CN204706536U - A kind of Kaufman ion source of metallic cathode structure - Google Patents
A kind of Kaufman ion source of metallic cathode structure Download PDFInfo
- Publication number
- CN204706536U CN204706536U CN201520397788.4U CN201520397788U CN204706536U CN 204706536 U CN204706536 U CN 204706536U CN 201520397788 U CN201520397788 U CN 201520397788U CN 204706536 U CN204706536 U CN 204706536U
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- CN
- China
- Prior art keywords
- ion source
- negative electrode
- kaufman
- metallic
- cathode structure
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model relates to a kind of ion source, particularly a kind of Kaufman ion source of metallic cathode structure.Described negative electrode is hollow barrel structure, and the anode of device is positioned at the center of barreled structure.The utility model beneficial effect: through the Novel ion source of modified node method, easily broken filament cathode, replaces with metallic netted structural, improves the useful life of negative electrode.
Description
Technical field
The present invention relates to a kind of ion source, particularly a kind of Kaufman ion source of metallic cathode structure.
Background technology
Ion beaming film deposition and ion beam material modification technology are important branch of material science, and the research and extension of ion beam technology achieves huge achievement.At present, ionogenic kind is a lot, Kaufman (Kaufman) ion source uses the device comparatively widely film being carried out to ion beam bombardment, the basic functional principle of this device is: first produce plasma by negative electrode at ion source inner chamber, then by two-layer or three layers of anode grid, ion is extracted from plasma chamber, the ion high directivity that this ion source produces, ion energy bandwidth-intensive, can be widely used in vacuum coating.
The electronics of conventional Kaufman ion source is launched by cathode filament, and the electronics of transmitting is attracted by barreled positive plate face, and electronics and the inert gas of transmitting are mixed to form ion current.The defect of this structure is that filament is easily broken, needs often to change filament cathode.
Utility model content
The utility model solves above-mentioned technological deficiency, designs a kind of Kaufman ion source of metallic cathode structure.
A Kaufman ion source for metallic cathode structure, comprises air admission hole, anode and negative electrode, it is characterized in that: described negative electrode is hollow barrel structure, and the anode of device is positioned at the center of barreled structure.
The negative electrode of described device is metallic netted structural.
The utility model beneficial effect: through the Novel ion source of modified node method, easily broken filament cathode, replaces with metallic netted structural, improves the useful life of negative electrode.
Accompanying drawing explanation
Fig. 1 is Kaufman ion source modified node method
Embodiment
As shown in Figure 1, inert gas is entered by the air admission hole 1 of Kaufman ion source, with the electron beam hybrid reaction of negative electrode 3 anode 2, described negative electrode 3 is in hollow barrel structure, the anode 2 of device is positioned at the center of barreled structure, electronics sends from negative electrode 3 barreled structure, in the process of impacting anode 2, form ion current with inert gas.The utility model beneficial effect: through the Novel ion source of modified node method, easily broken filament cathode, replaces with metallic netted structural, improves the useful life of negative electrode.
Claims (2)
1. the Kaufman ion source of a metallic cathode structure, comprise air admission hole (1), anode (2) and negative electrode (3), it is characterized in that: described negative electrode (3) is in hollow barrel structure, and the anode (2) of device is positioned at the center of barreled structure.
2. the Kaufman ion source of a kind of metallic cathode structure according to claim 1, is characterized in that: the negative electrode (3) of described device is metallic netted structural.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520397788.4U CN204706536U (en) | 2015-06-08 | 2015-06-08 | A kind of Kaufman ion source of metallic cathode structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520397788.4U CN204706536U (en) | 2015-06-08 | 2015-06-08 | A kind of Kaufman ion source of metallic cathode structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204706536U true CN204706536U (en) | 2015-10-14 |
Family
ID=54286135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520397788.4U Expired - Fee Related CN204706536U (en) | 2015-06-08 | 2015-06-08 | A kind of Kaufman ion source of metallic cathode structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204706536U (en) |
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2015
- 2015-06-08 CN CN201520397788.4U patent/CN204706536U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151014 Termination date: 20160608 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |