CN204984013U - Semiconductor is locking device for deposition equipment - Google Patents
Semiconductor is locking device for deposition equipment Download PDFInfo
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- CN204984013U CN204984013U CN201520347037.1U CN201520347037U CN204984013U CN 204984013 U CN204984013 U CN 204984013U CN 201520347037 U CN201520347037 U CN 201520347037U CN 204984013 U CN204984013 U CN 204984013U
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Abstract
Semiconductor is locking device for deposition equipment, current inconvenient the opening of bounding wall tool to lock of main solution, it is big to occupy the device space, and handle and the tool to lock protrusion bounding wall more pedestrian of causing in surface cut clashing and breaking to pieces and hinder the scheduling problem. It includes bounding wall and lock axle. Above -mentioned lock axle passes axle sleeve, packing ring and eccentric wheel, uses the terminal threaded connection of gasket and nut and spring bolt to fix it on the bounding wall. Above -mentioned lock axle adopts a style of calligraphy groove structure, the hole of above -mentioned eccentric wheel cooperatees with a lock axle middle section and is processed into the square or cuts edge circularly, above -mentioned eccentric wheel contacts with the afterbody of spring bolt, and the spring bolt leads through the guide bracket of welding on the bounding wall. Above -mentioned spring bolt is processed into type ladder shaft structure to install the spring above that. The utility model discloses a simple and easy type locking structure need not the private key, only needs a word spanner or flat to open, can realize maintainability and have stronger security.
Description
Technical field
The utility model relates to a kind of simple type locking device being applied to semiconductor deposition equipment, by simple structure design, reaches easy and simple to handle, takies the object that the device space is little.Belong to semiconductive thin film deposition applications and manufacturing technology field.
Background technology
Semiconductor equipment beautifies from secure context or in order to carry out industrial design, and in order to the design of proterctive equipment inside important feature, is not considered by reasons such as rival obtain easily, often increases coaming plate in equipment periphery.Be that external hanging type or embedded coaming plate form all need reliable fixing, can not damage because of coming off of coaming plate with proterctive equipment and personnel.Before guarantee is fixing reliably under topic, when equipment needs to safeguard, coaming plate is needed again to dismantle fast.Reliability and maintainability are all the necessary performance indications of semiconductor equipment, how between two kinds of performance indications, find balance, concerning most important the design of coaming plate.
Existing coaming plate design often adopts the mode of direct carry to realize its maintainability, but carry mode has some limitations, when equipment have vibrations occur or after long-term use, hook can wear and tear or come off, security presence like this for equipment and personnel harm greatly, especially, when coaming plate position is higher, can not be ignored especially from the danger of falling from high altitude.Above-mentioned safety problem is effectively avoided at the use lockset Shi Zehui that carries out being locked.But existing lockset is not often for semicon industry, its size and take up room larger.Some device interior layout and structure restriction, some semiconductor equipments cannot use.Or handle or lockset to protrude coaming plate surface more, like this personnel through out-of-date, be easy to clothing to tangle, cause laundry damage or injury to personnel.And existing lockset must use the key corresponding with it to open, when Emergency Maintenance forgets key or key loss, damage type opening ways can only be adopted, the equipment that have impact on serious like this and personal security, also maintenance time is delayed, the direct production efficiency affecting equipment.
Summary of the invention
The utility model, for the purpose of solving the problem, mainly solves existing coaming plate lockset and is inconvenient to open, and takies the device space large, and handle and lockset protrude the more pedestrian of causing in coaming plate surface cuts the problems such as clashing and breaking wound to pieces.
For achieving the above object, the utility model adopts following technical proposals: semiconductor deposition equipment locking device, comprises coaming plate and lock shaft.Above-mentioned lock shaft through axle sleeve, packing ring and eccentric wheel, uses being threaded of pad and nut and dead bolt end, and is fixed on coaming plate.Above-mentioned lock shaft adopts yi word pattern groove structure; Above-mentioned axle sleeve uses the material with certain self-lubricating property to make, and can rotate freely wherein to facilitate lock shaft.Above-mentioned eccentric endoporus matches with lock shaft stage casing and is processed into square or trimming circle, movable eccentric wheel can be with to facilitate to be rotated when lock shaft rotates.Above-mentioned eccentric wheel contacts with the afterbody of dead bolt, and dead bolt is led by the guiding trestle be welded on coaming plate.Above-mentioned dead bolt is processed into multidiameter structure, and mounting spring thereon, to ensure the contact that dead bolt and eccentric wheel remain good.
The beneficial effects of the utility model and feature:
The utility model is by a kind of coaming plate locking mechanism of simple type, its structure is simple, easy and simple to handle, without the need to private key, only need a word spanner or flat to open, reliable lock, takes up room little, it is less that lockset protrudes coaming plate surface, surface is more smooth, can not cause scratch to personnel, and profile is clean and tidy, attractive in appearance.Can maintainability be realized and there is stronger safety.
Accompanying drawing explanation
Fig. 1 is stereogram of the present utility model.
Fig. 2 is front view of the present utility model.
Fig. 3 is the left view of Fig. 2.
Fig. 4 is the A-A sectional view of Fig. 3.
In figure, piece mark represents respectively:
1, coaming plate; 2, lock shaft; 3, axle sleeve; 4, packing ring; 5, eccentric wheel; 6, pad; 7, nut; 8, dead bolt; 9, guiding trestle; 10, spring; 11, locking rack.
Below in conjunction with drawings and Examples, the utility model is further described.
Detailed description of the invention
Embodiment
As Figure 1-4, semiconductor deposition equipment locking device, comprises coaming plate 1 and lock shaft 2.Above-mentioned lock shaft 2, through axle sleeve 3, packing ring 4 and eccentric wheel 5, uses being threaded of pad 6 and nut 7 and dead bolt 8 end, and is fixed on coaming plate 1.
Above-mentioned lock shaft 2 adopts yi word pattern groove structure;
Above-mentioned axle sleeve 3 uses the material with certain self-lubricating property to make, as: gun-metal, polytetrafluoroethylene (PTFE) etc., can rotate freely wherein to facilitate lock shaft 2;
Above-mentioned eccentric wheel 5 endoporus matches with lock shaft 2 stage casing and is processed into square or trimming circle, movable eccentric wheel 5 can be with to facilitate to be rotated when lock shaft 2 rotates;
Above-mentioned eccentric wheel 5 contacts with the afterbody of dead bolt 8, and in order to ensure better to coordinate and prevent play, the afterbody of dead bolt 8 is processed into the arc consistent with eccentric wheel 5 appearance and size.Dead bolt 8 is led by the guiding trestle 9 be welded on coaming plate 1, carries out locking operation to facilitate to coordinate with locking rack 11.Above-mentioned dead bolt 8 is processed into multidiameter structure, and mounting spring 10 thereon, to ensure that dead bolt 8 and eccentric wheel 5 remain good contact.
During work, use a word spanner to rotate lock shaft 2, lock shaft 2 is with movable eccentric wheel 5 to rotate in axle sleeve 3.By the change of the eccentric throw of eccentric wheel 5 external diameter and center, rotation process is converted into the rectilinear motion of the dead bolt 8 contacted with eccentric wheel 5 circumferential surface, thus dead bolt 8 is entered or departs from locking rack 11, to realize unlatching and the locking functions of coaming plate 1.
Claims (8)
1. semiconductor deposition equipment locking device, comprises coaming plate, it is characterized in that: it also comprises lock shaft, and above-mentioned lock shaft through axle sleeve, packing ring and eccentric wheel, uses being threaded of pad and nut and dead bolt end, and is fixed on coaming plate (1).
2. semiconductor deposition equipment locking device as claimed in claim 1, is characterized in that: above-mentioned lock shaft adopts yi word pattern groove structure.
3. semiconductor deposition equipment locking device as claimed in claim 1, is characterized in that: above-mentioned axle sleeve uses the material with certain self-lubricating property to make.
4. semiconductor deposition equipment locking device as claimed in claim 3, is characterized in that: above-mentioned axle sleeve adopts gun-metal or polytetrafluoroethylene (PTFE).
5. semiconductor deposition equipment locking device as claimed in claim 1, is characterized in that: square or trimming circle are processed in the merging that matches of above-mentioned eccentric wheel endoporus and lock shaft stage casing.
6. semiconductor deposition equipment locking device as claimed in claim 1, it is characterized in that: above-mentioned eccentric wheel contacts with the afterbody of dead bolt, the afterbody of dead bolt is processed into the arc consistent with eccentric wheel appearance and size.
7. semiconductor deposition equipment locking device as claimed in claim 1, is characterized in that: described dead bolt is led by the guiding trestle be welded on coaming plate.
8. semiconductor deposition equipment locking device as claimed in claim 1, is characterized in that: above-mentioned dead bolt is processed into multidiameter structure, and mounting spring thereon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520347037.1U CN204984013U (en) | 2015-05-27 | 2015-05-27 | Semiconductor is locking device for deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520347037.1U CN204984013U (en) | 2015-05-27 | 2015-05-27 | Semiconductor is locking device for deposition equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204984013U true CN204984013U (en) | 2016-01-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520347037.1U Active CN204984013U (en) | 2015-05-27 | 2015-05-27 | Semiconductor is locking device for deposition equipment |
Country Status (1)
| Country | Link |
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| CN (1) | CN204984013U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112298442A (en) * | 2019-07-15 | 2021-02-02 | 捷安特电动车（昆山）有限公司 | Bicycle lock |
| CN113700719A (en) * | 2021-10-28 | 2021-11-26 | 江苏邑文微电子科技有限公司 | Self-locking structure and equipment |
-
2015
- 2015-05-27 CN CN201520347037.1U patent/CN204984013U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112298442A (en) * | 2019-07-15 | 2021-02-02 | 捷安特电动车（昆山）有限公司 | Bicycle lock |
| CN112298442B (en) * | 2019-07-15 | 2023-01-31 | 捷安特电动车（昆山）有限公司 | Bicycle lock |
| CN113700719A (en) * | 2021-10-28 | 2021-11-26 | 江苏邑文微电子科技有限公司 | Self-locking structure and equipment |
| CN113700719B (en) * | 2021-10-28 | 2021-12-24 | 江苏邑文微电子科技有限公司 | Self-locking structure and equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: No.900 Shuijia, Hunnan District, Shenyang City, Liaoning Province Patentee after: Tuojing Technology Co.,Ltd. Address before: 110179 3rd floor, No.1-1 Xinyuan street, Hunnan New District, Shenyang City, Liaoning Province Patentee before: PIOTECH Co.,Ltd. |