CN204831167U - Measurement device for whole curved surface of thing is leveled in accurate measurement - Google Patents
Measurement device for whole curved surface of thing is leveled in accurate measurement Download PDFInfo
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- CN204831167U CN204831167U CN201520293743.2U CN201520293743U CN204831167U CN 204831167 U CN204831167 U CN 204831167U CN 201520293743 U CN201520293743 U CN 201520293743U CN 204831167 U CN204831167 U CN 204831167U
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Abstract
一种精准测量平整物整体曲面的测量装置,它包括一带有水平仪的支柱,该支柱上横向连接有一带有导轨的主尺,所述的导轨上安装有可沿着主尺直线水平移动测量的电子千分表,且该电子千分表通过数据线相连有可自动输入测量数据的电脑;所述的导轨带有可准确控制测量点之间距离的副尺;所述的主尺通过轴承相接在支柱上并可以相对支柱进行旋转,所述的支柱底部存在用以调节水平的支架,顶端装有可确保电子千分表可以沿着主尺水平移动的水平仪;本实用新型的有益效果是:避免了高额的设备费用却可以达到0.001mm的精度的要求;并且测量方式操作简单,仪器携带方便。
A measuring device for accurately measuring the overall curved surface of a flat object, which includes a pillar with a level, and a main ruler with a guide rail is connected transversely to the pillar, and a measuring device that can move horizontally along the main ruler straight line is installed on the guide rail An electronic dial gauge, and the electronic dial gauge is connected with a computer that can automatically input measurement data through a data line; the guide rail has a sub-scale that can accurately control the distance between the measurement points; the main scale is connected through a bearing It is connected to the pillar and can be rotated relative to the pillar. There is a bracket for adjusting the level at the bottom of the pillar, and the top is equipped with a level that can ensure that the electronic dial gauge can move horizontally along the main ruler; the beneficial effect of the utility model is that : Avoid high equipment cost but can meet the requirement of 0.001mm accuracy; and the measurement method is easy to operate and the instrument is easy to carry.
Description
技术领域 technical field
本实用新型涉及的是一种精准测量平整物整体曲面的测量装置及测量方法,该测量方法精度范围为0.001mm—25mm,适用于精度要求较高而表面积范围较小(一般不大于0.25m2)的物体表面整体曲面的测量。 The utility model relates to a measuring device and a measuring method for accurately measuring the overall curved surface of a flat object. The measuring method has an accuracy range of 0.001mm-25mm, and is suitable for objects with high precision requirements and a small surface area range (generally not greater than 0.25m 2 ) . ) measurement of the overall surface of the object surface.
背景技术 Background technique
目前对物体表面的几何量测方式一般采用三坐标测量仪,它是指一种具有可作三个方向移动的探测器,可在三个相互垂直的导轨上移动,此探测器以接触或非接触等方式传送讯号,三个轴的位移测量系统经数据处理器计算出工件的各点坐标(X、Y、Z)及各项功能测量的仪器。三维可测的空间范围内,能够根据测头系统返回的点数据,通过三坐标的软件系统计算各类几何形状、尺寸等测量能力的仪器。三坐标测量仪具有机械结构刚性强、几何误差小、高精度和高稳定性的优点,但其的缺点为价格昂贵。 At present, the geometric measurement of the surface of the object generally adopts a three-coordinate measuring instrument, which refers to a detector that can move in three directions and can move on three mutually perpendicular guide rails. The detector uses contact or non-contact Signals are transmitted by means of contact, etc. The three-axis displacement measurement system calculates the coordinates (X, Y, Z) of each point of the workpiece through the data processor and the instrument for various functional measurements. Within the three-dimensional measurable space, it is an instrument that can calculate various geometric shapes, dimensions and other measurement capabilities through the three-coordinate software system according to the point data returned by the probe system. The three-coordinate measuring instrument has the advantages of strong mechanical structure rigidity, small geometric error, high precision and high stability, but its disadvantage is that it is expensive.
发明内容 Contents of the invention
本实用新型的目的在于克服现有技术存在的不足,而提供一种结构简单,使用操作方便,精度高,可靠性好的精准测量平整物整体曲面的测量装置及测量方法,它在避免了高额的设备成本的同时具备一定的精度及可操作性。 The purpose of the utility model is to overcome the deficiencies of the prior art, and provide a simple structure, easy to use and operate, high precision, good reliability and accurate measurement of the overall curved surface of the flat object and the measurement method, which avoids high It has a certain degree of accuracy and operability while reducing the equipment cost.
本实用新型所采用的技术方案是:一种精准测量平整物整体曲面的测量装置,它包括一带有水平仪的支柱,该支柱上横向连接有一带有导轨的主尺,所述的导轨上安装有可沿着主尺直线水平移动测量的电子千分表,且该电子千分表通过数据线相连有可自动输入测量数据的电脑。 The technical solution adopted by the utility model is: a measuring device for accurately measuring the overall curved surface of a flat object, which includes a pillar with a level gauge, and a main ruler with a guide rail is horizontally connected to the pillar, and the guide rail is equipped with The electronic dial gauge can be moved horizontally along the main ruler straight line, and the electronic dial gauge is connected with a computer that can automatically input measurement data through a data line.
所述的导轨带有可准确控制测量点之间距离的副尺;所述的主尺通过轴承相接在支柱上并可以相对支柱进行旋转,所述的支柱底部存在用以调节水平的支架,顶端装有可确保电子千分表可以沿着主尺水平移动的水平仪。 The guide rail has a sub-scale that can accurately control the distance between the measurement points; the main scale is connected to the pillar through a bearing and can rotate relative to the pillar, and there is a bracket at the bottom of the pillar for adjusting the level. A spirit level is installed on the top to ensure that the electronic dial indicator can move horizontally along the main scale.
所述支柱顶端水平仪为带有X、Y轴刻度的水平仪;所述的支柱上设置有整体高度可调整机构;所述的轴承可旋转并带有刻度,即可以带动主尺以支柱为轴进行固定角度的旋转,并为后续曲面模拟提供准确坐标; The level at the top of the pillar is a level with scales on the X and Y axes; the pillar is provided with an overall height adjustable mechanism; the bearing is rotatable and has a scale, which can drive the main ruler to take the pillar as the axis. Fixed-angle rotation, and provide accurate coordinates for subsequent surface simulation;
所述支柱底部的支架接触于测量物体表面并保持水平,且所述支架确定的平面以支柱横截面的圆心为基准点,使电子千分表的测头与圆心的连线平行于电子千分表移动方向。 The support at the bottom of the pillar is in contact with the surface of the measuring object and kept horizontal, and the plane defined by the support takes the center of the circle of the cross-section of the pillar as the reference point, so that the connection line between the measuring head of the electronic dial indicator and the center of the circle is parallel to the electronic dial indicator. Direction of watch movement.
与现有技术相比,本实用新型的有益效果是:避免了高额的设备费用却可以达到0.001mm的精度的要求;并且测量方式操作简单,仪器携带方便。 Compared with the prior art, the beneficial effect of the utility model is that: high equipment cost can be avoided but the precision requirement of 0.001 mm can be met; the measurement method is simple to operate, and the instrument is convenient to carry.
附图说明 Description of drawings
图1是本实用新型所述精准测量平整物整体曲面的测量装置示意图。 Fig. 1 is a schematic diagram of a measuring device for accurately measuring the overall curved surface of a flat object described in the present invention.
具体实施方式 Detailed ways
下面结合附图对本实用新型进一步说明。图1所示,本实用新型所述的一种精准测量平整物整体曲面的测量装置,它包括一带有水平仪的支柱2,该支柱2上横向连接有一带有导轨7的主尺9,所述的导轨7上安装有可沿着主尺直线水平移动测量的电子千分表6,且该电子千分表6通过数据线5相连有可自动输入测量数据的电脑8。 Below in conjunction with accompanying drawing, the utility model is further described. As shown in Fig. 1, a kind of measuring device for accurately measuring the overall curved surface of a flat object described in the utility model includes a pillar 2 with a level, and a main ruler 9 with a guide rail 7 is transversely connected to the pillar 2. An electronic dial indicator 6 that can move horizontally along the main scale straight line for measurement is installed on the guide rail 7, and the electronic dial indicator 6 is connected with a computer 8 that can automatically input measurement data through a data line 5.
图中所示,所述的导轨7带有可准确控制测量点之间距离的副尺;所述的主尺通过轴承3相接在支柱上并可以相对支柱进行旋转,所述的支柱底部存在用以调节水平的支架4,顶端装有可确保电子千分表可以沿着主尺水平移动的水平仪。 As shown in the figure, the guide rail 7 has a sub-scale that can accurately control the distance between the measuring points; the main scale is connected to the pillar through the bearing 3 and can rotate relative to the pillar. The support 4 in order to adjust the level is equipped with a spirit level that can ensure that the electronic dial indicator can move horizontally along the main ruler.
本实用新型所述支柱顶端水平仪1为带有X、Y轴刻度的水平仪;所述的支柱2上设置有整体高度可调整机构;所述的轴承3可旋转并带有刻度,即可以带动主尺以支柱为轴进行固定角度的旋转,并为后续曲面模拟提供准确坐标; The level meter 1 at the top of the pillar described in the utility model is a level meter with scales on the X and Y axes; the pillar 2 is provided with an overall height adjustable mechanism; the bearing 3 is rotatable and has a scale, which can drive the main The ruler rotates at a fixed angle with the pillar as the axis, and provides accurate coordinates for subsequent surface simulation;
所述支柱底部的支架4接触于测量物体表面并保持水平,且所述支架确定的平面以支柱横截面的圆心为基准点,使电子千分表的测头与圆心的连线平行于电子千分表移动方向。 The bracket 4 at the bottom of the pillar is in contact with the surface of the measuring object and kept horizontal, and the plane defined by the bracket takes the center of the circle of the cross section of the pillar as a reference point, so that the connection line between the probe of the electronic dial gauge and the center of the circle is parallel to the electronic dial gauge. Direction of sub-table movement.
一种利用所述精准测量平整物整体曲面的测量装置进行测量方法,所述的测量方法包括如下步骤: A measuring method using the measuring device for accurately measuring the overall curved surface of a flat object, the measuring method comprising the following steps:
a)将所述支柱2放置于被测物体的表面,若选择扇形的形式进行测量,则将支柱2放置于被测物体的一个角; a) Place the pillar 2 on the surface of the object to be measured. If fan-shaped measurement is selected, place the pillar 2 on a corner of the object to be measured;
b)结合支柱顶端的水平仪1对支架4进行调整,使得整体水平; b) Adjust the support 4 in combination with the spirit level 1 at the top of the pillar to make the whole level;
c)确定数据记录的形式及测量点的间距,以自动记录为例,将电子千分表6连接电脑8后,打开软件,进行测量并且将量测所得的参考数值进行手动或由计算机直接透过量测的千分表直接抓取数值; c) Determine the form of data recording and the distance between measurement points. Taking automatic recording as an example, after connecting the electronic dial indicator 6 to the computer 8, open the software, perform measurement, and manually or directly see through the computer for the reference value obtained from the measurement. The over-measured dial indicator directly grabs the value;
d)电子千分表以主尺9为轴,从左到右,结合副尺7移动准确距离后进行测量;将主尺通过轴承3进行旋转一定角度,重复之前的测量步骤即可,最终将所测得的数据透过可以呈现三维图形的套装软件或自行开发的软件即可呈现出被测物体的曲面状况。 d) The electronic dial indicator takes the main scale 9 as the axis, and measures from left to right, combined with the auxiliary scale 7 to move the accurate distance; rotate the main scale through the bearing 3 to a certain angle, repeat the previous measurement steps, and finally The measured data can present the surface condition of the measured object through packaged software that can present three-dimensional graphics or self-developed software.
以上结合附图对本实用新型的具体实施方式作了说明,但这些说明不能被理解为限制了本实用新型的范围,本实用新型的保护范围由随附的权利要求书限定,任何在本实用新型去权利要求基础上的改动都是本实用新型的保护范围。 The specific implementation of the utility model has been described above in conjunction with the accompanying drawings, but these descriptions cannot be interpreted as limiting the scope of the utility model, and the protection scope of the utility model is defined by the appended claims. Changes based on the claims are all within the protection scope of the present utility model.
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| CN201520293743.2U CN204831167U (en) | 2015-05-08 | 2015-05-08 | Measurement device for whole curved surface of thing is leveled in accurate measurement |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105091738A (en) * | 2015-05-08 | 2015-11-25 | 嘉兴斯达微电子有限公司 | Measuring device and measuring method for accurately measuring the whole curved surface of a flattening object |
| CN109759953A (en) * | 2018-12-26 | 2019-05-17 | 中国科学院长春光学精密机械与物理研究所 | Contour detection device and detection method of large-aperture plane mirror |
| CN113483637A (en) * | 2021-08-06 | 2021-10-08 | 上海菲利华石创科技有限公司 | Temporary rapid detection device and method for thick quartz plate groove for semiconductor |
-
2015
- 2015-05-08 CN CN201520293743.2U patent/CN204831167U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105091738A (en) * | 2015-05-08 | 2015-11-25 | 嘉兴斯达微电子有限公司 | Measuring device and measuring method for accurately measuring the whole curved surface of a flattening object |
| CN109759953A (en) * | 2018-12-26 | 2019-05-17 | 中国科学院长春光学精密机械与物理研究所 | Contour detection device and detection method of large-aperture plane mirror |
| CN113483637A (en) * | 2021-08-06 | 2021-10-08 | 上海菲利华石创科技有限公司 | Temporary rapid detection device and method for thick quartz plate groove for semiconductor |
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Effective date of registration: 20171220 Address after: Jiaxing City, Zhejiang province 314006 Nanhu District Branch Road No. 988 Patentee after: STARPOWER SEMICONDUCTOR Ltd. Address before: Jiaxing City, Zhejiang province 314006 Ring Road No. 18 Sidalu Patentee before: JIAXING STARPOWER MICROELECTRONICS Co.,Ltd. |
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| CX01 | Expiry of patent term | ||
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Granted publication date: 20151202 |