CN205027781U - A temperature is from compensating circuit for micromechanics accelerometer scale factor - Google Patents

A temperature is from compensating circuit for micromechanics accelerometer scale factor Download PDF

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Publication number
CN205027781U
CN205027781U CN201520811571.3U CN201520811571U CN205027781U CN 205027781 U CN205027781 U CN 205027781U CN 201520811571 U CN201520811571 U CN 201520811571U CN 205027781 U CN205027781 U CN 205027781U
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China
Prior art keywords
temperature
resistance
compensation circuit
micro
constant multiplier
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Expired - Fee Related
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CN201520811571.3U
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Chinese (zh)
Inventor
刘敬涛
张蔚
史庆云
马让奎
刘小舟
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Shaanxi Baocheng Aviation Instrument Co Ltd
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Shaanxi Baocheng Aviation Instrument Co Ltd
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Abstract

The utility model provides a temperature is from compensating circuit for micromechanics accelerometer scale factor includes the temperature compensation circuit who comprises resistance I, resistance II, resistance III and operational amplifier, and resistance I and resistance II float resistance for low temperature, and resistance III be the platinum resistance, and temperature compensation circuit's input is the scale factor of micromechanics accelerometer output, the coefficient of temperature compensation circuit output follow the temperature appear with the opposite trend of scale factor change. The utility model discloses a controlled temperature is to the purpose of micromechanics accelerometer scale factor influence, simple structure, low cost.

Description

For the temperature self-compensation circuit of micro-mechanical accelerometer constant multiplier
Technical field
The utility model belongs to micro inertial instrument technical field, is specifically related to a kind of temperature self-compensation circuit for micro-mechanical accelerometer constant multiplier, is specially adapted to the micro-mechanical accelerometer of constant multiplier with temperature linearly variation tendency.
Background technology
Along with the development of micro-electro-mechanical system design technology and technological level, micro-mechanical accelerometer is little compared with conventional accelerometers small product size by means of it, lightweight, cost is low, reliability is high, be suitable for the features such as production in enormous quantities, has been widely used in the Military and civil fields such as Aero-Space, auto industry, industrial automation and robot.But the constant multiplier ubiquity temperature influence of micro-mechanical accelerometer changes problem greatly at present, directly limit its engineer applied scope.Although by carrying out mathematics temperature compensation when system is applied to improve this problem, because the temperature coefficient of every micro-mechanical accelerometer is different, cause later stage calculated amount comparatively large, waste time and energy, cost is high, is unfavorable for batch production and the popularization and application of product.Therefore be necessary to propose to improve.
Utility model content
The technical matters that the utility model solves: a kind of temperature self-compensation circuit for micro-mechanical accelerometer constant multiplier is provided, adopt in former micro-mechanical accelerometer circuit, increase the temperature-compensation circuit be made up of three resistance and an operational amplifier, with the constant multiplier of former micro-mechanical accelerometer for input, the coefficient that temperature-compensation circuit is exported presents with temperature and changes contrary trend with constant multiplier, when the changing ratio of the two is equal, overall constant multiplier can not change, thus reach the object that control temperature affects micro-mechanical accelerometer constant multiplier, structure is simple, with low cost.
The technical solution adopted in the utility model: for the temperature self-compensation circuit of micro-mechanical accelerometer constant multiplier, comprise the temperature-compensation circuit be made up of resistance I, resistance II, resistance III and operational amplifier, described resistance I and resistance II are Low Drift Temperature resistance, described resistance III is platinum resistance, described temperature-compensation circuit be input as the constant multiplier that micro-mechanical accelerometer exports, the coefficient that described temperature-compensation circuit exports presents with temperature and changes contrary trend with constant multiplier.
Wherein, described resistance III and resistance I are connected in series with the resistance II be connected in parallel and operational amplifier again after connecting and form positive coefficient temperature-compensation circuit, and the constant multiplier of linearly increase that what described positive coefficient temperature-compensation circuit made micro-mechanical accelerometer export vary with temperature remains unchanged.
Further, described resistance I, resistance III and resistance II are connected in series, described operational amplifier and the resistance of connecting and resistance II parallel connection form negative coefficient temperature-compensation circuit, and the constant multiplier of linearly reduction that what described negative coefficient temperature-compensation circuit made micro-mechanical accelerometer export vary with temperature remains unchanged.
The utility model advantage compared with prior art:
1, adopt the constant multiplier of temperature-compensation circuit and the former micro-mechanical accelerometer be made up of three resistance and an operational amplifier to export to be connected, the coefficient that temperature-compensation circuit ratio exports presents with temperature and changes contrary trend with constant multiplier, when the changing ratio of the two is equal, overall constant multiplier will remain unchanged, and achieve the object that control temperature affects micro-mechanical accelerometer constant multiplier;
2, the utility model adopts the circuit that Low Drift Temperature resistance and platinum resistance connect into, and significantly reduces the temperature drift of micro-mechanical accelerometer constant multiplier, improves the performance of micro-mechanical accelerometer, and structure is simple, with low cost.
Accompanying drawing explanation
Fig. 1 is positive coefficient temperature-compensation circuit figure in the utility model;
Fig. 2 is negative coefficient temperature-compensation circuit figure in the utility model.
Embodiment
Below in conjunction with accompanying drawing 1-2, embodiment of the present utility model is described.
For the temperature self-compensation circuit of micro-mechanical accelerometer constant multiplier, comprise the temperature-compensation circuit be made up of resistance I 1, resistance II 2, resistance III 3 and operational amplifier 4, described resistance I 1 and resistance II 2 are Low Drift Temperature resistance, described resistance III 3 is platinum resistance, described temperature-compensation circuit be input as the constant multiplier that micro-mechanical accelerometer exports, the coefficient that described temperature-compensation circuit exports presents with temperature and changes contrary trend with constant multiplier.
Described resistance III 3 and resistance I 1 are connected in series with the resistance II 2 be connected in parallel and operational amplifier 4 again after connecting and form positive coefficient temperature-compensation circuit, and the constant multiplier of linearly increase that what described positive coefficient temperature-compensation circuit made micro-mechanical accelerometer export vary with temperature remains unchanged.
Embodiment one: as shown in Figure 1, existing for certain type micro-mechanical accelerometer, its input range is ± 400g to positive coefficient temperature-compensation circuit, constant multiplier K 1for 4.5mV/g ± 0.5mV/g, circuit is by 1 platinum resistance Pt and resistance III 3 and 2 Low Drift Temperature resistance R 1, R 2namely resistance I 1 and resistance II 2 form inverse proportion amplifying circuit, and wherein because the temperature drift coefficient of Low Drift Temperature is less than 20ppm, temperature variation 2 orders of magnitude little of platinum resistance, can think constant resistance.
The output formula of known positive coefficient temperature-compensation circuit is:
K o u t = K i n · - R 2 P t + R 1 Formula (1)
Wherein: K in---be micro-mechanical accelerometer constant multiplier;
K out---be overall constant multiplier.
When temperature raises or reduce, as the K of molecule inincrease or reduce certain ratio, and as Pt and the R of denominator 1also increase with resistance or reduce identical ratio, so K outto remain unchanged.
Here varies with temperature three micro-mechanical accelerometer constant multipliers to compensate front and after compensating experimental data statistical form:
Table 1 compensates front micro-mechanical accelerometer constant multiplier humid test data
From table 1, when temperature is in 50 DEG C the constant multiplier of three micro-mechanical accelerometers comparatively temperature increase nearly 10% for constant multiplier when-40 DEG C, and linearly increase rule.
Now according to positive coefficient temperature-compensation circuit formula (1), to get Pt be 1k Ω, R1 is 2.5k Ω, and when can calculate-40 DEG C ~ 50 DEG C, the rate of change of circuit and resistance is about 10.3%.Micro-mechanical accelerometer constant multiplier humid test data after compensation are as shown in table 2:
Table 2 compensates rear micro-mechanical accelerometer constant multiplier humid test data
Compared can be found out by table 1 and table 2, by increasing micro-mechanical accelerometer positive coefficient temperature-compensation circuit, significantly reduce the temperature drift of micro-mechanical accelerometer constant multiplier, three micro-mechanical accelerometer constant multiplier temperature errors are 1.26% to the maximum, reduce about 1 order of magnitude before comparatively compensating, improve the performance of micro-mechanical accelerometer.
Described resistance I 1, resistance III 3 and resistance II 2 are connected in series, described operational amplifier 4 and the resistance III 3 of connecting and resistance II 2 parallel connection form negative coefficient temperature-compensation circuit, and the constant multiplier of linearly reduction that what described negative coefficient temperature-compensation circuit made micro-mechanical accelerometer export vary with temperature remains unchanged.
Embodiment one: as shown in Figure 2, negative coefficient temperature-compensation circuit exports formula and is negative coefficient temperature-compensation circuit:
K o u t = K i n · - ( R 2 + P t ) R 1 Formula (2)
Wherein: K in---be micro-mechanical accelerometer constant multiplier;
K out---be overall constant multiplier.
When temperature raises or reduce, K inreduce or increase certain ratio, making Pt and R 2with resistance increase or reduce identical ratio, work as K inrate of change when being not more than 10%, K outonly change 1%, thus make the constant multiplier temperature variation of micro-mechanical accelerometer reduce 1 order of magnitude.
The coefficient that the utility model exports presents with temperature and changes contrary trend with micro-mechanical accelerometer constant multiplier, when the changing ratio of the two is equal, overall constant multiplier will remain unchanged, achieve the object that control temperature affects micro-mechanical accelerometer constant multiplier, structure is simple, with low cost, engineering easily realizes.
Above-described embodiment, just preferred embodiment of the present utility model, is not used for limiting the utility model practical range, therefore all equivalence changes done with content described in the utility model claim, all should be included within the utility model right.

Claims (3)

1. for the temperature self-compensation circuit of micro-mechanical accelerometer constant multiplier, it is characterized in that: comprise the temperature-compensation circuit be made up of resistance I (1), resistance II (2), resistance III (3) and operational amplifier (4), described resistance I (1) and resistance II (2) are Low Drift Temperature resistance, described resistance III (3) is platinum resistance, described temperature-compensation circuit be input as the constant multiplier that micro-mechanical accelerometer exports, the coefficient that described temperature-compensation circuit exports presents with temperature and changes contrary trend with constant multiplier.
2. the temperature self-compensation circuit for micro-mechanical accelerometer constant multiplier according to claim 1, it is characterized in that: described resistance III (3) and resistance I (1) are connected in series with the resistance II (2) be connected in parallel and operational amplifier (4) again after connecting and form positive coefficient temperature-compensation circuit, the constant multiplier of linearly increase that what described positive coefficient temperature-compensation circuit made micro-mechanical accelerometer export vary with temperature remains unchanged.
3. the temperature self-compensation circuit for micro-mechanical accelerometer constant multiplier according to claim 1, it is characterized in that: described resistance I (1), resistance III (3) and resistance II (2) are connected in series, described operational amplifier (4) and the resistance III (3) of connecting and resistance II (2) parallel connection form negative coefficient temperature-compensation circuit, and the constant multiplier of linearly reduction that what described negative coefficient temperature-compensation circuit made micro-mechanical accelerometer export vary with temperature remains unchanged.
CN201520811571.3U 2015-10-19 2015-10-19 A temperature is from compensating circuit for micromechanics accelerometer scale factor Expired - Fee Related CN205027781U (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106052668A (en) * 2016-06-01 2016-10-26 东南大学 Non-linear digital compensation method for wide-range silicon micro gyroscope
CN108107233A (en) * 2017-12-14 2018-06-01 中国电子产品可靠性与环境试验研究所 The continuous temperature bearing calibration of accelerometer constant multiplier and system
CN111505338A (en) * 2020-05-03 2020-08-07 华中科技大学 Magnetic feedback closed-loop acceleration sensor and temperature compensation method thereof
CN112833921A (en) * 2020-12-31 2021-05-25 广州导远电子科技有限公司 Single-axis gyroscope circuit

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106052668A (en) * 2016-06-01 2016-10-26 东南大学 Non-linear digital compensation method for wide-range silicon micro gyroscope
CN106052668B (en) * 2016-06-01 2019-03-12 东南大学 A kind of wide range silicon micro-gyroscope non-linear, digital compensation method
CN108107233A (en) * 2017-12-14 2018-06-01 中国电子产品可靠性与环境试验研究所 The continuous temperature bearing calibration of accelerometer constant multiplier and system
CN111505338A (en) * 2020-05-03 2020-08-07 华中科技大学 Magnetic feedback closed-loop acceleration sensor and temperature compensation method thereof
CN112833921A (en) * 2020-12-31 2021-05-25 广州导远电子科技有限公司 Single-axis gyroscope circuit

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160210

Termination date: 20171019

CF01 Termination of patent right due to non-payment of annual fee