CN204758028U - Mems惯性传感器、湿度传感器集成装置 - Google Patents
Mems惯性传感器、湿度传感器集成装置 Download PDFInfo
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- CN204758028U CN204758028U CN201520456030.3U CN201520456030U CN204758028U CN 204758028 U CN204758028 U CN 204758028U CN 201520456030 U CN201520456030 U CN 201520456030U CN 204758028 U CN204758028 U CN 204758028U
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Cited By (1)
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CN105115540A (zh) * | 2015-06-29 | 2015-12-02 | 歌尔声学股份有限公司 | Mems惯性传感器、湿度传感器集成装置及其制造方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN105115540A (zh) * | 2015-06-29 | 2015-12-02 | 歌尔声学股份有限公司 | Mems惯性传感器、湿度传感器集成装置及其制造方法 |
CN105115540B (zh) * | 2015-06-29 | 2018-07-06 | 歌尔股份有限公司 | Mems惯性传感器、湿度传感器集成装置及其制造方法 |
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Address after: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
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Effective date of registration: 20200610 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |
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