CN204735494U - Automatic cleaning station - Google Patents
Automatic cleaning station Download PDFInfo
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- CN204735494U CN204735494U CN201520160462.XU CN201520160462U CN204735494U CN 204735494 U CN204735494 U CN 204735494U CN 201520160462 U CN201520160462 U CN 201520160462U CN 204735494 U CN204735494 U CN 204735494U
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- 238000004140 cleaning Methods 0.000 title claims abstract description 64
- 238000000034 method Methods 0.000 claims abstract description 12
- 230000007246 mechanism Effects 0.000 claims description 18
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 239000002245 particle Substances 0.000 abstract description 56
- 239000000428 dust Substances 0.000 abstract description 26
- 239000000463 material Substances 0.000 abstract description 9
- 230000008030 elimination Effects 0.000 abstract description 2
- 238000003379 elimination reaction Methods 0.000 abstract description 2
- 238000007664 blowing Methods 0.000 abstract 1
- 239000000843 powder Substances 0.000 abstract 1
- 230000003068 static effect Effects 0.000 abstract 1
- 235000013312 flour Nutrition 0.000 description 27
- 150000002500 ions Chemical class 0.000 description 17
- 239000007789 gas Substances 0.000 description 10
- 230000032258 transport Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 238000001914 filtration Methods 0.000 description 2
- 241001676635 Lepidorhombus whiffiagonis Species 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002397 field ionisation mass spectrometry Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- NHDHVHZZCFYRSB-UHFFFAOYSA-N pyriproxyfen Chemical compound C=1C=CC=NC=1OC(C)COC(C=C1)=CC=C1OC1=CC=CC=C1 NHDHVHZZCFYRSB-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Abstract
The utility model provides an automatic cleaning station, the machine body of which is provided with a cleaning space for the passage of a track and an overhead crane carrier, and at least one air suction disc, at least one air knife and at least one ion release bar are arranged on the inner wall area of the cleaning space; at least one air suction joint is arranged on the machine body and is connected with the air suction disc through an internal air suction pipeline; at least one air supply joint is arranged on the machine body and is connected with the air knife through an internal air supply pipeline; at least one ion cloud generator installed in the body and connected to the ion releasing rod by an internal circuit; therefore, an overhead hoist conveyor (OHT) in the Automatic Material Handling System (AMHS) can enter an automatic cleaning station through the rail, and the automatic cleaning station can effectively remove the rail and the attached powder particles (particles) on the top of the overhead hoist conveyor and the machine body through the procedures of static elimination, air blowing dust removal, air suction dust collection and the like.
Description
Technical field
The utility model is a kind of technical field of the automation cleaning station for wafer factory, particularly a kind of for being distributed in the high aerial automatic material transport system (AMHS) of dust free room, the designed equipment removing dust efficiently.
Background technology
Semiconductor 12 inch (300mm) wafer factory, because produce high-tech chip, the requirement for chip production environment is very strict, and in current industry known facts, dust can not be ignored the impact of chip yield with vibrations.Adopt automatic material transport system (Automated Material Handling System in this type of wafer factory, be called for short AMHS), high voltage generation magnetic buoyancy is utilized to drive the operation of various carrier, its magnetic field produce a large amount of electrostatic and be easily built-up on carrier by the minute dusts flown upward in environment, and conveyor system travel speed is high, many seams and turning is had because orbit ring runs around dust free room, also carrier is easily made to produce larger vibrations, carrier running for years, itself spare part and orbit friction, produce a large amount of dust (particle), these dust will run along with carrier and shake and intersperse among in dust free room, this yield for chip production can cause serious impact.Wherein because Cgantry crane carrier (Overhead Hoist Transports, be called for short OHT) directly will load front open type wafer carrier box (the Front Opening Unified Pod of chip (Wafer), be called for short FOUP), be transported to front open type Interface Mechanical Standard (the Front-Opening Interface Mechanical Standard of chip production board, be called for short FIMS) system, dust on carrier is shaken off so the easiest and be built-up on FOUP, in time producing board and open FOUP door, because in board being vacuum state (negative pressure), can produce in board by FOUP sucks with the dust in environment, dust is caused to be scattered in the major defect thus chip causing chip.
Desirable solution regularly removes to be attached to the dust that Cgantry crane carrier (OHT) is upper and be distributed on track, especially hoards the break flour particle (Particle) on Cgantry crane carrier (OHT).But Cgantry crane carrier (OHT) operates on the high-altitude orbit that is distributed in wafer factory, also inconvenient and actual except security concerns with manual cleaning, consuming timely production capacity can be reduced again, if and cause dust to fly away in removal process, power house environment more can be caused to be polluted, in view of this, the utility model creator devises this automation cleaning station.
Utility model content
The utility model main purpose is to provide a kind of automation cleaning station, apply in the dust free room of wafer factory, for Cgantry crane carrier (OHT) end face easily hoarding break flour particle (Particle) in automatic material transport system (AMHS) and fuselage and track, electrostatic is eliminated in use, dust-removing supervisor is cleaned, air-breathing is collected in break flour particle (Particle) suction line simultaneously afterwards, remove break flour particle (Particle) efficiently, reduce the potential hazard factor likely affecting yield in wafer production.
In order to achieve the above object, the utility model provides a kind of automation cleaning station, its structure comprises: a body, have the cleaning space passed through for track and Cgantry crane carrier, this body is installed with at least one air draught dish, at least one air knife and at least one plasma diffusing W,Mo rod in the inner wall area of this cleaning space; At least one suction joint, is arranged on this body, is connected with this air draught dish by the suction line in this body; At least one air connector, is arranged on this body, is connected by the supply air line in this body with this air knife; And at least one ion cloud generator, be installed on this body, connected with this plasma diffusing W,Mo rod by circuit in this body.
Wherein, this cleaning space is from top to bottom divided into the first space and second space, and size is gradually expanded to second space by the first space, and this first space can be passed through for this track, and this second space can pass through for this Cgantry crane carrier.
Wherein, this air knife and this plasma diffusing W,Mo rod position be arranged in this body are adjacent to this first space and connect with this second space the sidewall in region, this sidewall has a long and narrow air outlet, and the positive and negative ion that distinguished and admirable and this plasma diffusing W,Mo rod of the injection that this air knife produces produces all enters in this cleaning space through this air outlet.
Wherein, this air knife and this plasma diffusing W,Mo rod have two groups, are installed on this relative first space of two positions respectively and connect with this second space region, i.e. two side positions through path at this track and this Cgantry crane carrier.
Wherein, the air outlet of this air knife is the top side location in the face of this Cgantry crane carrier.
Wherein, the position that this air draught dish is arranged on this body is the inwall in this second space region.
Wherein, the inwall section of this second space region is U-shaped, and wherein this air draught dish has three groups, and is distributed in two vertical planes and basal surface position.
Wherein, above-mentioned automation cleaning station includes at least one air jet system further, this air jet system is installed in this body, each air jet system comprises a rotating mechanism and an air jet pipe, this air jet pipe connects with this supply air line and by this rotating mechanism driven rotary, the puff prot of this air jet pipe can be positioned at this track via this rotating mechanism action.
Wherein, this air jet system number is four, position is four corners and be adjacent to the first space and connect with second space the sidewall in region in this body, this sidewall has at least one passway, when this rotating mechanism action, this air jet pipe can be driven to move at this internal body or this cleaning space through this passway.
Wherein, this air jet system is arranged on a reciprocal shifting apparatus, is produced and moves back and forth, make gas produce flow-disturbing phenomenon in the jet process of this air jet system by this reciprocal shifting apparatus.
The beneficial effects of the utility model are as follows:
When a Cgantry crane carrier (OHT) enters automation cleaning station through this track, this automation cleaning station, through eliminating electrostatic, dust-removing, air-breathing control of dust supervisor, can remove the break flour particle (Particle) on this track and this Cgantry crane carrier efficiently;
The operating mode of automation cleaning station produces a large amount of negative ions by this ion cloud generator, to eliminate electrostatic, and the gases at high pressure produced by this air knife blow off and are attached to the break flour particle (Particle) of body surface, drawn the break flour particle (Particle) flown in cleaning space again by this air draught dish large-area, finally collect discharge.
Moreover, in order to effectively remove break flour particle (Particle), the utility model includes at least one air jet system further, this air jet system is arranged on four corner positions in this body top, comprise a rotating mechanism and an air jet pipe, this air jet pipe also connects with this supply air line by this rotating mechanism driven rotary, and the puff prot of this air jet pipe can move in this track via this rotating mechanism action.This air jet system can be arranged on a reciprocal shifting apparatus in addition, and this reciprocating moving device is a pneumatic cylinder.Produced by this reciprocal shifting apparatus in the jet process of this air jet system and move back and forth, make gas produce flow-disturbing phenomenon.So contribute to removing further and hoard break flour particle (Particle) in track.
Below coordinate graphic and element numbers to do more detailed description to embodiment of the present utility model, make to have the knack of this those skilled in the art and can implement according to this after studying this description carefully.
Accompanying drawing explanation
Fig. 1 is the schematic diagram that the utility model automation cleaning station installs the track place of automatic material transport system (AMHS);
Fig. 2 is stereogram of the present utility model;
Fig. 3 is the internal structure schematic diagram after removal body fuselage of the present utility model;
Fig. 4 is side view of the present utility model;
When Fig. 5 is the utility model running, this Cgantry crane carrier not yet enters the schematic diagram in this body centre position;
When Fig. 6 is the utility model running, this Cgantry crane carrier has entered body centre position, for starting the schematic diagram carrying out washing and cleaning operation.
Description of reference numerals:
A automation cleaning station, 1 body, 11 cleaning spaces, 111 first spaces, 112 second spaces, 13 sidewalls, 131 air outlets, 132 passwaies, 14 inwalls, 15 air connectors, 151 supply air lines, 16 suction joint, 161 suction line, 2 air draught dishes, 3 air knives, 4 plasma diffusing W,Mo rods, 41 ion cloud generators, 5 air jet systems, 51 rotating mechanisms, 52 air jet pipes, 6 reciprocal shifting apparatus, 8 tracks, guide rail in 81,9 Cgantry crane carriers, 91 guide wheels.
Detailed description of the invention
As shown in Figure 1, the utility model automation cleaning station A is installed in the dust free room of wafer factory, in the track 8 of automatic material transport system (AMHS) through position, the Cgantry crane carrier 9 (OHT) run in this track 8 can be cleaned.Below, paragraph remakes description to Detailed Operation mode.
First structure of the present utility model makes a detailed description, as shown in Figures 1 and 3, is the schematic diagram of stereogram of the present utility model and content structure.The body 1 of the utility model automation cleaning station A has a cleaning space 11 that is opening up, that pass through for track 8, this cleaning space 11 is from top to bottom divided into the first space 111 and second space 112, size is gradually expanded to second space 112 by the first space 111, this the first space 111 width is to should track 8 size, this second space 112 is to should Cgantry crane carrier 9 (OHT) size, the lateral length of this cleaning space 11 is greater than this Cgantry crane carrier 9, and main dedusting operation area is in centre portion.
This body 1 is installed with at least one air draught dish 2, at least one air knife 3 and at least one plasma diffusing W,Mo rod 4 in the inner wall area of this cleaning space 11, wherein this air knife 3 and this plasma diffusing W,Mo rod 4 are installed in this body 1, and position is adjacent to this first space 111 and connects with this second space 112 sidewall 13 in region.This sidewall 13 has a long and narrow air outlet 131, and the positive and negative ion that distinguished and admirable and this plasma diffusing W,Mo rod 4 of the injection that this air knife 3 produces produces all enters in this cleaning space 11 through this air outlet 131.The air outlet of this air knife 3 is the top side location in the face of this Cgantry crane carrier 9.This air draught dish 2 is the inwalls 14 being installed on this second space 112 region, and this inwall 14 longitudinal sectional shape is U-shaped, and this air draught dish 2 has three groups in the present embodiment, is distributed in two vertical planes and basal surface position.
In this body 1, there is at least one ion cloud generator 41, via line connects with this plasma diffusing W,Mo rod 4, produce a large amount of positive and negative ion by this plasma diffusing W,Mo rod 4, reached the effect eliminating electrostatic by ion cloud, break flour particle (Particle) can not be attached on object.This air knife 3 dust-free air can be compressed, and reaches whiff pressure and strengthen, under aforementioned electrostatic elimination state, blown off by break flour particle (Particle) from body surface.In the present embodiment, this ion cloud generator 41, air knife 3 are provided with two groups, these cleaning space 11 both sides, office.This body 1 shell is installed with at least one air connector 15, and this suction joint 15 is connected with this air knife 3 by the supply air line 151 in this body 1, supplies gases at high pressure by outside.This body 1 shell is also provided with at least one suction joint 16 in addition, and this suction joint 16 is connected with this air draught dish 2 by the suction line 161 in this body 1.Wherein each supply air line 151 all has controlled valve (not drawing in figure), with the opening and closing opportunity of reed time controll pipeline with suction line 161.Because the utility model automation cleaning station A is installed in the dust free room of this wafer factory, various dedicated pipeline is dispersed with in this dust free room, comprising gas supply line and suction line, the utility model utilizes the air connector 15 of this body 1, suction joint 16 connects to relevant pipeline, just can when equipment operates, by dust free room, plant area supplies gases at high pressure in good time, break flour particle (Particle) is collected the filtration system being delivered to factory building end and discharge after air-breathing.
In the above-described embodiments, this air knife 3 mainly in order to remove the break flour particle (Particle) that Cgantry crane carrier 9 (OHT) end face and fuselage adhere to, but also easily hoards break flour particle (Particle) in the track 8 run for Cgantry crane carrier 9 (OHT).Therefore the utility model includes at least one air jet system 5 further, this air jet system 5 in order to blow in this track 8, to remove the break flour particle (Particle) of attachment in track 8.This air jet system 5 has four groups in the present embodiment, is installed on four corners in this body 1 top respectively, and position this sidewall 13 contiguous, comprises rotating mechanism 51 and an air jet pipe 52.This air jet pipe 52, in a three-dimensional bending L-type, connects with this supply air line 151, by this rotating mechanism 51 driven rotary.This sidewall 13 has at least one passway 132.When this rotating mechanism 51 action, this air jet pipe 52 can be driven to switch in this body 1 inside or this cleaning space 11 liang place work through this passway 132.In figure 3, two air jet pipe 52 positions on the right side of drawing are relatively inner at this body 1, and two air jet pipe 52 positions in left side are then the states in alignment rail, and under this state, the puff prot of this air jet pipe 52 is the place places being positioned at this track 8.
In addition in order to make the air-flow of above-mentioned jet generation disturbance, blown off in order to break flour particle (Particle), each this air jet system 5 is installed on a reciprocal shifting apparatus 6, and this reciprocating moving device 6 is a pneumatic cylinder in the present embodiment, and is connected with this supply air line 151.In the jet process of this air jet system 5, produced by this reciprocal shifting apparatus 6 and move back and forth, produce flow-disturbing phenomenon at this cleaning space 11 internal gas, contribute to break flour particle (Particle) and blown off.
Function mode of the present utility model does a clearly description with that: as shown in Fig. 1 and Fig. 4, be respectively schematic diagram and the side view of the utility model structure operation.The utility model automation cleaning station A is installed on the path of track 8 process of this automatic material transport system (AMHS), also be fixed in the factory building of dust free room, separately there is in factory building gas supply line, the air connector 15 of suction line (this part omit do not mark) and body 1 shell and suction joint 16 connect, the dustless gas of high pressure required when providing the utility model equipment to operate and suction.This track 8 section is like ㄇ font, and run in track 8 though this Cgantry crane carrier 9 utilizes high voltage to produce magnetic buoyancy, top separately has guide wheel 91 and interior guide rail 81 gentle touchdown in track 8.The utility model automation cleaning station A is mainly in order to remove Cgantry crane carrier 9 end face and fuselage and to move through guide wheel 91 and hoard the break flour particle (Particle) in interior guide rail 81.
As shown in Figure 5, when Cgantry crane carrier 9 not yet moves to the zone line in this body 1, the air jet pipe 52 of this air jet system 5 is positioned at this body 1 inside.As shown in Figure 6, after Cgantry crane carrier 9 moves tram, this air jet pipe 52 of front and back moves in the first space 111 of this cleaning space 11 through rotating mechanism 51 action, and this air jet pipe 52 exit face is to this interior guide rail 81.Washing and cleaning operation flow process is: first this plasma diffusing W,Mo rod 4 produces a large amount of positive and negative ion through ion generator 41 start, after the scheduled time, a large amount of positive and negative ion can be distributed in this cleaning space 11, reached the effect eliminating electrostatic by ion cloud, make break flour particle (Particle) that Cgantry crane carrier 9 and track 8 surface can not be sticked.Then this air knife 3 and air jet system 5 action simultaneously, break flour particle (Particle) is blown off this Cgantry crane carrier 9 and track 8 surface.This reciprocal shifting apparatus 6 also synchronization action, make this air jet system 5 produce front and back slightly movement back and forth, allow gas reach flow-disturbing effect, the break flour particle (Particle) between being contacted with interior guide rail 81 by guide wheel 91 is further blown down.In this process, be distributed in this air draught dish 2 large-area in this second space 112 and continue air-breathing, absorb by this first space 11 by the break flour particle blown off, then the suction line in dust free room is discharged, and delivers to the filtration system of factory building end.In cleaning process, this air knife 3 can preferentially stop, and is then stopped by this air jet system 5 again.This ion generator 41 is then just can stop after Cgantry crane carrier 9 leaves body 1, avoids break flour particle (Particle) to be adsorbed in tube wall because electrostatic produces once again in suction line.After cleaning process terminates, this air jet pipe 52 can rotate through rotating mechanism 51 action and again enter this body 1 inside, is beneficial to this Cgantry crane carrier 9 and shifts out this automation cleaning station A.The front and back position that this body 1 can pass through in this track 8 in addition separately installs an automatically-controlled door and relevant induction mechanism (not shown in FIG.), be beneficial in washing and cleaning operation process, allow this Cgantry crane carrier 9 completely surround by this body 1, avoid the break flour particle (Particle) of small part to descend slowly and lightly.
Comprehensive the above, the utility model automation cleaning station utilizes to eliminate electrostatic, dust-removing, air-breathing control of dust supervisor, reaches the object of the break flour particle (Particle) removed on this Cgantry crane carrier 9 and track 8.In cleaning space 11, be covered with negative ions by this ion generator 41, reach the effect eliminating electrostatic, make break flour particle (Particle) be attached to body surface; Then air knife 3 and air jet system 5 is used to blow the break flour particle (Particle) fallen within this lifting carrier 9 and track 8 off, then by large-area air blow pan 2 air-breathing control of dust.Therefore use design of the present utility model, just can reach the effect of dust suction, cleaning, control of dust, effectively keep the clean of automatic material transport system (AMHS).
Claims (10)
1. an automation cleaning station, is characterized in that, comprising:
One body, has the cleaning space passed through for track and Cgantry crane carrier, and this body is installed with at least one air draught dish, at least one air knife and at least one plasma diffusing W,Mo rod in the inner wall area of this cleaning space;
At least one suction joint, is arranged on this body, is connected with this air draught dish by the suction line in this body;
At least one air connector, is arranged on this body, is connected by the supply air line in this body with this air knife;
At least one ion cloud generator, is arranged on this body, is connected with this plasma diffusing W,Mo rod by circuit in this body.
2. automation cleaning station according to claim 1, it is characterized in that, this cleaning space is from top to bottom divided into the first space and second space, size is gradually expanded to second space by the first space, this first space can be passed through for this track, and this second space can pass through for this Cgantry crane carrier.
3. automation cleaning station according to claim 2, it is characterized in that, this air knife and this plasma diffusing W,Mo rod position be arranged in this body are adjacent to this first space and connect with this second space the sidewall in region, this sidewall has a long and narrow air outlet, and the positive and negative ion that distinguished and admirable and this plasma diffusing W,Mo rod of the injection that this air knife produces produces all enters in this cleaning space through this air outlet.
4. automation cleaning station according to claim 3, it is characterized in that, this air knife and this plasma diffusing W,Mo rod have two groups, are installed on this relative first space of two positions respectively and connect with this second space region, i.e. two side positions through path at this track and this Cgantry crane carrier.
5. automation cleaning station according to claim 4, is characterized in that, the air outlet of this air knife is the top side location in the face of this Cgantry crane carrier.
6. automation cleaning station according to claim 2, is characterized in that, the position that this air draught dish is arranged on this body is: the inwall of this second space region.
7. automation cleaning station according to claim 6, is characterized in that, the inwall section of this second space region is U-shaped, and wherein this air draught dish has three groups, and is distributed in two vertical planes and basal surface position.
8. automation cleaning station according to claim 2, it is characterized in that, include at least one air jet system further, this air jet system is installed in this body, each air jet system comprises a rotating mechanism and an air jet pipe, this air jet pipe connects with this supply air line and by this rotating mechanism driven rotary, the puff prot of this air jet pipe can be positioned at this track via this rotating mechanism action.
9. automation cleaning station according to claim 8, it is characterized in that, this air jet system number is four, position is four corners and be adjacent to the first space and connect with second space the sidewall in region in this body, this sidewall has at least one passway, when this rotating mechanism action, this air jet pipe can be driven to move at this internal body or this cleaning space through this passway.
10. automation cleaning station according to claim 8, is characterized in that, this air jet system is arranged on a reciprocal shifting apparatus, is produced and moves back and forth, make gas produce flow-disturbing phenomenon in the jet process of this air jet system by this reciprocal shifting apparatus.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW103217706U TWM499960U (en) | 2014-10-03 | 2014-10-03 | Automation vehicles washer |
| TW103217706 | 2014-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204735494U true CN204735494U (en) | 2015-11-04 |
Family
ID=53721775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520160462.XU Expired - Fee Related CN204735494U (en) | 2014-10-03 | 2015-03-20 | Automatic cleaning station |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN204735494U (en) |
| TW (1) | TWM499960U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107626482A (en) * | 2017-10-30 | 2018-01-26 | 佛山市三水凤铝铝业有限公司 | A kind of aluminium section bar dust process every powder device |
| CN107685061A (en) * | 2017-09-07 | 2018-02-13 | 凯盛科技股份有限公司 | A kind of coating film on glass cleaning device |
| CN111904021A (en) * | 2019-05-10 | 2020-11-10 | 虹霓机械制造有限公司 | Device for transferring rod-shaped articles of the tobacco processing industry |
| CN114733848A (en) * | 2022-02-28 | 2022-07-12 | 江苏道达智能科技有限公司 | AMHS overhead traveling crane (OHT) on-orbit cleaning and detecting machine |
-
2014
- 2014-10-03 TW TW103217706U patent/TWM499960U/en not_active IP Right Cessation
-
2015
- 2015-03-20 CN CN201520160462.XU patent/CN204735494U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107685061A (en) * | 2017-09-07 | 2018-02-13 | 凯盛科技股份有限公司 | A kind of coating film on glass cleaning device |
| CN107626482A (en) * | 2017-10-30 | 2018-01-26 | 佛山市三水凤铝铝业有限公司 | A kind of aluminium section bar dust process every powder device |
| CN111904021A (en) * | 2019-05-10 | 2020-11-10 | 虹霓机械制造有限公司 | Device for transferring rod-shaped articles of the tobacco processing industry |
| CN114733848A (en) * | 2022-02-28 | 2022-07-12 | 江苏道达智能科技有限公司 | AMHS overhead traveling crane (OHT) on-orbit cleaning and detecting machine |
Also Published As
| Publication number | Publication date |
|---|---|
| TWM499960U (en) | 2015-05-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180816 Address after: No. 1 Jinshan Road, dug street, Rudong high tech Industrial Development Zone, Nantong, Jiangsu Patentee after: Otto precision semiconductor (Jiangsu) Co., Ltd. Address before: Hsinchu County, Taiwan, China Patentee before: DEFAN ADVANCED TECHNOLOGY CO., LTD. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151104 Termination date: 20210320 |