CN204407367U - A kind of piezoelectric ceramics driving piece with anti-acoustic capability - Google Patents

A kind of piezoelectric ceramics driving piece with anti-acoustic capability Download PDF

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Publication number
CN204407367U
CN204407367U CN201420791663.5U CN201420791663U CN204407367U CN 204407367 U CN204407367 U CN 204407367U CN 201420791663 U CN201420791663 U CN 201420791663U CN 204407367 U CN204407367 U CN 204407367U
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China
Prior art keywords
thin layer
porous silicon
substrate
metal level
silicon thin
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Expired - Fee Related
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CN201420791663.5U
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Chinese (zh)
Inventor
陈英俊
陈庆华
李艳梅
范羽
吴海涛
赵肇雄
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Zhaoqing University
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Zhaoqing University
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Abstract

The utility model relates to a kind of piezoelectric ceramics driving piece with anti-acoustic capability, for operated pneumatic valve, it discloses substrate, piezoelectric ceramic piece, porous silicon thin layer, metal level, and piezoelectric ceramics driving piece is from outside to inside by metal level, porous silicon thin layer, piezoelectric ceramic piece, substrate, piezoelectric ceramic piece, porous silicon thin layer, metal level superposes successively and is sticked to form, described porous silicon thickness of thin layer is 2.5-4.5mm, and metal layer thickness is 1-5mm, and substrate is the good metal material of elasticity.The utility model has the advantages that rational in infrastructure, it effectively can reduce its noise produced under the mechanical performance not affecting electroceramics driving chip, and working stability is safe and reliable, long service life.

Description

A kind of piezoelectric ceramics driving piece with anti-acoustic capability
Technical field
The utility model relates to a kind of piezoelectric ceramics driving piece with anti-acoustic capability, is specifically applied to driving chip operated pneumatic valve with anti-acoustic capability.
Background technology
Piezoelectric ceramic valve is the fine setting gas control valve utilizing piezoceramic material to have inverse piezoelectric effect and make.Piezoceramic material has inverse piezoelectric effect, namely under DC Electric Field, produces mechanical strain, and its strain size is directly proportional to the size of extra electric field.The piezo electric valve response time is short, and energy consumption is low, and precision is high, is easy to control, and is therefore specially adapted to high speed pneumatic equipment.The existing piezoelectric ceramics driving piece for operated pneumatic valve application mainly comprises piezoelectric ceramic substrate.The motion under high-frequency electric field excitation of described piezoelectric ceramics driving piece, produces pneumatic noise and mechanical noise, the environment for use of limiter valve.Therefore noise piezoelectric ceramics driving piece that is low, applied range is the problem that manufacturers need to solve.
Utility model content
The purpose of this utility model is to provide a kind of piezoelectric ceramics driving piece with anti-acoustic capability, it passes through substrate, piezoelectric ceramic piece, porous silicon thin layer, fitting tightly of metal level multilayer, the noise produced when piezoelectric ceramics driving piece is moved under high-frequency electric field excitation is effectively reduced, and makes its applied range.
Technical solution of the present utility model is at substrate, piezoelectric ceramic piece, porous silicon thin layer, on the basis of metal level, be characterized in piezoelectric ceramics driving piece from outside to inside by metal level, porous silicon thin layer, piezoelectric ceramic piece, substrate, piezoelectric ceramic piece, porous silicon thin layer, metal level superposes successively and is sticked to form, described porous silicon thickness of thin layer is 2.5-4.5mm, and metal layer thickness is 1-5mm, and substrate is the good metal material of elasticity.
The thickness of above-described porous silicon thin layer preferably adopts 3mm or 4mm, and the material of described metal level preferably adopts thickness to be 3.5mm, and the better good gold of conductivity and ductility or copper; Described substrate material preferably adopts steel spring plate or beryllium-bronze plate.
Operation principle of the present utility model is that substrate adopts steel spring plate or beryllium-bronze plate, obtain good mechanical performance gold conjugate or copper thickness are the metal level of 3.5mm and thickness is again that the porous silicon thin layer of 3mm is as sound-absorbing porous material, make the noise reduction 5 decibels ~ 10 decibels of piezoelectric ceramics driving piece, therefore noise is little compared to existing technology for piezoelectric ceramics driving piece, and range of application is wider.
The utility model has the advantages that rational in infrastructure, it effectively can reduce its noise produced under the mechanical performance not affecting electroceramics driving chip, and working stability is safe and reliable, long service life.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model
Fig. 2 is sectional structure schematic diagram of the present utility model.
Embodiment
According to Fig. 1, Fig. 2, the utility model is at substrate 1, piezoelectric ceramic piece 2, porous silicon thin layer 3, on the basis of metal level 4, be characterized in piezoelectric ceramics driving piece from outside to inside by metal level 4, porous silicon thin layer 3, piezoelectric ceramic piece 2, substrate 1, piezoelectric ceramic piece 2, porous silicon thin layer 3, metal level 4 superposes successively and is sticked to form, the thickness of described porous silicon thin layer 3 is 2.5mm or is preferably 3mm, the thickness of metal level 4 is 1mm or is preferably 3.5mm, and the gold that conductivity and ductility are better good, and substrate 1 is the good steel spring plate of elasticity.
Embodiment 2
Be: the thickness of described porous silicon thin layer 3 is 3.5mm or is preferably 4mm that the thickness of metal level 4 is 2.5mm or is preferably 3.5mm with its different place of embodiment 1, and the copper that conductivity and ductility are better good, substrate 1 is the good beryllium-bronze plate of elasticity.
Embodiment 3
With its different place of embodiment 1 be: the thickness of described porous silicon thin layer 3 is 4.5mm, the thickness of metal level 4 is 5mm, and the copper that conductivity and ductility are better good, and substrate 1 is the good beryllium-bronze plate of elasticity.

Claims (2)

1. have a piezoelectric ceramics driving piece for anti-acoustic capability, it comprises substrate, piezoelectric ceramic piece, porous silicon thin layer, metal level, is characterized in that piezoelectric ceramics driving piece from outside to inside by metal level, porous silicon thin layer, piezoelectric ceramic piece, substrate, piezoelectric ceramic piece, porous silicon thin layer, metal level superposes successively and is sticked to form, and described porous silicon thickness of thin layer is 2.5-4.5mm, metal layer thickness is 1-5mm, and substrate is the good metal material of elasticity.
2. a kind of piezoelectric ceramics driving piece with anti-acoustic capability according to claim 1, it is characterized in that the thickness of described porous silicon thin layer adopts 3mm or 4mm, the material of described metal level adopts thickness to be 3.5mm, and the better good gold of conductivity and ductility or copper; Described substrate material adopts steel spring plate or beryllium-bronze plate.
CN201420791663.5U 2014-12-16 2014-12-16 A kind of piezoelectric ceramics driving piece with anti-acoustic capability Expired - Fee Related CN204407367U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420791663.5U CN204407367U (en) 2014-12-16 2014-12-16 A kind of piezoelectric ceramics driving piece with anti-acoustic capability

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201420791663.5U CN204407367U (en) 2014-12-16 2014-12-16 A kind of piezoelectric ceramics driving piece with anti-acoustic capability

Publications (1)

Publication Number Publication Date
CN204407367U true CN204407367U (en) 2015-06-17

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201420791663.5U Expired - Fee Related CN204407367U (en) 2014-12-16 2014-12-16 A kind of piezoelectric ceramics driving piece with anti-acoustic capability

Country Status (1)

Country Link
CN (1) CN204407367U (en)

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150617

Termination date: 20161216

CF01 Termination of patent right due to non-payment of annual fee