CN204741007U

CN204741007U - Hopper manifold of taking a breath

Info

Publication number: CN204741007U
Application number: CN201520248103.XU
Authority: CN
Inventors: 孙晋博
Original assignee: Beijing Sevenstar Electronics Co Ltd
Current assignee: North China Science And Technology Group Ltd By Share Ltd; Beijing Naura Microelectronics Equipment Co Ltd
Priority date: 2015-04-22
Filing date: 2015-04-22
Publication date: 2015-11-04
Anticipated expiration: 2025-04-22

Abstract

The utility model provides a hopper manifold of taking a breath, the vertical installation in the mechanism of opening the door. A hopper manifold of taking a breath sets up inlet port and venthole, the venthole has predetermined inclination with vertical direction, the venthole communicates with each other with the inlet port. The utility model discloses an inlet port lets in gases such as nitrogen gas to the manifold to at the uniform velocity pour into gases such as nitrogen gas into to the intracavity of hopper through the venthole, reduce the oxygen content of hopper intracavity, build a hypoxemia, uncontaminated microenvironment for the hopper. In addition because in scavenging period, vertically all there is a venthole whole, the laminar flow air current that consequently forms can be the most abundant removes the air in the hopper to be difficult to curl up the inside granule of hopper, the utility model discloses a manifold can effectively prevent to pollute inside microenvironment when the family of a general of mechanism that opens the door of hopper door from opening.

Description

A kind of hopper ventilation manifold

Technical field

The utility model relates to hopper door-opening mechanism technical field, more specifically relates to a kind of hopper ventilation manifold.

Background technology

In semiconductor manufacturing equipment, the microenvironment of apparatus and process needs low oxygen content, to ensure product quality.For silicon chip, in room temperature, the oxygen slow reaction in silicon chip and air generates natural oxide film, and therefore the excessive concentration of oxygen can affect the process results of silicon chip, and then affects production capacity and the yield of whole production line, causes damage.On the other hand, in the production process of semiconductor product, microenvironment needs higher cleanliness factor, has extremely strict requirement to Grain size controlling, in technical process, the amounts of particles of silicon chip surface directly affects the yield of product, and this has impact to the efficiency of the whole production line of semiconductor.Silicon chip will for some time in the closed environment of the hopper of low oxygen concentration, high-cleanness, high before technique starts to enter chamber and after completing technique, and this just requires that the inner space of hopper possesses low oxygen content and higher cleanliness factor equally.

In industry process in the mechanism of this kind of problem, need to transform hopper, corresponding construction is installed therein and realizes purifying and reducing the function of oxygen content, be unfavorable for large-scale need of production, also can the gross weight increase of another hopper.

Utility model content

(1) technical problem that will solve

The technical problems to be solved in the utility model is how when hopper is opened, and on the basis not changing hopper structure, reduces the oxygen content of hopper inside, purifies the internal environment of described hopper.

(2) technical scheme

In order to solve the problems of the technologies described above, the utility model provides a kind of hopper ventilation manifold, be installed on door-opening mechanism, described a kind of hopper ventilation manifold arranges air admission hole and venthole, described air admission hole communicates with venthole, gas is passed into by described air admission hole, and by described venthole by gas inject hopper; Described venthole and vertical direction have predetermined angle of inclination.

Preferably, described air admission hole is two.

Preferably, described air admission hole is positioned at the two ends of described a kind of hopper ventilation manifold.

Preferably, described venthole diameter is 8mm.

Preferably, described venthole is 18, and row is row.

Preferably, between described venthole, inside communicates.

Preferably, described a kind of hopper ventilation manifold arranges fixing hole.

Preferably, described a kind of hopper ventilation manifold is metal material.

(3) beneficial effect

The utility model provides a kind of hopper ventilation manifold, described manifold is vertically installed on the door-opening mechanism of hopper, comprise air admission hole and multiple venthole, by air admission hole to gases such as manifold nitrogen injections, gas being injected with at the uniform velocity laminar condition in the chamber of hopper by venthole, reduce the oxygen content in hopper chamber, by exhaust outlet, the gas of displacement is discharged hopper simultaneously, for hopper builds a hypoxemia, clean microenvironment.In addition due in scavenging period, have venthole in whole longitudinal direction, the laminar air flow therefore formed can drain the air in hopper the most fully, and is not easy the particle rolling hopper inside; Inner microenvironment is polluted when manifold of the present utility model can effectively prevent the door-opening mechanism of hopper door from being opened by door.

Accompanying drawing explanation

In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only embodiments more of the present utility model, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.

Fig. 1 is the structural representation of a kind of hopper ventilation manifold of the present utility model;

Fig. 2 is the end view of a kind of hopper ventilation manifold of the present utility model;

Fig. 3 is the scheme of installation of a kind of hopper ventilation manifold of the present utility model;

Fig. 4 is a kind of hopper ventilation manifold ventilation schematic diagram of the present utility model;

Fig. 5 is hopper structural representation.

Embodiment

Below in conjunction with drawings and Examples, the utility model is described in further detail.Following examples for illustration of the utility model, but can not be used for limiting scope of the present utility model.

Fig. 1 is the structural representation of a kind of hopper ventilation manifold of the present utility model; Fig. 2 is the end view of a kind of hopper ventilation manifold of the present utility model; Described a kind of hopper ventilation manifold 1 is vertically installed on door-opening mechanism 4, and as shown in Figure 3, it arranges air admission hole 102 and venthole 101, and described venthole 101 has predetermined angle of inclination with vertical direction; Described air admission hole 102 communicates with venthole 101, between venthole 101, inside also communicates, by air admission hole 102, the gases such as nitrogen are passed into manifold, by venthole 101, the gases such as nitrogen are injected with at the uniform velocity laminar condition in the chamber of hopper, reduce the oxygen content in hopper chamber, by exhaust outlet 8, the gas of displacement is discharged hopper, for hopper builds a hypoxemia, clean microenvironment simultaneously.In addition due in scavenging period, have venthole in whole longitudinal direction, the laminar air flow therefore formed can drain the air in hopper the most fully, and is not easy the particle rolling hopper inside; Inner microenvironment is polluted when manifold of the present utility model can effectively prevent the door-opening mechanism of hopper door from being opened by door.

Described hopper 5 comprises hermatic door 7, stocker box body 9 and exhaust outlet 8; Described exhaust outlet 8 is positioned at the top of described stocker box body 9.

Described air admission hole 102 for passing into high-purity gas, such as nitrogen; The quantity of described air admission hole is one or more according to specific circumstances, is preferably two, lays respectively at the two ends of described manifold.

Described venthole 101 is multiple, and row is row, and inside communicates each other; Described venthole 101 is preferably 18, and diameter is 8mm.Determining according to actual conditions with the angle of inclination of vertical direction of described air admission hole 102, is preferably 20 degree.The silicon chip 6 of hopper inside is horizontal direction, the air-flow entered by venthole 101 forms stable laminar flow in hopper 5, gas is discharged in vertical direction venthole at an angle, as shown in Figure 4 because the structure of hopper inwall is a structure along the arc of silicon chip 6, so just make air-flow with an angle along the space revolution flowing between silicon chip.Gas, in flow process, has the venthole of relevant position in whole longitudinal direction, the laminar air flow therefore formed can drain the air in hopper the most fully, and substitutes with the high pure nitrogen passed into, and is not easy the particle rolling hopper inside.Whole purge can continue a bit of time, after completing purging, close high pure nitrogen, and door-opening mechanism opens the hermatic door of hopper.Now hopper inside is filled with high pure nitrogen, and the closed environment oxygen concentration of chamber lower portion would not be made like this to increase.Door-opening mechanism shown in Fig. 4 is the closed structure with housing, and this structure to form an airtight space at closing time with hopper.

Described a kind of hopper ventilation manifold is metal material, or other materials; The air admission hole 102 of described a kind of hopper ventilation manifold adopts and is threaded, and also can connect with alternate manners such as welding points; Described manifold arranges fixing hole 103, is fixed on door-opening mechanism for being threaded connection.

Manifold of the present utility model is installed on the side of door-opening mechanism 4, on the basis not changing hopper structure, utilizing high pure nitrogen or other gas to discharge oxygen makes hopper inside be pure nitrogen environment, thus realizes the function of the oxygen concentration reducing hopper inside fast; High pure nitrogen is entered by venthole, at the uniform velocity blow to the gap of hopper inner laminated silicon chip, discharged by exhaust outlet again, uniform air-flow can prevent inner particle disturbance, attaching particles on silicon chip can be avoided and polluted, when manifold of the present utility model can effectively prevent the door-opening mechanism of hopper door from being opened by door, polluting the microenvironment of hopper.

Above execution mode only for illustration of the utility model, but not to restriction of the present utility model.Although be described in detail the utility model with reference to embodiment, those of ordinary skill in the art is to be understood that, various combination, amendment or equivalent replacement are carried out to the technical solution of the utility model, do not depart from the spirit and scope of technical solutions of the utility model, all should be encompassed in the middle of right of the present utility model.

Claims

1. a hopper ventilation manifold, is installed on door-opening mechanism, it is characterized in that, described a kind of hopper ventilation manifold arranges air admission hole and venthole, described air admission hole communicates with venthole, passes into gas by described air admission hole, and by described venthole by gas inject hopper; Described venthole and vertical direction have predetermined angle of inclination.

2. a kind of hopper ventilation manifold according to claim 1, it is characterized in that, described air admission hole is two.

3. a kind of hopper ventilation manifold according to claim 2, is characterized in that, described air admission hole is positioned at the two ends of described a kind of hopper ventilation manifold.

4. a kind of hopper ventilation manifold according to any one of claims 1 to 3, it is characterized in that, described venthole diameter is 8mm.

5. a kind of hopper ventilation manifold according to claim 4, it is characterized in that, described venthole is 18, and row is row.

6. a kind of hopper ventilation manifold according to claim 5, it is characterized in that, between described venthole, inside communicates.

7. a kind of hopper ventilation manifold according to claim 5 or 6, is characterized in that, described a kind of hopper ventilation manifold arranges fixing hole.

8. a kind of hopper ventilation manifold according to claim 7, is characterized in that, described a kind of hopper ventilation manifold is metal material.