CN204809201U - Lifter pin and supporting component - Google Patents
Lifter pin and supporting component Download PDFInfo
- Publication number
- CN204809201U CN204809201U CN201520377413.1U CN201520377413U CN204809201U CN 204809201 U CN204809201 U CN 204809201U CN 201520377413 U CN201520377413 U CN 201520377413U CN 204809201 U CN204809201 U CN 204809201U
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- China
- Prior art keywords
- cylinder
- lifter pin
- stainless steel
- steel column
- bottom electrode
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- 239000000919 ceramic Substances 0.000 claims abstract description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 46
- 239000010935 stainless steel Substances 0.000 claims description 46
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 17
- 238000010276 construction Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 9
- 229910010293 ceramic material Inorganic materials 0.000 claims description 6
- 238000005498 polishing Methods 0.000 claims description 4
- 229910000831 Steel Inorganic materials 0.000 abstract 1
- 239000010959 steel Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 21
- 238000000034 method Methods 0.000 description 7
- 239000011261 inert gas Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 210000002381 plasma Anatomy 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
Landscapes
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
The utility model provides a lifter pin, includes: thread, first cylinder and second cylinder, the one end and the thread fixed connection of first cylinder, the other end and the second cylinder of first cylinder adopt the detachable mode to be connected. Adopt the detachable mode to be connected between first cylinder through the lifter pin and the nonrust steel column heart of second cylinder, the effectual intensity that strengthens the second cylinder for the lifter pin is difficult breaks, prolongs the life of lifter pin, and the proportion of goods damageds reduce, and, if the second cylinder of lifter pin takes place the rupture, can only change the second cylinder of lifter pin, and the whole lifter pin that does not need to be changed for it is easily capable to change easy operation, and can reduce the use cost of lifter pin, use ceramics second cylinder, further lengthen the life of lifter pin, reduce the proportion of goods damageds.
Description
Technical field
The utility model relates to mechanical manufacturing field, particularly relates to a kind of lifter pin and supporting component.
Background technology
In the substrate course of processing, substrate is clamped (clamp) usually to bottom electrode (Lowerelectrode) (as electrostatic chuck).By direct current (DC) current potential is applied to bottom electrode to produce electrostatic charge between substrate and bottom electrode, thus clamping can be performed.In order to distribute the heat produced in the substrate course of processing, by pipeline in bottom electrode, inert gas (as helium) can be administered to the back side of substrate, to improve the heat transfer efficiency between substrate and bottom electrode.Due to the helium pressure on substrate, need relatively high electrostatic charge substrate clamping to bottom electrode.
Once complete the process to substrate in process chamber, release procedure carries out when clamp voltage is closed, even if clamp voltage is set to zero, due to the electrostatic charge between substrate and bottom electrode, still remaining electrostatic strength is had, in order to make the electrostatic charge between substrate and bottom electrode discharge, the attraction that low density plasmas comes between balancing substrate and bottom electrode can be produced.Once electrostatic charge is removed, the lifter pin (lifterpin) being positioned at bottom electrode is enhanced, and with upwards elevates substrate, substrate and lower electrode surface is separated, thus mechanical arm can be shifted out substrate from plasma processing chamber.
Wherein, one end of lifter pin arranges to be positioned at bottom electrode, and when substrate is clamped on bottom electrode, the one side that the not outstanding bottom electrode of lifter pin is adjacent with substrate, the other end of lifter pin is fixed on pedestal, and after electrostatic charge is removed, pedestal driven device drives and moves upward, drive lifter pin up to move, the hole that lifter pin is arranged through bottom electrode moves upward simultaneously.
At present, lifter pin is by polyimides (Polyimide, PI) make in conjunction with stainless steel material, refer to Fig. 1, Fig. 1 is the structural representation of lifter pin in prior art, and lifter pin comprises: thread 101, stainless steel cylinder 102 and PI cylinder 103, wherein, stainless steel cylinder 102 is arranged on one end of thread 101, and stainless steel cylinder 102 is connected with PI cylinder 103.In use, the thread 101 of lifter pin is fixed on pedestal, and PI cylinder 103 is positioned at bottom electrode, and PI cylinder 103, for supporting substrate, plays the effect of insulation simultaneously.
But, in prior art, the PI cylinder of lifter pin easily because of rise and in decline process with the hole wall friction of bottom electrode and attenuating, the PI cylinder of adding PI material is easily etched by inert gas, lifter pin is easily fractureed, and after lifter pin fractures, needs take off lifter pin from pedestal and new lifter pin is installed, replacement operation is cumbersome, and the cost changing whole lifter pin is also higher.
Utility model content
In view of this, the utility model provides a kind of lifter pin and supporting component, for solving in prior art the complicated operation of changing lifter pin and the higher problem of cost.
The lifter pin that the utility model embodiment provides, comprising:
Thread, the first cylinder and the second cylinder, one end of described first cylinder is fixedly connected with described thread, and the other end of described first cylinder adopts dismountable mode to be connected with described second cylinder.
Preferably, described first cylinder comprises: stainless steel cylinder and the stainless steel column heart, and described stainless steel cylinder is fixedly connected with the described stainless steel column heart; Described second cylinder has hollow-core construction, and the described hollow-core construction of described second cylinder is mated with the surface texture of the described stainless steel column heart, makes the described stainless steel column heart can be positioned at the described hollow-core construction of described second cylinder.
Preferably, described second cylinder described hollow-core construction in have screwed hole, the surface texture of the described stainless steel column heart is the helicitic texture mated with described screwed hole, and described second cylinder is connected by described screwed hole and described helicitic texture with described first cylinder.
Preferably, the external diameter of described stainless steel cylinder is greater than the external diameter of the described stainless steel column heart, and the external diameter of described second cylinder is identical with the external diameter of described stainless steel cylinder.
Preferably, the material of described second cylinder is ceramic material.
Preferably, the ceramic surface of described second cylinder is through polishing.
The embodiment of the present invention also provides a kind of supporting component, described supporting component comprises bottom electrode, pedestal and above-mentioned lifter pin, the described thread of described lifter pin is fixed in described pedestal, on described bottom electrode, the position of corresponding described lifter pin arranges through hole, and described second cylinder of described lifter pin is positioned at the described through hole of described bottom electrode.
Preferably, in described through hole, borehole jack is set.
As can be seen from the above technical solutions, the utility model embodiment has the following advantages:
Adopt dismountable mode to be connected between first cylinder of lifter pin and the stainless steel column heart of the second cylinder, the effective intensity strengthening the second cylinder, makes lifter pin not frangibility, extends the useful life of lifter pin, and the proportion of goods damageds reduce; Further, if the second cylinder of lifter pin fractures, only can change the second cylinder of lifter pin, and not need to change whole lifter pin, make replacement operation simple, and the use cost of lifter pin can be reduced; Meanwhile, use pottery to manufacture the second cylinder, extend the useful life of lifter pin further, reduce the wastage rate.
For above and other object of the present utility model, feature and advantage can be become apparent, preferred embodiment cited below particularly, and coordinate institute's accompanying drawings, be described in detail below.
Accompanying drawing explanation
Fig. 1 is the structural representation of lifter pin in prior art;
Fig. 2 is the cross-sectional view of the lifter pin in the utility model embodiment;
Fig. 3 is supporting component cross-sectional view in the utility model embodiment;
Fig. 4 is the vertical view of bottom electrode in the utility model embodiment.
Embodiment
For further setting forth the utility model for the technological means that realizes predetermined utility model object and take and effect, below in conjunction with accompanying drawing and preferred embodiment, to according to embodiment of the present utility model, structure, feature and effect thereof, be described in detail as follows.
Refer to Fig. 2, Fig. 2 is the cross-sectional view of the structure of lifter pin in the utility model embodiment, lifter pin.The lifter pin that the utility model embodiment provides comprises:
One end of thread 201, first cylinder 202 and the second cylinder 203, first cylinder 202 is fixedly connected with thread 201, and the other end of the first cylinder 202 adopts dismountable mode to be connected with the second cylinder 203;
Wherein, the first cylinder 202 comprises stainless steel cylinder 204 and the stainless steel column heart 205, and the stainless steel column heart 205 is fixedly connected with stainless steel cylinder 204.
Wherein, the second cylinder 203 is hollow cylinder, and the hollow-core construction of the second cylinder 203 is mated with the surface texture of the stainless steel column heart 205, makes the stainless steel column heart 205 can be positioned at the hollow-core construction of the second cylinder 203.
Wherein, the stainless steel column heart 205 and stainless steel cylinder 204 can be that the different stainless steel cylinder of two external diameters is fixedly connected with, and also can be overall stainless steel structure.
Wherein, the external diameter of stainless steel cylinder 204 is greater than the external diameter of the stainless steel column heart 205, and the external diameter of the second cylinder 203 is identical with the external diameter of stainless steel cylinder 204.
Wherein, the stainless steel column heart 205 of the first cylinder 202 and the second cylinder 203 can realize removably connecting by helicitic texture, can be specifically: the hollow-core construction of the second cylinder 203 is screwed hole, the surface of the stainless steel column heart 205 arranges the helicitic texture mated with this screwed hole, to realize the object that the second cylinder 203 is connected by screwed hole and helicitic texture with the stainless steel column heart 205.The stainless steel column heart 205 and the second cylinder 203 is connected by using dismountable mode, make the second cylinder 203 after fractureing, lifter pin can be repaired by the mode changing the second cylinder 203, and do not need to change whole lifter pin, reduce the use cost of lifter pin, and dismountable connected mode operates relative to the whole lifter pin of replacing more simple.
In addition, after the stainless steel column heart 205 of the second cylinder 203 and the first cylinder 202 is connected by helicitic texture, the stainless steel column heart 205 effectively can strengthen the impact resistance ability of the second cylinder 203, and effectively improve the overall performance of lifter pin, reduce the wastage rate.
Wherein, the material of the second cylinder 203 is ceramic material, because the PI cylinder 103 of PI material of the prior art easily attenuates because of the hole wall friction of lifter pin rising and decline process and bottom electrode, and be more prone to fracture, and in the utility model, use ceramic material to replace PI material, ceramic material is rub resistance more, the second cylinder 203 is made to be not easy to be fractureed, longer service life, and the PI theme of PI material is easily etched by inert gas in prior art, and the ceramic material stable performance used in the utility model, relative to PI material etch resistant more, therefore, second cylinder 203 more etch resistant, can effectively increase the service life.
Preferably, the ceramic surface of this second cylinder 203 can carry out polishing, and the surface of the second cylinder 203 after polishing is more smooth, and friction between the hole wall of the through hole of bottom electrode is less, the less wearing and tearing to the second cylinder 203 that rub are fewer, and the second cylinder 203 is not easy to fracture.
Wherein, also there is screw thread on the surface of thread 201, and lifter pin is fixed on battery lead plate or on pedestal by thread 201 and the first cylinder 202.
In the utility model embodiment, by removably connecting of the second cylinder 203 and the stainless steel column heart 205, effectively can strengthen the intensity of the second cylinder 203, make lifter pin not frangibility, extend the useful life of lifter pin, the proportion of goods damageds reduce.And the second cylinder 203 by using pottery to manufacture, friction between the hole wall that can reduce the speed that the second cylinder 203 etched by inert gas and the through hole reducing the second cylinder 203 and bottom electrode, can extend the useful life of lifter pin further, reduce the wastage rate.
Refer to Fig. 3, Fig. 3 is supporting component cross-sectional view in the utility model embodiment, and the supporting component that the utility model embodiment provides comprises:
Bottom electrode 301, pedestal 302 and the lifter pin 303 described in embodiment as shown in Figure 2, lifter pin 303 structure is please refer to Fig. 2.
Wherein, the thread 201 of lifter pin 303 is fixed in pedestal 302, and on bottom electrode 301, the position of corresponding lifter pin is provided with through hole 304, please refer to Fig. 4, Fig. 4 is the vertical view of bottom electrode 301 in the utility model embodiment, and the part of the second cylinder 203 of lifter pin 303 is positioned at through hole 304.
Wherein, borehole jack 305 is set in through hole 304; and borehole jack 305 has certain elasticity; can impact between buffer lift pin 303 and bottom electrode 301; make lifter pin 303 can obtain the protection of borehole jack 305 in rising and decline process; make lifter pin 303 be not easy to fracture, reduce the wastage rate.
In the utility model embodiment, the initial condition of supporting component is the through hole 304 that the second cylinder 203 of lifter pin 303 is positioned at bottom electrode 301, and the second cylinder 203 does not exceed the plane of bottom electrode 301, after substrate (not illustrating in the drawings) on bottom electrode 301 completes process, driving pedestal 302 moves upward by drive unit (not illustrating in the drawings), pedestal 302 will move upward with lifter pin 303, lifter pin 303 supporting substrate, and the borehole jack 305 that lifter pin 303 is through in the through hole 304 of bottom electrode 301 moves upward, it should be noted that, pedestal 302 is relevant with the driving of the height that lifter pin 303 rises and drive unit, and in the ordinary course of things, the height that pedestal 302 and lifter pin 303 rise can not exceed the length of the second cylinder 203 on lifter pin 303.
Wherein, after the substrate that lifter pin 303 supports is removed, drive unit will control pedestal 302 with lifter pin 303 toward declining, and lifter pin 303 and pedestal 302 will drop to initial condition.
In the utility model embodiment, by arranging borehole jack 305 in the through hole 304 of bottom electrode 301, can impact effectively between buffer lift pin 303 and bottom electrode 301, make lifter pin 303 be not easy to fracture, reduce the wastage rate.
The above, it is only preferred embodiment of the present utility model, not any pro forma restriction is done to the utility model, although the utility model discloses as above with preferred embodiment, but and be not used to limit the utility model, any those skilled in the art, do not departing within the scope of technical solutions of the utility model, make a little change when the technology contents of above-mentioned announcement can be utilized or be modified to the Equivalent embodiments of equivalent variations, in every case be do not depart from technical solutions of the utility model content, according to any simple modification that technical spirit of the present utility model is done above embodiment, equivalent variations and modification, all still belong in the scope of technical solutions of the utility model.
Claims (8)
1. a lifter pin, comprising: thread, the first cylinder and the second cylinder, and one end of described first cylinder is fixedly connected with described thread, it is characterized in that: the other end of described first cylinder adopts dismountable mode to be connected with described second cylinder.
2. lifter pin according to claim 1, is characterized in that:
Described first cylinder comprises: stainless steel cylinder and the stainless steel column heart, and described stainless steel cylinder is fixedly connected with the described stainless steel column heart;
Described second cylinder has hollow-core construction, and the described hollow-core construction of described second cylinder is mated with the surface texture of the described stainless steel column heart, makes the described stainless steel column heart can be positioned at the described hollow-core construction of described second cylinder.
3. lifter pin according to claim 2, it is characterized in that, the described hollow-core construction of described second cylinder is screwed hole, the described surface texture of the described stainless steel column heart is the helicitic texture mated with described screwed hole, and described second cylinder is connected by described screwed hole and described helicitic texture with the described stainless steel column heart.
4. lifter pin according to claim 2, is characterized in that, the external diameter of described stainless steel cylinder is greater than the external diameter of the described stainless steel column heart, and the external diameter of described second cylinder is identical with the external diameter of described stainless steel cylinder.
5. lifter pin according to claim 1, is characterized in that, the material of described second cylinder is ceramic material.
6. lifter pin according to claim 5, is characterized in that, the ceramic surface of described second cylinder is through polishing.
7. a supporting component, it is characterized in that, comprise bottom electrode, pedestal and the lifter pin as described in claim 1 to 6 any one, the described thread of described lifter pin is fixed in described pedestal, on described bottom electrode, the position of corresponding described lifter pin arranges through hole, described second columnar part of described lifter pin or be all positioned at the described through hole of described bottom electrode.
8. supporting component according to claim 7, is characterized in that, arranges borehole jack in described through hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520377413.1U CN204809201U (en) | 2015-06-03 | 2015-06-03 | Lifter pin and supporting component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520377413.1U CN204809201U (en) | 2015-06-03 | 2015-06-03 | Lifter pin and supporting component |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204809201U true CN204809201U (en) | 2015-11-25 |
Family
ID=54593977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520377413.1U Active CN204809201U (en) | 2015-06-03 | 2015-06-03 | Lifter pin and supporting component |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204809201U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107037615A (en) * | 2016-02-03 | 2017-08-11 | 南京瀚宇彩欣科技有限责任公司 | The etching machines of this support bar of support bar with application |
| CN107452669A (en) * | 2016-05-31 | 2017-12-08 | 朗姆研究公司 | Method and apparatus for the liquid handling of wafer-like article |
| CN111824771A (en) * | 2019-04-20 | 2020-10-27 | 天津庚辰精密机械有限责任公司 | Glass supports protective member |
| CN113046726A (en) * | 2021-02-07 | 2021-06-29 | 马浩宇 | VCD process cavity device suitable for silicon carbide wafer |
-
2015
- 2015-06-03 CN CN201520377413.1U patent/CN204809201U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107037615A (en) * | 2016-02-03 | 2017-08-11 | 南京瀚宇彩欣科技有限责任公司 | The etching machines of this support bar of support bar with application |
| CN107452669A (en) * | 2016-05-31 | 2017-12-08 | 朗姆研究公司 | Method and apparatus for the liquid handling of wafer-like article |
| CN107452669B (en) * | 2016-05-31 | 2020-12-01 | 朗姆研究公司 | Method and device for liquid treatment of wafer-shaped articles |
| CN111824771A (en) * | 2019-04-20 | 2020-10-27 | 天津庚辰精密机械有限责任公司 | Glass supports protective member |
| CN113046726A (en) * | 2021-02-07 | 2021-06-29 | 马浩宇 | VCD process cavity device suitable for silicon carbide wafer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 215301, 1, Longteng Road, Kunshan, Jiangsu, Suzhou Patentee after: InfoVision Optoelectronics(Kunshan)Co.,Ltd. Address before: 215301, 1, Longteng Road, Kunshan, Jiangsu, Suzhou Patentee before: INFOVISION OPTOELECTRONICS (KUNSHAN) Co.,Ltd. |