CN204649651U - A kind ofly mate the charged particle photographic means that line is collimated beam - Google Patents

Abstract

The utility model discloses and a kind ofly mate the charged particle photographic means that line is collimated beam, comprise beam-flow transmission line and optical imagery structure, described beam-flow transmission line comprises the leading portion quadrupole electromagnet group and back segment quadrupole electromagnet group that are centrosymmetric, optical imagery structure is positioned at the end of beam-flow transmission line, wherein leading portion quadrupole electromagnet group is identical with back segment quadrupole electromagnet group shape and include four blocks of identical quadrupole electromagnets, the Central Symmetry point of leading portion quadrupole electromagnet group and back segment quadrupole electromagnet group goes back setting angle collimating apparatus, the transmission matrix of leading portion quadrupole electromagnet group adopts quadravalence matrix M: quadravalence matrix M for meeting the incident condition of collimated beam is: M ₁₁=0, M ₂₂=0, M ₃₃=0, M ₄₄the quadravalence transmission matrix of=0, the forward and backward subscript of above matrix element represents the row and column at this element place respectively.The utility model adopts said structure, adopts point-to-point imaging, and coupling line is collimated beam, can overcome the defect that pointolite photographic image is fuzzy, improves the resolution of taking a picture.

Description

A kind ofly mate the charged particle photographic means that line is collimated beam

Technical field

The utility model relates to charged particle photographic art, particularly, relates to and a kind ofly mates the charged particle photographic means that line is collimated beam.

Background technology

It is a kind of in-duction linac technology that charged particle is taken a picture.Utilize accurate monoenergetic charged particle beam through sample to obtain image, and then obtain by the information of the needs such as density, the space concern of product sample interior in the same old way.

Charged particle is taken a picture can two kinds of forms, and the first is direct in-duction linac, and the second is the in-duction linac adopting electromagnetic lens to focus on.Adopt condenser lens can improve the resolution of image.

Focused electromagnetic lens also have two kinds of forms, and the first is axially symmetric structure, and the second is nonaxisymmetric structure.The focussing force of axially symmetric structure electromagnetic lens is more weak, can only use the particle that energy is lower, takes a picture to thinner sample.The focused electromagnetic lens of nonaxisymmetric structure can form much higher focussing force, thus are applicable to the photograph of thick sample.

Condenser lens has certain requirement to the charged particle beam injected, fuzzy with color difference eliminating, the matching condition of Here it is line.In nonaxisymmetrical focusing magnetic lens conventional at present, the matching condition of line is pointolite bundle, and this is a serious image blurring factor under a lot of experimental conditions, is unfavorable for improving the resolution of taking a picture.

Utility model content

Technical problem to be solved in the utility model is to provide a kind ofly mates the charged particle photographic means that line is collimated beam, adopts point-to-point imaging, and coupling line is collimated beam, can overcome the defect that pointolite photographic image is fuzzy, improves the resolution of taking a picture.

The technical scheme in the invention for solving the above technical problem is: a kind ofly mate the charged particle photographic means that line is collimated beam, comprise beam-flow transmission line and optical imagery structure, described beam-flow transmission line comprises the leading portion quadrupole electromagnet group and back segment quadrupole electromagnet group that are centrosymmetric, optical imagery structure is positioned at the end of beam-flow transmission line, wherein leading portion quadrupole electromagnet group is identical with back segment quadrupole electromagnet group shape and include four blocks of identical quadrupole electromagnets, the Central Symmetry point of leading portion quadrupole electromagnet group and back segment quadrupole electromagnet group goes back setting angle collimating apparatus, the transmission matrix of leading portion quadrupole electromagnet group adopts quadravalence matrix M:

Quadravalence matrix M for meeting the incident condition of collimated beam is: M ₁₁=0, M ₂₂=0, M ₃₃=0, M ₄₄the quadravalence transmission matrix of=0, the forward and backward subscript of above matrix element represents the row and column at this element place respectively.

What this programme adopted is the condenser lens of nonaxisymmetric structure, and condenser lens can improve the resolution of image, and in addition, the focused electromagnetic lens of nonaxisymmetric structure can form much higher focussing force, thus are applicable to the photograph of thick sample.In at present conventional nonaxisymmetrical focusing magnetic lens, the matching condition of line is pointolite bundle, easily causes serious image blurring in existing charged particle is taken a picture.And this programme utilizes the magnetic lens transmission structure of the point-to-point imaging of eight pieces of quadrupole electromagnet organization center symmetries, and the restrictive condition of the incident condition of the collimated beam obtained according to theory deduction, utilize ripe software for calculation to calculate the parameter of each magnet, make whole system form the function of point-to-point imaging; Then according to physical problem as improve take a picture resolution need the angular alignment scope that Angle collimator is set; Finally, place opto-electronic conversion screen at system end, and utilize CCD camera to receive image.In this transmission structure, the matching condition of line adopts collimated beam, but not pointolite bundle, thus overcome the fuzzy defect of pointolite photographic image, improve the resolution of photograph.Need the beam dynamics software for calculation utilizing accelerator field conventional during design, such as Transport, Trace3D etc., carry out the parameter matching of element.

Further, two blocks of level Four magnet are had to be positioned at above transverse axis in leading portion quadrupole electromagnet group, other two blocks of level Four magnet are positioned at below transverse axis, are positioned at the level Four magnet above transverse axis and are positioned at the level Four magnet equidistantly alternately arrangement in the horizontal direction below transverse axis.Transverse axis be shielded by take a picture sample and electro-optic conversion between the horizontal linear that formed.

Further, level Four magnet B 1 in level Four magnet A 1 in leading portion quadrupole electromagnet group and A3 and rear four sections of group of magnets and B3 are focusing quadrupole magnet, and the level Four magnet B 2 in the level Four magnet A 2 in addition in leading portion quadrupole electromagnet group and A4 and rear four sections of group of magnets and B4 are and defocus quadrupole electromagnet.In the flow direction, quadrupole electromagnet A1, A3, B1 are identical with the magnet current direction of B3, and level Four magnet A 2, A3, B2 are identical with the magnet current direction of B3, and the direction of current of these two groups of magnet is contrary simultaneously.

Further, level Four magnet B 1 in level Four magnet A 1 in leading portion quadrupole electromagnet group and A4 and rear four sections of group of magnets is all equal with the current value of B4, and the level Four magnet B 2 in the level Four magnet A 2 in addition in leading portion quadrupole electromagnet group and A3 and rear four sections of group of magnets is all equal with the current value of B3.Wherein current value be set to artificial setting.

Further, also arrange by photograph sample in leading portion quadrupole electromagnet group front end, by photograph sample and the Angle collimator Central Symmetry point symmetry relative to leading portion quadrupole electromagnet group.

Further, described optical imagery structure comprises electro-optic conversion screen and CCD camera, electro-optic conversion screen with by the Central Symmetry point symmetry of photograph sample relative to beam-flow transmission line, electro-optic conversion screen also with the Central Symmetry point symmetry of Angle collimator relative to back segment quadrupole electromagnet group.

Further, charged particle electron gun is also being set by the front end of photograph sample.

To sum up, the beneficial effects of the utility model are:

What 1, this programme adopted is the condenser lens of nonaxisymmetric structure, condenser lens can improve the resolution of image, and the focused electromagnetic lens of nonaxisymmetric structure can form much higher focussing force, thus being applicable to the photograph of thick sample, this programme utilizes 8 blocks of quadrupole electromagnets to form the magnetic lens of point-to-point imaging in addition, and transmission matrix is negative unit matrix, the inverted image of 1:1, the matching condition of line adopts collimated beam, overcomes the defect that pointolite is taken a picture, and improves the resolution of taking a picture.

2, only used focusing quadrupole magnet in this programme and defocus quadrupole electromagnet, and do not use deflection magnet, therefore first approximation upper/lower positions and angle all with can fall apart irrelevant, reduce the impact of external factor on photographic resolution, put forward the resolution of taking a picture further.

Accompanying drawing explanation

Fig. 1 is structural representation of the present utility model;

Fig. 2 is the particle trajectory figure of the proton of 11MeV.

Mark and corresponding parts title in accompanying drawing: 1, charged particle electron gun; 2, by photograph sample; 3, leading portion quadrupole electromagnet group; 4, back segment quadrupole electromagnet group; 5, Angle collimator; 6, electro-optic conversion screen; 7, CCD camera; 8, focusing quadrupole magnet; 9, quadrupole electromagnet is defocused.

Embodiment

Below in conjunction with embodiment and accompanying drawing, to the detailed description further of the utility model do, but embodiment of the present utility model is not limited thereto.

Embodiment 1:

As shown in Figure 1-2, the utility model comprises beam-flow transmission line and optical imagery structure, described beam-flow transmission line comprises the leading portion quadrupole electromagnet group 3 and back segment quadrupole electromagnet group 5 that are centrosymmetric, optical imagery structure is positioned at the end of beam-flow transmission line, wherein leading portion quadrupole electromagnet group 3 is identical with back segment quadrupole electromagnet group 5 shape and include four blocks of identical quadrupole electromagnets, the Central Symmetry point of leading portion quadrupole electromagnet group 3 and back segment quadrupole electromagnet group 5 goes back setting angle collimating apparatus 4, and the transmission matrix of leading portion quadrupole electromagnet group 3 adopts quadravalence matrix M:

Quadravalence matrix M for meeting the incident condition of collimated beam is: M ₁₁=0, M ₂₂=0, M ₃₃=0, M ₄₄the quadravalence transmission matrix of=0, the forward and backward subscript of above matrix element represents the row and column at this element place respectively.

Incident bar: the M of the collimated beam that quadravalence transmission matrix M meets ₁₁=0, M ₂₂=0, M ₃₃=0, M ₄₄=0, be the transmission matrix utilizing quadrupole electromagnet to arrange, obtain according to Lorentz rule.According to " charged particle beam optics " (Lv Jianqin, Higher Education Publishing House, 2003) pandect, charged particle moves in magnetic field, be subject to the impact of Lorentz force, namely Lorentz rule be make use of to the manipulation of the direction of motion of charged particle, describe the impact of complicated magnetic field on charged particle path for convenience, rise to further and express the information such as the intensity in magnetic field, direction and shape by matrix form.

For the transmission system of monoenergetic charged particle, if need imaging, also just mean, particle only depends on its position at object plane in the position as plane, and has nothing to do with its angle at object plane.

In charged particle transmission system, generally represent the state of particle by six-dimensional coordinate, represent the performance of system with sextuple transmission matrix, the expression formula of six-dimensional coordinate is as follows:

$X=\left[\begin{array}{c}x\\ x^{\′}\\ y\\ y^{\′}\\ z\\ \mathrm{\δ}\end{array}\right]---\left(1\right)$

In formula, X is six-dimensional coordinate, and x represents particle levels coordinate, x ' expression particle levels angle, and y represents particle vertical coordinate, and y ' expression particle vertical angle, z represents the particle position coordinate of transmission direction, and δ represents the deviation of particle energy.Here transmission direction represents the direction of motion of the particle beams, and horizontal direction and vertical direction are all describing perpendicular in the plane of transmission direction.

According to " charged particle beam optics " (Lv Jianqin work, Higher Education Publishing House, 2004), for the transmission structure that the utility model proposes, only use quadrupole electromagnet, do not use deflection magnet, thus first approximation upper/lower positions and angle all with can fall apart irrelevant, the expression formula of sextuple transmission matrix is as follows:

$R=\left[\begin{array}{cccccc}{R}_{11}& R_{12}& 0& 0& 0& 0\\ R_{21}& R_{22}& 0& 0& 0& 0\\ 0& 0& R_{33}& R_{34}& 0& 0\\ 0& 0& R_{43}& R_{44}& 0& 0\\ 0& 0& 0& 0& 1& 0\\ 0& 0& 0& 0& 0& 1\end{array}\right]---\left(2\right)$

Here R is sextuple transmission matrix, and each matrix element all represents the transport property of system.

And the realization of imaging function realizes by the following:

If the initial six-dimensional coordinate of particle is $\left[\begin{array}{c}{x}_0\\ x_0^{\′}\\ y_0\\ y_0^{\′}\\ {\mathrm{\φ}}_0\\ {\mathrm{\δ}}_0\end{array}\right],$ According to (2) formula, can obtain particle at the position coordinates as plane is:

x＝R ₁₁x ₀+R ₁₂x′ ₀(3)

y＝R ₃₃y ₀+R ₃₄y′ ₀(4)

Also known according to (2) formula, in order to form imaging function, namely particle has nothing to do in the position of picture plane and its initial angle, needs

R ₁₂＝0 (5)

R ₃₄＝0 (6)

If charged particle is not monoenergetic, also have the requirement of De-dispersion, namely particle can not be relevant at the energy of object plane to it in the position of picture plane, and its second order color matching condition is as follows:

In the system of reality, because particle generally has energy deviation, therefore need achromatism.According to " charged particle beam optics " (Lv Jianqin work, Higher Education Publishing House, 2004), for the bunch of quadrupole electromagnet composition, there is no single order aberration, need to eliminate second order aberration, removing method is as follows, (3) formula Taylor expansion to second order:

x＝(R ₁₁+R′ ₁₁δ)x ₀+(R ₁₂+R′ ₁₂δ)x′ ₀(7)

If assuming that input line is band modulation, namely the angle of particle is relevant with position then:

In formula, w is the index of modulation, it is the additive term that non-ideal factor causes.

Recycling image-forming condition (5) formula can expand into:

From (9) formula, in order to eliminate the second order aberration item relevant to position, demand fulfillment

R′ ₁₁+wR′ ₁₂＝0 (10)

In like manner have

R′ ₃₃+wR′ ₃₄＝0 (11)

Matching condition due to line in this programme adopts collimated beam coupling, and collimated beam represents that the angle of particle and its position have nothing to do, namely in (8) formula,

w＝0 (12)

Again according to (10) and (11) formula, can obtain collimated beam matching condition is:

R′ ₁₁＝0 (13)

R′ ₃₃＝0 (14)

A) in this programme, angular alignment condition setting is as follows: assuming that be N from the transmission matrix of the angular alignment plane of object plane, then in the L-expression of angular alignment plane particle similar (3), (4) formula, and just R becomes N.Angular alignment needs the position of particle on this plane only relevant with its initial angle, and this just shows as follows:

N ₁₁＝0 (15)

N ₃₃＝0 (16)

In the utility model, 8 blocks of magnet are divided into leading portion quadrupole electromagnet group and back segment quadrupole electromagnet group, the layout of leading portion quadrupole electromagnet group and back segment quadrupole electromagnet group is about Angle collimator Central Symmetry, for the symmetrical bunch be made up of quadrupole electromagnet, its sextuple transmission matrix has features:

R ₃₄＝R ₁₂(17)

R ₄₃＝R ₂₁(18)

R ₁₁＝R ₄₄(19)

R ₂₂＝R ₃₃(20)

Utilize symbol above, the transmission matrix of total is R, and the transmission matrix of front 4 blocks of magnet is M,

According to (17)-(20) formula, the transmission matrix in an actual Water demand x direction, for the above-mentioned reasons, following R matrix reduction is:

$R=\left[\begin{array}{cc}{R}_{11}& R_{12}\\ R_{21}& R_{22}\end{array}\right]---\left(21\right)$

Metzler matrix is also similar is $M=\left[\begin{array}{cccc}{M}_{11}& M_{12}& M_{13}& M_{14}\\ M_{21}& M_{22}& M_{23}& M_{24}\\ M_{31}& M_{32}& M_{33}& M_{34}\\ M_{41}& M_{42}& M_{43}& M_{44}\end{array}\right],$ From the layout of magnet, front 4 blocks of quadrupole electromagnets are the same with the transmission matrix of rear 4 blocks of quadrupole electromagnets, therefore:

R＝M ²＝-I+τM (22)

Here τ=M ₁₁+ M ₂₂for the mark of matrix M.

B) image-forming condition of the program is: if the mark τ of matrix M is 0, then transmission matrix R is negative unit matrix, obviously meets image-forming condition (5) and (6),

M ₁₁+M ₂₂＝0 (23)

C) to meet the incident condition of collimated beam as follows for the program:

According to (22) formula, for the particle departing from ideal capacity, the expression formula of its transmission matrix unit is

R _jk＝-δ _jk+τ(Δ)M _jk(Δ) (24)

Here δ _jkfor δ function, be 1 during j=k, otherwise be 0, to the differentiate of momentum spread Δ, obtain

$R_{\mathrm{jk}}^{\′}={\left(\frac{{\mathrm{dR}}_{\mathrm{jk}}}{\mathrm{d\Δ}}\right)}_{\mathrm{\Δ}=0}={(M_{\mathrm{jk}}\frac{\mathrm{d\τ}}{\mathrm{d\Δ}}+\mathrm{\τ}\frac{{\mathrm{dM}}_{\mathrm{jk}}}{\mathrm{d\Δ}})}_{\mathrm{\Δ}=0}={\mathrm{\τ}}^{\′}{M}_{\mathrm{jk}}---\left(25\right)$

Therefore,

R′ ₁₁＝τ′M ₁₁(26)

In conjunction with collimated beam matching condition (13), known:

M ₁₁＝0 (27)

Again according to (23) formula, can obtain:

M ₂₂＝0 (28)

In like manner obtain the condition in y direction

M ₃₃＝0 (29)

M ₄₄＝0 (30)

D) to meet angular alignment condition as follows for the program:

On the symmetrical plane of front 4 blocks of quadrupole electromagnets and rear 4 blocks of quadrupole electromagnets, according to (27,29) formula, obviously this plane meets angular alignment condition (15,16).

In sum, for the structure of 8 blocks of magnet, only need the transmission matrix of front 4 blocks of magnet to meet (27) and (28) formula, then whole system is the system of point-to-point imaging, and its coupling line is collimated beam.

For the proton of 11MeV, have employed 8 blocks of quadrupole electromagnets, devise an actual scheme, parameter and the positional representation of each element are as follows:

Table one

This coupling line is the total length of the charged particle photographic means of collimated beam is 4.4 meters, and utilize simulation softward MyBOC to calculate, particle trajectory is as shown in Figure 2, visible, and this is the system of a point-to-point one-tenth inverted image, and its central plane is angular alignment plane.Parameter value is given, its R ' according to Transport ₁₁with R ' ₃₃be 0, thus its to fit into feam column be collimated beam.In table one magnetic field gradient be on the occasion of time for focusing on level Four magnet, for time negative for defocusing level Four magnet.

What this programme adopted is the condenser lens of nonaxisymmetric structure, and condenser lens can improve the resolution of image, and in addition, the focused electromagnetic lens of nonaxisymmetric structure can form much higher focussing force, thus are applicable to the photograph of thick sample.In at present conventional nonaxisymmetrical focusing magnetic lens, the matching condition of line is pointolite bundle, easily causes serious image blurring in existing charged particle is taken a picture.And this programme utilizes the magnetic lens transmission structure of the point-to-point imaging of eight pieces of quadrupole electromagnet organization center symmetries, and the restrictive condition of the incident condition of the collimated beam obtained according to theory deduction, utilize ripe software for calculation to calculate the parameter of each magnet, make whole system form the function of point-to-point imaging; Then according to physical problem as improve take a picture resolution need the angular alignment scope that Angle collimator is set; Finally, place opto-electronic conversion screen at system end, and utilize CCD camera to receive image.In this transmission structure, the matching condition of line adopts collimated beam, but not pointolite bundle, thus overcome the fuzzy defect of pointolite photographic image, improve the resolution of photograph.Need the beam dynamics software for calculation utilizing accelerator field conventional during design, such as Transport, Trace3D etc., carry out the parameter matching of element.

Embodiment 2:

The present embodiment is preferably as follows on the basis of embodiment 1: have two blocks of level Four magnet to be positioned at above transverse axis in leading portion quadrupole electromagnet group 3, other two blocks of level Four magnet are positioned at below transverse axis, are positioned at the level Four magnet above transverse axis and are positioned at the level Four magnet equidistantly alternately arrangement in the horizontal direction below transverse axis.

According to the energy of adopted charged particle beam in this programme, select the quadrupole electromagnet being applicable to this energy; And the distance between magnet is rationally set according to restrictive conditions such as the intensity of quadrupole electromagnet and the sizes in place; Utilize the matching feature of software, according to these four restrictive conditions of (27)-(30), calculate the intensity of quadrupole electromagnet.Level Four magnet B 1 in level Four magnet A 1 in leading portion quadrupole electromagnet group 3 wherein and A3 and rear four sections of group of magnets 5 and B3 are focusing quadrupole magnet 8, and the level Four magnet B 2 in the level Four magnet A 2 in addition in leading portion quadrupole electromagnet group 3 and A4 and rear four sections of group of magnets 5 and B4 are and defocus quadrupole electromagnet 9.In the flow direction, quadrupole electromagnet A1, A3, B1 are identical with the magnet current direction of B3, and level Four magnet A 2, A3, B2 are identical with the magnet current direction of B3, and the direction of current of these two groups of magnet is contrary simultaneously.

Level Four magnet B 1 in level Four magnet A 1 in leading portion quadrupole electromagnet group 3 and A4 and rear four sections of group of magnets 5 is all equal with the current value of B4, and the level Four magnet B 2 in the level Four magnet A 2 in addition in leading portion quadrupole electromagnet group 3 and A3 and rear four sections of group of magnets 5 is all equal with the current value of B3.

Also arrange by photograph sample 2 in leading portion quadrupole electromagnet group 3 front end, by photograph sample 2 and the Central Symmetry point symmetry of Angle collimator 4 relative to leading portion quadrupole electromagnet group 3.

Optical imagery structure comprises electro-optic conversion screen 6 and CCD camera 7, electro-optic conversion screen 6 with by the Central Symmetry point symmetry of photograph sample 2 relative to beam-flow transmission line, electro-optic conversion screen 6 also with the Central Symmetry point symmetry of Angle collimator 4 relative to back segment quadrupole electromagnet group 5.

By the front end of photograph sample 2, charged particle electron gun 1 is also being set.

The above; it is only preferred embodiment of the present utility model; not do any pro forma restriction to the utility model, every any simple modification, equivalent variations done above embodiment according to technical spirit of the present utility model, all falls within protection domain of the present utility model.

Claims (7)

1. one kind mates the charged particle photographic means that line is collimated beam, comprise beam-flow transmission line and optical imagery structure, it is characterized in that, described beam-flow transmission line comprises the leading portion quadrupole electromagnet group (3) and back segment quadrupole electromagnet group (5) that are centrosymmetric, optical imagery structure is positioned at the end of beam-flow transmission line, wherein leading portion quadrupole electromagnet group (3) is identical with back segment quadrupole electromagnet group (5) shape and include four blocks of identical quadrupole electromagnets, the Central Symmetry point of leading portion quadrupole electromagnet group (3) and back segment quadrupole electromagnet group (5) goes back setting angle collimating apparatus (4), the transmission matrix of leading portion quadrupole electromagnet group (3) adopts quadravalence matrix M:

Quadravalence matrix M for meeting the incident condition of collimated beam is: M ₁₁=0, M ₂₂=0, M ₃₃=0, M ₄₄the quadravalence transmission matrix of=0, the forward and backward subscript of above matrix element represents the row and column at this element place respectively.

2. according to claim 1ly a kind ofly mate the charged particle photographic means that line is collimated beam, it is characterized in that, two blocks of level Four magnet are had to be positioned at above transverse axis in leading portion quadrupole electromagnet group (3), other two blocks of level Four magnet are positioned at below transverse axis, are positioned at the level Four magnet above transverse axis and are positioned at the level Four magnet equidistantly alternately arrangement in the horizontal direction below transverse axis.

3. according to claim 2ly a kind ofly mate the charged particle photographic means that line is collimated beam, it is characterized in that, quadrupole electromagnet B1 and B3 in level Four magnet A 1 in leading portion quadrupole electromagnet group (3) and A3 and rear four sections of group of magnets (5) is focusing quadrupole magnet (8), and the level Four magnet B 2 in the level Four magnet A 2 in addition in leading portion quadrupole electromagnet group (3) and A4 and rear four sections of group of magnets (5) and B4 are and defocus quadrupole electromagnet (9).

4. according to claim 3ly a kind ofly mate the charged particle photographic means that line is collimated beam, it is characterized in that, level Four magnet B 1 in level Four magnet A 1 in leading portion quadrupole electromagnet group (3) and A4 and rear four sections of group of magnets (5) is all equal with the current value of B4, and the level Four magnet B 2 in the level Four magnet A 2 in addition in leading portion quadrupole electromagnet group (3) and A3 and rear four sections of group of magnets (5) is all equal with the current value of B3.

5. according to claim 1ly a kind ofly mate the charged particle photographic means that line is collimated beam, it is characterized in that, also arrange in leading portion quadrupole electromagnet group (3) front end by photograph sample (2), by photograph sample (2) and the Central Symmetry point symmetry of Angle collimator (4) relative to leading portion quadrupole electromagnet group (3).

6. a kind ofly according to claim 1 or 5 mate the charged particle photographic means that line is collimated beam, it is characterized in that, described optical imagery structure comprises electro-optic conversion screen (6) and CCD camera (7), electro-optic conversion screen (6) with by the Central Symmetry point symmetry of photograph sample (2) relative to beam-flow transmission line, electro-optic conversion screen (6) also with the Central Symmetry point symmetry of Angle collimator (4) relative to back segment quadrupole electromagnet group (5).

7. according to claim 5ly a kind ofly mate the charged particle photographic means that line is collimated beam, it is characterized in that, charged particle electron gun (1) is also being set by the front end of photograph sample (2).