CN204479181U - A kind of parallel double grating monochromator - Google Patents

A kind of parallel double grating monochromator Download PDF

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CN204479181U
CN204479181U CN201520162720.8U CN201520162720U CN204479181U CN 204479181 U CN204479181 U CN 204479181U CN 201520162720 U CN201520162720 U CN 201520162720U CN 204479181 U CN204479181 U CN 204479181U
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grating
sine
frame
utility
sinusoidal
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吴少军
姚冬
李栋栋
张琳
范永熙
于晓明
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SHANDONG ZEPU MEDICAL TECHNOLOGY Co Ltd
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Abstract

本实用新型公开了一种并行双光栅单色仪包括框架,该框架上安装有并行设置的第一光栅和第二光栅,框架上设有一根转动轴;还包括用于驱动所述第一光栅和所述第二光栅同轴转动的正弦驱动机构,所述正弦驱动机构与所述转动轴传动连接。本实用新型的上述结构使正弦驱动机构在驱动转动轴转动时,转动轴带动框架整体转动,从而使同时安装在框架上的第一光栅和第二光栅同时发生转动,并且同步发生转动。因此本实用新型的第一光栅和第二光栅达到了同步转动的效果,在同等扫描速度下,全波段扫描时测量速度比单一光栅提高了一倍;同时也使分出的单色光的波长范围扩大一倍光谱能量分布均匀。

The utility model discloses a parallel double grating monochromator which comprises a frame, on which a first grating and a second grating arranged in parallel are installed, and a rotating shaft is arranged on the frame; A sinusoidal drive mechanism that rotates coaxially with the second grating, and the sinusoidal drive mechanism is transmission-connected to the rotation shaft. The above structure of the utility model makes the sinusoidal drive mechanism drive the rotating shaft to rotate, and the rotating shaft drives the frame to rotate as a whole, so that the first grating and the second grating installed on the frame rotate simultaneously and synchronously. Therefore, the first grating and the second grating of the utility model have achieved the effect of synchronous rotation. At the same scanning speed, the measurement speed is doubled compared with that of a single grating during full-band scanning; at the same time, the wavelength of the separated monochromatic light The range is doubled and the spectral energy is evenly distributed.

Description

一种并行双光栅单色仪A Parallel Double Grating Monochromator

技术领域technical field

本实用新型涉及光谱分析仪器技术领域,尤其涉及一种并行双光栅单色仪。The utility model relates to the technical field of spectrum analysis instruments, in particular to a parallel double grating monochromator.

背景技术Background technique

光栅单色仪是一种对光子能量或波长进行高分辨分析和选择的光学仪器,是光学和光电子领域从属研究的集成光谱分析和测量仪器。光栅单色仪是利用光栅作为分光元件,将入射的复合光分解为分布全波段的可供任意选择的光谱宽度很窄的单色光,即光栅单色仪就是把复合光分解为一系列高纯度的单色光的仪器。根据光栅单色仪产生的单色光源的特点,将其用于对透明物质和溶液的定性和定量分析。光栅单色仪的优点为波段的范围宽,在全波段色散均匀,单色光的波长可以达到非常精准的程度。Grating monochromator is an optical instrument for high-resolution analysis and selection of photon energy or wavelength. It is an integrated spectral analysis and measurement instrument for subordinate research in the fields of optics and optoelectronics. A grating monochromator uses a grating as a spectroscopic element to decompose the incident composite light into monochromatic light with a narrow spectral width that can be arbitrarily selected across the entire band, that is, the grating monochromator decomposes the composite light into a series of high An instrument for the purity of monochromatic light. According to the characteristics of the monochromatic light source produced by the grating monochromator, it is used for qualitative and quantitative analysis of transparent substances and solutions. The advantage of the grating monochromator is that the range of the wavelength band is wide, the dispersion is uniform in the whole band, and the wavelength of the monochromatic light can reach a very precise level.

但是光栅单色仪在使用过程中,有时需要多块光栅,或者需要经常更换光栅。为了解决上述问题,目前把两个简单单色仪串联起来,构成了双单色仪。在双单色仪中,每台单色仪都有各自的色散系统、具有一定的色散率。两台单色仪联合工作,可以有两种不同的组合方式:色散相加系统和色散相减系统。采用色散相加系统的双单色仪可以获得更大的总色散率;而采用色散相减的双单色仪则只是为了获得更“纯”的单色光和抑制杂散光。色散相加的双单色仪在扫描时,必须保证两台单色仪的动态一致性,通常是采用一个机构来控制两台单色仪的有关运动。因为稍有不同,则被分解的光束就不能全部从出射狭缝射出,甚至会被中间狭缝全部挡住。However, during the use of the grating monochromator, sometimes multiple gratings are needed, or the gratings need to be replaced frequently. In order to solve the above problems, two simple monochromators are currently connected in series to form a double monochromator. In double monochromators, each monochromator has its own dispersion system with a certain dispersion rate. Two monochromators work together, and there are two different combinations: dispersion addition system and dispersion subtraction system. The double monochromator using the dispersion addition system can obtain a greater total dispersion rate; while the double monochromator using the dispersion subtraction system is only to obtain more "pure" monochromatic light and suppress stray light. The dynamic consistency of the two monochromators must be guaranteed when the dispersion-adding dual monochromators are scanning. Usually, a mechanism is used to control the relative movement of the two monochromators. Because of a slight difference, the decomposed light beams cannot all be emitted from the exit slit, and may even be completely blocked by the middle slit.

目前采用的双单色仪的驱动机构大多为:联动正弦机构或者同步驱动正弦机构。上述两种正弦机构通常包括两个正弦臂,两个正弦臂与两个光栅一对一传动连接设置;然后两个正弦臂被一个驱动部件同时驱动,使两个光栅同步移动。但是无论精度多高,两个光栅的移动总会有误差存在,影响了两个光栅的同步性,不能获得更“纯”的单色光,也不能抑制杂散光。The driving mechanisms of the currently used double monochromators are mostly: linkage sinusoidal mechanisms or synchronously driven sinusoidal mechanisms. The above two sinusoidal mechanisms generally include two sinusoidal arms, which are set in one-to-one transmission connection with two gratings; and then the two sinusoidal arms are simultaneously driven by a driving component to make the two gratings move synchronously. But no matter how high the precision is, there will always be errors in the movement of the two gratings, which affects the synchronization of the two gratings, and cannot obtain more "pure" monochromatic light, nor can it suppress stray light.

实用新型内容Utility model content

本实用新型的目的在于提供一种并行双光栅单色仪,该双光栅单色仪的两个光栅同步性好,获得了更“纯”的单色光,也很好的抑制了杂散光,使全波段扫描下的光谱能量相应平坦,从而提高了测量速度。The purpose of this utility model is to provide a parallel double-grating monochromator, the two gratings of the double-grating monochromator have good synchronization, obtain more "pure" monochromatic light, and also suppress stray light well, The spectral energy under full-band scanning is correspondingly flattened, thereby improving the measurement speed.

为解决上述技术问题,本实用新型的技术方案是:一种并行双光栅单色仪包括框架,所述框架上安装有并行设置的第一光栅和第二光栅,所述框架上设有一根转动轴;还包括用于驱动所述第一光栅和所述第二光栅同轴转动的正弦驱动机构,所述正弦驱动机构与所述转动轴传动连接。In order to solve the above technical problems, the technical proposal of the present utility model is: a parallel double-grating monochromator includes a frame, the first grating and the second grating arranged in parallel are installed on the frame, and a rotating shaft; further comprising a sinusoidal drive mechanism for driving the first grating and the second grating to rotate coaxially, and the sinusoidal drive mechanism is transmission-connected to the rotation shaft.

优选方式为,所述第一光栅和所述第二光栅之间有相位角差。Preferably, there is a phase angle difference between the first grating and the second grating.

优选方式为,所述第一光栅的闪耀波长和所述第二光栅的闪耀波长不同。Preferably, the blaze wavelength of the first grating is different from the blaze wavelength of the second grating.

优选方式为,所述正弦驱动机构包括一根正弦臂,所述正弦臂的一端与所述转动轴传动连接,所述正弦臂的另一端与一个正弦机构顶块传动连接,所述正弦机构顶块与一个步进电机的输出轴传动连接。Preferably, the sinusoidal drive mechanism includes a sinusoidal arm, one end of the sinusoidal arm is in transmission connection with the rotating shaft, and the other end of the sinusoidal arm is in transmission connection with a sine mechanism top block, and the sine mechanism top block The block is drivingly connected to the output shaft of a stepper motor.

优选方式为,所述正弦机构顶块选用凸轮,所述凸轮套设在所述步进电机的输出轴上。Preferably, the top block of the sinusoidal mechanism is a cam, and the cam is sheathed on the output shaft of the stepping motor.

优选方式为,所述双光栅单色仪还包括对应所述第一光栅的第一入口狭缝和第一出口狭缝,以及对应所述第二光栅的第二入口狭缝和第二出口狭缝。Preferably, the double grating monochromator further includes a first entrance slit and a first exit slit corresponding to the first grating, and a second entrance slit and a second exit slit corresponding to the second grating seam.

优选方式为,所述框架为矩形框架,所述第一光栅和所述第二光栅沿所述框架的长度方向并行设置,所述转动轴沿所述框架的宽度方向设置。Preferably, the frame is a rectangular frame, the first grating and the second grating are arranged in parallel along the length direction of the frame, and the rotation axis is arranged along the width direction of the frame.

采用上述技术方案后,本实用新型的有益效果是:由于本实用新型的并行双光栅单色仪包括框架,该框架上安装有第一光栅和第二光栅,且框架上设有一根转动轴,上述结构使两块光栅达到了同轴安装的目的。本实用新型还包括用于驱动第一光栅和第二光栅同轴转动的正弦驱动机构,该正弦驱动机构与转动轴传动连接。本实用新型的正弦驱动机构在驱动转动轴转动时,转动轴带动框架整体转动,从而使同时安装在框架上的第一光栅和第二光栅达到同轴转动的目的,并且同步发生转动。因此本实用新型的第一光栅和第二光栅达到了同步转动的效果,获得了更“纯”的单色光,也很好的抑制了杂散光;在同等扫描速度下,全波段扫描时测量速度比单一光栅提高了一倍;同时也使分出的单色光的波长范围扩大一倍光谱能量分布均匀。After adopting the above-mentioned technical scheme, the beneficial effect of the utility model is: because the parallel double grating monochromator of the utility model comprises a frame, the first grating and the second grating are installed on the frame, and a rotating shaft is arranged on the frame, The above structure enables the two gratings to achieve the purpose of coaxial installation. The utility model also includes a sinusoidal driving mechanism for driving the first grating and the second grating to rotate coaxially, and the sinusoidal driving mechanism is connected with the rotating shaft through transmission. When the sine drive mechanism of the utility model drives the rotating shaft to rotate, the rotating shaft drives the frame to rotate as a whole, so that the first grating and the second grating installed on the frame at the same time achieve the purpose of coaxial rotation and synchronous rotation. Therefore, the first grating and the second grating of the utility model achieve the effect of synchronous rotation, obtain more "pure" monochromatic light, and suppress stray light well; The speed is doubled compared with a single grating; at the same time, the wavelength range of the separated monochromatic light is doubled, and the spectral energy distribution is uniform.

由于第一光栅和第二光栅之间有相位角差,该结构使两块光栅的扫描波长刚好衔接,从而扩大了光谱范围。Because there is a phase angle difference between the first grating and the second grating, the structure makes the scanning wavelengths of the two gratings just coincide, thereby expanding the spectral range.

由于第一光栅的闪耀波长和第二光栅的闪耀波长不同,该结构使两块光栅相当于一块双闪耀光栅,在全波段扫描时,使得光谱能量响应更加平坦。Since the blazed wavelength of the first grating is different from that of the second grating, this structure makes the two gratings equivalent to a double blazed grating, which makes the spectral energy response more flat during full-band scanning.

由于正弦驱动机构包括一根正弦臂,该正弦臂的一端与转动轴传动连接,该正弦臂的另一端与一个正弦机构顶块传动连接,该正弦机构顶块与一个步进电机的输出轴传动连接;该结构的步进电机在转动时,步进电机的输出轴带动正弦机构顶块一起转动,而正弦机构顶块顶着正弦臂做正弦运动,最后使转动轴带着第一光栅和第二光栅同步转动。Since the sinusoidal driving mechanism includes a sinusoidal arm, one end of the sinusoidal arm is connected to the rotating shaft, and the other end of the sinusoidal arm is connected to a sinusoidal mechanism top block, and the sinusoidal mechanism top block is connected to the output shaft of a stepping motor. connection; when the stepping motor of this structure is rotating, the output shaft of the stepping motor drives the top block of the sinusoidal mechanism to rotate together, and the top block of the sinusoidal mechanism carries the sinusoidal arm for sinusoidal motion, and finally the rotating shaft takes the first grating and the second The two gratings rotate synchronously.

综上所述,本实用新型将第一光栅和第二光栅安装在同一个框架上,并在框架上安装一个转动轴,使两块光栅实现同轴安装的结构;为了达到同轴转动,本实用新型让转动轴被正弦驱动机构带动转动,从而使两块光栅达到同轴转动的目的,从而获得了较纯的单色光,提高了本实用新型的测量速度。而且本实用新型通过选择不闪耀波长的光栅,来使本实用新型全波段扫描时,光谱能量响应更加平坦。本实用新型还让第一光栅和第二光栅安装在框架上后保持一定的安装相位角差,来从而扩大了光谱范围。In summary, the utility model installs the first grating and the second grating on the same frame, and installs a rotating shaft on the frame, so that the two gratings can be coaxially installed; in order to achieve coaxial rotation, this The utility model allows the rotating shaft to be rotated by the sinusoidal drive mechanism, so that the two gratings can rotate coaxially, thereby obtaining relatively pure monochromatic light and improving the measurement speed of the utility model. Moreover, the utility model makes the spectral energy response more flat when the utility model scans the whole band by selecting a grating with no blazing wavelength. The utility model also allows the first grating and the second grating to maintain a certain installation phase angle difference after they are installed on the frame, thereby enlarging the spectral range.

附图说明Description of drawings

图1是本实用新型的并行双光栅单色仪处于工作位置时的结构示意图;Fig. 1 is the structural representation when parallel double grating monochromator of the present utility model is in working position;

图2是本实用新型的并行双光栅单色仪处于起始位置时的结构示意图;Fig. 2 is the structural representation when parallel double grating monochromator of the present utility model is in starting position;

图3是本实用新型的并行双光栅单色仪处于终止位置时的结构示意图;Fig. 3 is the structural representation when the parallel double grating monochromator of the present invention is in the termination position;

图中:1—第一光栅、2—第二光栅、3—第一入口狭缝、4—第一出口狭缝、5—第二入口狭缝、6—第二出口狭缝、7—正弦臂、8—正弦机构顶块、9—步进电机、10—转动轴、11—框架。In the figure: 1—the first grating, 2—the second grating, 3—the first entrance slit, 4—the first exit slit, 5—the second entrance slit, 6—the second exit slit, 7—sine Arm, 8—sinusoidal mechanism top block, 9—stepping motor, 10—rotating shaft, 11—frame.

具体实施方式Detailed ways

为了使本实用新型的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本实用新型进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本实用新型,并不用于限定本实用新型。In order to make the purpose, technical solutions and advantages of the utility model clearer, the utility model will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model, and are not intended to limit the utility model.

如图1、图2和图3所示,一种并行双光栅单色仪包括框架11,优选框架11为矩形框架。还包括并行设置在框架11上的第一光栅1和第二光栅2,本实施例的两块光栅沿框架11的长度方向并行设置的。框架11上还设有一根转动轴10,本实施例的转动轴10沿框架11的宽度方向设置的。本实用新型的双光栅单色仪的转动轴10与一个正弦驱动机构传动连接,即转动轴10被正弦驱动机构驱动做正弦移动,而转动轴10的移动使框架11随着一起移动,最终使同时安装在框架11上的第一光栅1和第二光栅2同轴转动。As shown in FIG. 1 , FIG. 2 and FIG. 3 , a parallel double-grating monochromator includes a frame 11 , preferably the frame 11 is a rectangular frame. It also includes a first grating 1 and a second grating 2 arranged in parallel on the frame 11 , and the two gratings in this embodiment are arranged in parallel along the length direction of the frame 11 . A rotating shaft 10 is also provided on the frame 11 , and the rotating shaft 10 in this embodiment is arranged along the width direction of the frame 11 . The rotating shaft 10 of the double-grating monochromator of the present utility model is connected with a sinusoidal driving mechanism through transmission, that is, the rotating shaft 10 is driven by the sinusoidal driving mechanism to move sinusoidally, and the movement of the rotating shaft 10 makes the frame 11 move together, and finally makes the At the same time, the first grating 1 and the second grating 2 mounted on the frame 11 rotate coaxially.

正弦驱动机构包括一根正弦臂7,正弦臂7的一端与转动轴10传动连接,正弦臂7的另一端与一个正弦机构顶块8传动连接。正弦机构顶块8与一个步进电机9的输出轴传动连接。优选正弦机构顶块8为凸轮,凸轮套设在步进电机9的输出轴上。当步进电机9的输出轴在转动时,凸轮被带动转动,而与凸轮传动连接的正弦臂7被带着做正弦移动,与正弦臂7传动连接的转动轴10一起做正弦移动,最终是第一光栅1和第二光栅2发生同轴转动。The sinusoidal driving mechanism includes a sinusoidal arm 7 , one end of the sinusoidal arm 7 is in transmission connection with the rotating shaft 10 , and the other end of the sinusoidal arm 7 is in transmission connection with a sinusoidal mechanism top block 8 . The sinusoidal mechanism top block 8 is connected with the output shaft of a stepping motor 9 through transmission. Preferably, the top block 8 of the sinusoidal mechanism is a cam, and the cam is sleeved on the output shaft of the stepping motor 9 . When the output shaft of the stepping motor 9 is rotating, the cam is driven to rotate, and the sinusoidal arm 7 connected to the cam drive is moved sinusoidally, and the rotating shaft 10 connected to the sinusoidal arm 7 is moved sinusoidally together, finally The first grating 1 and the second grating 2 rotate coaxially.

本实施例的第一光栅1和第二光栅2之间有相位角差,该相位角差使第一光栅1和第二光栅2具有一定的安装初始角。而具有相位角差的两块光栅的扫描波长刚好衔接,从而扩大了光谱的范围。优选第一光栅1的初始角为200°,第二光栅2的初始角为600°。那么再第一光栅1的扫描范围为200°-600°之间,第二光栅2的扫描范围为600°-1000°之间,很明显第一光栅1和第二光栅2在600°处衔接,从而提高了测量速度。There is a phase angle difference between the first grating 1 and the second grating 2 in this embodiment, and the phase angle difference makes the first grating 1 and the second grating 2 have a certain installation initial angle. However, the scanning wavelengths of the two gratings with phase angle difference are just connected, thus expanding the range of the spectrum. Preferably, the initial angle of the first grating 1 is 200°, and the initial angle of the second grating 2 is 600°. Then the scanning range of the first grating 1 is between 200°-600°, and the scanning range of the second grating 2 is between 600°-1000°. It is obvious that the first grating 1 and the second grating 2 are connected at 600° , thereby increasing the measurement speed.

本实施例的第一光栅1的闪耀波长和第二光栅2的闪耀波长不同,其中闪耀波长为闪耀波长是闪耀光栅中闪耀角所对应的闪耀极大的波长,也是最强的衍射波长。本实用新型可通过选择不同闪耀波长的两块光栅,使其相当于一块双闪耀光,使得在全波段扫描时,光谱能量响应更加平坦,扩大了一倍的波长范围。The blaze wavelength of the first grating 1 and the blaze wavelength of the second grating 2 in this embodiment are different, wherein the blaze wavelength is the maximum blaze wavelength corresponding to the blaze angle in the blaze grating, and is also the strongest diffraction wavelength. In the utility model, two gratings with different blaze wavelengths can be selected to make it equivalent to a double blaze light, so that the spectral energy response is more flat during full-band scanning, and the wavelength range is doubled.

另外本实施例的双光栅单色仪还包括对应第一光栅1的第一入口狭缝3和第一出口狭缝4,以及对应第二光栅2的第二入口狭缝5和第二出口狭缝6。In addition, the double grating monochromator of this embodiment also includes a first entrance slit 3 and a first exit slit 4 corresponding to the first grating 1, and a second entrance slit 5 and a second exit slit corresponding to the second grating 2 Sew 6.

使用本实用新型进行透明物质和溶液的定性和定量分析时,光源或照明系统发出的光束,同时均匀的照射在第一入口狭缝3和第二入口狭缝5上面后,经过其他光学元件后,分别被第一光栅1和第二光栅2分光,分别从第一出口狭缝4和第二出口狭缝6分出单色光。本实用新型的正弦驱动机构的步进电机9在控制系统的控制下启动工作,可根据控制系统的测量需要调整转速。步进电机9转动后,正弦机构顶块8被带着转轴,正弦机构顶块8再顶着正弦臂7移动,使正弦臂7做正弦运动。最终使转动轴10也做正弦运动,框架11带第一光栅1和第二光栅2同时同步发生同轴转动。在第一光栅1和第二光栅2发生同轴转动后,从第一出口狭缝4和第二出口狭缝6依次出现由短波长到长波长的单色光,并单色光更纯,杂散光减少了。When the utility model is used for qualitative and quantitative analysis of transparent substances and solutions, the light beam emitted by the light source or the lighting system is uniformly irradiated on the first entrance slit 3 and the second entrance slit 5 at the same time, and after passing through other optical elements , are split by the first grating 1 and the second grating 2 respectively, and monochromatic light is split from the first exit slit 4 and the second exit slit 6 respectively. The stepping motor 9 of the sinusoidal drive mechanism of the utility model starts to work under the control of the control system, and the rotating speed can be adjusted according to the measurement needs of the control system. After the stepping motor 9 rotates, the sine mechanism top block 8 is taken with the rotating shaft, and the sine mechanism top block 8 moves against the sine arm 7 again, so that the sine arm 7 does a sinusoidal motion. Finally, the rotating shaft 10 also performs a sinusoidal motion, and the frame 11 rotates coaxially with the first grating 1 and the second grating 2 synchronously. After the coaxial rotation of the first grating 1 and the second grating 2, the monochromatic light from short wavelength to long wavelength appears sequentially from the first exit slit 4 and the second exit slit 6, and the monochromatic light is more pure, Stray light is reduced.

因本实用新型的第一光栅1和第二光栅2的起始点和终止点在同一位置,从而提高了测量的速度。两组光栅分光同步、精度高、效果好,两个光栅得到的是光能量叠加,实现光能亮更高的单色光。因此本实用新型相比于简单串联在一起的单色仪,测量速度提高了一倍,波长范围也扩大了一倍。Since the starting point and the ending point of the first grating 1 and the second grating 2 of the present invention are at the same position, the measurement speed is improved. The two groups of gratings are synchronized in light splitting, with high precision and good effect. The two gratings obtain superposition of light energy to achieve monochromatic light with higher light energy. Therefore, compared with monochromators simply connected in series, the utility model doubles the measurement speed and doubles the wavelength range.

以上所述本实用新型的较佳实施例而已,并不用以限制本实用新型,凡在本实用新型的精神和原则之内所作的任何修改、等同一种并行双光栅单色仪结构的改进等,均应包含在本实用新型的保护范围之内。The preferred embodiment of the utility model described above is only, not in order to limit the utility model, any modification done within the spirit and principle of the utility model, is equal to the improvement of a kind of parallel double grating monochromator structure etc. , should be included within the protection scope of the present utility model.

Claims (7)

1. a parallel double grating monochromator, is characterized in that, comprises framework, and described framework is provided with the first grating and second grating of parallel setting, described framework is provided with a rotation axis; Also comprise the Sine Driving Mechanism for driving described first grating and described second grating coaxial rotation, described Sine Driving Mechanism and described rotation axis are in transmission connection.
2. parallel double grating monochromator according to claim 1, is characterized in that, has phase angle difference between described first grating and described second grating.
3. parallel double grating monochromator according to claim 1, is characterized in that, the blaze wavelength of described first grating is different with the blaze wavelength of described second grating.
4. parallel double grating monochromator according to any one of claim 1 to 3, it is characterized in that, described Sine Driving Mechanism comprises a sine arm, one end and the described rotation axis of described sine arm are in transmission connection, the other end of described sine arm and a sine mechanism jacking block are in transmission connection, and the output shaft of described sine mechanism jacking block and a stepper motor is in transmission connection.
5. parallel double grating monochromator according to claim 4, is characterized in that, described sine mechanism jacking block selects cam, and described cam is set on the output shaft of described stepper motor.
6. parallel double grating monochromator according to claim 5, it is characterized in that, described double grating monochromator also comprises the first entrance slit and first exit slit of corresponding described first grating, and the second entrance slit of corresponding described second grating and the second exit slit.
7. parallel double grating monochromator according to claim 1, is characterized in that, described framework is rectangular frame, and described first grating and described second grating are arranged along the length direction of described framework is parallel, and described rotation axis is arranged along the Width of described framework.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109323762A (en) * 2018-09-21 2019-02-12 中国科学院长春光学精密机械与物理研究所 A concave grating double monochromator assembly system and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109323762A (en) * 2018-09-21 2019-02-12 中国科学院长春光学精密机械与物理研究所 A concave grating double monochromator assembly system and method

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