CN205077135U - Novel load cavity structure of bleeding fast - Google Patents
Novel load cavity structure of bleeding fast Download PDFInfo
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- CN205077135U CN205077135U CN201520829090.5U CN201520829090U CN205077135U CN 205077135 U CN205077135 U CN 205077135U CN 201520829090 U CN201520829090 U CN 201520829090U CN 205077135 U CN205077135 U CN 205077135U
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- angle valve
- vacuum pump
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- pipeline
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Abstract
The utility model provides a lower and low scheduling problem of equipment capacity of vacuum pump utilization ratio that novel load cavity structure of bleeding fast passes the piece module in the current semiconductor films preparation equipment of main solution and is equipped with the utility model provides a novel load cavity structure of bleeding fast, the structure of should bleeding goes up the load module, lower load module, angle valve A, vacuum pump A, angle valve B, angle valve C, vacuum pump B, angle valve D including passing the piece module. The utility model discloses a simple structure practicality of bleeding does not need extra increasing to purchase equipment, and the cost is lower to multiplicable pumping rate improves the productivity.
Description
Technical field
The utility model relates to a kind of novel load cavity fast pump structure, belongs to the applied technical field of semiconductor film film device.
Background technology
In semiconductor film Preparation equipment, load blocks needs frequently to be pumped to predetermined pressure with vacuum pump, existing biography sheet module is communicated with separately with vacuum pump, vacuum pump only uses for biography sheet module, the vacuum pump utilization ratio causing biography sheet module to be equipped with is lower, is Appropriate application device resource, needs a kind of novel fast pump structure, can pumpdown time be reduced, improve equipment capacity.
Summary of the invention
The utility model is for the purpose of solving the problem, provide a kind of novel load cavity fast pump structure, the vacuum pump controlling to pass sheet module can be combined utilization with the vacuum pump controlling upper load blocks and lower load blocks by this air extraction structure, can reduce pumpdown time, improve equipment capacity.
For achieving the above object, the utility model adopts following technical proposals:
A kind of novel load cavity fast pump structure, this air extraction structure comprises biography sheet module, upper load blocks, lower load blocks, angle valve A, vacuum pump A, angle valve B, angle valve C, vacuum pump B, angle valve D; Described biography sheet module is connected by bolt with upper load blocks, lower load blocks respectively, and upper load blocks is placed in above lower load blocks; Pass sheet module to be connected by pipeline with one end of described angle valve D, the other end of angle valve D is connected by pipeline with one end of angle valve C and vacuum pump B, upper load blocks is connected by pipeline with one end of angle valve A, lower load blocks 3 is connected by pipeline with one end of angle valve B, meanwhile, the other end of angle valve A and the other end of angle valve B are by being connected by pipeline with the other end of described angle valve C and vacuum pump A after pipeline connection again.
The beneficial effects of the utility model and feature are:
1, air extraction structure of the present utility model is simple and practical, increases pumping speed, improves production capacity;
2, the utility model effectively utilizes existing equipment, and not needing additionally increases procuring equipment, and cost is lower.
Accompanying drawing explanation
Fig. 1 is load cavity fast pump structural representation of the present utility model.
Embodiment
Further the utility model is described in detail below in conjunction with embodiment, but utility model protection content is not limited to described embodiment:
As shown in Figure 1, a kind of novel load cavity fast pump structure, this air extraction structure comprises biography sheet module 1, upper load blocks 2, lower load blocks 3, angle valve A4, vacuum pump A5, angle valve B6, angle valve C7, vacuum pump B8, angle valve D9; Described biography sheet module 1 is connected by bolt with upper load blocks 2, lower load blocks 3 respectively, and upper load blocks 2 is placed in above lower load blocks 3; Pass sheet module 1 to be connected by pipeline with one end of described angle valve D9, the other end of angle valve D9 is connected by pipeline with one end of angle valve C7 and vacuum pump B8, upper load blocks 2 is connected by pipeline with one end of angle valve A4, lower load blocks 3 is connected by pipeline with one end of angle valve B6, meanwhile, the other end of angle valve A4 and the other end of angle valve B6 are by being connected by pipeline with the other end of described angle valve C7 and vacuum pump A5 after pipeline connection again.
When upper load blocks 2 needs to vacuumize, close angle valve D9 and angle valve B6, open angle valve C7 and angle valve A4, open vacuum pump B8 and vacuum pump A5, compared with common structure, then this structure can realize the fast pump to upper load blocks 2; In like manner, when load blocks 3 needs to vacuumize instantly, close angle valve D9 and angle valve A4, open angle valve C7 and angle valve B6, open the fast pump of vacuum pump B8 and vacuum pump A5 realization to lower load blocks 3.
The foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection domain of the present utility model.
Claims (1)
1. a novel load cavity fast pump structure, is characterized in that, this air extraction structure comprises biography sheet module, upper load blocks, lower load blocks, angle valve A, vacuum pump A, angle valve B, angle valve C, vacuum pump B, angle valve D; Described biography sheet module is connected by bolt with upper load blocks, lower load blocks respectively, and upper load blocks is placed in above lower load blocks; Pass sheet module to be connected by pipeline with one end of described angle valve D, the other end of angle valve D is connected by pipeline with one end of angle valve C and vacuum pump B, upper load blocks is connected by pipeline with one end of angle valve A, lower load blocks 3 is connected by pipeline with one end of angle valve B, meanwhile, the other end of angle valve A and the other end of angle valve B are by being connected by pipeline with the other end of described angle valve C and vacuum pump A after pipeline connection again.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520829090.5U CN205077135U (en) | 2015-10-23 | 2015-10-23 | Novel load cavity structure of bleeding fast |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520829090.5U CN205077135U (en) | 2015-10-23 | 2015-10-23 | Novel load cavity structure of bleeding fast |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205077135U true CN205077135U (en) | 2016-03-09 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520829090.5U Active CN205077135U (en) | 2015-10-23 | 2015-10-23 | Novel load cavity structure of bleeding fast |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205077135U (en) |
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2015
- 2015-10-23 CN CN201520829090.5U patent/CN205077135U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: No.900 Shuijia, Hunnan District, Shenyang City, Liaoning Province Patentee after: Tuojing Technology Co.,Ltd. Address before: 110179 3rd floor, No.1-1 Xinyuan street, Hunnan New District, Shenyang City, Liaoning Province Patentee before: PIOTECH Co.,Ltd. |