CN204831167U - Measurement device for whole curved surface of thing is leveled in accurate measurement - Google Patents

Measurement device for whole curved surface of thing is leveled in accurate measurement Download PDF

Info

Publication number
CN204831167U
CN204831167U CN201520293743.2U CN201520293743U CN204831167U CN 204831167 U CN204831167 U CN 204831167U CN 201520293743 U CN201520293743 U CN 201520293743U CN 204831167 U CN204831167 U CN 204831167U
Authority
CN
China
Prior art keywords
pillar
level
electronic dial
curved surface
guide rail
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN201520293743.2U
Other languages
Chinese (zh)
Inventor
戴志展
姚钧
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STARPOWER SEMICONDUCTOR Ltd
Original Assignee
JIAXING STARPOWER MICROELECTRONICS CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JIAXING STARPOWER MICROELECTRONICS CO Ltd filed Critical JIAXING STARPOWER MICROELECTRONICS CO Ltd
Priority to CN201520293743.2U priority Critical patent/CN204831167U/en
Application granted granted Critical
Publication of CN204831167U publication Critical patent/CN204831167U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)

Abstract

一种精准测量平整物整体曲面的测量装置,它包括一带有水平仪的支柱,该支柱上横向连接有一带有导轨的主尺,所述的导轨上安装有可沿着主尺直线水平移动测量的电子千分表,且该电子千分表通过数据线相连有可自动输入测量数据的电脑;所述的导轨带有可准确控制测量点之间距离的副尺;所述的主尺通过轴承相接在支柱上并可以相对支柱进行旋转,所述的支柱底部存在用以调节水平的支架,顶端装有可确保电子千分表可以沿着主尺水平移动的水平仪;本实用新型的有益效果是:避免了高额的设备费用却可以达到0.001mm的精度的要求;并且测量方式操作简单,仪器携带方便。

A measuring device for accurately measuring the overall curved surface of a flat object, which includes a pillar with a level, and a main ruler with a guide rail is connected transversely to the pillar, and a measuring device that can move horizontally along the main ruler straight line is installed on the guide rail An electronic dial gauge, and the electronic dial gauge is connected with a computer that can automatically input measurement data through a data line; the guide rail has a sub-scale that can accurately control the distance between the measurement points; the main scale is connected through a bearing It is connected to the pillar and can be rotated relative to the pillar. There is a bracket for adjusting the level at the bottom of the pillar, and the top is equipped with a level that can ensure that the electronic dial gauge can move horizontally along the main ruler; the beneficial effect of the utility model is that : Avoid high equipment cost but can meet the requirement of 0.001mm accuracy; and the measurement method is easy to operate and the instrument is easy to carry.

Description

一种精准测量平整物整体曲面的测量装置A measuring device for accurately measuring the overall curved surface of a flat object

技术领域 technical field

本实用新型涉及的是一种精准测量平整物整体曲面的测量装置及测量方法,该测量方法精度范围为0.001mm—25mm,适用于精度要求较高而表面积范围较小(一般不大于0.25m2)的物体表面整体曲面的测量。 The utility model relates to a measuring device and a measuring method for accurately measuring the overall curved surface of a flat object. The measuring method has an accuracy range of 0.001mm-25mm, and is suitable for objects with high precision requirements and a small surface area range (generally not greater than 0.25m 2 ) . ) measurement of the overall surface of the object surface.

背景技术 Background technique

目前对物体表面的几何量测方式一般采用三坐标测量仪,它是指一种具有可作三个方向移动的探测器,可在三个相互垂直的导轨上移动,此探测器以接触或非接触等方式传送讯号,三个轴的位移测量系统经数据处理器计算出工件的各点坐标(X、Y、Z)及各项功能测量的仪器。三维可测的空间范围内,能够根据测头系统返回的点数据,通过三坐标的软件系统计算各类几何形状、尺寸等测量能力的仪器。三坐标测量仪具有机械结构刚性强、几何误差小、高精度和高稳定性的优点,但其的缺点为价格昂贵。 At present, the geometric measurement of the surface of the object generally adopts a three-coordinate measuring instrument, which refers to a detector that can move in three directions and can move on three mutually perpendicular guide rails. The detector uses contact or non-contact Signals are transmitted by means of contact, etc. The three-axis displacement measurement system calculates the coordinates (X, Y, Z) of each point of the workpiece through the data processor and the instrument for various functional measurements. Within the three-dimensional measurable space, it is an instrument that can calculate various geometric shapes, dimensions and other measurement capabilities through the three-coordinate software system according to the point data returned by the probe system. The three-coordinate measuring instrument has the advantages of strong mechanical structure rigidity, small geometric error, high precision and high stability, but its disadvantage is that it is expensive.

发明内容 Contents of the invention

本实用新型的目的在于克服现有技术存在的不足,而提供一种结构简单,使用操作方便,精度高,可靠性好的精准测量平整物整体曲面的测量装置及测量方法,它在避免了高额的设备成本的同时具备一定的精度及可操作性。 The purpose of the utility model is to overcome the deficiencies of the prior art, and provide a simple structure, easy to use and operate, high precision, good reliability and accurate measurement of the overall curved surface of the flat object and the measurement method, which avoids high It has a certain degree of accuracy and operability while reducing the equipment cost.

本实用新型所采用的技术方案是:一种精准测量平整物整体曲面的测量装置,它包括一带有水平仪的支柱,该支柱上横向连接有一带有导轨的主尺,所述的导轨上安装有可沿着主尺直线水平移动测量的电子千分表,且该电子千分表通过数据线相连有可自动输入测量数据的电脑。 The technical solution adopted by the utility model is: a measuring device for accurately measuring the overall curved surface of a flat object, which includes a pillar with a level gauge, and a main ruler with a guide rail is horizontally connected to the pillar, and the guide rail is equipped with The electronic dial gauge can be moved horizontally along the main ruler straight line, and the electronic dial gauge is connected with a computer that can automatically input measurement data through a data line.

所述的导轨带有可准确控制测量点之间距离的副尺;所述的主尺通过轴承相接在支柱上并可以相对支柱进行旋转,所述的支柱底部存在用以调节水平的支架,顶端装有可确保电子千分表可以沿着主尺水平移动的水平仪。 The guide rail has a sub-scale that can accurately control the distance between the measurement points; the main scale is connected to the pillar through a bearing and can rotate relative to the pillar, and there is a bracket at the bottom of the pillar for adjusting the level. A spirit level is installed on the top to ensure that the electronic dial indicator can move horizontally along the main scale.

所述支柱顶端水平仪为带有X、Y轴刻度的水平仪;所述的支柱上设置有整体高度可调整机构;所述的轴承可旋转并带有刻度,即可以带动主尺以支柱为轴进行固定角度的旋转,并为后续曲面模拟提供准确坐标; The level at the top of the pillar is a level with scales on the X and Y axes; the pillar is provided with an overall height adjustable mechanism; the bearing is rotatable and has a scale, which can drive the main ruler to take the pillar as the axis. Fixed-angle rotation, and provide accurate coordinates for subsequent surface simulation;

所述支柱底部的支架接触于测量物体表面并保持水平,且所述支架确定的平面以支柱横截面的圆心为基准点,使电子千分表的测头与圆心的连线平行于电子千分表移动方向。 The support at the bottom of the pillar is in contact with the surface of the measuring object and kept horizontal, and the plane defined by the support takes the center of the circle of the cross-section of the pillar as the reference point, so that the connection line between the measuring head of the electronic dial indicator and the center of the circle is parallel to the electronic dial indicator. Direction of watch movement.

与现有技术相比,本实用新型的有益效果是:避免了高额的设备费用却可以达到0.001mm的精度的要求;并且测量方式操作简单,仪器携带方便。 Compared with the prior art, the beneficial effect of the utility model is that: high equipment cost can be avoided but the precision requirement of 0.001 mm can be met; the measurement method is simple to operate, and the instrument is convenient to carry.

附图说明 Description of drawings

图1是本实用新型所述精准测量平整物整体曲面的测量装置示意图。 Fig. 1 is a schematic diagram of a measuring device for accurately measuring the overall curved surface of a flat object described in the present invention.

具体实施方式 Detailed ways

下面结合附图对本实用新型进一步说明。图1所示,本实用新型所述的一种精准测量平整物整体曲面的测量装置,它包括一带有水平仪的支柱2,该支柱2上横向连接有一带有导轨7的主尺9,所述的导轨7上安装有可沿着主尺直线水平移动测量的电子千分表6,且该电子千分表6通过数据线5相连有可自动输入测量数据的电脑8。 Below in conjunction with accompanying drawing, the utility model is further described. As shown in Fig. 1, a kind of measuring device for accurately measuring the overall curved surface of a flat object described in the utility model includes a pillar 2 with a level, and a main ruler 9 with a guide rail 7 is transversely connected to the pillar 2. An electronic dial indicator 6 that can move horizontally along the main scale straight line for measurement is installed on the guide rail 7, and the electronic dial indicator 6 is connected with a computer 8 that can automatically input measurement data through a data line 5.

图中所示,所述的导轨7带有可准确控制测量点之间距离的副尺;所述的主尺通过轴承3相接在支柱上并可以相对支柱进行旋转,所述的支柱底部存在用以调节水平的支架4,顶端装有可确保电子千分表可以沿着主尺水平移动的水平仪。 As shown in the figure, the guide rail 7 has a sub-scale that can accurately control the distance between the measuring points; the main scale is connected to the pillar through the bearing 3 and can rotate relative to the pillar. The support 4 in order to adjust the level is equipped with a spirit level that can ensure that the electronic dial indicator can move horizontally along the main ruler.

本实用新型所述支柱顶端水平仪1为带有X、Y轴刻度的水平仪;所述的支柱2上设置有整体高度可调整机构;所述的轴承3可旋转并带有刻度,即可以带动主尺以支柱为轴进行固定角度的旋转,并为后续曲面模拟提供准确坐标; The level meter 1 at the top of the pillar described in the utility model is a level meter with scales on the X and Y axes; the pillar 2 is provided with an overall height adjustable mechanism; the bearing 3 is rotatable and has a scale, which can drive the main The ruler rotates at a fixed angle with the pillar as the axis, and provides accurate coordinates for subsequent surface simulation;

所述支柱底部的支架4接触于测量物体表面并保持水平,且所述支架确定的平面以支柱横截面的圆心为基准点,使电子千分表的测头与圆心的连线平行于电子千分表移动方向。 The bracket 4 at the bottom of the pillar is in contact with the surface of the measuring object and kept horizontal, and the plane defined by the bracket takes the center of the circle of the cross section of the pillar as a reference point, so that the connection line between the probe of the electronic dial gauge and the center of the circle is parallel to the electronic dial gauge. Direction of sub-table movement.

一种利用所述精准测量平整物整体曲面的测量装置进行测量方法,所述的测量方法包括如下步骤: A measuring method using the measuring device for accurately measuring the overall curved surface of a flat object, the measuring method comprising the following steps:

a)将所述支柱2放置于被测物体的表面,若选择扇形的形式进行测量,则将支柱2放置于被测物体的一个角; a) Place the pillar 2 on the surface of the object to be measured. If fan-shaped measurement is selected, place the pillar 2 on a corner of the object to be measured;

b)结合支柱顶端的水平仪1对支架4进行调整,使得整体水平; b) Adjust the support 4 in combination with the spirit level 1 at the top of the pillar to make the whole level;

c)确定数据记录的形式及测量点的间距,以自动记录为例,将电子千分表6连接电脑8后,打开软件,进行测量并且将量测所得的参考数值进行手动或由计算机直接透过量测的千分表直接抓取数值; c) Determine the form of data recording and the distance between measurement points. Taking automatic recording as an example, after connecting the electronic dial indicator 6 to the computer 8, open the software, perform measurement, and manually or directly see through the computer for the reference value obtained from the measurement. The over-measured dial indicator directly grabs the value;

d)电子千分表以主尺9为轴,从左到右,结合副尺7移动准确距离后进行测量;将主尺通过轴承3进行旋转一定角度,重复之前的测量步骤即可,最终将所测得的数据透过可以呈现三维图形的套装软件或自行开发的软件即可呈现出被测物体的曲面状况。 d) The electronic dial indicator takes the main scale 9 as the axis, and measures from left to right, combined with the auxiliary scale 7 to move the accurate distance; rotate the main scale through the bearing 3 to a certain angle, repeat the previous measurement steps, and finally The measured data can present the surface condition of the measured object through packaged software that can present three-dimensional graphics or self-developed software.

以上结合附图对本实用新型的具体实施方式作了说明,但这些说明不能被理解为限制了本实用新型的范围,本实用新型的保护范围由随附的权利要求书限定,任何在本实用新型去权利要求基础上的改动都是本实用新型的保护范围。 The specific implementation of the utility model has been described above in conjunction with the accompanying drawings, but these descriptions cannot be interpreted as limiting the scope of the utility model, and the protection scope of the utility model is defined by the appended claims. Changes based on the claims are all within the protection scope of the present utility model.

Claims (4)

1.一种精准测量平整物整体曲面的测量装置,它包括一带有水平仪的支柱,该支柱上横向连接有一带有导轨的主尺,其特征在于所述的导轨上安装有可沿着主尺直线水平移动测量的电子千分表,且该电子千分表(6)通过数据线(5)相连有可自动输入测量数据的电脑(8)。 1. A measuring device for accurately measuring the overall curved surface of a flat object, which includes a pillar with a level, and a main ruler with a guide rail is transversely connected to the pillar, and it is characterized in that the guide rail is equipped with a device that can move along the main ruler. An electronic dial gauge for linear and horizontal movement measurement, and the electronic dial gauge (6) is connected with a computer (8) capable of automatically inputting measurement data through a data line (5). 2.根据权利要求1所述的精准测量平整物整体曲面的测量装置,其特征在于所述的导轨(7)带有可准确控制测量点之间距离的副尺;所述的主尺通过轴承(3)相接在支柱上并可以相对支柱进行旋转,所述的支柱底部存在用以调节水平的支架(4),顶端装有可确保电子千分表可以沿着主尺水平移动的水平仪。 2. The measuring device for accurately measuring the overall curved surface of a flat object according to claim 1, characterized in that the guide rail (7) has an auxiliary scale that can accurately control the distance between the measurement points; the main scale passes through the bearing (3) It is connected to the pillar and can be rotated relative to the pillar. There is a bracket (4) at the bottom of the pillar to adjust the level, and a level is installed on the top to ensure that the electronic dial indicator can move horizontally along the main scale. 3.根据权利要求2所述的精准测量平整物整体曲面的测量装置,其特征在于所述支柱顶端水平仪(1)为带有X、Y轴刻度的水平仪;所述的支柱(2)上设置有整体高度可调整机构;所述的轴承(3)可旋转并带有刻度,即可以带动主尺以支柱为轴进行固定角度的旋转,并为后续曲面模拟提供准确坐标。 3. The measuring device for accurately measuring the overall curved surface of a flat object according to claim 2, characterized in that the level (1) at the top of the pillar is a level with scales on the X and Y axes; There is an overall height adjustable mechanism; the bearing (3) is rotatable and has a scale, that is, it can drive the main scale to rotate at a fixed angle with the pillar as the axis, and provide accurate coordinates for subsequent surface simulation. 4.根据权利要求2或3所述的精准测量平整物整体曲面的测量装置,其特征在于所述支柱底部的支架(4)接触于测量物体表面并保持水平,且所述支架确定的平面以支柱横截面的圆心为基准点,使电子千分表的测头与圆心的连线平行于电子千分表移动方向。 4. The measuring device for accurately measuring the overall curved surface of a flat object according to claim 2 or 3, characterized in that the bracket (4) at the bottom of the pillar is in contact with the surface of the measured object and kept horizontal, and the plane determined by the bracket is The center of the circle of the cross-section of the pillar is the reference point, so that the connection line between the probe of the electronic dial indicator and the center of the circle is parallel to the moving direction of the electronic dial indicator.
CN201520293743.2U 2015-05-08 2015-05-08 Measurement device for whole curved surface of thing is leveled in accurate measurement Expired - Lifetime CN204831167U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201520293743.2U CN204831167U (en) 2015-05-08 2015-05-08 Measurement device for whole curved surface of thing is leveled in accurate measurement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201520293743.2U CN204831167U (en) 2015-05-08 2015-05-08 Measurement device for whole curved surface of thing is leveled in accurate measurement

Publications (1)

Publication Number Publication Date
CN204831167U true CN204831167U (en) 2015-12-02

Family

ID=54688760

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201520293743.2U Expired - Lifetime CN204831167U (en) 2015-05-08 2015-05-08 Measurement device for whole curved surface of thing is leveled in accurate measurement

Country Status (1)

Country Link
CN (1) CN204831167U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105091738A (en) * 2015-05-08 2015-11-25 嘉兴斯达微电子有限公司 Measuring device and measuring method for accurately measuring the whole curved surface of a flattening object
CN109759953A (en) * 2018-12-26 2019-05-17 中国科学院长春光学精密机械与物理研究所 Contour detection device and detection method of large-aperture plane mirror
CN113483637A (en) * 2021-08-06 2021-10-08 上海菲利华石创科技有限公司 Temporary rapid detection device and method for thick quartz plate groove for semiconductor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105091738A (en) * 2015-05-08 2015-11-25 嘉兴斯达微电子有限公司 Measuring device and measuring method for accurately measuring the whole curved surface of a flattening object
CN109759953A (en) * 2018-12-26 2019-05-17 中国科学院长春光学精密机械与物理研究所 Contour detection device and detection method of large-aperture plane mirror
CN113483637A (en) * 2021-08-06 2021-10-08 上海菲利华石创科技有限公司 Temporary rapid detection device and method for thick quartz plate groove for semiconductor

Similar Documents

Publication Publication Date Title
CN102506702B (en) Large three-dimensional coordinate measuring method with laser tracking and device
CN202501819U (en) Measuring device and pedal measuring device
CN103217252B (en) Movable container type high-precision micro-pressure detection device
CN105091738A (en) Measuring device and measuring method for accurately measuring the whole curved surface of a flattening object
CN102636137B (en) REVO (Resident Encrypted Variable Output) measuring head position posture calibrating method in joint arm type coordinate measuring machine
CN103630096B (en) A kind of Zero positioning method of articulated arm coordinate measuring machine
CN204085427U (en) A kind of measuring for verticality measurer
CN106643643A (en) Non-contact target coordinate measuring method
CN204831167U (en) Measurement device for whole curved surface of thing is leveled in accurate measurement
CN104034478B (en) The support arrangement that in centroid measurement, ball-and-socket, needling, plane combine
CN207742559U (en) The full degree of freedom accuracy detecting device of lathe linear motion run mode
CN102322778B (en) Special curved surface length gauge for bras
CN205642396U (en) High accuracy level bar calibrating installation based on sine
CN107388942A (en) A kind of architectural engineering detection rule for verticality calibrating installation
CN107014275B (en) A kind of two centre of sphere distance meter of space and its measurement method
CN218297169U (en) A surveying and mapping device for engineering cost
CN105043280A (en) Rotating center measuring apparatus and spacing measuring method thereof
CN104006781B (en) The computational methods of surface normal vector certainty of measurement
CN205748238U (en) A kind of architectural engineering detection rule for verticality assay device
CN103278074B (en) Tiltometer
CN201926436U (en) Attitude adjusting device of roughness measuring instrument
CN105115462A (en) Three-coordinate measurement apparatus convenient for correcting obtained data
CN207395622U (en) It is a kind of to determine front-and rear-view away from equal device in the measurement of the level
CN201387301Y (en) Section difference ruler
CN206573080U (en) A kind of non-contact optical three-dimensional measuring apparatus

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20171220

Address after: Jiaxing City, Zhejiang province 314006 Nanhu District Branch Road No. 988

Patentee after: STARPOWER SEMICONDUCTOR Ltd.

Address before: Jiaxing City, Zhejiang province 314006 Ring Road No. 18 Sidalu

Patentee before: JIAXING STARPOWER MICROELECTRONICS Co.,Ltd.

CX01 Expiry of patent term
CX01 Expiry of patent term

Granted publication date: 20151202