CN204831167U - Measurement device for whole curved surface of thing is leveled in accurate measurement - Google Patents

Measurement device for whole curved surface of thing is leveled in accurate measurement Download PDF

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Publication number
CN204831167U
CN204831167U CN201520293743.2U CN201520293743U CN204831167U CN 204831167 U CN204831167 U CN 204831167U CN 201520293743 U CN201520293743 U CN 201520293743U CN 204831167 U CN204831167 U CN 204831167U
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China
Prior art keywords
pillar
main scale
curved surface
guide rail
measurement
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CN201520293743.2U
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Chinese (zh)
Inventor
戴志展
姚钧
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STARPOWER SEMICONDUCTOR LTD.
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JIAXING STARPOWER MICROELECTRONICS CO Ltd
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Abstract

The utility model provides a measurement device for whole curved surface of thing is leveled in accurate measurement, it includes a pillar of taking competent appearance, transverse connection has a main scale that has the guide rail on this pillar of, the guide rail on install can be along main scale straight line horizontal migration measuring electronics amesdial, and this electronics amesdial links to each other through the data line and has the computer that can import measured data voluntarily, the guide rail have can accurate control survey between the point vice chi of distance, the main scale meet on the pillar through the bearing and relatively the pillar rotate, pillar bottom exist and be used for adjusting the horizontally support, the top is equipped with and is ensured that the electron amesdial can be along main scale horizontal migration's spirit level, the beneficial effects of the utility model are that: the equipment cost who has avoided the great number but can reach the requirement of 0.001mm's precision, and measurement mode easy operation, instrument convenient to carry.

Description

A kind of measurement mechanism accurately measuring the overall curved surface of smooth thing
Technical field
The utility model relates to a kind of measurement mechanism and the measuring method that accurately measure the overall curved surface of smooth thing, this measuring method accuracy rating is 0.001mm-25mm, is applicable to that accuracy requirement is higher and surface area is less (is generally not more than 0.25m 2) the measurement of the overall curved surface of body surface.
Background technology
At present mode is measured to the geometry of body surface and generally adopt three-coordinates measuring machine, it refers to a kind ofly have the detector can doing three direction movements, can move on three orthogonal guide rails, this detector transmits signal in modes such as contact or noncontacts, and the displacement measurement system of three axles calculates each point coordinate (X, Y, Z) of workpiece and the instrument of various functions measurement through data processor.In the three-dimensional spatial dimension that can survey, the point data that can return according to gauge head system, calculates the instrument of the measurement capabilities such as all kinds of geometric configuration, size by the software systems of three-dimensional.Three-coordinates measuring machine has that physical construction rigidity is strong, geometric error is little, the advantage of high precision and high stability, but its shortcoming is expensive.
Summary of the invention
The purpose of this utility model is the deficiency overcoming prior art existence, and provide a kind of structure simple, use easy to operate, precision is high, the measurement mechanism accurately measuring the overall curved surface of smooth thing of good reliability and measuring method, it possesses certain precision and operability while avoiding the equipment cost of great number.
The technical scheme that the utility model adopts is: a kind of measurement mechanism accurately measuring the overall curved surface of smooth thing, it comprises one with the pillar of level meter, this pillar is horizontally connected with one with the main scale of guide rail, described guide rail is provided with can along the electronic dial gauge of main scale straight horizontal traverse measurement, and this electronic dial gauge be connected with by data line can the computer of input measurement data automatically.
Described guide rail is with can the secondary chi of the accurate spacing of control survey point; Described main scale is connected on mutually on pillar by bearing and also can rotates by opposite legs, and described posts bottom exists the support in order to regulate level, and the level meter can guaranteeing that electronic dial gauge can move horizontally along main scale is equipped with on top.
Described pillar top level meter is the level meter with X, Y-axis scale; Described pillar is provided with whole height adjusting mechanism; Described bearing is rotatable and with scale, main scale namely can be driven to take pillar as the rotation that axle is fixed angle, and provides accurate coordinate for follow-up curve modeling;
The support of described posts bottom is contacted with to be measured body surface and keeps level, and the plane determined of described support with the center of circle of pillar xsect for reference point, make the gauge head of electronic dial gauge and the line in the center of circle be parallel to electronic dial gauge moving direction.
Compared with prior art, the beneficial effects of the utility model are: the cost of equipment avoiding great number but can reach the requirement of the precision of 0.001mm; And metering system is simple to operate, instrument is easy to carry.
Accompanying drawing explanation
Fig. 1 is the measurement mechanism schematic diagram accurately measuring the overall curved surface of smooth thing described in the utility model.
Embodiment
Below in conjunction with accompanying drawing, the utility model is further illustrated.Shown in Fig. 1, a kind of measurement mechanism accurately measuring the overall curved surface of smooth thing described in the utility model, it comprises one with the pillar 2 of level meter, this pillar 2 is horizontally connected with one with the main scale 9 of guide rail 7, described guide rail 7 is provided with can along the electronic dial gauge 6 of main scale straight horizontal traverse measurement, and this electronic dial gauge 6 be connected with by data line 5 can the computer 8 of input measurement data automatically.
Shown in figure, described guide rail 7 is with can the secondary chi of the accurate spacing of control survey point; Described main scale is connected on mutually on pillar by bearing 3 and also can rotates by opposite legs, and described posts bottom exists the support 4 in order to regulate level, and the level meter can guaranteeing that electronic dial gauge can move horizontally along main scale is equipped with on top.
Pillar top described in the utility model level meter 1 is the level meter with X, Y-axis scale; Described pillar 2 is provided with whole height adjusting mechanism; Described bearing 3 is rotatable and with scale, main scale namely can be driven to take pillar as the rotation that axle is fixed angle, and provides accurate coordinate for follow-up curve modeling;
The support 4 of described posts bottom is contacted with to be measured body surface and keeps level, and the plane determined of described support with the center of circle of pillar xsect for reference point, make the gauge head of electronic dial gauge and the line in the center of circle be parallel to electronic dial gauge moving direction.
The measurement mechanism accurately measuring the overall curved surface of smooth thing described in utilizing carries out a measuring method, and described measuring method comprises the steps:
A) described pillar 2 is positioned over the surface of testee, if select fan-shaped form to measure, then pillar 2 is positioned over an angle of testee;
B) the level meter 1 pair of support 4 in conjunction with pillar top adjusts, and makes integral level;
C) form of data record and the spacing of measurement point is determined, to be automatically recorded as example, after electronic dial gauge 6 is connected computer 8, open software, carry out measuring and the referential data measuring gained carried out manually or by computing machine directly directly capture numerical value through the clock gauge measured;
D) electronic dial gauge is with main scale 9 for axle, from left to right, measures after moving accurate distance in conjunction with secondary chi 7; Rotated to an angle by bearing 3 by main scale, the measuring process before repetition, data the most measured can present the curved surface situation of testee through the package software or independently developed software that can present three-dimensional picture.
Below by reference to the accompanying drawings embodiment of the present utility model is described; but these explanations can not be understood to limit scope of the present utility model; protection domain of the present utility model is limited by the claims of enclosing, and anyly goes the change on claim basis to be all protection domain of the present utility model at the utility model.

Claims (4)

1. one kind accurately measures the measurement mechanism of the overall curved surface of smooth thing, it comprises one with the pillar of level meter, this pillar is horizontally connected with one with the main scale of guide rail, it is characterized in that described guide rail is provided with can along the electronic dial gauge of main scale straight horizontal traverse measurement, and this electronic dial gauge (6) be connected with by data line (5) can the computer (8) of input measurement data automatically.
2. the measurement mechanism accurately measuring the overall curved surface of smooth thing according to claim 1, is characterized in that described guide rail (7) is with can the secondary chi of the accurate spacing of control survey point; Described main scale is connected on mutually on pillar by bearing (3) and also can rotates by opposite legs, and described posts bottom exists the support (4) in order to regulate level, and the level meter can guaranteeing that electronic dial gauge can move horizontally along main scale is equipped with on top.
3. the measurement mechanism accurately measuring the overall curved surface of smooth thing according to claim 2, is characterized in that described pillar top level meter (1) is the level meter with X, Y-axis scale; Described pillar (2) is provided with whole height adjusting mechanism; Described bearing (3) is rotatable and with scale, main scale namely can be driven to take pillar as the rotation that axle is fixed angle, and provides accurate coordinate for follow-up curve modeling.
4. the measurement mechanism accurately measuring the overall curved surface of smooth thing according to Claims 2 or 3, it is characterized in that the support (4) of described posts bottom is contacted with measure body surface and keep level, and the plane determined of described support with the center of circle of pillar xsect for reference point, make the gauge head of electronic dial gauge and the line in the center of circle be parallel to electronic dial gauge moving direction.
CN201520293743.2U 2015-05-08 2015-05-08 Measurement device for whole curved surface of thing is leveled in accurate measurement Active CN204831167U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201520293743.2U CN204831167U (en) 2015-05-08 2015-05-08 Measurement device for whole curved surface of thing is leveled in accurate measurement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201520293743.2U CN204831167U (en) 2015-05-08 2015-05-08 Measurement device for whole curved surface of thing is leveled in accurate measurement

Publications (1)

Publication Number Publication Date
CN204831167U true CN204831167U (en) 2015-12-02

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105091738A (en) * 2015-05-08 2015-11-25 嘉兴斯达微电子有限公司 Measuring device and measuring method for accurately measuring the whole curved surface of a flattening object
CN109759953A (en) * 2018-12-26 2019-05-17 中国科学院长春光学精密机械与物理研究所 The contour detecting device and its detection method of large plane
CN113483637A (en) * 2021-08-06 2021-10-08 上海菲利华石创科技有限公司 Temporary rapid detection device and method for thick quartz plate groove for semiconductor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105091738A (en) * 2015-05-08 2015-11-25 嘉兴斯达微电子有限公司 Measuring device and measuring method for accurately measuring the whole curved surface of a flattening object
CN109759953A (en) * 2018-12-26 2019-05-17 中国科学院长春光学精密机械与物理研究所 The contour detecting device and its detection method of large plane
CN113483637A (en) * 2021-08-06 2021-10-08 上海菲利华石创科技有限公司 Temporary rapid detection device and method for thick quartz plate groove for semiconductor

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right

Effective date of registration: 20171220

Address after: Jiaxing City, Zhejiang province 314006 Nanhu District Branch Road No. 988

Patentee after: STARPOWER SEMICONDUCTOR LTD.

Address before: Jiaxing City, Zhejiang province 314006 Ring Road No. 18 Sidalu

Patentee before: Jiaxing Starpower Microelectronics Co., Ltd.

TR01 Transfer of patent right