CN204724434U - Meet the broadband ultrasonic transducer composite structure of multi-frequency demand - Google Patents
Meet the broadband ultrasonic transducer composite structure of multi-frequency demand Download PDFInfo
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- CN204724434U CN204724434U CN201520418459.3U CN201520418459U CN204724434U CN 204724434 U CN204724434 U CN 204724434U CN 201520418459 U CN201520418459 U CN 201520418459U CN 204724434 U CN204724434 U CN 204724434U
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Abstract
The utility model discloses a kind of broadband ultrasonic transducer composite structure meeting multi-frequency demand, comprise the first electrode layer of the bottom set gradually from down to up, insulating barrier, low frequency, high frequency resonate cavity layer, dielectric resilience vibration rete and the second electrode lay, and form an overall composite structure, in composite structure, vibrate rete by row's groove that low frequency insulation support plate is provided with and insulating barrier and dielectric resilience again form a low frequency vacuum chamber, by the second electrode slice of each low frequency vacuum chamber and top, first electrode slice of below forms an independently cellular construction, independently cellular construction can freely control, by controlling independently cellular construction, making independently cellular construction to be operated in high frequency state, also can be operated in low frequency state, and can Time-sharing control, the frequency range of wide region be provided and meet different frequency needs, thus being applied to the occasion of multifrequency demand.
Description
Technical field
The utility model relates to the micro-electromechanical system field with power conversion, particularly relates to a kind of broadband ultrasonic transducer composite structure meeting multi-frequency demand.
Background technology
Modern medicine image technology comprises ultrasonic imaging, X-CT fault imaging, radioisotope scanning imaging and nuclear magnetic resonance etc.Wherein, ultrasonic imaging technique have real-time good, without performances such as ionising radiations, harmless to human body in diagnostic application power bracket, reusable and cost is low, easy to carry and be used widely.Especially strong to biologic soft tissue distinguishing ability, in the diagnosis of soft tissue illness, there is advantage, all if the real-time dynamic imaging of display profile, acquisition blood flow information, Abnormal organs, heart and blood flow etc.And be widely used in medical diagnosis and treatment as the sonac of ultrasonic imaging and supersonic therapeutic system core component, and the Non-Destructive Testing etc. in engineer applied field.
At present, the application of piezoelectric type ultrasonic transducer is occupied an leading position.Relative to piezoelectric type ultrasonic transducer, capacitive micromachined ultrasonic transducer (CMUT) Yin Qiyi produces by batch, and cost is low, frequency domain is wide, application time receive publicity without the need to matching layer, be considered to the product replacing piezoelectric type ultrasonic transducer.Now, the frequency response of the cellular construction that existing CMUT is single is the characteristic frequency response of single a certain frequency band.If (this CMUT cellular construction or its array structure are used for transmitting and receiving, then two kinds of operator schemes will be disturbed mutually.) sonac is in the past confined to simple function, or for medical imaging, or for therapeutic treatment etc.
Utility model content
The purpose of this utility model is to provide a kind of broadband ultrasonic transducer composite structure meeting multi-frequency demand, can provide the frequency range of wide region and meet the needs of different frequency, improves the definition of ultrasonic imaging.
The technical solution adopted in the utility model is:
A kind of broadband ultrasonic transducer composite structure meeting multi-frequency demand, comprise the first electrode layer of the bottom set gradually from down to up, insulating barrier, low frequency, high frequency resonate cavity layer, dielectric resilience vibration rete and the second electrode lay, first electrode layer adopts the first electrode slice, the upper surface of the first electrode slice is connected with the lower surface of insulating barrier, low frequency, high frequency resonate cavity layer comprises the high-frequency insulation supporter of low frequency insulation support plate and frame structure, the lower surface of low frequency insulation support plate connects the upper surface of insulating barrier, the upper surface of low frequency insulation support plate connects the lower surface of dielectric resilience vibration rete, low frequency insulation support plate is provided with row groove penetrating up and down, each groove and insulating barrier and dielectric resilience vibrate rete and form a low frequency vacuum chamber, a high-frequency insulation supporter is provided with in each low frequency vacuum chamber, the upper surface of high-frequency insulation supporter and dielectric resilience vibrate rete lower surface and fit, and the lower surface of high-frequency insulation supporter does not contact with insulating barrier upper surface, the second electrode lay comprises multiple second electrode slice, the upper surface that lower surface and the dielectric resilience of each second electrode slice vibrate rete is connected, and correspondence arranges second electrode slice above each low frequency vacuum chamber, under original state, between the first electrode slice and the second electrode slice during non-making alive, groove, dielectric resilience vibrating membrane and insulating barrier form low frequency vacuum chamber, when the alternating voltage applied when between the first electrode slice and the second electrode slice is no more than the collapse voltage of low frequency vacuum chamber, dielectric resilience vibration rete does up and down reciprocatingly vibration action, and high-frequency insulation supporter lower surface does not contact with insulating barrier upper surface, when the alternating voltage applied when between the first electrode slice and the second electrode slice exceedes the collapse voltage of low frequency vacuum chamber, dielectric resilience vibration rete does up and down reciprocatingly vibration action, and high-frequency insulation supporter lower surface contacts with insulating barrier upper surface, the space in high-frequency insulation supporter, insulating barrier and dielectric resilience vibrating membrane form high-frequency vacuum chamber.
Described dielectric resilience vibration rete adopts a whole dielectric resilience vibrating membrane or adopts multiple little dielectric resilience vibrating reed, and each little dielectric resilience vibrating reed correspondence is located at the top of each groove and is tightly connected.
The degree of depth of described groove is greater than the height of high-frequency insulation supporter.
The utility model forms an overall composite structure by the first electrode layer of the bottom that sets gradually from down to up, insulating barrier, low frequency, high frequency resonate cavity layer, dielectric resilience vibration rete and the second electrode lay, in composite structure, vibrate rete by row's groove that low frequency insulation support plate is provided with and insulating barrier and dielectric resilience again form a low frequency vacuum chamber, form an independently cellular construction by each low frequency vacuum chamber and the second electrode slice of top, the first electrode slice of below, independently cellular construction can freely control; By controlling independently cellular construction, making independently cellular construction to be operated in high frequency state, also can be operated in low frequency state, and can Time-sharing control, the frequency range of wide region be provided and meet different frequency needs, thus being applied to the occasion of multifrequency demand.
The beneficial effects of the utility model have:
1, in medical practice, convert high frequency or low frequency part as required and work, be applied to medical diagnosis or therapeutic treatment respectively, and do not need to apply two cover autonomous devices respectively or system meets Diagnosis and Treat respectively.
2, simultaneously, this composite structure is by the arrangement of array, and composition mixed cell, increases the frequency range of composite structure, effectively can improve the definition of ultrasonic imaging.
3, the utility model can be applicable to ultrasound detection, as ultrasonic navigation, range finding, location and industrial ultrasonic Non-Destructive Testing (NDE).
Accompanying drawing explanation
Fig. 1 is structural representation sectional view of the present utility model;
Fig. 2 is the structural representation sectional view under dielectric resilience of the present utility model vibration rete adopts the low frequency state of a whole dielectric resilience vibrating membrane;
Fig. 3 is the structural representation sectional view under dielectric resilience of the present utility model vibration rete adopts the low frequency state of multiple little dielectric resilience vibrating reed;
Fig. 4 is the structural representation sectional view under dielectric resilience of the present utility model vibration rete adopts the high-frequency structure state of a whole dielectric resilience vibrating membrane;
Fig. 5 is the structural representation sectional view of the cellular construction mixing array in composite structure of the present utility model.
Detailed description of the invention
As depicted in figs. 1 and 2, the utility model comprises the first electrode layer of the bottom set gradually from down to up, insulating barrier 5, low frequency, high frequency resonate cavity layer, dielectric resilience vibration rete and the second electrode lay, first electrode layer adopts the first electrode slice 6, the upper surface of the first electrode slice 6 is connected with the lower surface of insulating barrier 5, low frequency, high frequency resonate cavity layer comprises the high-frequency insulation supporter 3 of low frequency insulation support plate 2 and frame structure, the lower surface of low frequency insulation support plate 2 connects the upper surface of insulating barrier 5, the upper surface of low frequency insulation support plate 2 connects the lower surface of dielectric resilience vibration rete, low frequency insulation support plate 2 is provided with row groove penetrating up and down, each groove and insulating barrier 5 and dielectric resilience vibrate rete and form a low frequency vacuum chamber 4-1, a high-frequency insulation supporter 3 is provided with in each low frequency vacuum chamber 4-1, each low frequency vacuum chamber 4-1 structure is exactly an independently cellular construction.The degree of depth of groove is greater than the height 1.5 times of high-frequency insulation supporter 3, the upper surface of high-frequency insulation supporter 3 and dielectric resilience vibrate rete lower surface and fit, and the lower surface of high-frequency insulation supporter 3 does not contact with insulating barrier 5 upper surface, the second electrode lay comprises multiple second electrode slice 7, the lower surface of each second electrode slice 7 is connected with the upper surface that dielectric resilience vibrates rete, and above each low frequency vacuum chamber 4-1, correspondence arranges second electrode slice 7; Under original state, between the first electrode slice 6 and the second electrode slice 7 during non-making alive, groove, dielectric resilience vibrating membrane 1 and insulating barrier 5 form low frequency vacuum chamber 4-1; When the alternating voltage applied when between the first electrode slice 6 and the second electrode slice 7 is no more than the collapse voltage of low frequency vacuum chamber 4-1, dielectric resilience vibration rete does up and down reciprocatingly vibration action, and high-frequency insulation supporter 3 lower surface does not contact with insulating barrier 5 upper surface; When the alternating voltage applied when between the first electrode slice 6 and the second electrode slice 7 exceedes the collapse voltage of low frequency vacuum chamber 4-1, dielectric resilience vibration rete does up and down reciprocatingly vibration action, and high-frequency insulation supporter 3 lower surface contacts with insulating barrier 5 upper surface, the space in high-frequency insulation supporter 3, insulating barrier 5 and dielectric resilience vibrating membrane 1 form high-frequency vacuum chamber 4-2.
Described dielectric resilience vibration rete adopts a whole dielectric resilience vibrating membrane 1 or adopts multiple little dielectric resilience vibrating reed, and each little dielectric resilience vibrating reed correspondence is located at the top of each groove and is tightly connected.
Below in conjunction with accompanying drawing, describe operation principle of the present utility model in detail:
As shown in Figure 1, be separated by low frequency vacuum chamber 4-1 between the first electrode slice 6 and the second electrode slice 7, thus have electric capacity between two electrodes.Between the first electrode slice 6 and the second electrode slice 7, apply voltage, from electrostatic principle, dielectric resilience vibrating membrane 1 can along with execute alive change to the first electrode slice 6 close to or away from, thus launch acoustic signals.In addition, when there is ul-trasonic irradiation in the external world in dielectric resilience vibrating membrane 1, dielectric resilience vibrating membrane 1 also can due to the effect of acoustic pressure, and to the first electrode slice 6 close to or away from, thus two interelectrode electric capacity are changed, then pass through pick-up circuit, detect acoustic signals, analyze acoustic wave character.Pick-up circuit is wherein the existing mature technology in this area, and its operation principle repeats no more.
When composite structure is in low frequency configuration state, is the first application form of the present utility model, the application scenario of low frequency demand can be met.
First electrode slice 6 of each low frequency vacuum chamber 4-1 in composite structure and the second electrode slice 7 of top, below forms an independently cellular construction, when the alternating voltage applied when between the first electrode slice 6 and each second electrode slice 7 is no more than the collapse voltage of each low frequency vacuum chamber 4-1, each cellular construction in whole composite structure can be made all to be in application low frequency configuration state, thus whole composite structure is applied to low frequency use.When dielectric resilience vibration rete adopts whole dielectric resilience vibrating membrane 1 structure, sectional view as shown in Figure 2.Or dielectric resilience vibration rete adopts multiple little dielectric resilience vibrating reed, each little dielectric resilience vibrating reed correspondence is located at the top of each groove and is tightly connected, sectional view as shown in Figure 3.Be separated by low frequency vacuum chamber 4-1 between first electrode slice 6 and the second electrode slice 7, thus there is electric capacity between the first electrode slice 6 and the second electrode slice 7.When the first electrode slice 6 and the second electrode slice 7 apply to be no more than the alternating voltage subsided of low frequency vacuum chamber 4-1, from electrostatic principle, dielectric resilience vibrating membrane 1 can along with execute alive change to the first electrode slice 6 close to or away from, dielectric resilience vibration rete does up and down reciprocatingly vibration action, so groove and insulating barrier 5 and dielectric resilience vibrate rete form a low frequency vacuum chamber 4-1, meanwhile, acoustic signals can be launched due to vibration.In addition, when there is ul-trasonic irradiation in the external world in dielectric resilience vibrating membrane 1, dielectric resilience vibrating membrane 1 also can due to the effect of acoustic pressure to the first electrode slice 6 close to or away from, the electric capacity between the first electrode slice 6 and the second electrode slice 7 can be made to change, pass through pick-up circuit, detect acoustic signals, analyze acoustic wave character.
When composite structure is in high-frequency structure state, is the second application form of the present utility model, the application scenario of high frequency requirements can be met.
When the alternating voltage applied when between the first electrode slice 6 and each second electrode slice 7 exceedes the collapse voltage of each low frequency vacuum chamber 4-1, each cellular construction in whole composite structure can be made all to be in application high-frequency structure state, thus whole composite structure is applied to high frequency use.Be illustrated in figure 4 dielectric resilience vibration rete and adopt sectional view under the high-frequency structure state of whole dielectric resilience vibrating membrane 1 structure, dielectric resilience vibration rete adopts multiple little dielectric resilience vibrating reed not in mapping.When the first electrode slice 6 and the second electrode slice 7 are applied above the alternating voltage subsided of low frequency vacuum chamber 4-1, from electrostatic principle, dielectric resilience vibrating membrane 1 can along with execute alive change to the first electrode slice 6 close to or away from, dielectric resilience vibration rete does up and down reciprocatingly vibration action, and high-frequency insulation supporter 3 lower surface contacts with insulating barrier 5 upper surface, and space in high-frequency insulation supporter 3, insulating barrier 5 and dielectric resilience vibrating membrane 1 form high-frequency vacuum chamber 4-2, meanwhile, acoustic signals can be launched due to vibration.In addition, when there is ul-trasonic irradiation in the external world in dielectric resilience vibrating membrane 1, dielectric resilience vibrating membrane 1 also can due to the effect of acoustic pressure to the first electrode slice 6 close to or away from, the electric capacity between the first electrode slice 6 and the second electrode slice 7 can be made to change, pass through pick-up circuit, detect acoustic signals, analyze acoustic wave character.
When composite structure is in low frequency, high frequency mixed structure state, is the third application form of the present utility model, the application scenario of high frequency requirements can be met.
Because each cellular construction in composite structure is independently, can independently arrange, so each cellular construction all can be operated in high frequency state or low frequency state independently.Certainly, need according to the actual needs, composite structure is carried out to the permutation and combination of array, the form of combination is varied, such as, as shown in Figure 5, the alternating voltage applied between the first electrode slice 6 in first cellular construction and the second electrode slice 7 is no more than the collapse voltage of low frequency vacuum chamber 4-1, first cellular construction is made to be operated in low frequency state, three cellular constructions (the i.e. second unit structure connected successively after first cellular construction, 3rd cellular construction and the 4th cellular construction) be all applied above the collapse voltage of low frequency vacuum chamber 4-1, three cellular constructions are made to be operated in high frequency state below, then first cellular construction and second unit structure, 3rd cellular construction, 4th cellular construction is combined with a first new array element, unit is below combined as the new array element as the first array element successively equally, such as, the 5th cellular construction is made to be operated in low frequency state, 6th cellular construction, 7th cellular construction and the 8th cellular construction are operated in high frequency state, then the 5th cellular construction and the 6th cellular construction, 7th cellular construction, the second array element that 8th unit combination one is new, by that analogy follow-up.In like manner, the various combination of composite structure, as the arranged in parallel or cross arrangement of high and low frequency structure between recombiner unit, the new array element of different mixing can be formed, can form without the dissimilar array combination form of array, both can meet different frequencies, in turn increase the bandwidth of frequency response, greatly reduce again the graing lobe that is harmful to and secondary lobe simultaneously, different performance requirements can be reached, meet different application scenarios.
, because each cellular construction in composite structure is independently, can independently arrange, the single cellular construction in composite structure can be applied to frequency applications state, also can be applied to low frequency applications state meanwhile.No matter be high frequency or low frequency, its frequency values can be identical, also can not be identical.By controlling the voltage of the individual unit structure of composite structure respectively, make it by necessarily regularly arranged, and by Time-sharing control, timesharing export multiple frequency and meet multifrequency application scenario.Under this pattern, individual unit structure independently exports separately or receives the signal of different frequency, thus meets the application scenario of multifrequency.Both can be applied to ultrasonic imaging diagnosis, and also can be applied to ultrasonic therapy or be applied to Diagnosis and Treat simultaneously, the application scenario of multi-frequency demand can be met.
Claims (3)
1. one kind meets the broadband ultrasonic transducer composite structure of multi-frequency demand, it is characterized in that: the first electrode layer comprising the bottom set gradually from down to up, insulating barrier, low frequency, high frequency resonate cavity layer, dielectric resilience vibration rete and the second electrode lay, first electrode layer adopts the first electrode slice, the upper surface of the first electrode slice is connected with the lower surface of insulating barrier, low frequency, high frequency resonate cavity layer comprises the high-frequency insulation supporter of low frequency insulation support plate and frame structure, the lower surface of low frequency insulation support plate connects the upper surface of insulating barrier, the upper surface of low frequency insulation support plate connects the lower surface of dielectric resilience vibration rete, low frequency insulation support plate is provided with row groove penetrating up and down, each groove and insulating barrier and dielectric resilience vibrate rete and form a low frequency vacuum chamber, a high-frequency insulation supporter is provided with in each low frequency vacuum chamber, the upper surface of high-frequency insulation supporter and dielectric resilience vibrate rete lower surface and fit, and the lower surface of high-frequency insulation supporter does not contact with insulating barrier upper surface, the second electrode lay comprises multiple second electrode slice, the upper surface that lower surface and the dielectric resilience of each second electrode slice vibrate rete is connected, and correspondence arranges second electrode slice above each low frequency vacuum chamber, under original state, between the first electrode slice and the second electrode slice during non-making alive, groove, dielectric resilience vibrating membrane and insulating barrier form low frequency vacuum chamber, when the alternating voltage applied when between the first electrode slice and the second electrode slice is no more than the collapse voltage of low frequency vacuum chamber, dielectric resilience vibration rete does up and down reciprocatingly vibration action, and high-frequency insulation supporter lower surface does not contact with insulating barrier upper surface, when the alternating voltage applied when between the first electrode slice and the second electrode slice exceedes the collapse voltage of low frequency vacuum chamber, dielectric resilience vibration rete does up and down reciprocatingly vibration action, and high-frequency insulation supporter lower surface contacts with insulating barrier upper surface, the space in high-frequency insulation supporter, insulating barrier and dielectric resilience vibrating membrane form high-frequency vacuum chamber.
2. the broadband ultrasonic transducer composite structure meeting multi-frequency demand according to claim 1, it is characterized in that: described described dielectric resilience vibration rete adopts a whole dielectric resilience vibrating membrane or adopts multiple little dielectric resilience vibrating reed, and each little dielectric resilience vibrating reed correspondence is located at the top of each groove and is tightly connected.
3. the broadband ultrasonic transducer composite structure meeting multi-frequency demand according to claim 2, is characterized in that: the degree of depth of described groove is greater than the height of high-frequency insulation supporter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201520418459.3U CN204724434U (en) | 2015-06-17 | 2015-06-17 | Meet the broadband ultrasonic transducer composite structure of multi-frequency demand |
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| CN201520418459.3U CN204724434U (en) | 2015-06-17 | 2015-06-17 | Meet the broadband ultrasonic transducer composite structure of multi-frequency demand |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104907241A (en) * | 2015-06-17 | 2015-09-16 | 河南大学 | Broadband ultrasonic transducer composite mechanism satisfying multifrequency requirement |
| CN106714055A (en) * | 2016-12-31 | 2017-05-24 | 苏州清听声学科技有限公司 | Back plate multi-channel electrostatic transducer |
| CN107812691A (en) * | 2017-09-28 | 2018-03-20 | 瑞声科技(新加坡)有限公司 | Piezoelectric ultrasonic transducer and preparation method thereof |
-
2015
- 2015-06-17 CN CN201520418459.3U patent/CN204724434U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104907241A (en) * | 2015-06-17 | 2015-09-16 | 河南大学 | Broadband ultrasonic transducer composite mechanism satisfying multifrequency requirement |
| CN106714055A (en) * | 2016-12-31 | 2017-05-24 | 苏州清听声学科技有限公司 | Back plate multi-channel electrostatic transducer |
| CN106714055B (en) * | 2016-12-31 | 2019-04-19 | 苏州清听声学科技有限公司 | Back pole plate multichannel electrostatic transducer |
| CN107812691A (en) * | 2017-09-28 | 2018-03-20 | 瑞声科技(新加坡)有限公司 | Piezoelectric ultrasonic transducer and preparation method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20151028 Effective date of abandoning: 20171114 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20151028 Effective date of abandoning: 20171114 |