CN204788719U - Lithium niobate - gold - lithium niobate surface plasmon temperature sensing device of raster structure - Google Patents
Lithium niobate - gold - lithium niobate surface plasmon temperature sensing device of raster structure Download PDFInfo
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- CN204788719U CN204788719U CN201520495266.8U CN201520495266U CN204788719U CN 204788719 U CN204788719 U CN 204788719U CN 201520495266 U CN201520495266 U CN 201520495266U CN 204788719 U CN204788719 U CN 204788719U
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Abstract
The utility model discloses a lithium niobate - gold - lithium niobate surface plasmon temperature sensing device of raster structure, characterized by, include the iterative bottom glass layer of order, first lithium niobate layer, gold layer and second lithium niobate layer, first lithium niobate layer, golden layer and laminiform the one -tenth lithium niobate - gold of second lithium niobate - lithium niobate dielectric waveguide structure, lithium niobate - gold - lithium niobate be the symmetry lithium niobate dielectric waveguide structure, the intermediate level gold layer of lithium niobate dielectric waveguide structure is cycle raster structure. This kind of plasmon temperature sensing device is adaptability and sensitivity that the surperficial plasma technical application of inferior wavelength yardstick has improved the device in temperature sensing field, remedied micro -electro -mechanical system use in low, the poor stability of temperature sensor precision, the long defect of reaction time, the nanometer size that especially has can provide crucial device for the development of photoelectricity integrated.
Description
Technical field
The utility model belongs to sensor technical field, specifically a kind of lithium niobate-Jin-lithium niobate surface plasmons temperature sensing device of optical grating construction.
Background technology
Surface plasma technology can realize amplification, the detected light information of sub-wavelength dimensions, this just for realizing photon circuit, optoelectronic integrated circuit provides possibility.Current this subject of subwavelength optics that to have created with surface plasma technical research be core content, scientists is studied widely to this has been, and proposes various devices and mechanism.Especially with the AlbertPolman seminar of Dutch FOM research institute, effects on surface plasma technology proposes in field application such as optical transport, information communication, integrated photonics and predicts widely.No matter be traditional optical waveguide or photon crystal device, owing to being subject to the restriction of the diffraction limit of light, discrete component size is confined to the optical wavelength magnitude of several times or even tens ripples all the time, obviously cannot realize ultra-large integrated.And surface plasma technology can break through diffraction limit easily, this can foundation for realize under nanometer scale yardstick constraint and handle that luminous energy provides.Current surface plasma technology sensing device mostly concentrates on the field such as bio-sensing, gas sensing.
And " Acta Optica " has published " refractive index and temperature sensing research based on side-polished fiber surface plasma body resonant vibration " literary composition on 34 volumes the 5th phase in 2014 0206005 page, the vast seminar of Luo Yun of Ji'nan University sputters golden film by magnetron sputtering method and makes side-polished fiber surface plasma resonance sensor, research is completed to the temperature characterisitic of sensor, but does not also see the application utilizing surface plasma technology to realize temperature sensing at present.From current development, more and more higher to the requirement of all kinds of sensing device in Micro-Opto-Electro-Mechanical Systems, the high sensitivity that this just makes to utilize special technique or material to make complex environment applies, hypervelocity sensing device become primary goal.
Utility model content
The purpose of this utility model is for the deficiencies in the prior art, and provides a kind of lithium niobate-Jin-lithium niobate surface plasmons temperature sensing device of optical grating construction.The defect that this device can make up temperature sensor in MEMS (micro electro mechanical system) application, and precision is low under low temperature or high temperature special environment condition, sensitivity is little, poor stability, reaction time are long, and structure simple, be easy to realize.
The technical scheme realizing the utility model object is:
A kind of lithium niobate-Jin-lithium niobate surface plasmons temperature sensing device of optical grating construction, comprise bottom glassy layer, the first niobic acid lithium layer, layer gold and the second niobic acid lithium layer that order is spliced, the first niobic acid lithium layer, layer gold and the second niobic acid lithium layer form lithium niobate-Jin-lithium niobate Medium Wave Guide structure.
Described lithium niobate-Jin-lithium niobate is symmetrical lithium niobate Medium Wave Guide structure, can strengthen surface plasmon modes coupling effect, increases the propagation distance of surface plasma.
The middle layer layer gold of described lithium niobate Medium Wave Guide structure is period grat-ing structure, not only can strengthen surface plasma stimulation effect, can also strengthen photon localization and realize input more easily.
The Medium Wave Guide structure of described lithium niobate-Jin-lithium niobate, adopts the preparation of colloidal sol-gel process, such crystal lithium niobate temperature sensing stable performance, instead can reuse.
Be that the P polarized light of the He-Ne laser emitting of 632nm incides glassy layer with the angle of total reflection angle be greater than between glass and lithium columbate crystal by wavelength, because lithium niobate variations in refractive index can occur when the change of environment temperature, the stiffness of coupling of surface plasma in waveguiding structure can be changed like this, make optical path difference and the phasic difference change of emergent light, by the relation between optical power change and temperature variation, light power meter is utilized to measure emergent light luminous power determination temperature variation.
Described light power meter obtains temperature sensing amount by following relation:
wherein
be the phasic difference that the optical path difference before measuring causes, Δ L is optical path difference, passes through phase differential
calculate, h is proportionality constant, P
0for the power before measurement, P is the power after change.
The surface plasma technology of sub-wavelength dimensions is applied in adaptability and the sensitivity that temperature sensing arts improves device by this plasmon temperature sensing device, compensate for low, the poor stability of temperature sensor precision in MEMS (micro electro mechanical system) application, reaction time long defect, the nano-grade size particularly had can provide Primary Component for the development that photoelectricity is integrated.
Accompanying drawing explanation
Fig. 1 is the structural representation of embodiment.
1. glassy layer 2. first niobic acid lithium layer 3. layer gold 4. second niobic acid lithium layer 5. polarized light 6. emergent lights in figure.
Embodiment
Below in conjunction with drawings and Examples, the utility model content is further elaborated, but is not that the utility model is limited.
Embodiment:
With reference to Fig. 1, a kind of lithium niobate-Jin-lithium niobate surface plasmons temperature sensing device of optical grating construction, comprise bottom glassy layer 1, first niobic acid lithium layer 2 that order splices, layer gold 3 and the second niobic acid lithium layer 4, first niobic acid lithium layer 2, layer gold 3 and the second niobic acid lithium layer 4 form lithium niobate-Jin-lithium niobate Medium Wave Guide structure.
Described lithium niobate-Jin-lithium niobate is symmetrical lithium niobate Medium Wave Guide structure, can strengthen surface plasmon modes coupling effect, increases the propagation distance of surface plasma.
The middle layer layer gold 3 of described lithium niobate Medium Wave Guide structure is period grat-ing structure, not only can strengthen surface plasma stimulation effect, can also strengthen photon localization and realize input more easily.
The Medium Wave Guide structure of described lithium niobate-Jin-lithium niobate, adopts the preparation of colloidal sol-gel process, such crystal lithium niobate temperature sensing stable performance, instead can reuse.
Be that the P polarized light 5 of the He-Ne laser emitting of 632nm incides glassy layer 1 with the angle of total reflection angle be greater than between glassy layer and lithium niobate layer crystal body by wavelength, because lithium niobate variations in refractive index can occur when the change of environment temperature, the stiffness of coupling of surface plasma in waveguiding structure can be changed like this, make optical path difference and the phasic difference change of emergent light 6, by the relation between optical power change and temperature variation, light power meter is utilized to measure emergent light 6 luminous power determination temperature variation.
Described light power meter obtains temperature sensing amount by following relation:
wherein
be the phasic difference that the optical path difference before measuring causes, Δ L is optical path difference, passes through phase differential
calculate, h is proportionality constant, P
0for the power before measurement, P is the power after change.
Described He-Ne laser instrument, output wavelength is 632nm, and this laser instrument has very high stability and directivity, and light beam to concentrate be the ideal chose of sensor light source.
Particularly, the length and width of each layer of this device is identical is respectively 1200nm, 900nm.Each layer thickness is as follows: glassy layer 1 thickness is 200nm, and symmetrical lithium niobate layer thickness is 300nm, and layer gold 3 thickness is 150nm, and the cycle is 80nm.
Claims (3)
1. lithium niobate-Jin-lithium niobate surface plasmons the temperature sensing device of an optical grating construction, it is characterized in that, comprise bottom glassy layer, the first niobic acid lithium layer, layer gold and the second niobic acid lithium layer that order is spliced, the first niobic acid lithium layer, layer gold and the second niobic acid lithium layer form lithium niobate-Jin-lithium niobate Medium Wave Guide structure.
2. lithium niobate-Jin-lithium niobate surface plasmons the temperature sensing device of optical grating construction according to claim 1, is characterized in that, described lithium niobate-Jin-lithium niobate is symmetrical lithium niobate Medium Wave Guide structure.
3. lithium niobate-Jin-lithium niobate surface plasmons the temperature sensing device of optical grating construction according to claim 2, is characterized in that, the middle layer layer gold of described lithium niobate Medium Wave Guide structure is period grat-ing structure.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520495266.8U CN204788719U (en) | 2015-07-09 | 2015-07-09 | Lithium niobate - gold - lithium niobate surface plasmon temperature sensing device of raster structure |
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| CN201520495266.8U CN204788719U (en) | 2015-07-09 | 2015-07-09 | Lithium niobate - gold - lithium niobate surface plasmon temperature sensing device of raster structure |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104964762A (en) * | 2015-07-09 | 2015-10-07 | 广西师范大学 | Grating structure lithium niobate-gold-lithium niobate surface plasmon temperature sensing device |
| CN107238448A (en) * | 2017-05-08 | 2017-10-10 | 东南大学 | A kind of SMD temperature of metal phasmon and infrared ray sensor |
-
2015
- 2015-07-09 CN CN201520495266.8U patent/CN204788719U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104964762A (en) * | 2015-07-09 | 2015-10-07 | 广西师范大学 | Grating structure lithium niobate-gold-lithium niobate surface plasmon temperature sensing device |
| CN104964762B (en) * | 2015-07-09 | 2019-04-23 | 广西师范大学 | A kind of lithium niobate-gold of optical grating construction-lithium niobate surface plasmons temperature sensing device |
| CN107238448A (en) * | 2017-05-08 | 2017-10-10 | 东南大学 | A kind of SMD temperature of metal phasmon and infrared ray sensor |
| CN107238448B (en) * | 2017-05-08 | 2019-06-21 | 东南大学 | A kind of metal phasmon patch type temperature and infrared sensor |
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Granted publication date: 20151118 Termination date: 20160709 |
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| CF01 | Termination of patent right due to non-payment of annual fee |