CN204667003U - Substrate container cleaning device - Google Patents
Substrate container cleaning device Download PDFInfo
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- CN204667003U CN204667003U CN201520384283.4U CN201520384283U CN204667003U CN 204667003 U CN204667003 U CN 204667003U CN 201520384283 U CN201520384283 U CN 201520384283U CN 204667003 U CN204667003 U CN 204667003U
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- container
- jet
- cleaning device
- substrate
- substrate container
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Abstract
The utility model relates to a kind of substrate container cleaning device, comprise: the container with through hole, first jet is movably set with above described container, described first jet connects a driving mechanism, described first jet also connects a feed pipe, described first jet is vertically arranged at above described container, and described container bottom is arranged at intervals with multiple support.The cleaning performance of the utility model to substrate container is good, and cleaning efficiency is high, saves scavenging period greatly.
Description
Technical field
The utility model relates to substrate production technical field, particularly relates to substrate container cleaning device.
Background technology
At TFT (Thin Film Transistor, thin film transistor (TFT))-LCD (Liquid Crystal Display, liquid crystal display) in substrate production process, TFT-LCD substrate needs to hold with basket to transport, in order to ensure the cleanliness of glass substrate in basket, need to carry out periodic cleaning to basket, if especially basket inside is not cleaned up, inner dust is easy to the yield polluteing substrate and then have influence on substrate.The nozzle of current cleaning basket is being horizontally placed on above basket, and in basket cleaning process, nozzle can not extend into the inside of basket, has had influence on the thorough cleaning of the inner corner of basket and support.
Utility model content
Based on this, be necessary, for the existing cleaning container poor effect holding substrate, basket upper section can only be cleaned to, the defect that cleaning efficiency is low, a kind of new substrate container cleaning device is provided.
A kind of substrate container cleaning device, comprise: the container with through hole, first jet is movably set with above described container, described first jet connects a driving mechanism, described first jet also connects a feed pipe, described first jet is vertically arranged at above described container, and described container bottom is arranged at intervals with multiple support.
In one embodiment, described feed pipe is flexible pipe.
In one embodiment, described driving mechanism is set to cylinder.
In one embodiment, described first jet quantity is two.
In one embodiment, be provided with below described container and drive with described container the rotating mechanism be connected.
In one embodiment, described rotating mechanism is set to electric rotating machine.
In one embodiment, described through hole is arranged at the bottom of described container.
In one embodiment, described through hole is arranged at the side of described container.
In one embodiment, described outside of containers is provided with at least one second nozzle.
In one embodiment, described second nozzle quantity is four.
Aforesaid substrate container washing apparatus, good to the cleaning performance of substrate container, and cleaning efficiency is high, saves scavenging period greatly.
Aforesaid substrate container washing apparatus, also to the comprehensive cleaning in substrate container inside, improves cleaning performance further.
Aforesaid substrate container washing apparatus, also accelerates cleaning current flowing velocity, improves cleaning efficiency further.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of a kind of substrate container cleaning device of the utility model embodiment;
Fig. 2 is the other direction schematic diagram of the container of the utility model embodiment;
Fig. 3 is a direction cut-open view of the container of the utility model embodiment.
Embodiment
For the ease of understanding the present invention, below with reference to relevant drawings, the present invention is described more fully.Better embodiment of the present invention is given in accompanying drawing.But the present invention can realize in many different forms, is not limited to embodiment described herein.On the contrary, provide the object of these embodiments be make to disclosure of the present invention understand more thorough comprehensively.
It should be noted that, when element is called as " being arranged at " another element, directly can there is element placed in the middle in it on another element or also.When an element is considered to " connection " another element, it can be directly connected to another element or may there is centering elements simultaneously.Term as used herein " vertical ", " level ", "left", "right" and similar statement just for illustrative purposes, do not represent it is unique embodiment.
Unless otherwise defined, all technology used herein and scientific terminology are identical with belonging to the implication that those skilled in the art of the present invention understand usually.The object of term used in the description of the invention herein just in order to describe concrete embodiment, is not intended to be restriction the present invention.Term as used herein " and/or " comprise arbitrary and all combinations of one or more relevant Listed Items.
As shown in Figure 1, it is the substrate container cleaning device 10 of the utility model one preferred embodiment, comprising:
There is the container 100 of through hole, such as, described container 100 is set to square, square container 100 mates with substrate shape, be more suitable for placing substrate, and more substrate can be placed, described container 100 top has opening, first jet 200 is movably set with above described container 100, described first jet 200 connects a driving mechanism 220, described first jet 200 also connects a feed pipe 210, described first jet 200 is vertically arranged at above described container 100, described first jet 200 is mobile in container 100 under described driving mechanism 220 drives, such as move along on the vertical direction of top, as Fig. 2, shown in Fig. 3, described container 100 bottom interval is provided with multiple support 110, described support 110 is for supporting placement substrate, first jet 200 is inner for vertically stretching into container 100, to container 100 internal spray, rinse, such as, first jet 200 arranges horizontal-jet end, for horizontal-jet current, especially can spray between the corner of container 100 and support 110, rinse, make dust along with rinse current wash away, and flowed out by the through hole of container 100, such as, described container 100 is basket.
For making first jet 200 can flexibly above container 100 and container 100 internal motion, such as, described feed pipe is flexible pipe 210 and driving mechanism 220, flexible pipe 210 is also connected with water supply installation (not shown), and water supply installation is that first jet 200 supplies water, and current output to first jet 200 through flexible pipe 210, and flexible pipe 210 has good retractility, such as, described flexible pipe 210 is bellows 210, and and for example described flexible pipe 210 is collapsible tubes 210; Such as, described flexible pipe 210 is plastic flexible pipe 210.Flexible pipe 210 elongates or shortens for moving with first jet 200, makes the motion of first jet 200 more flexible.
For improving the sensitivity of first jet 200, such as, described driving mechanism 220 is set to cylinder 220, and cylinder 220 has less volume and less weight, can be first jet 200 in the vertical direction and driving force is provided, avoid impacting the motion of first jet 200 and water supply simultaneously.
For improving cleaning performance further, improve cleaning efficiency, described first jet 200 quantity is two, two first jet 200 ejection efficiencies are higher, cleaning performance is better, and improves cleaning efficiency, such as, described first jet 200 quantity is three, and for example, described first jet 200 quantity is four, such as, first jet 200 quantity can be arranged according to the amount of capacity of container 100, meets the cleaning demand of different vessels 100.Such as, the angle of two first jet is 0 to 160 degree, and namely the angle of both injection directions is 0 to 160 degree, and and for example, the angle of two first jet is 120 to 150 degree, and namely the angle of both injection directions is 120 to 150 degree; And for example, two first jet be arranged in parallel, and namely its injection direction be arranged in parallel, and and for example, the shower nozzle of two first jet is positioned at same level position; Like this, more fully hydro-peening effect can be obtained.
For improving cleaning performance further, make each orientation, inside of container 100, each position all can fully be rinsed, be provided with below described container 100 and drive with described container 100 rotating mechanism 300 be connected, described rotating mechanism 300 drives described container 100 to rotate, make first jet 200 when container 100 internal spray, each orientation of the flushable container 100 of current sprayed and position, in one embodiment, described rotating mechanism 300 is set to electric rotating machine 300, described container 100 at the uniform velocity rotates under electric rotating machine 300 drives, improve cleaning performance, such as, after cleaning, electric rotating machine 300 accelerates to rotate, the water droplet be attached on container 100 is thrown away, container 100 can be made at short notice air-dry.
Can flow out rapidly for making the current after cleaning, such as, through hole (not shown) can be arranged on the bottom of container 100, be convenient to current discharge, such as through hole is arranged on the side of container 100, and for example through hole is arranged on bottom and the side of container 100, and like this, current can be discharged from the bottom of container 100 and side fast simultaneously.
For improving cleaning performance further, such as, described container 100 arranged outside has at least one second nozzle 400, second nozzle 400 current spray towards container 100 outer wall, container 100 outer wall is cleaned, such as, described second nozzle 400 quantity is four, four second nozzles 400 are arranged at the outside in four faces of square container 100, such as, first jet 200 sprays in container 100 interior, and second nozzle 400 sprays externally to container 100 at container 100, accelerate current flowing velocity, improve cleaning efficiency further.
Each technical characteristic of the above embodiment can combine arbitrarily, for making description succinct, the all possible combination of each technical characteristic in above-described embodiment is not all described, but, as long as the combination of these technical characteristics does not exist contradiction, be all considered to be the scope that this instructions is recorded.
The above embodiment only have expressed several embodiment of the present utility model, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to utility model patent scope.It should be pointed out that for the person of ordinary skill of the art, without departing from the concept of the premise utility, can also make some distortion and improvement, these all belong to protection domain of the present utility model.Therefore, the protection domain of the utility model patent should be as the criterion with claims.
Claims (10)
1. a substrate container cleaning device, it is characterized in that, comprise the container with through hole, first jet is movably set with above described container, described first jet connects a driving mechanism, described first jet also connects a feed pipe, and described first jet is vertically arranged at above described container, and described container bottom is arranged at intervals with multiple support.
2. substrate container cleaning device according to claim 1, is characterized in that, described feed pipe is flexible pipe.
3. substrate container cleaning device according to claim 1, is characterized in that, described driving mechanism is set to cylinder.
4. the substrate container cleaning device according to any one of claim 1-3, is characterized in that, described first jet quantity is two.
5. substrate container cleaning device according to claim 1, is characterized in that, is provided with and drives with described container the rotating mechanism be connected below described container.
6. substrate container cleaning device according to claim 5, is characterized in that, described rotating mechanism is set to electric rotating machine.
7. substrate container cleaning device according to claim 1, is characterized in that, described through hole is arranged at the bottom of described container.
8. substrate container cleaning device according to claim 1, is characterized in that, described through hole is arranged at the side of described container.
9. the substrate container cleaning device according to claim 7 or 8, is characterized in that, described outside of containers is provided with at least one second nozzle.
10. substrate container cleaning device according to claim 9, is characterized in that, described second nozzle quantity is four.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520384283.4U CN204667003U (en) | 2015-06-05 | 2015-06-05 | Substrate container cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520384283.4U CN204667003U (en) | 2015-06-05 | 2015-06-05 | Substrate container cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204667003U true CN204667003U (en) | 2015-09-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520384283.4U Active CN204667003U (en) | 2015-06-05 | 2015-06-05 | Substrate container cleaning device |
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| CN (1) | CN204667003U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114789177A (en) * | 2022-04-02 | 2022-07-26 | 蚌埠高华电子股份有限公司 | TFT-LCD glass substrate etching, soaking and rinsing device and method |
-
2015
- 2015-06-05 CN CN201520384283.4U patent/CN204667003U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114789177A (en) * | 2022-04-02 | 2022-07-26 | 蚌埠高华电子股份有限公司 | TFT-LCD glass substrate etching, soaking and rinsing device and method |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |