CN204696089U - Filter, filtration system and semiconductor board - Google Patents
Filter, filtration system and semiconductor board Download PDFInfo
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- CN204696089U CN204696089U CN201520463417.1U CN201520463417U CN204696089U CN 204696089 U CN204696089 U CN 204696089U CN 201520463417 U CN201520463417 U CN 201520463417U CN 204696089 U CN204696089 U CN 204696089U
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- filter
- agent structure
- condensation column
- air inlet
- gas outlet
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Abstract
The utility model provides a kind of filter, filtration system and semiconductor board, and wherein, filter comprises: agent structure, and one end of described agent structure is provided with air inlet, and the other end is provided with gas outlet; Condensation column, described condensation column is positioned at described agent structure; Screen pack, described screen pack is between described condensation column and the inwall of described agent structure, and one end of described screen pack is connected with described gas outlet.Waste gas in reaction chamber enters into agent structure from the air inlet of agent structure, dust in waste gas is filtered net filtration and falls, and liquid by-product is deposited on described condensation column through the condensation of condensation column in waste gas, reduce concentration that is liquid in waste gas and solid-state processing by products, thus make the gas that enters in pump more clean, reduce described pump because of liquid or solid-state processing by products is stuck and the risk that lost efficacy, improve the yield of efficiency and product, reduce cost.
Description
Technical field
The utility model relates to IC manufacturing field, especially a kind of filter, filtration system and semiconductor board.
Background technology
Every processing procedure of wafer needs to complete in the reaction chamber on board, described reaction chamber is connected with a dry pump, containing a large amount of liquid state or solid-state processing by products in waste gas in described reaction chamber, these liquid state or solid-state processing by products can enter into described dry pump along with waste gas, cause described dry pump seizure, about have the described dry pump of 25% every year because liquid or solid-state processing by products is stuck, cause the wafer loss in described reaction chamber, reduce the yield of product, add cost.
Utility model content
The purpose of this utility model is to provide a kind of filter, filtration system and semiconductor board, has solved the problem that pump in prior art lost efficacy because processing by products is stuck.
In order to achieve the above object, the utility model provides a kind of filter, filtration system and semiconductor board, and wherein, described filter comprises: agent structure, and one end of described agent structure is provided with air inlet, and the other end is provided with gas outlet;
Condensation column, described condensation column is positioned at described agent structure;
Screen pack, described screen pack is between described condensation column and the inwall of described agent structure, and one end of described screen pack is connected with described gas outlet.
Preferably, in above-mentioned filter, described filter also comprises a condenser pipe, and described condenser pipe is arranged along the outer wall of described condensation column.
Preferably, in above-mentioned filter, described condenser pipe is provided with a water inlet end and a water side, and described water inlet end and described water side are positioned at the outside of described agent structure.
Preferably, in above-mentioned filter, the U-shaped encapsulation of described condenser pipe is on the outer wall of described condensation column.
Preferably, in above-mentioned filter, described condenser pipe is arranged along the sidewall of described condensation column in the shape of a spiral.
Preferably, in above-mentioned filter, described air inlet is positioned at the center of described agent structure one end, and described gas outlet is positioned at the center of the other end of described agent structure.
Preferably, in above-mentioned filter, described agent structure is cylinder shape.
Preferably, in above-mentioned filter, one end and the described air inlet of described condensation column are just right, the other end and described gas outlet just right.
Preferably, in above-mentioned filter, the circular in cross-section of described air inlet, the circular in cross-section of described gas outlet.
Preferably, in above-mentioned filter, the cross section of described air inlet is polygon, and the cross section of described gas outlet is polygon.
The utility model further provides a kind of filtration system, comprises filter as above, reaction chamber and a pump, and the gas outlet of described reaction chamber is connected with the air inlet of described filter, and the gas outlet of described filter is connected with the air inlet of described pump.
The utility model more provides a kind of semiconductor board, comprises filtration system as above.
In filter, filtration system and semiconductor board that the utility model provides, waste gas in reaction chamber enters into agent structure from the air inlet of agent structure, dust in waste gas is filtered net filtration and falls, and liquid by-product is deposited on described condensation column through the condensation of condensation column in waste gas, reduce concentration that is liquid in waste gas and solid-state processing by products, thus make the gas that enters in pump more clean, reduce described pump because of liquid or solid-state processing by products is stuck and the risk that lost efficacy, improve efficiency and product yield, reduce cost.
Accompanying drawing explanation
Fig. 1 is the structural representation of filtration system in the utility model embodiment;
Fig. 2 is the cutaway view of filter in the utility model embodiment;
In figure; 101-reaction chamber; 102-filter; 103-pump;
201-agent structure; The air inlet of 202-agent structure; The gas outlet of 203-agent structure; 204-condensation column; 205-screen pack; 206-condenser pipe; 207-water inlet end; 208-water side.
Embodiment
Below in conjunction with schematic diagram, embodiment of the present utility model is described in detail.According to following description and in conjunction with claims, advantage of the present utility model and feature will be clearer.It should be noted that, accompanying drawing all adopts the form that simplifies very much and all uses non-ratio accurately, only in order to object that is convenient, aid illustration the utility model embodiment lucidly.
The utility model embodiment provides a kind of filtration system, as shown in Figure 1, comprise: reaction chamber 101, one pump 103 and a filter 102, the gas outlet of described reaction chamber 101 is connected with the air inlet of described filter 102, mist containing processing by products in described reaction chamber 101 enters into described filter 102 from the gas outlet of described reaction chamber 101, through the filtration of described filter 102, to wherein filter out by most processing by products, then the gas greatly reducing processing by products content enters into the air inlet of described pump 103 from the gas outlet of described filter 102, reduce the content entering processing by products in the gas of described pump 103, thus reduce the deposition of processing by products in described pump 103, reduce the risk that described pump 103 is stuck because of the deposition of processing by products, thus reduce described pump 103 because processing by products deposition the risk that lost efficacy, enhance productivity, reduce production cost.
Wherein, as shown in Figure 2, described filter 102 comprises: agent structure 201, one end of described agent structure 201 is provided with air inlet 202, the other end is provided with gas outlet 203, the waste gas that processing by products concentration in described reaction chamber 101 is higher enters into described agent structure 201 from described air inlet 202, then leaves described agent structure 201 from described gas outlet 203.
Described agent structure 201 is a cylinder, concrete, and the cross section of described agent structure 201 can be circular or oval, can also be polygon.Further, the cross section of described air inlet 202 and described gas outlet 203 also can be circular, oval or polygon.As long as described air inlet 202 mates with the gas outlet of described reaction chamber 101, described gas outlet 203 is mated with the air inlet of described pump.
Further, described agent structure 201 is a hollow structure, and a condensation column position 204 is in described agent structure 201, and on the outer wall of described condensation column 204, be provided with a condenser pipe 206, and namely described condenser pipe 206 is also positioned at described agent structure 201 inside.
Described condenser pipe 206 has water inlet end 207 and a water side 208, described water inlet end 207 and described water side 208 are all positioned at the outside of described agent structure 201, described condenser pipe 206 is arranged along the outer wall of described condensation column 204, concrete, described condenser pipe 206 can be placed on the outer wall of described condensation column 204 with U-shape, namely, described condenser pipe 206 is arranged along the sidewall of described condensation column 204, through the top of described condensation column 204, and then arrange along the side relative with described sidewall, described condenser pipe 206 is placed on described condensation column 204 in falling U-shaped.Or described condenser pipe 206 can also be arranged along the sidewall of described condensation column 204 in the shape of a spiral.In other embodiments of the present utility model, described condenser pipe 206 can also be arranged with the outer wall of other forms along described condensation column 204, lowers the temperature to described condensation column 204 as long as can cross.
In use, condensed fluid or gas is made to enter into described condenser pipe 206 from described water inlet end 207, at condensate liquid or gas in the process of described condenser pipe 206, realize the cooling to described condensation column 204, simultaneously, make the high-temp waste gas condensation entering into described agent structure 201, and the processing by products in described high-temp waste gas is deposited on described condensation column 204, thus reduce the concentration of processing by products in described waste gas.
Described filter 102 also comprises a screen pack 205, and described screen pack 205 is between described condensation column 204 and the inwall of described agent structure 201, and one end of described screen pack 205 is connected with the gas outlet 203 of described agent structure.Concrete, one end of described condensation column 204 and the air inlet 202 of described agent structure just right, the gas outlet 203 of the other end and described agent structure is just right, the other end of described screen pack 205 is between one end and the air inlet 202 of described agent structure of described condensation column 204, described screen pack 205 is netted, and the netted aperture of described screen pack is between 0.3mm to 0.5mm, namely, 0.3mm< aperture <0.5mm is such as 0.35mm, 0.4mm or 0.45mm etc.
Described screen pack is column, and such as, described screen pack can be cylindrical shape.More excellent, as shown in Figure 2, the edge indentation in the vertical section of described screen pack, can strengthen the contact area of solid-state processing by products and described screen pack in waste gas like this, improves the efficiency that described filter screen filtration falls solid-state processing by products.
When the waste gas in described reaction chamber 101 enters into described agent structure 201, described screen pack 205 faces the air inlet of described agent structure 201, improves the efficiency that in waste gas, dust processing by products is blocked.
More excellent, in the utility model embodiment, the air inlet 202 of described agent structure is positioned at the center of described agent structure 201 one end, and the gas outlet 203 of described agent structure is positioned at the center of described agent structure 201 other end.
The utility model embodiment also provides a kind of semiconductor board, and described semiconductor board comprises filtration system as above.
For the filtration system of installing described filter or semiconductor board, as long as regular cleaning described filter, the useful life of pump can be extended, reduce the loss caused because of the stuck of described pump, reduce cost.
To sum up, at the filter that the utility model embodiment provides, in filtration system and semiconductor board, waste gas in reaction chamber enters into agent structure from the air inlet of agent structure, dust in waste gas is filtered net filtration and falls, and liquid by-product is deposited on described condensation column through the condensation of condensation column in waste gas, reduce concentration that is liquid in waste gas and solid-state processing by products, thus make the gas that enters in pump more clean, reduce described pump because of liquid or solid-state processing by products is stuck and the risk that lost efficacy, improve efficiency and product yield, reduce cost.
Above are only preferred embodiment of the present utility model, any restriction is not played to the utility model.Any person of ordinary skill in the field; not departing from the scope of the technical solution of the utility model; the technical scheme disclose the utility model and technology contents make the variations such as any type of equivalent replacement or amendment; all belong to the content not departing from the technical solution of the utility model, still belong within protection range of the present utility model.
Claims (12)
1. a filter, is characterized in that, comprising:
Agent structure, one end of described agent structure is provided with air inlet, and the other end is provided with gas outlet;
Condensation column, described condensation column is positioned at described agent structure;
Screen pack, described screen pack is between described condensation column and the inwall of described agent structure, and one end of described screen pack is connected with described gas outlet.
2. filter as claimed in claim 1, it is characterized in that, described filter also comprises a condenser pipe, and described condenser pipe is arranged along the outer wall of described condensation column.
3. filter as claimed in claim 2, it is characterized in that, described condenser pipe is provided with a water inlet end and a water side, and described water inlet end and described water side are all positioned at the outside of described agent structure.
4. filter as claimed in claim 3, is characterized in that, the described condenser pipe shape that takes the shape of the letter U is placed on the outer wall of described condensation column.
5. filter as claimed in claim 3, it is characterized in that, described condenser pipe is arranged along the sidewall of described condensation column in the shape of a spiral.
6. filter as claimed in claim 1, it is characterized in that, described air inlet is positioned at the center of described agent structure one end, and described gas outlet is positioned at the center of the other end of described agent structure.
7. filter as claimed in claim 1, it is characterized in that, described agent structure is cylinder shape.
8. filter as claimed in claim 1, it is characterized in that, one end and the described air inlet of described condensation column are just right, the other end and described gas outlet just right.
9. filter as claimed in claim 1, is characterized in that, the circular in cross-section of described air inlet, the circular in cross-section of described gas outlet.
10. filter as claimed in claim 1, it is characterized in that, the cross section of described air inlet is polygon, and the cross section of described gas outlet is polygon.
11. 1 kinds of filtration systems, it is characterized in that, comprise as the filter in claim 1-10 as described in any one, reaction chamber and a pump, the gas outlet of described reaction chamber is connected with the air inlet of described filter, and the gas outlet of described filter is connected with the air inlet of described pump.
12. 1 kinds of semiconductor boards, is characterized in that, comprise filtration system as claimed in claim 11.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520463417.1U CN204696089U (en) | 2015-07-01 | 2015-07-01 | Filter, filtration system and semiconductor board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520463417.1U CN204696089U (en) | 2015-07-01 | 2015-07-01 | Filter, filtration system and semiconductor board |
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| Publication Number | Publication Date |
|---|---|
| CN204696089U true CN204696089U (en) | 2015-10-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520463417.1U Active CN204696089U (en) | 2015-07-01 | 2015-07-01 | Filter, filtration system and semiconductor board |
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| CN (1) | CN204696089U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111430281A (en) * | 2020-05-25 | 2020-07-17 | 中国科学院微电子研究所 | Reaction chamber, control method of reaction chamber and semiconductor processing equipment |
| CN111584405A (en) * | 2020-05-25 | 2020-08-25 | 中国科学院微电子研究所 | Reaction chamber and semiconductor processing equipment |
-
2015
- 2015-07-01 CN CN201520463417.1U patent/CN204696089U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111430281A (en) * | 2020-05-25 | 2020-07-17 | 中国科学院微电子研究所 | Reaction chamber, control method of reaction chamber and semiconductor processing equipment |
| CN111584405A (en) * | 2020-05-25 | 2020-08-25 | 中国科学院微电子研究所 | Reaction chamber and semiconductor processing equipment |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |