CN204437163U - Precision type instrument vibration insulation structure in a kind of intergrated circuit factory building - Google Patents
Precision type instrument vibration insulation structure in a kind of intergrated circuit factory building Download PDFInfo
- Publication number
- CN204437163U CN204437163U CN201420826564.6U CN201420826564U CN204437163U CN 204437163 U CN204437163 U CN 204437163U CN 201420826564 U CN201420826564 U CN 201420826564U CN 204437163 U CN204437163 U CN 204437163U
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- pneumatic spring
- damper
- pedestal
- insulation structure
- control system
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Abstract
The utility model discloses the precision type instrument vibration insulation structure in a kind of intergrated circuit factory building, comprise pedestal, air supply system, height control system, pneumatic spring, damper, described pneumatic spring is positioned under described pedestal, the output terminal of air supply system is connected with the input end of height control system, the output terminal of height control system is connected with pneumatic spring, damper is arranged under pneumatic spring, by the pedestal described in described pneumatic spring and described damper supported in series.It has simple and reasonable, that vibration isolating effect is good feature, and by taking the dual vibration isolation of pneumatic spring and damper, vibration isolating effect is better, and bearing capacity is stronger.
Description
Technical field
The utility model relates to a kind of vibration insulation structure, particularly relates to a kind of for the precision type instrument vibration insulation structure in intergrated circuit factory building.
Background technique
In the time of nearly more than ten years, intergrated circuit processing technology level is always in fast development.The level of processing that current intergrated circuit foundries main is in the world produced on a large scale is to 0.13 μm, and the processing technology level as Intel, AMD and IBM Corporation has reached 65nm even 45nm.In integrated circuit production process, because feature sizes is more and more less, the factor being limited by environment also gets more and more, as the microorganism in the dust in air, the impurity in industrial gas, water, the produced pollution such as bacterium and dust, electromagnetic interference, noise and vibration on the person, the production of capital to intergrated circuit impacts, and micro-vibration problem is the significant problem needing in intergrated circuit factory design and construction to solve.
Be completed in intergrated circuit factory building civil engineering, when factory building internally-powered equipment installs and trys out, need test the vibration values of precision equipment position, to judge whether to meet microvibration-preventing requirement, when not meeting, vibration isolation measure taked by reply precision equipment.Existing vibration isolation measure is exactly under precision equipment, increase by one adopt rubber vibration insulating pad, this vibration isolation way can not vibrate by precise hard_drawn tuhes, effectively can not eliminate microseismic activity, instrument is caused not install, the bearing capacity of this rubber vibration insulating pad is weak simultaneously, for the precision type instrument of heavier-weight, inconvenience is installed.
Model utility content
For above technical problem, the utility model provides the precision type instrument vibration insulation structure in a kind of simple and reasonable, intergrated circuit factory building that vibration isolating effect is good, and by taking the dual vibration isolation of pneumatic spring and damper, vibration isolating effect is better, and bearing capacity is stronger.
In order to solve above technical problem, the technical solution of the utility model is as follows, its pedestal, air supply system, height control system, pneumatic spring, damper, it is characterized in that: described pneumatic spring is positioned under described pedestal, the output terminal of air supply system is connected with the input end of height control system, the output terminal of height control system is connected with pneumatic spring, and damper is arranged under pneumatic spring, by the pedestal described in described pneumatic spring and described damper supported in series.
Further, the longitudinal cross-section of described pedestal is T-shape.
Further, described pneumatic spring is two, and symmetry is arranged on the both sides, bottom surface of T-shape pedestal.
Air supply system directly utilizes existing clean compressed air in factory building, fill to pneumatic spring, venting, height control system is utilized to control the height of pneumatic spring, thus regulate the impact that the lengthwise position of pedestal causes vibration insulating foundation performance to overcome load variations, damper is arranged on the bottom of pneumatic spring, resistance can be provided by arranging damper, reduce precision type instrument and be placed on the vibration produced after on pedestal, damper and pneumatic spring are installed in series in the bottom of pedestal, can ensure that vibration insulation structure has strong bearing capacity, overcome the shortcoming of existing rubber vibration insulating pad bearing capacity difference.Compared with prior art, the utility model, by arranging a vibration insulation structure in tight apparatus installation position, adopts the dual vibration isolation of pneumatic spring and damper, and vibration isolating effect is better, and bearing capacity is stronger.
Owing to have employed above technological scheme, the utility model has simple and reasonable, that vibration isolating effect is good feature, and it is by taking the dual vibration isolation of pneumatic spring and damper, and vibration isolating effect is better, and bearing capacity is stronger.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model;
In accompanying drawing, reference character is as follows: 1. pedestal; 2. air supply system; 3. height control system; 4. pneumatic spring; 5. damper.
Embodiment
In order to make the purpose of this utility model, technological scheme and advantage clearly understand, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the utility model, and be not used in restriction the utility model.
Below in conjunction with concrete accompanying drawing, realization of the present utility model is described in detail.
See Fig. 1, the utility model comprises pedestal 1, air supply system 2, height control system 3, pneumatic spring 4, damper 5, described pneumatic spring 4 is positioned under described pedestal 1, the output terminal of air supply system 2 is connected with the input end of height control system 3, the output terminal of height control system (3) is connected with pneumatic spring 4, damper 5 is arranged under pneumatic spring 4, by described pneumatic spring 4 and the pedestal 1 described in described damper 5 supported in series.
Air supply system 2 directly utilizes existing clean compressed air in factory building, fill to pneumatic spring 4, venting, height control system 3 is utilized to control the height of pneumatic spring 4, thus regulate the impact that the lengthwise position of pedestal 1 causes vibration insulating foundation performance to overcome load variations, damper 5 is arranged on the bottom of pneumatic spring 4, resistance can be provided by arranging damper 5, reduce precision type instrument and be placed on the vibration produced after on pedestal 1, damper 5 and pneumatic spring 4 are installed in series in the bottom of pedestal 1, can ensure that vibration insulation structure has strong bearing capacity, overcome the shortcoming of existing rubber vibration insulating pad bearing capacity difference.Compared with prior art, the utility model, by arranging a vibration insulation structure in tight apparatus installation position, adopts the dual vibration isolation of pneumatic spring and damper, and vibration isolating effect is better, and bearing capacity is stronger.
See Fig. 1, described pedestal 1 longitudinal cross-section is T-shape, and pneumatic spring 4 is two, and symmetry is arranged on the both sides, bottom surface of T-shape pedestal 1.Pedestal longitudinal cross-section is the balance that T-shape can keep pedestal, can facilitate the installation of pneumatic spring and damper simultaneously.
The foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection domain of the present utility model.
Claims (3)
1. the precision type instrument vibration insulation structure in an intergrated circuit factory building, comprise pedestal (1), air supply system (2), height control system (3), pneumatic spring (4), damper (5), it is characterized in that: described pneumatic spring (4) is positioned under described pedestal (1), the output terminal of air supply system (2) is connected with the input end of height control system (3), the output terminal of height control system (3) is connected with pneumatic spring (4), damper (5) is arranged under pneumatic spring (4), by described pneumatic spring (4) and the pedestal (1) described in described damper (5) supported in series.
2. the precision type instrument vibration insulation structure in intergrated circuit factory building as claimed in claim 1, is characterized in that: described pedestal (1) longitudinal cross-section is T-shape.
3. the precision type instrument vibration insulation structure in intergrated circuit factory building as claimed in claim 2, it is characterized in that: described pneumatic spring (4) is two, symmetry is arranged on the both sides, bottom surface of T-shape pedestal (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420826564.6U CN204437163U (en) | 2014-12-24 | 2014-12-24 | Precision type instrument vibration insulation structure in a kind of intergrated circuit factory building |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420826564.6U CN204437163U (en) | 2014-12-24 | 2014-12-24 | Precision type instrument vibration insulation structure in a kind of intergrated circuit factory building |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204437163U true CN204437163U (en) | 2015-07-01 |
Family
ID=53605032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420826564.6U Expired - Fee Related CN204437163U (en) | 2014-12-24 | 2014-12-24 | Precision type instrument vibration insulation structure in a kind of intergrated circuit factory building |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204437163U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111022567A (en) * | 2019-12-23 | 2020-04-17 | 哈尔滨恒信精密气浮科技有限公司 | High-precision self-leveling air spring vibration isolation table |
-
2014
- 2014-12-24 CN CN201420826564.6U patent/CN204437163U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111022567A (en) * | 2019-12-23 | 2020-04-17 | 哈尔滨恒信精密气浮科技有限公司 | High-precision self-leveling air spring vibration isolation table |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150701 Termination date: 20181224 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |