CN204989611U - Liquid drop array generator - Google Patents

Abstract

The utility model discloses a liquid drop array generator, including the rotary drum, rotary driving mechanism and shell, wherein, the rotary drum is used for receiving the liquid material, rotary driving mechanism drives the rotary drum and rotates, make the liquid material become a series of liquid drops, a series of liquid drops are behind the shell, produce high output frequence, high initial velocity, the micron order liquid drop array that the size is stable, the light source arouses produced piece to collect in this antipodal uv light source system of liquid drop array ability, reduce pollution and the damage of piece to intracavity other system surface, and have higher piece collection efficiency simultaneously and have better source spectrum transmissivity.

Description

A kind of droplet array generator

Technical field

The utility model belongs to instrument field, particularly relates to a kind of droplet array generator.

Background technology

At present, increasing field needs to provide micron order diameter, dimensionally stable, outgoing frequency higher, and has the forward entry device of droplet array generator as system of certain initial velocity, such as, in EUV light source, carry out scrap collecting.A large amount of chips can be produced in EUV light source excitation process, if without reliable debris collection device, will certainly the extreme ultraviolet collection system follow-up to light source bring serious pollution even to damage, gently then reduce extreme ultraviolet collection system collection efficiency, heavy then destroy its light capacity gauge.Therefore effective debris collection device must be used to protect the extreme ultraviolet collection system in system.Thus, the research of debris collection device is continued to bring out.

In light-source system, the requirement of effective debris collection device demand fulfillment two aspects:

1, higher scrap collecting efficiency is had;

2, good light source light spectrum transmitance is had.

Based on above demand, in debris collection device, the patent No. is describe the method using radial blade to carry out scrap collecting in the patent " DebrisMitigationDevice " of US007355190B2.Debris collection device preformed hole on the outside axis of light source hot spot in this patent, the paraxial light making energy density larger easily via.Adopt the radial carbon back blade of a circle to stop chip outward at axle and lower the temperature.By light source produce chip on travel path, be subject to radial leaf tinsel stop, a part of speed reduce to withered and fallen under, another part is pasted on tinsel.Although the method can effective collection of debris, its deficiency is, when radial carbon back blade quantity is less, chip blocking effect is poor, when radial carbon back blade quantity is more, paillon foil is comparatively serious to the absorption of extreme ultraviolet, be unfavorable for extreme ultraviolet through.

In order to obtain higher light transmission rate, carbon back blade is eliminated in the chip retention device of the patent " RadiationSource; LithographicApparatusandDeviceManufacturingMethod " of patent No. WO2011/110383A1, adopt and as buffer gas, chip is stopped to the less hydrogen of EUV light absorption, as shown in Figure 1.In this patent, debris collector outer wall 1 is designed to the cone shape of bore Stepwize Shrink, with the physical form of debris collector restriction amount of debris, uses buffer gas hydrogen to collect chip 3 by the design of rational gas flowfield 2 simultaneously.The method effectively can improve logical light rate, but scrap collecting efficiency is lower.

Utility model content

(1) technical matters that will solve

The purpose of this utility model is to provide a kind of droplet array generator, the micron order droplet array of high output frequency, high initial speed degree, dimensionally stable can be produced, to carry out scrap collecting, and higher scrap collecting efficiency can be had simultaneously and have good light source light spectrum transmitance.

(2) technical scheme

The utility model provides a kind of droplet array generator, comprising:

Rotary drum, for receiving liquid material, rotary drum is the cylinder-like structure of one end open, and on the sidewall pressing close to its bottom surface, have an aperture;

Rotary drive mechanism, is located under rotary drum, for driving rotary drum around its central axis;

Shell, be the cylinder-like structure of one end open, coaxial sleeve is located at the outside of rotary drum, and on sidewall, have a ribbon opening, and the aperture on ribbon opening and rotary drum sidewall is on same level position.

Further, droplet array generator also comprises liquid material generator, for storing liquid material and providing liquid material to rotary drum.

Further, liquid material generator comprises:

Material storing box, for storing liquid material;

Feed conduit, for importing to the liquid material in material storing box in rotary drum.

Further, rotary drum receive the position of liquid material be positioned on rotary drum bottom surface with ribbon opening position farthest.

Further, liquid material is liquid metal.

Further, the aperture on rotary drum sidewall is the aperture of millimeter magnitude.

Further, liquid material is accelerated in described rotary drum, and form drop, wherein, the rotating speed of described rotary drum and the diameter of rotary drum meet following formula:

$D=98.5\frac{1}{v}\sqrt{\frac{2\mathrm{\σ}}{d\mathrm{\ρ}}}$

Wherein, ρ is liquid material density, and d is roller diameter, and v is rotary drum rotating speed, and σ is liquid material surface tension.

(3) beneficial effect

1, the droplet array generator that the utility model provides can produce the discrete topology of micron dimension molten drop composition, and collect chip, the continuous structure that carbon back blade compared by this discrete topology has better light transmission efficiency.

2, the utility model adopts array architecture, realizes the buffering step by step to chip in scrap collecting process, by regulating the collection of drop array density realization to the chip of different pollution level.

3, need after common adhesive type debris collection device uses a period of time to change blade, to ensure collecting effect.The utility model adopts molten drop to complete scrap collecting, and droplet generator does not participate in collection process, in use can without the need to more changing device itself.

4, stopped by shell after the molten drop outgoing of the utility model outside shell ribbon opening range, make scrap collecting medium-molten drop can recycling, save time, financial cost.

Accompanying drawing explanation

Fig. 1 is the schematic diagram of debris collector in prior art.

The structural representation of the droplet array generator that Fig. 2 and Fig. 3 provides for an embodiment of the present utility model.

Fig. 4 is the schematic diagram of droplet array for collection of debris of embodiment generation of the present utility model.

Embodiment

The utility model provides a kind of droplet array generator, comprises rotary drum, rotary drive mechanism and shell, and wherein, rotary drum is for receiving liquid material, and rotary drum is the cylinder-like structure of one end open, and on the sidewall pressing close to its bottom surface, have an aperture; Rotary drive mechanism is located under rotary drum, for driving rotary drum around its central axis; Shell is the cylinder-like structure of one end open, and coaxial sleeve is located at the outside of rotary drum, and on sidewall, have a ribbon opening, and the aperture on ribbon opening and rotary drum sidewall is on same level position.

Preferably, droplet array generator also comprises liquid material generator, for storing liquid material and providing liquid material to rotary drum.

A during embodiment, liquid material generator comprises material storing box and feed conduit, and wherein, material storing box is for storing liquid material, and feed conduit is used for the liquid material in material storing box to import in rotary drum.

In order to make liquid material have enough acceleration time in rotary drum, rotary drum receive the position of liquid material be positioned on rotary drum bottom surface with ribbon opening position farthest.

Relevant with rotary drum rotating speed according to liquid-drop diameter and droplet material, rotary drum basal diameter, for producing micron order drop, make liquid material be liquid metal, such as zinc liquid and tin liquor, wherein, the rotating speed of rotary drum and the diameter of rotary drum meet following formula:

$D=98.5\frac{1}{v}\sqrt{\frac{2\mathrm{\σ}}{d\mathrm{\ρ}}}$

Wherein, the diameter of drop of D for producing, ρ is liquid material density, and d is roller diameter, and v is rotary drum rotating speed, and σ is liquid material surface tension.

Aperture on rotary drum sidewall is the aperture of millimeter magnitude, is generally 0.1mm ~ 10mm.

For making the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the utility model is further described.

Fig. 2 is the structural representation of a specific embodiment of droplet array of the present utility model.As shown in Figure 2, droplet array generator comprises rotary drum 8, high-speed electric expreess locomotive 13, shell 7, material storing box 4 and feed conduit 6, and wherein, rotary drum 8 is cylinder-like structure, and the outer wall pressing close to bottom surface has the aperture 9 of a 1mm, and high-speed electric expreess locomotive 13 is located under rotary drum 8; Shell 7 is cylinder-like structure, with the outside being located in rotary drum 8, the outer wall of shell 7 has a ribbon opening 11, the aperture 9 of ribbon opening 11 and rotary drum outer wall is on the position of sustained height, material storing box stores metal liquid material, and feed conduit is used for the metal liquid material in material storing box to import in rotary drum.

As shown in Figure 3, after liquid metal in material storing box 4 enters rotary drum 8 by feed conduit 6, rotary drum 8 center is engaged mutually with high-speed electric expreess locomotive 13, high-speed electric expreess locomotive 13 drives rotary drum 8 fast rotational, wherein, the diameter of rotary drum 8 is 200mm, high-speed electric expreess locomotive 13 rotating speed is 8000 revs/min, liquid metal is accelerated by rotary drum, by centrifugal action fast movement to rotary drum 8 edge, rotary drum 8 outer wall that against rotary drum 8 edge accelerates, and forms molten drop 12 in liquid metal accelerator by metal liquid viscous force and surface tension effects, wherein, molten drop diameter is 40 μm.During rotary drum stabilization of speed, its drop generation frequency is stablized.Molten drop 12 in rotary drum 8 constantly adjusts its diameter and speed in rotation process in rotary drum 8, when turning to rotary drum outer wall aperture 9, the molten drop 12 that against the motion of rotary drum outer wall loses rotary drum 8 outer wall applies to point to along rotary drum bottom surface radius rotary drum center of circle centripetal force to it, drop can along the tangential direction outgoing of rotary drum bottom surface, next drop can in the next position outgoing along rotary drum girth, by that analogy, the quantity of molten drop is accumulated on the concentric circles girth of rotary drum bottom surface.

Wherein, diameter and rate request can be met before making the outgoing of each molten drop 12, make it in rotary drum 8, have enough acceleration time, position rotary drum 8 being received liquid material 5 be arranged on rotary drum bottom surface with ribbon opening 11 position farthest.

Molten drop 12 is after the rear outgoing of rotary drum opening of external wall 9, and the molten drop 12 in shell ribbon opening 11 scope from outgoing in whole device, becomes a part for molten drop array 10 through the banded opening 11 of housing strip.Stopped by shell after the extraneous molten drop outgoing of shell ribbon opening 11, be recycled in device inside.

In above process, rotary drum 8 revolves the drop chain concentric circle that turns around in ribbon opening 11 scope of shell 7 being formed arcuation, because liquid-drop diameter is much smaller than roller diameter, and rotary drum opening of external wall 9 scope is less, the arcuation drop chain therefore in concentric circumferences can be similar to regards that chain is dripped in the discharge opeing be positioned on the same line as.The rotating speed of the rotary drum 8 in the utility model is higher, turn around when rotary drum 8 revolves, after first row molten drop chain is formed, rotary drum 8 enters the second circle very soon, second row molten drop chain is formed again in second circle rotary course, now first row molten drop chain outgoing spin cycle time, therefore spatially second row drop chain can and then first row drop chain outgoing.By that analogy, after chain and the outgoing of subsequent droplet chain difference are dripped in the 3rd metal discharge opeing, device outside can form the micron order droplet array 10 that has space distribution.

As shown in Figure 4, there is the micro-sized metal droplet array 10 of space distribution, the chip 14 that can produce in collection light source luminescent process plays good effect.Be on the one hand, the diameter of each molten drop 12 is very little, and have good transmission effect to light wave, after this debris collection device, light energy losses is less.Be on the other hand, the generated frequency of molten drop 12 is higher, and the drop density namely in molten drop array 10 is comparatively large, the spacing between molten drop 12 can make light wave easily through, but but to there being the chip 14 of certain volume to have good inhibiting effect.And in molten drop array, chip constantly encounters molten drop 12, is decelerated gradually, is finally captured eliminating, thus effectively collects chip.

Above-described specific embodiment; the purpose of this utility model, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiment of the utility model; be not limited to the utility model; all within spirit of the present utility model and principle, any amendment made, equivalent replacement, improvement etc., all should be included within protection domain of the present utility model.

Claims (5)

1. a droplet array generator, is characterized in that, comprising:

Material storing box, for storing liquid material;

Feed conduit, for importing in rotary drum by the described liquid material in described material storing box;

Rotary drum, for receiving liquid material, described rotary drum is the cylinder-like structure of one end open, and on the sidewall pressing close to its bottom surface, have an aperture;

Rotary drive mechanism, is located under described rotary drum, for driving described rotary drum around its central axis;

Shell, be the cylinder-like structure of one end open, coaxial sleeve is located at the outside of described rotary drum, and on sidewall, have a ribbon opening, and the aperture on described ribbon opening and described rotary drum sidewall is on same level position.

2. droplet array generator according to claim 1, is characterized in that, the position that described rotary drum receives liquid material be positioned on described rotary drum bottom surface with described ribbon opening position farthest.

3. droplet array generator according to claim 1, is characterized in that, described liquid material is liquid metal.

4. droplet array generator according to claim 1, is characterized in that, the aperture on described rotary drum sidewall is the aperture of millimeter magnitude.

5. droplet array generator according to claim 1, is characterized in that, described liquid material is accelerated in described rotary drum, and form drop, wherein, the rotating speed of described rotary drum and the diameter of rotary drum meet following formula:

$D=98.5\frac{1}{v}\sqrt{\frac{2\mathrm{\σ}}{d\mathrm{\ρ}}}$

Wherein, ρ is liquid material density, and d is roller diameter, and v is rotary drum rotating speed, and σ is liquid material surface tension.