CN205081091U - Vacuum arc ion source time -of -flight mass spectrometer - Google Patents
Vacuum arc ion source time -of -flight mass spectrometer Download PDFInfo
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- CN205081091U CN205081091U CN201520747550.XU CN201520747550U CN205081091U CN 205081091 U CN205081091 U CN 205081091U CN 201520747550 U CN201520747550 U CN 201520747550U CN 205081091 U CN205081091 U CN 205081091U
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Abstract
The utility model provides a vacuum arc ion source time -of -flight mass spectrometer. In a high vacuum cavity, equipment such as vacuum arc ion source, ion door, three drum focusing lens, faraday cup have been set up. Add a high -voltage pulse between ion source positive pole and negative pole, the vacuum arc discharges, produces plasma. Drawing forth under highly compressed effect, pulsed ion beam is drawn forth. The ion door is opened, different mass -to -charge ratioes (i) m (i) / (i) (i) ion passes through the ion door and gets into the distance for (i) (i) field -free drift region flight a period, through three drum focusing lens focus back, the ion arrives the faraday cup detector to L q. Different mass -to -charge ratioes (i) m (i) / (i) q (ion i) reach the faraday cup detector flight time (i) tf (i) different, consequently, demonstrate register for easy reference peak of different ionic flight time on the oscillograph, on the abscissa time represent ion mass -to -charge ratio (i) m (i) / i), (i) (the number of ions is then represented to the peak value of setting to music the peak to q. Consequently, can obtain containing deuterium metal electrode intermediate ion composition.
Description
Technical field
The utility model belongs to mass spectrometry art field, be specifically related to a kind of vacuum arc ion source time-of-flight mass spectrometer, that especially a kind of ion source extraction voltage is greater than 40kV, that ion composition after discharging containing deuterium metal electrode single pulse can be detected time-of-flight mass spectrometer.
Background technology
Pulse neutron tube has a wide range of applications in the research field such as Non-Destructive Testing, pulsed neutron log, has important application in nuclear technology field.The deuterium metal electrode vacuum arc ion source that contains of pulse neutron tube both produced deuterium ion in discharge process, also produced deuterium molecule ion and metal ion.To generation neutron usefully deuterium ion, and other ion beam currents not only have damage to tritium target, and can reduce the withstand voltage properties of deuterium tritium neutron tube.Therefore deuterium ion line composition is higher, means that the performance in neutron tube intermediate ion source is better.In order to improve pulse neutron tube vacuum arc ion source performance, the deuterium ion composition that ion source is drawn must be measured.Experiment has confirmed that ion source is drawn ion and had inhomogeneities, along with the difference of extraction voltage, the ion beam distribution arriving pulse neutron tube target end is different, cause deuterium ion composition different with the change of extraction voltage, therefore during the deuterium ion composition that ion source is drawn is measured, as far as possible close to pulse neutron tube extraction voltage, to ensure the accuracy measured.The preferred equipment that ion source exports the composition of deuterium ion line measured by time-of-flight mass spectrometer.Can sub reflector formula time-of-flight mass spectrometer and orthoscopic time-of-flight mass spectrometer from Ion Extraction mode.Sub reflector formula time-of-flight mass spectrometer draws ion from ion outlet vertical direction, and after reflector, make ion reach detector.Orthoscopic time-of-flight mass spectrometer draws ion from ion outlet horizontal direction, and ion flies arrival detector in a linear fashion.
Because in pulse neutron tube, vacuum arc ion source single pulse half width is less than 20 μ s usually, in addition the electromagnetic interference of discharge process is very large, must have fast time response, stronger antijamming capability, higher mass resolution power and higher certainty of measurement with time-of-flight mass spectrometer ranging pulse ion composition.Respective shortcoming is had during the ion component of existing time-of-flight mass spectrometer in ranging pulse ion source, cannot effectively for the single pulse vacuum arc ion source of narrow pulse width.
2006, the people such as Muscovite V.I.Gushenets are at the 77th volume of " REVIEWOFSCIENTIFICINSTRUMENTS " magazine, 6th phase delivered and has been entitled as " Simpleandinexpensivetime-of-flightcharge-to-massanalyzer forionbeamsourcecharacterization " article, a kind of time-of-flight mass spectrometer is described in literary composition, adopt evaporation of metal vacuum arc ion source, ion source extraction voltage reaches 30kV, produce the continuous impulse bundle of frequency-adjustable, ion source pulse half-width reaches 250 μ about s.The result that applicant carries out testing at this time-of-flight mass spectrometer proves, due to the restriction of anti-electromagnetic interference capability and pulse ion sampling mode, this orthoscopic time-of-flight mass spectrometer cannot ranging pulse half width lower than the burst pulse ion beam of 100 μ s, be not more suitable for the single pulse vacuum arc ion source that pulse duration is narrower.
In May, 2010, the people such as Chen Lei have delivered the article being entitled as " Plasmacharacteristicsofvacuumarcionsourcebyusingtime-of-flightmassspectrometry " in vacuum discharge in 2010 and electric insulation International Academic Conference collection of thesis, describe a kind of reflection time-of-flight spectrometer, have employed burst pulse hydrogeneous electrode vacuum arc ion source, have employed positive and negative dipulse repulsion and vertical ion lead-out mode, this type of lead-out mode ion source extraction voltage-1.2kV.The parameters such as the percentage of the ion in vacuum arc ion source plasma are measured with this spectrometer, achieve pulse half-width 10 μ s ion composition to measure, but owing to adopting microchannel plate in ion detection system, microchannel plate is very large to the Ion response difference of different quality, so certainty of measurement can not ensure.
2006, the people such as Jia Wei sheath or bow case have delivered in mass spectrum journal the 27th volume third phase and have been entitled as " development of high performance liquid chromatography detector-high-resolution time-of-flight mass spectrometer ", this spectrometer also adopts positive and negative dipulse repulsion and vertical ion lead-out mode, and ion source extraction voltage is less than 1kV.Article describes and microchannel plate setting is operated in saturation condition, forms isolated sub-peak-to-peak signal counting, to reduce Ion response difference, the raising precision of different quality.The prerequisite of this method is that Ion Counting is sufficiently many, therefore pulse half-width is only suitable for wider and be the electron spray molecular ion source of continuous impulse, be not suitable for the single pulse vacuum arc ion source that half width 20 below μ s is narrower, because this type of ion source Ion Counting is considerably less, cannot be quantitative.
Summary of the invention
The utility model provides a kind of vacuum arc ion source time-of-flight mass spectrometer, it adopts pulse Vacuum arc ion source, ion source extraction voltage is greater than 40kV, and pulse half-width is greater than 6 μ s, can measure the ionic species and ion composition that produce in ion source pulsed discharge containing deuterium metal electrode.Ion detection adopts Faraday cup, and the ionic spectrum peak totally linearization different quality ion recorded, overcomes the limitation of other time-of-flight spectrometer.
Vacuum arc ion source time-of-flight mass spectrometer of the present utility model, be characterized in, this described vacuum arc ion source time-of-flight mass spectrometer comprises extraction power supply, isolating transformer, ion source power supply, vacuum arc ion source, forward flange, stainless-steel vacuum chamber, high vacuum is regulated, first limit beam hole, second limit beam hole, first aperture plate, ion gate, second aperture plate, three cylinder condenser lenses, Faraday cup suppresses electrode, electrode in Faraday cup, Faraday cup external electrode, rear flange, suppress power supply, first molecular pump, condenser lens power supply, second molecular pump, first vacuum valve, ion gate power supply, dry pump, low vacuum is regulated, slide valve, second vacuum valve.
Its annexation is, draws power supply High voltage output and is connected with vacuum arc ion source anode; Ion source power supply exports and is connected with ion vacuum arc ion source cathode; Isolating transformer output is connected with ion source power supply; Forward flange is connected with stainless-steel vacuum chamber; High vacuum is regulated and is connected with stainless-steel vacuum chamber; Stainless-steel vacuum chamber shell is connected to ground; First limit beam hole, the second limit beam hole are arranged in stainless-steel vacuum chamber, are connected and conducting with stainless-steel vacuum chamber by screw; First aperture plate, the second aperture plate are arranged in stainless-steel vacuum chamber, are connected and conducting with stainless-steel vacuum chamber by screw; First aperture plate and the second aperture plate arrange in stainless-steel vacuum chamber, both be connected to ground, ion gate is arranged in stainless-steel vacuum chamber, and ion gate is made up of the stainless steel wire of two groups of mutual insulatings, one group of stainless steel wire is connected to ground, and another group stainless steel wire is connected with ion gate power supply; Three cylinder condenser lenses are made up of the first cylinder, middle cylinder and the 3rd cylinder, arrange and are fixed in stainless-steel vacuum chamber, and the first cylinder, the 3rd cylinder are connected to ground, and middle cylinder is connected with condenser lens power supply; Faraday cup ion detector suppresses electrode in electrode, Faraday cup, Faraday cup external electrode by Faraday cup and suppresses power supply to form; Faraday cup suppresses electrode to make netted, is fixed in stainless-steel vacuum chamber, is connected with suppression power supply; Faraday cup external electrode is fixed by screws in stainless-steel vacuum chamber, is connected to ground; In Faraday cup, electrode is fixed on Faraday cup external electrode inwall by insulating material, and in Faraday cup, electrode receives ion beam, and is connected by measuring equipments such as measurement electrode and oscilloscopes.First molecular pump is connected with stainless-steel vacuum chamber respectively by a vacuum corner valve with the second molecular pump; Rear flange stainless-steel vacuum chamber connects; First molecular pump is connected with the second molecular pump by stainless steel pipes; Dry pump is connected with the second molecular pump by stainless steel pipes, the first vacuum valve, and dry pump is by stainless steel pipes and low vacuum gage connection, and dry pump is connected with stainless-steel vacuum chamber by the second vacuum valve, stainless steel pipes; Slide valve is connected with stainless-steel vacuum chamber by adpting flange.
Vacuum arc ion source time-of-flight mass spectrometer of the present utility model, especially a kind ofly adopts pulse Vacuum arc ion source, time-of-flight mass spectrometer that ion source extraction voltage is greater than 40kV.Its technical scheme is: in a high-vacuum chamber, is provided with the equipment such as vacuum arc ion source, ion gate, three cylinder condenser lenses, Faraday cup.Between ion source anode and negative electrode, add a high-voltage pulse, vacuum arc discharge, the atom etc. near negative electrode spot is ionized, and produces plasma.Under the effect of drawing high pressure, pulsed ionizing beam is drawn.Ion gate is opened, different mass-to-charge ratio
m/
qion enter distance by ion gate be
lfly a period of time in field-free drift district, after being focused on by three cylinder condenser lenses, ion arrives Faraday cup detector.Relation between the flight time of different ions and its mass-to-charge ratio is represented by formula (1):
（1）
In formula,
t f for the flight time,
ufor the extraction voltage of ion.
According to formula (1), different mass-to-charge ratio
m/
qion arrive flight time of Faraday cup detector
t f difference, therefore, oscilloscope demonstrates the time of flight spectrum peak of different ions, on abscissa, the time represents ion mass-to-charge ratio
m/
q, the peak value at spectrum peak then represents number of ions.Therefore can obtain containing deuterium metal electrode intermediate ion composition.
The utility model has the advantages that:
The utility model is drawn supply voltage and is greater than 40kV, can be used for detecting the ion component exported after vacuum arc ion source electric discharge containing deuterium metal electrode; Both can detect the ion composition after containing deuterium metal electrode impulse discharge, the ion composition after containing the electric discharge of deuterium metal electrode continuous impulse can have been detected again.
The utility model adopts ion gate mode, and ion gate opening speed is fast, can detect ionic species and ion composition that vacuum arc ion source exports pulse half-width 6 more than μ s;
The utility model adopts and suppresses by Faraday cup the Faraday cup ion detector that in electrode, Faraday cup, electrode and Faraday cup external electrode form, whole collection is by the various ions of ion gate, compared with microchannel plate ion detector, substantially increase ion detection precision;
The utility model adopts bimolecular pump to vacuumize, and reduces the loss of deuterium ion bundle in transmitting procedure, makes vacuum degree reach 5 × 10
-6pa;
The utility model adopts diplopore limit bundle, the even field intensity of aperture plate, ion gate intercept the many kinds of measures such as ion and three cylinder condenser lens focusing, makes pulse ion mass resolution reach more than 200;
The equipment and materials that the utility model uses is easy, easily prepares and purchases.
Accompanying drawing explanation
Fig. 1 is the vacuum arc ion source time-of-flight mass spectrometer structural representation of invention;
In figure, 1. draw power supply 2. isolating transformer 3. ion source power supply 4. vacuum arc ion source 5. forward flange 6. stainless-steel vacuum chamber 7. high vacuum and regulate 8. first limit beam holes 9. second and limit beam hole 10. first aperture plate 11. ion gate 12. second aperture plate 13. 3 cylinder condenser lens 14. Faraday cups to suppress electrode 16. Faraday cup external electrode 17. rear flange 18. in electrode 15. Faraday cups to suppress dry pump 25. low vacuum of power supply 19. first molecular pump 20. condenser lens power supply 21. second molecular pump 22. first vacuum valve 23. ion gate power supply 24. to regulate 26. slide valve 27. second vacuum valves.
Embodiment
Below in conjunction with accompanying drawing, the utility model is further described.
Embodiment 1
The annexation of a kind of vacuum arc ion source time-of-flight mass spectrometer of the utility model is: draw power supply 1 High voltage output and be connected with vacuum arc ion source 4 anode; Ion source power supply 3 exports and is connected with ion vacuum arc ion source 4 negative electrode; Isolating transformer 2 output is connected with ion source power supply 3; Forward flange 5 is connected with stainless-steel vacuum chamber 6; High vacuum is regulated 7 and is connected with stainless-steel vacuum chamber 6; Stainless-steel vacuum chamber 6 shell is connected to ground; First limit beam hole 8, second limits beam hole 9 to be arranged in stainless-steel vacuum chamber 6, is connected and conducting with stainless-steel vacuum chamber 6 by screw; First aperture plate 10, second aperture plate 12 is arranged in stainless-steel vacuum chamber 6, is connected and conducting with stainless-steel vacuum chamber 6 by screw; First aperture plate 10 and the second aperture plate 12 arrange in stainless-steel vacuum chamber 6, both be connected to ground, ion gate 11 is arranged in stainless-steel vacuum chamber 6, ion gate 11 is made up of the stainless steel wire of two groups of mutual insulatings, one group of stainless steel wire is connected to ground, and another group stainless steel wire is connected with ion gate power supply 23; Three cylinder condenser lenses 13 are made up of the first cylinder, middle cylinder and the 3rd cylinder, arrange and are fixed in stainless-steel vacuum chamber 6, and the first cylinder, the 3rd cylinder are connected to ground, and middle cylinder is connected with condenser lens power supply 20; Faraday cup ion detector suppresses electrode 15 in electrode 14, Faraday cup, Faraday cup external electrode 16 by Faraday cup and suppresses power supply 18 to form; Faraday cup suppresses electrode 14 to make netted, is fixed in stainless-steel vacuum chamber 6, is connected with suppression power supply 18; Faraday cup external electrode 16 is fixed by screws in stainless-steel vacuum chamber 6, is connected to ground; In Faraday cup, electrode 15 is fixed on Faraday cup external electrode 16 inwall by insulating material, and in Faraday cup, electrode 15 receives ion beam, and is connected with measuring equipments such as oscilloscopes by measurement electrode.First molecular pump 19 is connected with stainless-steel vacuum chamber 6 respectively by a vacuum corner valve with the second molecular pump 21; Rear flange 17 stainless-steel vacuum chamber 6 connects; First molecular pump 19 is connected with the second molecular pump 21 by stainless steel pipes; Dry pump 24 is connected with the second molecular pump 21 by stainless steel pipes, the first vacuum valve 22, and dry pump 24 is regulated 25 by stainless steel pipes and low vacuum and is connected, and dry pump 24 is connected with stainless-steel vacuum chamber 6 by the second vacuum valve 27, stainless steel pipes; Slide valve 26 is connected with stainless-steel vacuum chamber 6 by adpting flange.
Open slide valve 26; Open the first vacuum valve 22 and the second vacuum valve 27; Close two angle valves; Start dry pump 24; Carry out low vacuum to whole vacuum arc ion source time-of-flight mass spectrometer to bleed; When the low vacuum in stainless-steel vacuum chamber 6 is in 0Pa, open two angle valves; Start the first molecular pump 19 and the second molecular pump 21; When the vacuum degree in stainless-steel vacuum chamber 6 reaches 5 × 10
6during Pa, startup ion source power supply 3, under oscillographic monitoring, setting ion source power supply 3 pulse frequency is single, pulse half-width is 6 μ s, pulse current amplitude is 100A, obtains the current waveform of vacuum arc discharge; Open and suppress power supply 18, open condenser lens power supply 20, open ion gate power supply 23, open and draw power supply 1, trigger ion source power supply 3, in Faraday cup, electrode 15 records flight time spectrogram.Close slide valve 26, dismounting forward flange 5, replaceable vacuum arc ion source 4, dismounting rear flange 17, replaceable Faraday cup.
Embodiment 2
The present embodiment is identical with the structure of embodiment 1, and implementation process is also identical with embodiment 1.Difference is: setting ion source power supply 3 pulse frequency is 0.1Hz, pulse half-width is 50 μ s, pulse current amplitude is 50A.
Claims (1)
1. a vacuum arc ion source time-of-flight mass spectrometer, it is characterized in that, described vacuum arc ion source time-of-flight mass spectrometer comprises draws power supply (1), isolating transformer (2), ion source power supply (3), vacuum arc ion source (4), forward flange (5), stainless-steel vacuum chamber (6), high vacuum is regulated (7), first limit beam hole (8), second limit beam hole (9), first aperture plate (10), ion gate (11), second aperture plate (12), three cylinder condenser lenses (13), Faraday cup suppresses electrode (14), electrode (15) in Faraday cup, Faraday cup external electrode (16), rear flange (17), suppress power supply (18), first molecular pump (19), condenser lens power supply (20), second molecular pump (21), first vacuum valve (22), ion gate power supply (23), dry pump (24), low vacuum is regulated (25), slide valve (26), second vacuum valve (27),
The annexation of above-mentioned parts is: draw power supply (1) High voltage output and be connected with vacuum arc ion source (4) anode; Ion source power supply (3) exports and is connected with ion vacuum arc ion source (4) negative electrode; Isolating transformer (2) output is connected with ion source power supply (3); Forward flange (5) is connected with stainless-steel vacuum chamber (6); High vacuum is regulated (7) is connected with stainless-steel vacuum chamber (6); Stainless-steel vacuum chamber (6) shell is connected to ground; First limit beam hole (8), the second limit beam hole (9) are arranged in stainless-steel vacuum chamber (6), are connected and conducting with stainless-steel vacuum chamber (6) by screw; First aperture plate (10), the second aperture plate (12) are arranged in stainless-steel vacuum chamber (6), are connected and conducting with stainless-steel vacuum chamber (6) by screw; First aperture plate (10) and the second aperture plate (12) arrange in stainless-steel vacuum chamber (6), both be connected to ground, ion gate (11) is arranged in stainless-steel vacuum chamber (6), ion gate (11) is made up of the stainless steel wire of two groups of mutual insulatings, one group of stainless steel wire is connected to ground, and another group stainless steel wire is connected with ion gate power supply (23); Three cylinder condenser lenses (13) are made up of the first cylinder, middle cylinder and the 3rd cylinder, and arrange and be fixed in stainless-steel vacuum chamber (6), the first cylinder, the 3rd cylinder are connected to ground, and middle cylinder is connected with condenser lens power supply (20); Faraday cup ion detector suppresses electrode (15) in electrode (14), Faraday cup, Faraday cup external electrode (16) by Faraday cup and suppresses power supply (18) to form; Faraday cup suppresses electrode (14) to make netted, is fixed in stainless-steel vacuum chamber (6), is connected with suppression power supply (18); Faraday cup external electrode (16) is fixed by screws in stainless-steel vacuum chamber (6), is connected to ground; In Faraday cup, electrode (15) is fixed on Faraday cup external electrode (16) inwall by insulating material, and in Faraday cup, electrode (15) receives ion beam, and is connected by measuring equipments such as measurement electrode and oscilloscopes;
First molecular pump (19) is connected with stainless-steel vacuum chamber (6) respectively by a vacuum corner valve with the second molecular pump (21); Rear flange (17) stainless-steel vacuum chamber (6) connects; First molecular pump (19) is connected with the second molecular pump (21) by stainless steel pipes; Dry pump (24) is connected with the second molecular pump (21) by stainless steel pipes, the first vacuum valve (22), dry pump (24) is regulated (25) by stainless steel pipes and is connected with low vacuum, dry pump (24) is connected with stainless-steel vacuum chamber (6) by the second vacuum valve (27), stainless steel pipes; Slide valve (26) is connected with stainless-steel vacuum chamber (6) by adpting flange.
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| CN201520747550.XU CN205081091U (en) | 2015-09-25 | 2015-09-25 | Vacuum arc ion source time -of -flight mass spectrometer |
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| CN201520747550.XU CN205081091U (en) | 2015-09-25 | 2015-09-25 | Vacuum arc ion source time -of -flight mass spectrometer |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105304455A (en) * | 2015-09-25 | 2016-02-03 | 中国工程物理研究院核物理与化学研究所 | Vacuum arc ion source time-of-flight mass spectrometer |
| CN107318213A (en) * | 2017-07-06 | 2017-11-03 | 复旦大学 | The experimental provision of high electric conduction |
-
2015
- 2015-09-25 CN CN201520747550.XU patent/CN205081091U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105304455A (en) * | 2015-09-25 | 2016-02-03 | 中国工程物理研究院核物理与化学研究所 | Vacuum arc ion source time-of-flight mass spectrometer |
| CN107318213A (en) * | 2017-07-06 | 2017-11-03 | 复旦大学 | The experimental provision of high electric conduction |
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|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20160309 Effective date of abandoning: 20170329 |
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| AV01 | Patent right actively abandoned |