CN205015293U - Prominent detection device of outward appearance flaw - Google Patents
Prominent detection device of outward appearance flaw Download PDFInfo
- Publication number
- CN205015293U CN205015293U CN201520718509.XU CN201520718509U CN205015293U CN 205015293 U CN205015293 U CN 205015293U CN 201520718509 U CN201520718509 U CN 201520718509U CN 205015293 U CN205015293 U CN 205015293U
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- light sources
- led
- light
- light source
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Abstract
The utility model discloses a prominent detection device of outward appearance flaw, include from last to the image acquisition device, the the light source device that set gradually down and detect the platform that the light source device includes the leaded light cup, the monitoring channel who treats detection area who supplies the collection of image acquisition device to detect the bench is seted up at this leaded light cup middle part, and leaded light cup lower extreme is equipped with and holds the chamber, hold the intracavity with circumference array closure circlewise the mode arranged a plurality of LED of being listed as light sources, a plurality of LED of being listed as light sources set up respectively on the installation face that holds the different angles in chamber, and a plurality of LED of being listed as light sources are connected with the light control device respectively. The utility model discloses examine time measuring with circumference array closure circlewise a plurality of LED of being listed as light sources of arranging of mode detect position to each of product and shine, satisfy the image acquisition device through the light control device with the light source luminance of difference, the LED light source that shines the angle and detect the demand, reach the true degree and resolution requirement of measuring.
Description
Technical field
The utility model relates to technical field of optical detection, specifically refers to that a kind of apparent flaws highlights pick-up unit.
Background technology
In semiconductor equipment manufactures, optical detection is usually used to the defect detecting wafer surface, as contamination particle, scratches and material layer residue.Above-mentioned defect can cause equipment failure, thus tangible effect Production Gain.Therefore, for guaranteeing clean and quality in the different phase of production run, need to carry out careful detection to patterning and non-patterned wafer.
The normally used method detecting semiconductor crystal wafer irradiates wafer surface with light beam, measures the light of returning from each light beam incidence point scattering.Such as, the flaw of LED lead frame outward appearance, its outward appearance adopts visual inspection mode at present, fix owing to adopting the angle of incident light of ordinary light source, the reflection of illumination causes individual region contrast inconsistent, there is the drawbacks such as undetected, flase drop, inefficiency, the in batches difference of outward appearance are too large, perfection cannot highlight its apparent flaw.
Utility model content
The purpose of this utility model overcomes weak point of the prior art, provides a kind of clear-cut, avoids the reflection of illumination to cause the inconsistent apparent flaws of individual region contrast to highlight pick-up unit.
The purpose of this utility model is achieved through the following technical solutions:
A kind of apparent flaws highlights pick-up unit, comprise the image collecting device set gradually from top to bottom, light supply apparatus and monitor station, described light supply apparatus comprises guide-lighting cup, the sense channel for the region to be detected on image acquisition device monitor station is offered in the middle part of this guide-lighting cup, described guide-lighting cup lower end is provided with container cavity, be closed into ring style with circumference array in described container cavity and be furnished with some row LED light sources, described some row LED light sources are separately positioned on the installed surface of container cavity different angles, described some row LED light sources are connected to light source control device.
Improve as one of the present utility model, described container cavity is bowl structure, described installed surface comprise be arranged on this bowl structure sidewall on multiple annular base station horizontal by an angle, multiple annular base station circumference distribution and diminishing gradually from top to bottom with the angle of bowl structure vertical center line.
The utility model has the following advantages and beneficial effect compared to existing technology:
Image collecting device of the present utility model detects the product to be detected on monitor station by the sense channel that guide-lighting cup is arranged, some row LED light sources each detection position to product being closed into ring style layout during detection with circumference array is irradiated, by light source control device, the LED light source of different light-source brightness, irradiating angle is met image collecting device and detect demand, reach validity and the resolution requirement of detection, thus obtain the product profile image that obviously clear, contrast is strong, improve and detect precision.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the utility model is described in further detail, but embodiment of the present utility model is not limited thereto.
Embodiment
As shown in Figure 1, the present embodiment provides a kind of apparent flaws to highlight pick-up unit, comprise the image collecting device 1 set gradually from top to bottom, light supply apparatus 2 and monitor station 3, described light supply apparatus 2 comprises guide-lighting cup 201, the sense channel 202 for the region to be detected on image acquisition device monitor station is offered in the middle part of this guide-lighting cup 201, described guide-lighting cup 201 lower end is provided with container cavity, be closed into ring style with circumference array in described container cavity and be furnished with some row LED light sources 203, described some row LED light sources 203 are separately positioned on the installed surface of container cavity different angles, described some row LED light sources are connected to light source control device (not shown).
In the present embodiment, described image collector is set to CCD camera.
Improve as one of the present utility model, described container cavity is bowl structure, described installed surface comprise be arranged on this bowl structure sidewall on multiple annular base station 204 horizontal by an angle, multiple annular base station 204 circumference distribution and diminishing gradually from top to bottom with the angle of bowl structure vertical center line.
In the present embodiment, apparent flaws highlights the product size of pick-up unit according to product to be detected, the demand of Product checking, by the region segmentation region detected, according to size and the features of each cut zone, develop the LED light source that 4 control separately brightness and multi-angle; Each LED light source is because setting angle is inconsistent, make main each cut zone of sensing respectively of LED light source 203 irradiating angle on its each annular base station 204, can control separately the brightness in a region, 4 of product thus, thus reach regional clear-cut, avoid the reflection of illumination to cause the inconsistent problem of individual region contrast.
Above-described embodiment is the utility model preferably embodiment; but embodiment of the present utility model is not restricted to the described embodiments; change, the modification done under other any does not deviate from Spirit Essence of the present utility model and principle, substitute, combine, simplify; all should be the substitute mode of equivalence, be included within protection domain of the present utility model.
Claims (2)
1. an apparent flaws highlights pick-up unit, comprise the image collecting device set gradually from top to bottom, light supply apparatus and monitor station, it is characterized in that: described light supply apparatus comprises guide-lighting cup, the sense channel for the region to be detected on image acquisition device monitor station is offered in the middle part of this guide-lighting cup, described guide-lighting cup lower end is provided with container cavity, be closed into ring style with circumference array in described container cavity and be furnished with some row LED light sources, described some row LED light sources are separately positioned on the installed surface of container cavity different angles, described some row LED light sources are connected to light source control device.
2. apparent flaws according to claim 1 highlights pick-up unit, it is characterized in that: described container cavity is bowl structure, described installed surface comprise be arranged on this bowl structure sidewall on multiple annular base station horizontal by an angle, multiple annular base station circumference distribution and diminishing gradually from top to bottom with the angle of bowl structure vertical center line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520718509.XU CN205015293U (en) | 2015-09-16 | 2015-09-16 | Prominent detection device of outward appearance flaw |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520718509.XU CN205015293U (en) | 2015-09-16 | 2015-09-16 | Prominent detection device of outward appearance flaw |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205015293U true CN205015293U (en) | 2016-02-03 |
Family
ID=55213888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520718509.XU Expired - Fee Related CN205015293U (en) | 2015-09-16 | 2015-09-16 | Prominent detection device of outward appearance flaw |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205015293U (en) |
-
2015
- 2015-09-16 CN CN201520718509.XU patent/CN205015293U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160203 Termination date: 20210916 |