CN204495728U - A kind of micro-vision measurement mechanism with four degree of freedom - Google Patents
A kind of micro-vision measurement mechanism with four degree of freedom Download PDFInfo
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Abstract
本实用新型涉及一种具有四个自由度的显微视觉测量装置，属于光学测量技术领域。本实用新型在装置上设置有X轴移动机构和X轴移动平台，X轴移动平台与可带动其沿着X轴移动的X轴移动机构连接；在X轴移动平台上设置有Y轴移动机构和Y轴移动平台，Y轴移动平台与可带动其沿着Y轴移动的Y轴移动机构连接；在Y轴移动平台上设置有绕Z轴转动的机构Ⅰ，在绕Z轴转动的机构Ⅰ上设置有Z轴移动机构和Z轴移动平台，Z轴移动平台与可带动其沿着Z轴移动的Z轴移动机构连接；在Z轴移动平台上设置有绕Z轴转动的机构Ⅱ，在绕Z轴转动的机构Ⅱ上设置有相机支撑板，在相机支撑板上设置CCD摄像机。本实用新型结构简单，成本较低，增加了装置的自由度。
The utility model relates to a microscopic vision measurement device with four degrees of freedom, which belongs to the technical field of optical measurement. The utility model is provided with an X-axis moving mechanism and an X-axis moving platform on the device, and the X-axis moving platform is connected with an X-axis moving mechanism that can drive it to move along the X-axis; a Y-axis moving mechanism is arranged on the X-axis moving platform And the Y-axis mobile platform, the Y-axis mobile platform is connected with the Y-axis mobile mechanism that can drive it to move along the Y-axis; the Y-axis mobile platform is provided with a mechanism Ⅰ that rotates around the Z-axis, and the mechanism Ⅰ that rotates around the Z-axis The Z-axis moving mechanism and the Z-axis moving platform are arranged on the Z-axis moving platform, and the Z-axis moving platform is connected with the Z-axis moving mechanism that can drive it to move along the Z-axis; A camera supporting plate is arranged on the mechanism II rotating around the Z axis, and a CCD camera is arranged on the camera supporting plate. The utility model has the advantages of simple structure, low cost and increased freedom of the device.
Description
技术领域 technical field
本实用新型涉及一种具有四个自由度的显微视觉测量装置，属于光学测量技术领域。 The utility model relates to a microscopic vision measurement device with four degrees of freedom, which belongs to the technical field of optical measurement.
背景技术 Background technique
随着科学技术的发展，显微视觉测量得到了广泛的应用。在显微视觉测量装置中，国际上尚无统一标准的测量装置，存在着许多形式不一的测量装置，由于测量的对象不同从而研制和使用不同的测量装置；同时，在机器视觉测量领域，比较成熟的实验仪器和设备主要是适用于宏观物体的测量与研究。而在显微视觉测量中所涉及到的物体都是纳米级的物体。此时对于测量装置的灵活性有了更高的要求。为了适应测量的要求，则需要测量装置具有多个自由度。 With the development of science and technology, microscopic vision measurement has been widely used. In the microscopic vision measuring device, there is no uniform standard measuring device in the world, and there are many measuring devices in different forms. Different measuring devices are developed and used due to different measuring objects; at the same time, in the field of machine vision measuring, The relatively mature experimental instruments and equipment are mainly suitable for the measurement and research of macroscopic objects. The objects involved in the microscopic vision measurement are all nanoscale objects. At this time, higher requirements are placed on the flexibility of the measuring device. In order to meet the requirements of measurement, the measurement device needs to have multiple degrees of freedom.
发明内容 Contents of the invention
本实用新型提供了一种具有四个自由度的显微视觉测量装置，以用于解决现有测量装置复杂灵活性低的问题。 The utility model provides a microscopic vision measuring device with four degrees of freedom, which is used to solve the problem of low complexity and low flexibility of the existing measuring device.
本实用新型的技术方案是：一种具有四个自由度的显微视觉测量装置，包括在装置上设置有X轴移动机构和X轴移动平台5，X轴移动平台与可带动其沿着X轴移动的X轴移动机构连接；在X轴移动平台5上设置有Y轴移动机构和Y轴移动平台7，Y轴移动平台7与可带动其沿着Y轴移动的Y轴移动机构连接；在Y轴移动平台上设置有绕Z轴转动的机构Ⅰ，在绕Z轴转动的机构Ⅰ上设置有Z轴移动机构和Z轴移动平台17，Z轴移动平台17与可带动其沿着Z轴移动的Z轴移动机构连接；在Z轴移动平台17上设置有绕Z轴转动的机构Ⅱ，在绕Z轴转动的机构Ⅱ上设置有相机支撑板20，在相机支撑板20上设置带有显微摄像头的CCD摄像机21。 The technical scheme of the utility model is: a microscopic vision measurement device with four degrees of freedom, including an X-axis moving mechanism and an X-axis moving platform 5 on the device, and the X-axis moving platform can drive it along the X axis. The X-axis moving mechanism that moves the axis is connected; the X-axis moving platform 5 is provided with a Y-axis moving mechanism and a Y-axis moving platform 7, and the Y-axis moving platform 7 is connected with a Y-axis moving mechanism that can drive it to move along the Y-axis; On the Y-axis moving platform, there is a mechanism I that rotates around the Z axis. On the mechanism I that turns around the Z axis, there are a Z-axis moving mechanism and a Z-axis moving platform 17. The Z-axis moving platform 17 can drive it along the Z axis. The Z-axis moving mechanism that moves along the axis is connected; on the Z-axis moving platform 17, a mechanism II that rotates around the Z axis is provided, and a camera support plate 20 is provided on the mechanism II that rotates around the Z axis, and a belt is set on the camera support plate 20 CCD camera 21 with microscopic camera.
所述X轴移动机构包括X轴滑轨1、X轴丝杠2、X轴移动电机3、支架Ⅰ4；其中X轴移动电机3与X轴丝杠2固定连接在支架Ⅰ4上，X轴移动平台5与X轴滑轨1成滑动连接； The X-axis moving mechanism includes an X-axis slide rail 1, an X-axis screw 2, an X-axis moving motor 3, and a bracket I4; wherein the X-axis moving motor 3 and the X-axis screw 2 are fixedly connected to the bracket I4, and the X-axis moves The platform 5 is in sliding connection with the X-axis slide rail 1;
所述Y轴移动机构包括Y轴滑轨6、Y轴移动平台7、Y轴丝杠8、Y轴移动电机9、支架Ⅱ10；其中Y轴移动电机9与Y轴丝杠8固定连接在支架Ⅱ10上，Y轴移动平台7与Y轴滑轨6成滑动连接； The Y-axis moving mechanism includes a Y-axis slide rail 6, a Y-axis moving platform 7, a Y-axis screw 8, a Y-axis moving motor 9, and a bracket II 10; wherein the Y-axis moving motor 9 and the Y-axis screw 8 are fixedly connected to the bracket On Ⅱ10, the Y-axis moving platform 7 is in sliding connection with the Y-axis slide rail 6;
所述绕Z轴转动的机构Ⅰ包括底座11、控制机构12、转动平台13；其中Y轴移动平台7与控制机构12通过底座11固定连接，控制机构12上固定有转动平台13； The mechanism I rotating around the Z axis includes a base 11, a control mechanism 12, and a rotating platform 13; wherein the Y-axis moving platform 7 is fixedly connected to the control mechanism 12 through the base 11, and the control mechanism 12 is fixed with a rotating platform 13;
所述Z轴移动机构包括Z轴移动架14、Z轴丝杠15、Z轴移动电机16；其中Z轴移动电机16与Z轴丝杠15连接，Z轴移动平台17与Z轴移动架14成滑动连接，与Z轴丝杠15配合的Z轴螺母固定在Z轴移动平台17上； The Z-axis moving mechanism includes a Z-axis moving frame 14, a Z-axis screw 15, and a Z-axis moving motor 16; wherein the Z-axis moving motor 16 is connected with the Z-axis leading screw 15, and the Z-axis moving platform 17 is connected with the Z-axis moving frame 14. into a sliding connection, and the Z-axis nut matched with the Z-axis lead screw 15 is fixed on the Z-axis moving platform 17;
所述绕Z轴转动的机构Ⅱ包括横梁18、绕Z轴转动电机19；其中Z轴移动平台17上沿X轴方向固定一横梁18，在横梁上设置绕Z轴转动电机19，平行于Z轴的绕Z轴转动电机19转轴的下端连接绕Z轴转动的相机支撑板20。 The mechanism II that rotates around the Z axis includes a beam 18 and a motor 19 that rotates around the Z axis; wherein a beam 18 is fixed along the direction of the X axis on the Z-axis mobile platform 17, and a motor 19 that rotates around the Z axis is set on the beam, parallel to the Z axis. The lower end of the rotating shaft of the motor 19 rotating around the Z axis is connected with the camera support plate 20 rotating around the Z axis.
所述CCD摄像机21下装有显微摄像头，显微摄像头下连接有光源。 A microscopic camera is installed under the CCD camera 21, and a light source is connected under the microscopic camera.
本实用新型的工作原理是： The working principle of the utility model is:
根据待测物体的位置来调整带有显微摄像头的CCD摄像机21的位置。X轴移动电机3通过X轴丝杠2使得X轴移动平台5在X轴滑轨1上移动从而来调整带有显微摄像头的CCD摄像机21在X轴上的位置。在X轴移动平台5上固定有Y轴滑轨6和Y轴移动电机9，Y轴移动电机与Y轴丝杠8固定连接在支架Ⅱ10上。Y轴移动平台7与Y轴滑轨6成滑动连接。Y轴移动电机9通过Y轴丝杠8使得Y轴移动平台7在Y轴滑轨6上移动从而来调整带有显微摄像头的CCD摄像机21在Y轴上的位置。在Y轴移动平台7上固定连接有控制机构12，11为控制机构的底座，Y轴移动平台7与控制机构12通过底座11固定连接。在控制机构12上固定有转动平台13，通过人工干预控制机构来调整带有显微摄像头的CCD摄像机21绕Z轴的位置。在转动平台13上固定有Z轴移动架14和Z轴移动电机16，Z轴移动电机16与Z轴丝杠15连接。Z轴移动平台17与Z轴移动架14成滑动连接，与Z轴丝杠15配合的Z轴螺母固定在Z轴移动平台17上。Z轴移动电机16通过Z轴丝杠15使得Z轴移动平台17在Z轴移动架14上移动从而来调整带有显微摄像头的CCD摄像机21在Z轴上的位置。在Z轴移动平台17上沿X轴方向固定一横梁18，在横梁上设置绕Z轴转动电机19，平行于Z轴的绕Z轴转动电机19转轴的下端连接绕Z轴转动的相机支撑板20。相机支撑板20连接带有显微摄像头的CCD摄像机21。绕Z轴转动电机19通过转动轴使得相机支撑板20绕Z轴转动从而来调整带有显微摄像头的CCD摄像机21绕Z轴的位置。 The position of the CCD camera 21 with a microscopic camera is adjusted according to the position of the object to be measured. The X-axis moving motor 3 makes the X-axis moving platform 5 move on the X-axis slide rail 1 through the X-axis screw 2 to adjust the position of the CCD camera 21 with the microscopic camera on the X-axis. A Y-axis slide rail 6 and a Y-axis moving motor 9 are fixed on the X-axis moving platform 5 , and the Y-axis moving motor and the Y-axis lead screw 8 are fixedly connected to the support II 10 . The Y-axis moving platform 7 is in sliding connection with the Y-axis slide rail 6 . The Y-axis moving motor 9 makes the Y-axis moving platform 7 move on the Y-axis slide rail 6 through the Y-axis lead screw 8 to adjust the position of the CCD camera 21 with the microscopic camera head on the Y-axis. A control mechanism 12 is fixedly connected to the Y-axis moving platform 7 , and 11 is a base of the control mechanism, and the Y-axis moving platform 7 and the control mechanism 12 are fixedly connected through the base 11 . A rotating platform 13 is fixed on the control mechanism 12, and the position of the CCD camera 21 with a microscopic camera head around the Z axis is adjusted through manual intervention in the control mechanism. A Z-axis moving frame 14 and a Z-axis moving motor 16 are fixed on the rotating platform 13 , and the Z-axis moving motor 16 is connected with a Z-axis screw 15 . The Z-axis moving platform 17 is slidingly connected with the Z-axis moving frame 14 , and the Z-axis nut cooperating with the Z-axis screw 15 is fixed on the Z-axis moving platform 17 . The Z-axis moving motor 16 makes the Z-axis moving platform 17 move on the Z-axis moving frame 14 through the Z-axis lead screw 15 to adjust the position of the CCD camera 21 with the microscopic camera head on the Z-axis. On the Z-axis mobile platform 17, a crossbeam 18 is fixed along the X-axis direction, and the Z-axis rotation motor 19 is arranged on the crossbeam, and the lower end of the Z-axis rotation motor 19 rotating shaft parallel to the Z-axis is connected with a camera support plate that rotates around the Z-axis 20. The camera support plate 20 is connected with a CCD camera 21 with a microscopic camera. The rotation motor 19 around the Z axis makes the camera support plate 20 rotate around the Z axis through the rotation shaft to adjust the position of the CCD camera 21 with the micro camera head around the Z axis.
CCD摄像机21经过图像采集卡连接到电脑上，其中光源用于提供照明，从而提高采集的效果。 The CCD camera 21 is connected to the computer through the image acquisition card, wherein the light source is used to provide illumination, thereby improving the effect of acquisition.
本实用新型的有益效果是：结构简单，成本较低，既增加了测量装置的自由度，又提高了装置的灵活性从而提高了所采集到的图像的质量减少了测量误差。 The utility model has the beneficial effects of simple structure and low cost, which not only increases the degree of freedom of the measuring device, but also improves the flexibility of the device, thereby improving the quality of the collected images and reducing measurement errors.
附图说明 Description of drawings
图1为本实用新型的结构示意图； Fig. 1 is the structural representation of the utility model;
图中各标号：1-X轴滑轨、2-X轴丝杠、3-X轴移动电机、4-支架Ⅰ、5-X轴移动平台、6-Y轴滑轨、7-Y轴移动平台、8-Y轴丝杠、9-Y轴移动电机、10-支架Ⅱ、11-底座、12-控制机构、13-转动平台、14-Z轴移动架、15-Z轴丝杠、16-Z轴移动电机、17-Z轴移动平台、18-横梁、19-绕Z轴转动电机、20-相机支撑板、21-CCD摄像机。 Each label in the figure: 1-X-axis slide rail, 2-X-axis screw, 3-X-axis moving motor, 4-support Ⅰ, 5-X-axis moving platform, 6-Y-axis slide rail, 7-Y-axis moving Platform, 8-Y-axis screw, 9-Y-axis moving motor, 10-bracket II, 11-base, 12-control mechanism, 13-rotary platform, 14-Z-axis moving frame, 15-Z-axis screw, 16 -Z-axis moving motor, 17-Z-axis moving platform, 18-beam, 19-rotating motor around Z-axis, 20-camera support plate, 21-CCD camera.
具体实施方式 Detailed ways
实施例1：如图1所示，一种具有四个自由度的显微视觉测量装置，包括在装置上设置有X轴移动机构和X轴移动平台5，X轴移动平台与可带动其沿着X轴移动的X轴移动机构连接；在X轴移动平台5上设置有Y轴移动机构和Y轴移动平台7，Y轴移动平台7与可带动其沿着Y轴移动的Y轴移动机构连接；在Y轴移动平台上设置有绕Z轴转动的机构Ⅰ，在绕Z轴转动的机构Ⅰ上设置有Z轴移动机构和Z轴移动平台17，Z轴移动平台17与可带动其沿着Z轴移动的Z轴移动机构连接；在Z轴移动平台17上设置有绕Z轴转动的机构Ⅱ，在绕Z轴转动的机构Ⅱ上设置有相机支撑板20，在相机支撑板20上设置带有显微摄像头的CCD摄像机21。 Embodiment 1: as shown in Figure 1, a kind of microscopic vision measuring device with four degrees of freedom comprises that an X-axis moving mechanism and an X-axis moving platform 5 are arranged on the device, and the X-axis moving platform can drive it along the The X-axis moving mechanism that moves along the X-axis is connected; the X-axis moving platform 5 is provided with a Y-axis moving mechanism and a Y-axis moving platform 7, and the Y-axis moving platform 7 is connected with a Y-axis moving mechanism that can drive it to move along the Y-axis Connection; on the Y-axis mobile platform, a mechanism I that rotates around the Z axis is provided, and on the mechanism I that rotates around the Z axis, a Z-axis mobile mechanism and a Z-axis mobile platform 17 are arranged, and the Z-axis mobile platform 17 can drive it along the The Z-axis moving mechanism that moves along the Z-axis is connected; on the Z-axis moving platform 17, a mechanism II that rotates around the Z axis is provided, and a camera support plate 20 is arranged on the mechanism II that rotates around the Z axis. On the camera support plate 20 A CCD camera 21 with a microscope camera is provided.
所述X轴移动机构包括X轴滑轨1、X轴丝杠2、X轴移动电机3、支架Ⅰ4；其中X轴移动电机3与X轴丝杠2固定连接在支架Ⅰ4上，X轴移动平台5与X轴滑轨1成滑动连接； The X-axis moving mechanism includes an X-axis slide rail 1, an X-axis screw 2, an X-axis moving motor 3, and a bracket I4; wherein the X-axis moving motor 3 and the X-axis screw 2 are fixedly connected to the bracket I4, and the X-axis moves The platform 5 is in sliding connection with the X-axis slide rail 1;
所述Y轴移动机构包括Y轴滑轨6、Y轴移动平台7、Y轴丝杠8、Y轴移动电机9、支架Ⅱ10；其中Y轴移动电机9与Y轴丝杠8固定连接在支架Ⅱ10上，Y轴移动平台7与Y轴滑轨6成滑动连接； The Y-axis moving mechanism includes a Y-axis slide rail 6, a Y-axis moving platform 7, a Y-axis screw 8, a Y-axis moving motor 9, and a bracket II 10; wherein the Y-axis moving motor 9 and the Y-axis screw 8 are fixedly connected to the bracket On Ⅱ10, the Y-axis moving platform 7 is in sliding connection with the Y-axis slide rail 6;
所述绕Z轴转动的机构Ⅰ包括底座11、控制机构12、转动平台13；其中Y轴移动平台7与控制机构12通过底座11固定连接，控制机构12上固定有转动平台13； The mechanism I rotating around the Z axis includes a base 11, a control mechanism 12, and a rotating platform 13; wherein the Y-axis moving platform 7 is fixedly connected to the control mechanism 12 through the base 11, and the control mechanism 12 is fixed with a rotating platform 13;
所述Z轴移动机构包括Z轴移动架14、Z轴丝杠15、Z轴移动电机16；其中Z轴移动电机16与Z轴丝杠15连接，Z轴移动平台17与Z轴移动架14成滑动连接，与Z轴丝杠15配合的Z轴螺母固定在Z轴移动平台17上； The Z-axis moving mechanism includes a Z-axis moving frame 14, a Z-axis screw 15, and a Z-axis moving motor 16; wherein the Z-axis moving motor 16 is connected with the Z-axis leading screw 15, and the Z-axis moving platform 17 is connected with the Z-axis moving frame 14. into a sliding connection, and the Z-axis nut matched with the Z-axis lead screw 15 is fixed on the Z-axis moving platform 17;
所述绕Z轴转动的机构Ⅱ包括横梁18、绕Z轴转动电机19；其中Z轴移动平台17上沿X轴方向固定一横梁18，在横梁上设置绕Z轴转动电机19，平行于Z轴的绕Z轴转动电机19转轴的下端连接绕Z轴转动的相机支撑板20。 The mechanism II that rotates around the Z axis includes a beam 18 and a motor 19 that rotates around the Z axis; wherein a beam 18 is fixed along the direction of the X axis on the Z-axis mobile platform 17, and a motor 19 that rotates around the Z axis is set on the beam, parallel to the Z axis. The lower end of the rotating shaft of the motor 19 rotating around the Z axis is connected with the camera support plate 20 rotating around the Z axis.
所述CCD摄像机21下装有显微摄像头，显微摄像头下连接有光源。 A microscopic camera is installed under the CCD camera 21, and a light source is connected under the microscopic camera.
实施例2：如图1所示，一种具有四个自由度的显微视觉测量装置，包括在装置上设置有X轴移动机构和X轴移动平台5，X轴移动平台与可带动其沿着X轴移动的X轴移动机构连接；在X轴移动平台5上设置有Y轴移动机构和Y轴移动平台7，Y轴移动平台7与可带动其沿着Y轴移动的Y轴移动机构连接；在Y轴移动平台上设置有绕Z轴转动的机构Ⅰ，在绕Z轴转动的机构Ⅰ上设置有Z轴移动机构和Z轴移动平台17，Z轴移动平台17与可带动其沿着Z轴移动的Z轴移动机构连接；在Z轴移动平台17上设置有绕Z轴转动的机构Ⅱ，在绕Z轴转动的机构Ⅱ上设置有相机支撑板20，在相机支撑板20上设置带有显微摄像头的CCD摄像机21。 Embodiment 2: as shown in Figure 1, a kind of microscopic vision measuring device with four degrees of freedom comprises that an X-axis moving mechanism and an X-axis moving platform 5 are arranged on the device, and the X-axis moving platform can drive it along the The X-axis moving mechanism that moves along the X-axis is connected; the X-axis moving platform 5 is provided with a Y-axis moving mechanism and a Y-axis moving platform 7, and the Y-axis moving platform 7 is connected with a Y-axis moving mechanism that can drive it to move along the Y-axis Connection; on the Y-axis mobile platform, a mechanism I that rotates around the Z axis is provided, and on the mechanism I that rotates around the Z axis, a Z-axis mobile mechanism and a Z-axis mobile platform 17 are arranged, and the Z-axis mobile platform 17 can drive it along the The Z-axis moving mechanism that moves along the Z-axis is connected; on the Z-axis moving platform 17, a mechanism II that rotates around the Z axis is provided, and a camera support plate 20 is arranged on the mechanism II that rotates around the Z axis. On the camera support plate 20 A CCD camera 21 with a microscope camera is provided.
所述X轴移动机构包括X轴滑轨1、X轴丝杠2、X轴移动电机3、支架Ⅰ4；其中X轴移动电机3与X轴丝杠2固定连接在支架Ⅰ4上，X轴移动平台5与X轴滑轨1成滑动连接； The X-axis moving mechanism includes an X-axis slide rail 1, an X-axis screw 2, an X-axis moving motor 3, and a bracket I4; wherein the X-axis moving motor 3 and the X-axis screw 2 are fixedly connected to the bracket I4, and the X-axis moves The platform 5 is in sliding connection with the X-axis slide rail 1;
所述Y轴移动机构包括Y轴滑轨6、Y轴移动平台7、Y轴丝杠8、Y轴移动电机9、支架Ⅱ10；其中Y轴移动电机9与Y轴丝杠8固定连接在支架Ⅱ10上，Y轴移动平台7与Y轴滑轨6成滑动连接； The Y-axis moving mechanism includes a Y-axis slide rail 6, a Y-axis moving platform 7, a Y-axis screw 8, a Y-axis moving motor 9, and a bracket II 10; wherein the Y-axis moving motor 9 and the Y-axis screw 8 are fixedly connected to the bracket On Ⅱ10, the Y-axis moving platform 7 is in sliding connection with the Y-axis slide rail 6;
所述绕Z轴转动的机构Ⅰ包括底座11、控制机构12、转动平台13；其中Y轴移动平台7与控制机构12通过底座11固定连接，控制机构12上固定有转动平台13； The mechanism I rotating around the Z axis includes a base 11, a control mechanism 12, and a rotating platform 13; wherein the Y-axis moving platform 7 is fixedly connected to the control mechanism 12 through the base 11, and the control mechanism 12 is fixed with a rotating platform 13;
所述Z轴移动机构包括Z轴移动架14、Z轴丝杠15、Z轴移动电机16；其中Z轴移动电机16与Z轴丝杠15连接，Z轴移动平台17与Z轴移动架14成滑动连接，与Z轴丝杠15配合的Z轴螺母固定在Z轴移动平台17上； The Z-axis moving mechanism includes a Z-axis moving frame 14, a Z-axis screw 15, and a Z-axis moving motor 16; wherein the Z-axis moving motor 16 is connected with the Z-axis leading screw 15, and the Z-axis moving platform 17 is connected with the Z-axis moving frame 14. into a sliding connection, and the Z-axis nut matched with the Z-axis lead screw 15 is fixed on the Z-axis moving platform 17;
所述绕Z轴转动的机构Ⅱ包括横梁18、绕Z轴转动电机19；其中Z轴移动平台17上沿X轴方向固定一横梁18，在横梁上设置绕Z轴转动电机19，平行于Z轴的绕Z轴转动电机19转轴的下端连接绕Z轴转动的相机支撑板20。 The mechanism II that rotates around the Z axis includes a beam 18 and a motor 19 that rotates around the Z axis; wherein a beam 18 is fixed along the direction of the X axis on the Z-axis mobile platform 17, and a motor 19 that rotates around the Z axis is set on the beam, parallel to the Z axis. The lower end of the rotating shaft of the motor 19 rotating around the Z axis is connected with the camera support plate 20 rotating around the Z axis.
实施例3：如图1所示，一种具有四个自由度的显微视觉测量装置，包括在装置上设置有X轴移动机构和X轴移动平台5，X轴移动平台与可带动其沿着X轴移动的X轴移动机构连接；在X轴移动平台5上设置有Y轴移动机构和Y轴移动平台7，Y轴移动平台7与可带动其沿着Y轴移动的Y轴移动机构连接；在Y轴移动平台上设置有绕Z轴转动的机构Ⅰ，在绕Z轴转动的机构Ⅰ上设置有Z轴移动机构和Z轴移动平台17，Z轴移动平台17与可带动其沿着Z轴移动的Z轴移动机构连接；在Z轴移动平台17上设置有绕Z轴转动的机构Ⅱ，在绕Z轴转动的机构Ⅱ上设置有相机支撑板20，在相机支撑板20上设置带有显微摄像头的CCD摄像机21。 Embodiment 3: as shown in Figure 1, a kind of microscopic vision measuring device with four degrees of freedom comprises that X-axis moving mechanism and X-axis moving platform 5 are arranged on the device, and X-axis moving platform and can drive it along The X-axis moving mechanism that moves along the X-axis is connected; the X-axis moving platform 5 is provided with a Y-axis moving mechanism and a Y-axis moving platform 7, and the Y-axis moving platform 7 is connected with a Y-axis moving mechanism that can drive it to move along the Y-axis Connection; on the Y-axis mobile platform, a mechanism I that rotates around the Z axis is provided, and on the mechanism I that rotates around the Z axis, a Z-axis mobile mechanism and a Z-axis mobile platform 17 are arranged, and the Z-axis mobile platform 17 can drive it along the The Z-axis moving mechanism that moves along the Z-axis is connected; on the Z-axis moving platform 17, a mechanism II that rotates around the Z axis is provided, and a camera support plate 20 is arranged on the mechanism II that rotates around the Z axis. On the camera support plate 20 A CCD camera 21 with a microscope camera is provided.
实施例4：如图1所示，一种具有四个自由度的显微视觉测量装置，包括在装置上设置有X轴移动机构和X轴移动平台5，X轴移动平台与可带动其沿着X轴移动的X轴移动机构连接；在X轴移动平台5上设置有Y轴移动机构和Y轴移动平台7，Y轴移动平台7与可带动其沿着Y轴移动的Y轴移动机构连接；在Y轴移动平台上设置有绕Z轴转动的机构Ⅰ，在绕Z轴转动的机构Ⅰ上设置有Z轴移动机构和Z轴移动平台17，Z轴移动平台17与可带动其沿着Z轴移动的Z轴移动机构连接；在Z轴移动平台17上设置有绕Z轴转动的机构Ⅱ，在绕Z轴转动的机构Ⅱ上设置有相机支撑板20，在相机支撑板20上设置带有显微摄像头的CCD摄像机21。 Embodiment 4: as shown in Figure 1, a kind of microscopic vision measuring device with four degrees of freedom comprises that an X-axis moving mechanism and an X-axis moving platform 5 are arranged on the device, and the X-axis moving platform can drive it along the The X-axis moving mechanism that moves along the X-axis is connected; the X-axis moving platform 5 is provided with a Y-axis moving mechanism and a Y-axis moving platform 7, and the Y-axis moving platform 7 is connected with a Y-axis moving mechanism that can drive it to move along the Y-axis Connection; on the Y-axis mobile platform, a mechanism I that rotates around the Z axis is provided, and on the mechanism I that rotates around the Z axis, a Z-axis mobile mechanism and a Z-axis mobile platform 17 are arranged, and the Z-axis mobile platform 17 can drive it along the The Z-axis moving mechanism that moves along the Z-axis is connected; on the Z-axis moving platform 17, a mechanism II that rotates around the Z axis is provided, and a camera support plate 20 is arranged on the mechanism II that rotates around the Z axis. On the camera support plate 20 A CCD camera 21 with a microscope camera is provided.
所述CCD摄像机21下装有显微摄像头，显微摄像头下连接有光源。 A microscopic camera is installed under the CCD camera 21, and a light source is connected under the microscopic camera.
上面结合附图对本实用新型的具体实施方式作了详细说明，但是本实用新型并不限于上述实施方式，在本领域普通技术人员所具备的知识范围内，还可以在不脱离本实用新型宗旨的前提下作出各种变化。 The specific implementation of the utility model has been described in detail above in conjunction with the accompanying drawings, but the utility model is not limited to the above-mentioned implementation. Various changes are made.
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