CN204439662U - 一种加速度计中的z轴结构 - Google Patents
一种加速度计中的z轴结构 Download PDFInfo
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104614553A (zh) * | 2015-01-30 | 2015-05-13 | 歌尔声学股份有限公司 | 一种加速度计中的z轴结构 |
CN106153241A (zh) * | 2016-08-25 | 2016-11-23 | 华东光电集成器件研究所 | 一种mems电容式压力传感器 |
WO2019109639A1 (zh) * | 2017-12-08 | 2019-06-13 | 华中科技大学 | 利用soi片制作高精度mems惯性传感器的方法及重力加速度传感器 |
CN118011043A (zh) * | 2024-04-10 | 2024-05-10 | 中国工程物理研究院电子工程研究所 | 具有一体式应力隔离下极板的微加速度计及其加工方法 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104614553A (zh) * | 2015-01-30 | 2015-05-13 | 歌尔声学股份有限公司 | 一种加速度计中的z轴结构 |
CN106153241A (zh) * | 2016-08-25 | 2016-11-23 | 华东光电集成器件研究所 | 一种mems电容式压力传感器 |
CN106153241B (zh) * | 2016-08-25 | 2019-04-05 | 华东光电集成器件研究所 | 一种mems电容式压力传感器 |
WO2019109639A1 (zh) * | 2017-12-08 | 2019-06-13 | 华中科技大学 | 利用soi片制作高精度mems惯性传感器的方法及重力加速度传感器 |
CN118011043A (zh) * | 2024-04-10 | 2024-05-10 | 中国工程物理研究院电子工程研究所 | 具有一体式应力隔离下极板的微加速度计及其加工方法 |
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Address after: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
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Effective date of registration: 20200612 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |