CN204828962U - Manufacturing equipment and manufacturing equipment pipeline threading device thereof - Google Patents
Manufacturing equipment and manufacturing equipment pipeline threading device thereof Download PDFInfo
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- CN204828962U CN204828962U CN201520531077.1U CN201520531077U CN204828962U CN 204828962 U CN204828962 U CN 204828962U CN 201520531077 U CN201520531077 U CN 201520531077U CN 204828962 U CN204828962 U CN 204828962U
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Abstract
The utility model discloses a manufacturing equipment pipeline threading device, include: threading sleeve pipe, threading sleeve pipe include big external diameter portion and little external diameter portion, and big external diameter portion is used for the joint at the mounting hole of the equipment cabinet body, is provided with first screw on the outside circumference face of little external diameter portion, the axially extending bore who sets up is located to the process line cover on the threading sleeve pipe in, and process line and axially extending bore directly upwards the clearance laminate, a second screw thread that is used for the locking ring with little external diameter portion locking positioning, be provided with on the inner wall of locking ring with a screw -thread fit to realize the locking ring and stretch into closely cooperating in order to press from both sides the tight equipment cabinet body in the little external diameter portion of mounting hole. Above -mentioned device realized with being connected of the fixed of the equipment cabinet body and device and process line, the installation is simple reliable, and easily standardized, reduction installation cost. The utility model also provides an including the manufacturing equipment of above -mentioned manufacturing equipment pipeline threading device, this manufacturing equipment connection performance is good.
Description
Technical field
The utility model relates to semi-conductor device technology field, particularly a kind of manufacturing equipment pipeline threading device.In addition, the utility model also relates to a kind of manufacturing equipment comprising above-mentioned manufacturing equipment pipeline threading device.
Background technique
In semiconductor microelectronic industry, can use the processing mediums such as a large amount of special gas in art production process, this just has the cabinet of great deal of small-diameter road through manufacturing equipment.
During normal operation, due to toxic and harmful reaction can be passed in the active chamber of manufacturing equipment, in order to ensure the safety of environment and personnel, need in manufacturing equipment cabinet to keep negative pressure state.In order to allow the inside and outside environment of cabinet after pipeline threading keep apart, just needing a kind of well pipeline threading Sealing and realizing.
At present, for the design of manufacturing equipment cabinet pipeline threading, main employing is directly opened hole and is allowed pipe perforation and mistake on cabinet, then, places rubber seal at hole place, fills up the sealing gap between cabinet and pipeline by rubber seal.But this method pipeline is fixing unstable, easily produces and rock; Due to above-mentioned shaking phenomenon cause pipeline and cabinet joint sealing poor, easily cause leakage; And size is mismatched between pipeline and cabinet threading, because the size of pipeline has diversity, for ensureing coordinating of pipeline and cabinet, need to reprocess cabinet; In addition, the fireproof performance of quality of rubber materials is poor, and hermetic unit unsightly.
Therefore, how ensureing the connective stability of cabinet and pipeline, is the current technical issues that need to address of those skilled in the art.
Model utility content
In view of this, the purpose of this utility model is to provide a kind of manufacturing equipment pipeline threading device, and this manufacturing equipment pipeline threading device can ensure that process pipe and the reliable of equipment cabinet are fixed, and contributes to batch installation.Another object of the present utility model is to provide a kind of manufacturing equipment comprising above-mentioned manufacturing equipment pipeline threading device, and this manufacturing equipment connectivity is good, and easy for installation.
For achieving the above object, the utility model provides following technological scheme:
A kind of manufacturing equipment pipeline threading device, comprising:
Threading sleeve pipe, described threading sleeve pipe comprises large outer diameter part and little outer diameter part, described large outer diameter part is for being connected to the mounting hole of equipment cabinet, the external circumferential face of described little outer diameter part is provided with the first screw thread, process pipe is sheathed in the axial hole that described threading sleeve pipe is arranged, and described process pipe and described axial hole are fitted in gap diametrically;
For the locking ring with described little outer diameter part locking and positioning, the inwall of described locking ring is provided with the second screw thread with described first screw-thread fit, closely cooperates to clamp described equipment cabinet with the little outer diameter part being inserted into described mounting hole to realize described locking ring.
Preferably, the port of described axial hole is provided with seal arrangement, for the sealing gap between described process pipe and described threading sleeve pipe.
Preferably, the junction surface of described large outer diameter part and described little outer diameter part is provided with seal arrangement, for the sealing gap between described threading sleeve pipe and described equipment cabinet.
Preferably, described seal arrangement is silicone-rubber seals.
Preferably, the end of described large outer diameter part is provided with hexagonal blind hole, or the outer wall of described large outer diameter part is provided with clamp face.
Preferably, described threading sleeve pipe is stainless steel sleeve pipe, and described locking ring is stainless steel locking ring.
Preferably, described threading sleeve pipe is SS304 sleeve pipe, and described locking ring is SS304 locking ring.
Preferably, the axial length of described large outer diameter part is 5mm, and the axial length of described little outer diameter part is 9mm, and the axial length of described locking ring is 5mm.
A kind of manufacturing equipment, comprise manufacturing equipment pipeline threading device, described manufacturing equipment pipeline threading device is the manufacturing equipment pipeline threading device as described in above-mentioned any one.
A kind of manufacturing equipment pipeline threading device that the utility model provides, fixing for process pipe and equipment cabinet, mainly comprise threading sleeve pipe and locking ring, threading sleeve pipe comprises large outer diameter part and little outer diameter part, the external circumferential face of little outer diameter part being provided with the first screw thread, threading sleeve pipe being provided with the axial hole for being socketed with process pipe; The inwall of locking ring is provided with the second screw thread with the first screw-thread fit, to realize locking ring and large outer diameter part in the axial direction to the clamping of equipment cabinet.In pipeline threading device provided by the utility model, threading sleeve pipe is provided with for carrying out with process pipe the axial hole that is socketed, threading sleeve pipe is by large outer diameter part and the clamping of equipment cabinet, and locked at the opposite side of equipment cabinet and minor diameter part by locking ring, achieve the connection of fixing and device and the process pipe of device and equipment cabinet.Said apparatus is installed simple, fixing reliable, and is easy to standardization, can reduce the installation cost of process pipe.The utility model additionally provides a kind of manufacturing equipment comprising above-mentioned manufacturing equipment pipeline threading device, and this manufacturing equipment connectivity is good, and easy for installation.
Accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technological scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only embodiment of the present utility model, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to the accompanying drawing provided.
Fig. 1 provides by the utility model a kind of structural drawing of manufacturing equipment pipeline threading device specific embodiment;
Fig. 2 provides by the utility model the top view of threading sleeve pipe in specific embodiment;
Fig. 3 provides by the utility model the front view of threading sleeve pipe in specific embodiment;
Fig. 4 provides by the utility model the top view of locking ring in specific embodiment.
Wherein, 1 is threading sleeve pipe, and 2 is locking ring, and 3 is process pipe, and 4 is equipment cabinet.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, be clearly and completely described the technological scheme in the utility model embodiment, obviously, described embodiment is only the utility model part embodiment, instead of whole embodiments.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtained under creative work prerequisite, all belong to the scope of the utility model protection.
Core of the present utility model is to provide a kind of manufacturing equipment pipeline threading device, and this manufacturing equipment pipeline threading device can ensure that process pipe and the reliable of equipment cabinet are fixed, and contributes to batch installation.Another core of the present utility model is to provide a kind of manufacturing equipment comprising above-mentioned pipeline threading device, and this manufacturing equipment connectivity is good, and easy for installation.
Please refer to Fig. 1 to Fig. 4, Fig. 1 provides by the utility model a kind of structural drawing of pipeline threading device specific embodiment; Fig. 2 provides by the utility model the top view of threading sleeve pipe in specific embodiment; Fig. 3 provides by the utility model the front view of threading sleeve pipe in specific embodiment; Fig. 4 provides by the utility model the top view of locking ring in specific embodiment.
A kind of pipeline threading device that the application provides, is mainly used in the fixing of process pipe 3 and equipment cabinet 4, structurally mainly comprises threading sleeve pipe 1, locking ring 2 and process pipe 3.
Threading sleeve pipe 1 is common pipe fitting, this pipe fitting there is stair-stepping external diameter, comprise large outer diameter part and little outer diameter part, large outer diameter part is for being connected to the mounting hole of equipment cabinet 4, the external circumferential face of little outer diameter part is provided with the first screw thread, threading sleeve pipe 1 is provided with the axial hole be socketed with process pipe 3, process pipe 3 is sheathed in the axial hole that threading sleeve pipe 1 is arranged, and process pipe 3 is fitted with gap in axial hole radial direction;
Locking ring 2 is mainly used in and little outer diameter part locking and positioning, and the inwall of locking ring 2 is provided with the second screw thread with the first screw-thread fit, closely cooperates with apparatus for fastening cabinet 4 with the little outer diameter part being inserted into mounting hole for realizing locking ring 2.
The manufacturing equipment pipeline threading device installation process that the present embodiment provides is: first, and the little outer diameter part of threading sleeve pipe 1 in the hole of the equipment cabinet 4 installed, is carried out clamping with the junction surface of large outer diameter part and little outer diameter part and equipment cabinet 4 through needing; Then, locking ring 2 is installed from the another side of equipment cabinet 4 and little outer diameter part, carry out coordinating being fixedly connected with the second screw thread be arranged on locking ring 2 by the first screw thread be arranged on little outer diameter part, realize the fixing of threading sleeve pipe 1 and locking ring 2, and both realizing, equipment cabinet 4 is clamped in centre, thus achieve its fixing with equipment cabinet 4.Now, by being penetrated in the axial hole of threading sleeve pipe 1 by process pipe 3, realize the fixing of process pipe 3 and equipment cabinet 4.Said apparatus is installed simple, fixing reliable, and is easy to standardization.
On the basis of above-described embodiment; the carrying out sealing of pipeline threading device is arranged; seal arrangement is set by the port at axial hole, can realizes the sealing gap between process pipe 3 and threading sleeve pipe 1, realize the sealing of equipment cabinet 4 both sides cavity and the protection of medium.
On the basis of above-mentioned two embodiments, can improve the sealing of threading sleeve pipe 1 and equipment cabinet 4 further, the junction surface of large outer diameter part and little outer diameter part arranges seal arrangement, for the sealing gap between threading sleeve pipe 1 and equipment cabinet 4.
Preferably, above-mentioned seal arrangement can be sealing gasket or sealer, and wherein sealing gasket can be silicone-rubber seals, and sealer can be silica gel.Can know, except above-mentioned seal arrangement, other also can as mode of execution of the present utility model for the device sealed.
Preferably, the diameter of axial hole is 1/4th of large outer diameter part outer diameter.Because threading sleeve pipe 1 is structural member, so in order to ensure the join strength with locking ring 2, the tube wall with the threading sleeve pipe 1 of axial hole should have certain thickness, can not be excessively thin, so the diameter of axial hole to be set to 1/4th of the outer diameter of large outer diameter part, structural strength can be ensured.
Preferably, the end of large outer diameter part is provided with hexagonal blind hole, or the outer wall of large outer diameter part is provided with clamp face.The installation and removal of the locking ring 2 of threading sleeve pipe 1 can be facilitated.
Preferably, threading sleeve pipe 1 is stainless steel sleeve pipe, and locking ring 2 is stainless steel locking ring.
The material of said apparatus can more specifically be set to: threading sleeve pipe 1 is SS304 sleeve pipe, and locking ring 2 is SS304 locking ring.
Adopt the threading sleeve pipe 1 of above-mentioned material and locking ring 2 can ensure the join strength of the two.
Above-mentioned any embodiment provide the concrete size of manufacturing equipment pipeline threading device all can adjust according to usage requirement, only introduce a kind of concrete size with an example below to arrange, the axial length of large outer diameter part is 5mm, the axial length of little outer diameter part is 9mm, and the axial length of locking ring 2 is 5mm.The screw thread of threading sleeve pipe 1 can be the screw thread of M24, and the screw thread of locking ring 2 is M24 tapped hole.The diameter of the hexagonal blind hole of the large outer diameter part of threading sleeve pipe 1 is 8mm, and the profile of large outer diameter part is hexagon, and the length on every bar limit is 18mm
In addition, need it is to be noted that the little outer diameter part of threading sleeve pipe 1 should arrange longer as far as possible, to ensure the thickness of adaptation equipment cabinet 4, i.e. the thickness of cabinet steel plate, makes locking ring 2 can be fixed on little outer diameter part.
In this specification, each embodiment adopts the mode of going forward one by one to describe, and what each embodiment stressed is the difference with other embodiments, between each embodiment identical similar portion mutually see.
Except each major component of the manufacturing equipment pipeline threading device that above-described embodiment provides, the utility model additionally provides a kind of manufacturing equipment comprising above-mentioned manufacturing equipment pipeline threading device, the structure of other each several parts that this manufacturing equipment relates to please refer to prior art, repeats no more herein.
Above a kind of manufacturing equipment provided by the utility model and manufacturing equipment pipeline threading device thereof are described in detail.Apply specific case herein to set forth principle of the present utility model and mode of execution, the explanation of above embodiment just understands method of the present utility model and core concept thereof for helping.Should be understood that; for those skilled in the art; under the prerequisite not departing from the utility model principle, can also carry out some improvement and modification to the utility model, these improve and modify and also fall in the protection domain of the utility model claim.
Claims (9)
1. a manufacturing equipment pipeline threading device, is characterized in that, comprising:
Threading sleeve pipe (1), described threading sleeve pipe (1) comprises large outer diameter part and little outer diameter part, described large outer diameter part is for being connected to the mounting hole of equipment cabinet (4), the external circumferential face of described little outer diameter part is provided with the first screw thread, process pipe (3) is sheathed in the upper axial hole arranged of described threading sleeve pipe (1), and described process pipe (3) and described axial hole are fitted in gap diametrically;
For the locking ring (2) with described little outer diameter part locking and positioning, the inwall of described locking ring (2) is provided with the second screw thread with described first screw-thread fit, closely cooperates to clamp described equipment cabinet (4) with the little outer diameter part being inserted into described mounting hole to realize described locking ring (2).
2. manufacturing equipment pipeline threading device according to claim 1, it is characterized in that, the port of described axial hole is provided with seal arrangement, for the sealing gap between described process pipe (3) and described threading sleeve pipe (1).
3. manufacturing equipment pipeline threading device according to claim 2, it is characterized in that, the junction surface of described large outer diameter part and described little outer diameter part is provided with seal arrangement, for the sealing gap between described threading sleeve pipe (1) and described equipment cabinet (4).
4. manufacturing equipment pipeline threading device according to claim 3, it is characterized in that, described seal arrangement is silicone-rubber seals.
5. manufacturing equipment pipeline threading device according to claim 4, it is characterized in that, the end of described large outer diameter part is provided with hexagonal blind hole, or the outer wall of described large outer diameter part is provided with clamp face.
6. manufacturing equipment pipeline threading device according to claim 5, is characterized in that, described threading sleeve pipe (1) is stainless steel sleeve pipe, and described locking ring (2) is stainless steel locking ring.
7. manufacturing equipment pipeline threading device according to claim 6, is characterized in that, described threading sleeve pipe (1) is SS304 sleeve pipe, and described locking ring (2) is SS304 locking ring.
8. manufacturing equipment pipeline threading device according to claim 7, is characterized in that, the axial length of described large outer diameter part is 5mm, and the axial length of described little outer diameter part is 9mm, and the axial length of described locking ring (2) is 5mm.
9. a manufacturing equipment, comprises manufacturing equipment pipeline threading device, it is characterized in that, described manufacturing equipment pipeline threading device is the manufacturing equipment pipeline threading device as described in claim 1 to 8 any one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520531077.1U CN204828962U (en) | 2015-07-21 | 2015-07-21 | Manufacturing equipment and manufacturing equipment pipeline threading device thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520531077.1U CN204828962U (en) | 2015-07-21 | 2015-07-21 | Manufacturing equipment and manufacturing equipment pipeline threading device thereof |
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| Publication Number | Publication Date |
|---|---|
| CN204828962U true CN204828962U (en) | 2015-12-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201520531077.1U Active CN204828962U (en) | 2015-07-21 | 2015-07-21 | Manufacturing equipment and manufacturing equipment pipeline threading device thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107654767A (en) * | 2017-10-30 | 2018-02-02 | 南京磁谷科技有限公司 | A kind of axially and radially adjustable air inlet pipeline connecting structure that may pass through door-plate |
-
2015
- 2015-07-21 CN CN201520531077.1U patent/CN204828962U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107654767A (en) * | 2017-10-30 | 2018-02-02 | 南京磁谷科技有限公司 | A kind of axially and radially adjustable air inlet pipeline connecting structure that may pass through door-plate |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP02 | Change in the address of a patent holder | ||
| CP02 | Change in the address of a patent holder |
Address after: No. 170 purple sea road, Minhang District, Shanghai Patentee after: Shanghai PNC Process Systems Co., Ltd. Address before: 200241 03A 1, Ting 1 building, 555 Dongchuan Road, Minhang District, Shanghai. Patentee before: Shanghai PNC Process Systems Co., Ltd. |