CN204529967U - A kind of high-power mid frequency sputtering power supply - Google Patents

Abstract

A kind of high-power mid frequency sputtering power supply, comprise be linked in sequence air switch, recover protective tube, three-phase bridge rectification circuit, filter capacitor, DC/DC umformer, DC/AC umformer soon; It is characterized by: described DC/DC umformer is controlled by control circuit of chopping; Described DC/AC invertor is controlled by inverter control circuit; Described control circuit of chopping output terminal is connected with the control end of DC/DC umformer breaker in middle pipe; The output terminal of described inverter control circuit is connected with the control end of DC/AC invertor breaker in middle pipe.Beneficial effect: increase the reliability of shielding power supply, adopt above-mentioned power supply architecture to reduce power supply cost simultaneously, its kinetic characteristic is good.

Description

A kind of high-power mid frequency sputtering power supply

Technical field

The utility model relates to magnetron sputtering technique field, particularly relates to a kind of high-power mid frequency sputtering power supply.

Background technology

Thin film deposition is under vacuum conditions, utilizes the energetic ion bombardment target material surface in plasma body, makes atom that target is shelled out or ion deposition grow into the film with specific function at matrix surface.Magnetron sputtering technique is the one of thin film deposition processes, is to utilize electromagnetic field to control the movement locus of gas anomaly glow discharge intermediate ion, electronics and the sputter coating process process of distribution situation in vacuum chamber.Medium frequency magnetron sputtering is again the one of magnetron sputtering technique, can overcome the charge accumulated in sputter procedure and electric discharge, efficiently solves the phenomenon that target poison ing is serious, when particularly sputtering the target of insulating material, overcomes the phenomenon that sputter procedure Anodic disappears.Anomalous glow discharge belongs to geseous discharge category, under electric field action gas breakdown and conduction phenomenon be referred to as geseous discharge.Geseous discharge has " glow discharge " and " arc discharge " two kinds of forms.Glow discharge is divided into again " normal glow discharge " and " anomalous glow discharge " two kinds, and they are the basic links producing plasma body in magnetron sputtering plating technological process.And glow discharge is produced by mid frequency sputtering power supply in vacuum chamber.

In prior art, Japanese Patent (JP Laid-Open 10-298754A) discloses a kind of supply unit for sputtering, by realizing stable sputtering below electric discharge initiation pressure, the scattering of the sputtering particle owing to producing with the collision of the rare gas element for sputtering being reduced, step coverage can be improved and improve the compactness of sputtered film.According to the present invention, be provided for the supply unit sputtered, it comprises sputtering direct supply (A), the constant-current circuit (B) be connected with this direct supply, the sputtering source (21) be connected with this constant-current circuit (B), and carry out control and make the electric current exported from constant-current circuit (B) become the control section (11) of constant current.

Chinese patent (application number: CN201220111912) discloses a kind of full digital high-power unipolar pulse magnetron sputtering power supply, comprise EMI filter circuit, three-phase bridge rectifying circuit, low-frequency d filtering circuit, series-resonant inverting circuit, tank circuit, the solid semiconductor switch of IGBT composition and DSP digital signal processing circuit, by DSP high-speed digital video camera circuit, each functional circuit is coordinated, control and management, make the orderly reliable operation of superpower one pole pulsed magnetron sputtering power supply, the utility model stable performance, efficiency high structure is simple, life-span is long.Thus ensure stability and the consistence of film quality, by adjusting frequency and the pulse width of high power pulsed source, the rete of the height densification of different requirement and quality can be prepared.

But, shielding power supply of the prior art, the general structure adopting DC/DC umformer and DC/AC umformer compact cascade type to export.It is the adjustable direct current of voltage that DC/DC umformer is actually the DC power conversion of industrial-frequency alternating current after full-bridge rectification, is responsible for the amplitude adjusted that medium-frequency pulse exports; It is the pulse square wave with double-polarity control that DC/AC umformer is actually DC power conversion, is responsible for the frequency and the duty cycle adjustment that export medium-frequency pulse.Existing power supply some adopt thyristor phase-shift voltage regulating and full-bridge inverting and transformer boost mode to realize medium-frequency pulse to export, because the switching frequency of thyristor is low, cause voltage adjustment characteristic poor, affect coating quality; A part adopts full-bridge inverting rectifying and pressure-regulating boosting mode of connecting with bridge inversion of enjoying a double blessing to realize, and power switch pipe quantity is many, the increase of power supply cost, and Energy control is complicated, affects power supply reliability.

Utility model content

In order to solve defect of the prior art, the utility model discloses a kind of high-power mid frequency sputtering power supply to meet deficiency of the prior art.

A kind of high-power mid frequency sputtering power supply, comprise be linked in sequence air switch, recover protective tube, three-phase bridge rectification circuit, filter capacitor, DC/DC umformer, DC/AC umformer soon; It is characterized by: described DC/DC umformer is controlled by control circuit of chopping; Described DC/AC umformer is controlled by inverter control circuit; Described control circuit of chopping output terminal is connected with the control end of DC/DC umformer breaker in middle pipe; The output terminal of described inverter control circuit is connected with the control end of DC/AC umformer breaker in middle pipe.

Be preferably: described three-phase bridge rectification circuit adopts three phase full bridge rectification integration module.

Be preferably: described filtering circuit adopts each one or each two chemical capacitors of 1000V/4700uF, 1000V/1uF.

Be preferably: described DC/DC umformer comprises switching tube V1, inductance L 1, electric capacity C1, diode D1, diode D2; The described grid of switching tube V1 is connected with the output terminal of control circuit of chopping; The source electrode of switching tube V1 is connected with the anode of filtering circuit output terminal, diode D2; The drain electrode of switching tube V1 is connected with the anode of diode D1, inductance L 1 one end; The negative electrode of described diode D2 is connected with inductance L 1 the other end, electric capacity C1 one end; The negative electrode of described diode D1 is connected with the other end of filtering circuit output terminal, the electric capacity C1 the other end.

Be preferably: DC/AC umformer is full-bridge inverter; Comprise 4 switching tubes; The control end of described four switching tubes connects the output terminal of inverter control circuit; Switching tube S1 source electrode is connected with the drain electrode of switching tube S2; Switching tube S3 source electrode is connected with the drain electrode of switching tube S4; The source electrode of switching tube S1 is connected with the former limit input terminus of a transformer; The source electrode of switching tube S3 is connected with the former limit input terminus the other end of described transformer; The secondary of transformer connects output load.

Be preferably: described DC/AC umformer is integrated IPM power model.

Be preferably: described transformer is high-frequency transformer.

Beneficial effect: in the reliability that three-phase bridge rectification circuit input terminus increases air switch, fast recovery protective tube ensure that power supply simultaneously, adopt above-mentioned power supply architecture to ensure the kinetic characteristic of system is good, cost is lower, it is simple and reliable to control simultaneously.

Accompanying drawing explanation

Fig. 1 is the utility model circuit overall structure iron;

Fig. 2 is the circuit structure diagram of the utility model DC/DC umformer;

Fig. 3 is the circuit structure diagram of the utility model DC/AC umformer;

Fig. 4 is the utility model full bridge inverter equivalent structure figure;

Fig. 5 is the utility model inverter control circuit schematic diagram.

Embodiment

Described in accompanying drawing 1-5.A kind of high-power mid frequency sputtering power supply, comprise be linked in sequence air switch, recover protective tube, three-phase bridge rectification circuit, filter capacitor, DC/DC umformer, DC/AC umformer soon; Described DC/DC umformer is controlled by control circuit of chopping; Described DC/AC umformer is controlled by inverter control circuit; Described control circuit of chopping output terminal is connected with the control end of DC/DC umformer breaker in middle pipe; The output terminal of described inverter control circuit and the control end of DC/AC umformer breaker in middle pipe connect to be pressed.Described three-phase bridge rectification circuit adopts three phase full bridge rectification integration module.Described filtering circuit adopts each one or each two chemical capacitors of 1000V/4700uF, 1000V/1uF.

Described DC/DC umformer comprises switching tube V1, inductance L 1, electric capacity C1, diode D1, diode D2; The described grid of switching tube V1 is connected with the output terminal of control circuit of chopping; The source electrode of switching tube V1 is connected with the anode of filtering circuit output terminal, diode D2; The drain electrode of switching tube V1 is connected with the anode of diode D1, inductance L 1 one end; The negative electrode of described diode D2 is connected with inductance L 1 the other end, electric capacity C1 one end; The negative electrode of described diode D1 is connected with the other end of filtering circuit output terminal, the electric capacity C1 the other end.

Full bridge inverse conversion power main power circuit part is a single-phase full bridge SPWM invertor, the waveform exported due to invertor two brachium pontis is PWM ripple, therefore bridge circuit equivalent can be considered as the voltage source that electric capacity two ends have added an output single-pole SPWM pulse wave, simultaneously, because the loadtype of system is indefinite, consider the load effect of link, by the current perturbation I of load.Also input source is considered as.By above-mentioned equivalence, whole circuit can be equivalent to circuit as shown in Figure 4.In this model, Utopian hypothesis is carried out to circuit: DC bus-bar voltage is invariable; Power switch pipe is ideal component; Fundamental voltage output of voltage frequency and LC filtering circuit shake frequency naturally far below switching frequency.To flow through filter inductance I _lelectric current and filter capacitor both end voltage U _cfor state variables, the state equation of above-mentioned model under continuous regime can be obtained:

$\left[\begin{array}{c}{\stackrel{\·}{u}}_C\\ {\stackrel{\·}{i}}_L\end{array}\right]=\left[\begin{array}{cc}0& \frac{1}{C}\\ -\frac{1}{L}& 0\end{array}\right]\left[\begin{array}{c}{u}_C\\ i_L\end{array}\right]+\left[\begin{array}{cc}0& -\frac{1}{C}\\ \frac{1}{L}& 0\end{array}\right]\left[\begin{array}{c}{u}_n\\ i_o\end{array}\right]$

Above-mentioned equation is converted to the form of complex frequency domain, can derive this system is second-order lag system.

DC/AC umformer is full-bridge inverter; Comprise 4 switching tubes; The control end of described four switching tubes connects the output terminal of invertor; Switching tube S1 source electrode is connected with the drain electrode of switching tube S2; Switching tube S3 source electrode is connected with the drain electrode of switching tube S4; The source electrode of switching tube S1 is connected with the former limit input terminus of a transformer; The source electrode of switching tube S3 is connected with the former limit input terminus the other end of described transformer; The secondary of transformer connects output load.

DC/DC inverter control schematic diagram is see shown in accompanying drawing 5.This pilot circuit preferably adopts TMS320LF2407A control chip, and this chip is a high-speed digital video camera chip, device is integrated with the peripheral hardware of multiple advanced person, utilize the full comparing unit in its EV event manager module, the PWM ripple of 4 tunnels with dead band able to programme and output polarity can be produced easily.General purpose timer (providing time reference), asymmetric waveform producer, programmable dead band generating unit, asymmetric waveform generating unit, output logic control unit and space vector PWM generation unit are used in the generation of PWM waveform, the register of comparing unit is suitably set, required SPWM ripple can be generated easily.Utilize the general thought of regular sampling generation SPWM waveform as follows: the EVA module utilizing DSP, when timer T1 is in continuous incremented/decremented count mode, numerical value change track in counter register (T1CNT) just defines a series of isosceles triangle ripple, as comparand register (CMPRx, x=1,2,3) when the value in is equal with the value in counter register, corresponding pin (PWMx, x=1,2,3,4,5,6) level on will produce saltus step, thus produces a series of contour square-wave signal.The width exporting square wave is determined by the value in comparand register, as long as therefore make the value in comparand register change by sinusoidal rule, required SPWM waveform.In addition, the sampling of volts DS shown in Fig. 5 the data obtained is used for differentiating whether the input voltage of inverter circuit reaches set(ting)value, and after reaching, DSP exports 4 road SPWM actuate signals, and this sampled data also can be used to judging circuit and whether overvoltage and under-voltage fault occur; The sampling of output AC voltage, compared with the magnitude of voltage of setting, drives according to error transfer factor, makes stable output in set(ting)value; DC bus current sampled data is used for differentiating whether over current fault occurs, and temperature sampling data are used for differentiating whether overheating fault occurs.

Pilot circuit in the utility model comprises control circuit of chopping and inverter control circuit, and major function is: the generation of pulse-width signal; The protection of abnormal arc discharge; The generation of constant current, constant voltage, constant output characteristic.

Set forth a lot of detail in the above description so that fully understand the utility model.But above description is only preferred embodiment of the present utility model, the utility model can be much different from alternate manner described here to implement, and therefore the utility model is not by the disclosed concrete restriction implemented above.Any those skilled in the art are not departing under technical solutions of the utility model ambit simultaneously, the Method and Technology content of above-mentioned announcement all can be utilized to make many possible variations and modification to technical solutions of the utility model, or be revised as the Equivalent embodiments of equivalent variations.Every content not departing from technical solutions of the utility model, according to technical spirit of the present utility model to any simple modification made for any of the above embodiments, equivalent variations and modification, all still belongs in the scope of technical solutions of the utility model protection.

Claims (7)

1. a high-power mid frequency sputtering power supply, comprise be linked in sequence air switch, recover protective tube, three-phase bridge rectification circuit, filter capacitor, DC/DC umformer, DC/AC umformer soon; It is characterized by: described DC/DC umformer is controlled by control circuit of chopping; Described DC/AC umformer is controlled by inverter control circuit; Described control circuit of chopping output terminal is connected with the control end of DC/DC umformer breaker in middle pipe; The output terminal of described inverter control circuit is connected with the control end of DC/AC umformer breaker in middle pipe.

2. high-power mid frequency sputtering power supply according to claim 1, is characterized by: described three-phase bridge rectification circuit adopts three phase full bridge rectification integration module.

3. high-power mid frequency sputtering power supply according to claim 1, is characterized by: described filtering circuit adopts each one or each two chemical capacitors of 1000V/4700uF, 1000V/1uF.

4., according to the arbitrary described high-power mid frequency sputtering power supply of claim 1-3, it is characterized by: described DC/DC umformer comprises switching tube V1, inductance L 1, electric capacity C1, diode D1, diode D2; The described grid of switching tube V1 is connected with the output terminal of control circuit of chopping; The source electrode of switching tube V1 is connected with the anode of filter capacitor output terminal, diode D2; The drain electrode of switching tube V1 is connected with the anode of diode D1, inductance L 1 one end; The negative electrode of described diode D2 is connected with inductance L 1 the other end, electric capacity C1 one end; The negative electrode of described diode D1 is connected with the other end of filter capacitor output terminal, the electric capacity C1 the other end.

5., according to the arbitrary described high-power mid frequency sputtering power supply of claim 1-3, it is characterized by: DC/AC umformer is full-bridge inverter; Comprise 4 switching tubes; The control end of described four switching tubes connects the output terminal of inverter control circuit; Switching tube S1 source electrode is connected with the drain electrode of switching tube S2; Switching tube S3 source electrode is connected with the drain electrode of switching tube S4; The source electrode of switching tube S1 is connected with the former limit input terminus of a transformer; The source electrode of switching tube S3 is connected with the former limit input terminus the other end of described transformer; The secondary of transformer connects output load.

6., according to the arbitrary described high-power mid frequency sputtering power supply of claim 1-3, it is characterized by: described DC/AC umformer is integrated IPM power model.

7. high-power mid frequency sputtering power supply according to claim 5, is characterized by: described transformer is high-frequency transformer.