CN204924630U - Bellows actual life detection device - Google Patents
Bellows actual life detection device Download PDFInfo
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- CN204924630U CN204924630U CN201520575581.1U CN201520575581U CN204924630U CN 204924630 U CN204924630 U CN 204924630U CN 201520575581 U CN201520575581 U CN 201520575581U CN 204924630 U CN204924630 U CN 204924630U
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- heating plate
- cavity
- fixed
- corrugated tube
- mounting base
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Abstract
Bellows actual life detection device is including upper cover plate, cavity, heater assembly and counter flange. The upper cover plate sets up the upper end at the cavity. The lower extreme at the cavity is fixed to heater assembly and counter flange. The heating plate subassembly includes mounting base, cylinder, universal movable joint, linear slide rail, slider, heating plate connecting piece, bellows and heating plate. The pump line way that the factory was engaged in the end is connected to on the lower extreme flange of counter flange. Linear slide rail fixes on the mounting base. The slider slides on linear slide rail. The lower extreme at the mounting base is fixed to the cylinder. The cylinder links together with the heating plate connecting piece. The side and the slider fixed connection of heating plate connecting piece. In the cavity was inserted to the heating plate upper end, the lower extreme was connected with the heating plate connecting piece. The bellows upper end is fixed on the cavity, and the lower extreme is fixed on the heating plate connecting piece. The utility model discloses simple structure through the in -service use circumstances of simulation board, tests the demand whether real life of bellows accords with equipment.
Description
Technical field
The utility model relates to a kind of pick-up unit, and especially a kind of corrugated tube pick-up unit actual life, belongs to semiconductive thin film deposition applications and manufacturing technology field.
Background technology
Being of wide application of bellows type mechanical seal, from low temperature to high temperature, from neutral medium to Korrosionsmedium, from low speed to high speed, all can select from common to the condition of work of harshness.All these, by changing geometric configuration (as internal-and external diameter, wave plate thickness and wave number etc.) and the elasticity modulus of materials of corrugated tube, change the bullet rate of corrugated tube.According to the corrosive nature of medium, select different corrugated tube materials etc.
In existing semiconductor coated film equipment, corrugated tube is in a crucial position, and environment temperature is higher, and inside is in vacuum state.Meanwhile, corrugated tube is in the state of moving up and down all the time, and inner corrosive medium in addition exists.In use procedure, because the effect of external force or high temperature, corrugated tube can be caused to be out of shape or to break.The life span of corrugated tube is a very crucial index, and it directly affects the normal operation of board.
Utility model content
For above-mentioned the deficiencies in the prior art, the utility model provides a kind of corrugated tube pick-up unit actual life.
For achieving the above object, the technical solution adopted in the utility model is: corrugated tube pick-up unit actual life, comprises upper cover plate (4), cavity (42), heater assembly and counter flange (36).Upper cover plate (4) is arranged on the upper end of cavity (42).Heater assembly and counter flange (36) are fixed on the lower end of cavity (42).Heating plate assembly comprises mounting base (14), cylinder (21), universal movable joint (22), line slide rail (15), slide block (16), heating plate web member (30), corrugated tube (34) and heating plate (3).The pump line road of factory's business end is connected in the lower end flanges (35) of counter flange (36).Line slide rail (15) is fixed on mounting base (14).Slide block (16) is in the upper slip of line slide rail (15).Cylinder (21) is fixed on the lower end of mounting base (14).Cylinder (21) and heating plate web member (30) link together.The side of heating plate web member (30) is fixedly connected with slide block (16).Heating plate (3) upper end is inserted in cavity (42), and lower end is connected with heating plate web member (30).Corrugated tube (34) upper end is fixed on cavity (42), and lower end is fixed on heating plate web member (30).Heating plate (3) is through corrugated tube (34).
Preferably, rubber sealing is had between described upper cover plate (4) and cavity (42).
Preferably, mounting base (14) is provided with reinforcement (17).
Preferably, heating plate web member (30) is provided with water channel (29).
The utility model structure is simple, by simulating the actual service condition of board, tests the demand whether corrugated tube meets equipment real serviceable life.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the A-A cut-open view of Fig. 1.
Fig. 3 is the vertical view after the utility model removes upper cover plate.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, to the technical scheme in the utility model embodiment carry out clear, intactly describe, obviously, described embodiment is only the utility model part embodiment, instead of whole embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtained under creative work prerequisite, all belong to the scope of the utility model protection.
As shown in Figure 1-Figure 3: corrugated tube pick-up unit actual life, be made up of upper cover plate 4, cavity 42, heater assembly and counter flange 36.Heating plate assembly comprises mounting base 14, cylinder 21, universal movable joint 22, line slide rail 15, slide block 16, heating plate web member 30, corrugated tube 34, well heater more than 3 part.When counter flange 36 uses, by placing cushion rubber in the cushion rubber mounting groove 38 in upper flanges 37, realize the sealing of counter flange 36 upper flanges face 39 and cavity lower surface 12.The pump line road of factory's business end can be connected in the lower end flanges 35 of counter flange 36.Wherein, have rubber sealing between upper cover plate 4 and cavity 42, upper cover plate lower surface 7 requires certain machining precision, ensures sealing.The mounting base 14 of heating plate assembly adds structure for T-shaped machine substantially, and there is multiple threaded hole in its front 18, for the fixed installation of line slide rail 15, is provided with two slide blocks 16 above slide rail.There are two reinforcements 17 at the back side, for booster action, prevents the deformation of himself.Upper surface 13 is stationary plane, with two register pins and four through holes, fixes for the location between cavity lower surface 12.Bottom plate 19 is upper is provided with a large through hole and four little through holes, on the lower surface 20 being fixed on bottom plate of cylinder 21 in the heart.Cylinder 21 is linked together with heating plate web member 30 by universal movable joint 22.Heating plate web member 30 also adds structure for T-shaped machine, and its benchmark facade is provided with register pin and installs fixed orifice, for line slide rail 15 above being connected and fixed of two slide blocks 16.The bottom 23 of this facade, is provided with the threaded hole 24 for being connected with universal movable joint 22.Its vertical-horizontal reference field 26 is provided with heating plate and installs fixed orifice, heating plate TC and power lead wire hole and heating plate O-ring seal mounting groove 27.Heating plate 3 is provided with threaded hole by the column end face 28 of bottom, fixes for the installation between heating plate 3 and heating plate web member 30.Install when heating plate and be fixed to after on this level reference 25, the sealing realizing therebetween by the heating plate O-ring seal of mounted thereto.Meanwhile, consider the serviceable life of heating plate O-ring seal, this heating plate web member 30 is provided with water channel 29.Whole water route, by pipeline and Chang Wuduan cooling water source UNICOM, realizes the cooling at heat dish web member 30 place, namely realizes the guarantee to heating plate O-ring seal sealing.The structure of this corrugated tube 34 and size, keep completely the same with the corrugated tube on existing equipment, form by upper flange 41, lower flange 32 and welding bellows 33.Upper flange 41 and lower flange 32 install fixed orifice with cushion rubber mounting groove 31 and bolt, for realizing being tightly connected with two end connections, being tightly connected namely respectively with cavity 42 and heating plate web member 30.During work, cylinder 21 drives heating plate web member 30 to move up and down, and the heating plate 3 be fastened on heating plate web member 30 can and then move up and down simultaneously together.In motion process, this end that corrugated tube 34 is fixed on heating plate web member 30 also will along with moving up and down together, thus corrugated tube 34 moving up and down along with heating plate 3, self be also in a compression, stretch the state of alternate cycles.In the process declined, the lower surface 2 of heating plate 3 can not contact with the lower surface 11 of chamber.
Before unlatching heating plate 3, need to vacuumize in chamber 5.Assembly and factory pump group of being engaged in will be vacuumized be connected, realize the vacuum level requirements in chamber 5.Cavity 42 is provided with chamber 5 according to the function of installation and assembly, and the external diameter 9 of chamber 5 is greater than the diameter of heating plate.Also have heating plate mounting hole 10, vacuum pumping hole 40, upper cover plate mounting hole 44 and heating plate mounting base mounting hole, corrugated tube fixed installation hole etc., its upper surface 1 is also provided with the aprons slot 6 sealed with upper cover plate.In addition, portion on the upper side, side is also provided with limit switch 46 mounting groove 45 and the mounting hole of upper cover plate.Sidepiece, near upper surface 1 place, is also arranged with two big grooves 8.Big groove 8 has certain degree of depth with the outmost surface 43 of cavity 42 and upper cover plate 4, ensures the unlatching of enough operating spaces for upper cover plate 4.As simple frock, upper cover plate 4 does not have mounting knob, its unlatching is by big groove 8 as operating space, directly hold upper cover plate 4 realize upper cover plate 4 unlatching, lay and adjust with position.In test process, need upper cover plate 4 to put well, ensure the sealing with cavity 42.5 to vacuumize in chamber simultaneously, start heating plate 3, be warming up to temperature required.Start cylinder 21, set test procedure, allow the motion that whole test fixture carries out up and down reciprocatingly automatically, till the ultimate limit states such as breaking, incompressible appears in corrugated tube 34.The number of times of the motion of the cylinder 21 of record current state, is the actual life of corrugated tube 34.
Claims (4)
1. corrugated tube pick-up unit actual life, is characterized in that: comprise upper cover plate (4), cavity (42), heater assembly and counter flange (36); Upper cover plate (4) is arranged on the upper end of cavity (42); Heater assembly and counter flange (36) are fixed on the lower end of cavity (42); Heating plate assembly comprises mounting base (14), cylinder (21), universal movable joint (22), line slide rail (15), slide block (16), heating plate web member (30), corrugated tube (34) and heating plate (3); The pump line road of factory's business end is connected in the lower end flanges (35) of counter flange (36); Line slide rail (15) is fixed on mounting base (14), slide block (16) is in the upper slip of line slide rail (15), cylinder (21) is fixed on the lower end of mounting base (14), cylinder (21) and heating plate web member (30) link together, the side of heating plate web member (30) is fixedly connected with slide block (16), heating plate (3) upper end is inserted in cavity (42), and lower end is connected with heating plate web member (30); Corrugated tube (34) upper end is fixed on cavity (42), and lower end is fixed on heating plate web member (30), and heating plate (3) is through corrugated tube (34).
2. corrugated tube pick-up unit actual life as claimed in claim 1, is characterized in that: have rubber sealing between described upper cover plate (4) and cavity (42).
3. corrugated tube pick-up unit actual life as claimed in claim 1, is characterized in that: described mounting base (14) is provided with reinforcement (17).
4. corrugated tube pick-up unit actual life as claimed in claim 1, is characterized in that: on heating plate web member (30), be provided with water channel (29).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520575581.1U CN204924630U (en) | 2015-08-03 | 2015-08-03 | Bellows actual life detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520575581.1U CN204924630U (en) | 2015-08-03 | 2015-08-03 | Bellows actual life detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204924630U true CN204924630U (en) | 2015-12-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520575581.1U Active CN204924630U (en) | 2015-08-03 | 2015-08-03 | Bellows actual life detection device |
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| CN (1) | CN204924630U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108240901A (en) * | 2016-12-26 | 2018-07-03 | 北京有色金属研究总院 | Solar high-temperature vacuum heat-collecting tube fatigue life test device and method |
-
2015
- 2015-08-03 CN CN201520575581.1U patent/CN204924630U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108240901A (en) * | 2016-12-26 | 2018-07-03 | 北京有色金属研究总院 | Solar high-temperature vacuum heat-collecting tube fatigue life test device and method |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: No.900 Shuijia, Hunnan District, Shenyang City, Liaoning Province Patentee after: Tuojing Technology Co.,Ltd. Address before: 110179 3rd floor, No.1-1 Xinyuan street, Hunnan New District, Shenyang City, Liaoning Province Patentee before: PIOTECH Co.,Ltd. |