CN204621910U - The installation positioning tool of double-deck manipulator - Google Patents
The installation positioning tool of double-deck manipulator Download PDFInfo
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- CN204621910U CN204621910U CN201520217190.2U CN201520217190U CN204621910U CN 204621910 U CN204621910 U CN 204621910U CN 201520217190 U CN201520217190 U CN 201520217190U CN 204621910 U CN204621910 U CN 204621910U
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- manipulator
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Abstract
An installation positioning tool for double-deck manipulator, can not only realize installation and the integral operational of leveling of double-deck manipulator front end finger, and decreases the overall maintenance time of equipment and reduce the complexity of horizontal adjustment.Its structure comprises: install positioning baseplate, the locating hole of manipulator lower floor front end finger, the locating hole of front end, manipulator upper strata finger, wherein installing positioning baseplate is symmetrical structure, for positioning mechanical arm levels front end finger, and the accuracy of the locating hole of manipulator lower floor front end finger, the locating hole of front end, manipulator upper strata finger relies on machining accuracy to ensure completely.The utility model is rational in infrastructure, utilize and the symmetry of positioning baseplate and locating hole structure are installed achieve installation to double-deck manipulator and location, do not need the levelness going again to adjust manipulator front end finger after installation, shorten the horizontal adjustment time to whole equipment.It is symmetrical arm structure that this frock is applicable to double-deck manipulator.Manufacture and the applied technical field of semiconductor coated film equipment can be widely used in.
Description
Technical field
The utility model relates to the installation positioning tool based on double-deck manipulator in a kind of semiconductor coated film equipment, in the front end finger mounted that this structure is mainly used in double-deck manipulator and position fixing process, belongs to manufacture and the applied technical field of semiconductor coated film equipment.
Background technology
Existing semiconductor coated film equipment is for improving equipment capacity, major part have employed double-deck manipulator biography and gets sheet, but in each assembling of equipment, displacement, horizontal adjustment and pass in sheet debugging, front end finger mounted, the leveling of double-deck manipulator and to pass built-in testing all more consuming time, leveling process CIMS is complicated, considerably increases the overall maintenance time of equipment.
Summary of the invention
The utility model is for the purpose of solving the problem, devise a kind of novel installation positioning tool structure based on double-deck manipulator, the installation of double-deck manipulator front end finger and the integral operational of leveling can not only be realized, and decrease the overall maintenance time of equipment and reduce the complexity of horizontal adjustment, being particularly useful for double-deck manipulator is symmetrical arm structure.
For achieving the above object, the utility model adopts following technical proposals: the installation positioning tool of double-deck manipulator, comprise and positioning baseplate (1), the locating hole (6) of manipulator lower floor front end finger, the locating hole (7) of front end, manipulator upper strata finger are installed, wherein installing positioning baseplate (1) is symmetrical structure, for positioning mechanical arm levels front end finger, and the accuracy of the locating hole (6) of manipulator lower floor front end finger, the locating hole (7) of front end, manipulator upper strata finger relies on machining accuracy to ensure completely.
Concrete installation method: first the locating hole (7) of front end, the manipulator upper strata finger installing positioning baseplate (1) is alignd with the mounting screw holes on manipulator upper strata arm (4) and fixes, again manipulator lower floor front end finger (2) is encased in the upper fixing and locking in manipulator upper strata arm (4) along the direction of positioning baseplate (1), positioning baseplate (1) then will be installed and pulls down.The installation carrying out manipulator lower floor front end finger (3) is again fixed, the locating hole (6) of the manipulator lower floor front end finger installing positioning baseplate (1) is alignd with the mounting screw holes in manipulator lower floor arm (5) and fixes, again manipulator lower floor front end finger (3) is encased in the upper fixing and locking of manipulator lower floor arm (5) along the direction of positioning baseplate (1), positioning baseplate (1) then will be installed pull down, (8) be manipulator lower floor front end finger and the position relationship installing positioning baseplate, it is more than the embodiment of front end finger on the left of double-deck manipulator.The location swap so locating hole (7) pointed with front end, manipulator upper strata by the locating hole (6) of manipulator lower floor front end finger only needing for the front end finger mounted location embodiment on the right side of double-deck manipulator just can, method of operating is as above.
The beneficial effects of the utility model and feature are:
1, rational in infrastructure, utilize and the symmetry of positioning baseplate and locating hole structure are installed achieve installation to double-deck manipulator and location, do not need the levelness going again to adjust manipulator front end finger after installation, shorten the horizontal adjustment time to whole equipment;
2, this tool structure is applicable to double-deck manipulator is symmetrical arm structure.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model, is also detailed description of the invention of the present utility model.
Detailed description of the invention
Embodiment
With reference to accompanying drawing 1, the installation positioning tool of double-deck manipulator, comprise and positioning baseplate 1, the locating hole 6 of manipulator lower floor front end finger, the locating hole 7 of front end, manipulator upper strata finger are installed, wherein installing positioning baseplate 1 is symmetrical structure, for positioning mechanical arm levels front end finger, and the accuracy of the locating hole 6 of manipulator lower floor front end finger, the locating hole 7 of front end, manipulator upper strata finger relies on machining accuracy to ensure completely.
Concrete installation method: first the locating hole 7 of front end, the manipulator upper strata finger installing positioning baseplate 1 is alignd with the mounting screw holes on manipulator upper strata arm 4 and fixes, again front end, manipulator upper strata finger 2 is encased in fixing and locking on manipulator upper strata arm 4 along the direction of positioning baseplate 1, then installation positioning baseplate 1 is pulled down.The installation carrying out manipulator lower floor front end finger 3 is again fixed, the locating hole 6 installing the manipulator lower floor front end finger of positioning baseplate 1 is alignd with the mounting screw holes on manipulator lower floor arm 5 and fixes, again manipulator lower floor front end finger 3 is encased in fixing and locking on manipulator lower floor arm 5 along the direction of positioning baseplate 1, then installation positioning baseplate 1 is pulled down, the lower floor of manipulator shown in figure front end finger and the position relationship 8 installing positioning baseplate are more than the embodiment of front end finger on the left of double-deck manipulator.The location swap so locating hole 7 pointed with front end, manipulator upper strata by the locating hole 6 of manipulator lower floor front end finger only needing for the front end finger mounted location embodiment on the right side of double-deck manipulator just can, method of operating is as above.
Claims (2)
1. the installation positioning tool of a double-deck manipulator, it is characterized in that: this frock comprises installs positioning baseplate (1), the locating hole (6) of manipulator lower floor front end finger, the locating hole (7) of front end, manipulator upper strata finger, wherein installing positioning baseplate (1) is symmetrical structure, points for positioning mechanical arm levels front end.
2. the installation positioning tool of a kind of double-deck manipulator as claimed in claim 1, it is characterized in that: for the finger mounted location, front end on the right side of double-deck manipulator, only need the location swap of the locating hole (7) pointed with front end, manipulator upper strata by the locating hole (6) of manipulator lower floor front end finger just can.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520217190.2U CN204621910U (en) | 2015-04-13 | 2015-04-13 | The installation positioning tool of double-deck manipulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520217190.2U CN204621910U (en) | 2015-04-13 | 2015-04-13 | The installation positioning tool of double-deck manipulator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204621910U true CN204621910U (en) | 2015-09-09 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520217190.2U Active CN204621910U (en) | 2015-04-13 | 2015-04-13 | The installation positioning tool of double-deck manipulator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204621910U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108890560A (en) * | 2018-06-26 | 2018-11-27 | 西北机电工程研究所 | Full-automatic conducting wire positioning and clamping mechanism |
-
2015
- 2015-04-13 CN CN201520217190.2U patent/CN204621910U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108890560A (en) * | 2018-06-26 | 2018-11-27 | 西北机电工程研究所 | Full-automatic conducting wire positioning and clamping mechanism |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: No.900 Shuijia, Hunnan District, Shenyang City, Liaoning Province Patentee after: Tuojing Technology Co.,Ltd. Address before: 110179 3rd floor, No.1-1 Xinyuan street, Hunnan New District, Shenyang City, Liaoning Province Patentee before: PIOTECH Co.,Ltd. |