CN204391079U - A kind of chip suction nozzle - Google Patents

A kind of chip suction nozzle Download PDF

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Publication number
CN204391079U
CN204391079U CN201520131395.9U CN201520131395U CN204391079U CN 204391079 U CN204391079 U CN 204391079U CN 201520131395 U CN201520131395 U CN 201520131395U CN 204391079 U CN204391079 U CN 204391079U
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China
Prior art keywords
suction nozzle
nozzle body
multiple vacuum
joint face
chip
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CN201520131395.9U
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Chinese (zh)
Inventor
凡会建
李文化
彭志文
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Te Ke Core Co Ltd
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Te Ke Core Co Ltd
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Priority to CN201520131395.9U priority Critical patent/CN204391079U/en
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Abstract

The utility model relates to a kind of chip suction nozzle, comprise suction nozzle body, suction nozzle body bottom surface is provided with recess, also be provided with joint face, joint face is provided with multiple vacuum hole, and multiple vacuum hole is arranged around recess, suction nozzle body end face is provided with the multiple vacuum holes with multiple vacuum hole opposite positions of joint face, its global shape is circle, and suction nozzle body end face is connected with multiple vacuum holes of joint face, and interval is equal; Pass through technique scheme, change the vacsorb mode of suction nozzle, by the setting of the arrangement of multiple vacuum hole and recess, eliminate the phenomenon of chip intermediate recess and dimpling, overcome and reduce between chip center region and substrate and produce gas hole, improve the rate of dispatching from the factory of product and the stability of Total Product, the absorption chip of suction nozzle is firm, suction is even, safe and convenient to use.

Description

A kind of chip suction nozzle
Technical field
The utility model relates to suction nozzle, is related specifically to a kind of chip suction nozzle.
Background technology
At present, along with the development of semiconductor technology and the demand of product, more and more thinner to the requirement of the thickness of chip in a package, at present to reach about 50um, so thin chip easily produces gas hole upper process because of the bending of chip, and then produce product rejection or affect the reliability of product, and the suction nozzle used at present, it is the middle suction type being provided with single vacuum hole, its absorption is insecure, in adsorption process, because the absorption affinity of suction nozzle is excessively strong, and chip body is excessively thin, the absorption of the vacuum hole in the middle of it, cross due to suction and easily make by force chip in absorption in intermediate deformation, such as intermediate recess, middle dimpling, impact uses, also waste material.
Utility model content
The utility model, in order to solve the problem of chip intermediate deformation in absorption of prior art, providing a kind of vacsorb mode by changing suction nozzle, eliminating the phenomenon of chip intermediate deformation, improve the chip suction nozzle of the yield of product and the stability of product.
Concrete technical scheme of the present utility model is: a kind of chip suction nozzle, comprise suction nozzle body, the global shape of described suction nozzle body is rectangle, described suction nozzle body bottom surface is also provided with recess, described recess is located at the centre of the bottom surface of suction nozzle body, described suction nozzle body bottom surface is also provided with joint face, described joint face is provided with four, described four joint faces are respectively the first joint face, second joint face, 3rd joint face and the 4th joint face, described first joint face, second joint face, 3rd joint face and the 4th joint face are arranged around recess, described four joint faces are equipped with multiple vacuum hole, multiple vacuum hole is arranged around recess, described first joint face and multiple vacuum holes of the second joint face are that vertical opposite position is arranged, multiple vacuum holes of described 3rd joint face and the 4th joint face are the opposite position setting of level, described suction nozzle body end face is provided with multiple vacuum holes of the multiple vacuum hole opposite positions being provided with four joint faces with suction nozzle body bottom surface, the global shape that multiple vacuum hole of described suction nozzle body end face and suction nozzle body bottom surface are provided with multiple vacuum holes of four joint faces is circle, multiple vacuum holes that multiple vacuum hole and the suction nozzle body bottom surface of described suction nozzle body end face are provided with four joint faces are connected, interval between multiple vacuum holes that multiple vacuum hole of described suction nozzle body end face and suction nozzle body bottom surface are provided with four joint faces is all equal.
It is below attached technical scheme of the present utility model.
Preferably, the material of described suction nozzle is rubber.
Preferably, the global shape of described recess is rectangle, can also be square.
Preferably, described suction nozzle body end face and suction nozzle body bottom surface are provided with multiple vacuum holes formation global shapes communicated of joint face is cylindrical vacuum body.
Technique effect of the present utility model: a kind of chip suction nozzle of the present utility model, by changing the vacsorb mode of suction nozzle, by the setting of the arrangement of multiple vacuum hole and recess, eliminate the phenomenon of chip intermediate recess and middle dimpling, thus overcome and greatly reduce generation gas hole in the middle of chip center region and substrate, improve the rate of dispatching from the factory of product and the stability of Total Product, and the absorption chip of suction nozzle is firm, suction is even, safe and convenient to use.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of chip suction nozzle of the utility model embodiment.
Fig. 2 is another structural representation of a kind of chip suction nozzle of the utility model embodiment.
Fig. 3 is the top surface structure schematic diagram of a kind of chip suction nozzle of the utility model embodiment.
Fig. 4 is the using state schematic diagram that a kind of chip suction nozzle of the utility model embodiment shows.
In figure: suction nozzle body 1, suction nozzle body end face 11, suction nozzle body bottom surface 12, recess 3, joint face 4, the first joint face 41, second joint face the 42, three joint face the 43, four joint face 44, vacuum hole 6, vacuum body 8, fixture 10, tracheae 110.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described further.
As shown in Figure 1 to Figure 3, a kind of chip suction nozzle of the present embodiment, comprises suction nozzle body 1, and the global shape of described suction nozzle body 1 is rectangle, and its material is rubber, arranges like this, and absorption chip is convenient and firm.Described suction nozzle body bottom surface 12 is also provided with recess 3, and it is located at the centre position of suction nozzle body bottom surface, arranges like this, is convenient to arrange to multiple vacuum hole centered by recess, and suction is evenly distributed.The global shape of described recess 3 is rectangle, and can also be square, it be specifically arranged according to actual needs.Described suction nozzle body bottom surface 12 is also provided with joint face 4, arranges like this, can be provided with multiple vacuum hole, contribute to absorption chip on joint face.Described joint face 4 is provided with multiple vacuum hole 6, and described joint face 4 comprises four, and it is respectively the first joint face 41, second joint face 42,3rd joint face 43 and the 4th joint face 44, described first, second, the third and fourth joint face is arranged around recess 3, such setting, arrangement evenly.Multiple vacuum holes 6 of described first joint face 41 and the second joint face 42 are arranged in vertically opposite position of answering, multiple vacuum holes 6 of described 3rd joint face 43 and the 4th joint face 44 are arranged in horizontal opposite position, such setting, use suction nozzle air-breathing even, easily hold chip, and the phenomenon of chip nick and dimpling can not be produced, ensure that the qualification rate of chip.Described multiple vacuum hole 6 is arranged around recess 3, and arrange like this, absorption chip is firm.Described suction nozzle body end face 11 is provided with multiple vacuum holes 6 of multiple vacuum holes 6 opposite position of the joint face 4 be provided with suction nozzle body bottom surface 12, its global shape is circle, multiple vacuum holes of the joint face that the end face of described suction nozzle body is provided with suction nozzle body bottom surface 12 are connected, forming global shape is columniform vacuum body 8, such setting, be convenient to the getter device coordinating suction nozzle fixture to connect, produce suction by multiple vacuum hole, absorption chip.Interval between multiple vacuum holes 6 of the joint face that described suction nozzle body end face 11 and suction nozzle body bottom surface 12 are provided with is equal, and this bar is arranged, and suction is even, and multiple vacuum hole degree of depth is identical with suction nozzle body height, and is greater than recess depths.
As shown in Figure 4, in order to further illustrate suction nozzle body utilization in practice, shown in this figure, suction nozzle body 1 is clipped on fixture 10, fixture 10 is provided with tracheae 110, and tracheae 110 is communicated with getter device (not shown), provides suction by getter device, drawn by multiple vacuum holes 6 of suction nozzle body 1, be convenient to draw and moving chip.
Further, a kind of chip suction nozzle of the present utility model, the structure that the center of its existing suction nozzle is provided with single vacuum hole is designed to the suction type of the multiple vacuum holes arranged along suction nozzle girth around recess, make suction nozzle in the process of absorption chip, suction nozzle acts on the vacuum impetus on chip in the surrounding of chip instead of chip center region, make to form an evacuated air air bag between the central area of chip and suction nozzle, thus make chip in suction process, depression can not be produced, even because the generation dimpling of the effect of gravity, the chip of this shape is in upper process, region elder generation of chip center and substrate contacts, thus solve at present at chip in upper process, because the surrounding of chip and substrate contacts and the gas hole phenomenon produced, the quality stability of product is got a promotion.
A kind of chip suction nozzle of the present utility model, in concrete use procedure, the quantity of suction nozzle size and multiple vacuum hole and the size in hole all can adjust according to the size of chip, chip by the thimble on chip operation platform chip jack-up, by suction nozzle absorption chip, then shift chip by suction nozzle, chip is moved on substrate, be convenient to encapsulation.
A kind of chip suction nozzle of the present utility model, by changing the vacsorb mode of suction nozzle, eliminate the umbilicate phenomenon of chip, the phenomenon of dimpling in the middle of even being formed, thus overcome and greatly reduce generation gas hole in the middle of chip center region and substrate, improve the yield of product and the stability of product.It is to be noted; above-mentioned preferred embodiment is only and technical conceive of the present utility model and feature is described; its object is to person skilled in the art can be understood content of the present utility model and implement according to this, protection range of the present utility model can not be limited with this.All equivalences done according to the utility model Spirit Essence change or modify, and all should be encompassed within protection range of the present utility model.

Claims (4)

1. a chip suction nozzle, comprise suction nozzle body, it is characterized in that: the global shape of described suction nozzle body is rectangle, described suction nozzle body bottom surface is also provided with recess, described recess is located at the centre of the bottom surface of suction nozzle body, described suction nozzle body bottom surface is also provided with joint face, described joint face is provided with four, described four joint faces are respectively the first joint face, second joint face, 3rd joint face and the 4th joint face, described first joint face, second joint face, 3rd joint face and the 4th joint face are arranged around recess, described four joint faces are equipped with multiple vacuum hole, multiple vacuum hole is arranged around recess, described first joint face and multiple vacuum holes of the second joint face are that vertical opposite position is arranged, multiple vacuum holes of described 3rd joint face and the 4th joint face are the opposite position setting of level, described suction nozzle body end face is provided with multiple vacuum holes of the multiple vacuum hole opposite positions being provided with four joint faces with suction nozzle body bottom surface, the global shape that multiple vacuum hole of described suction nozzle body end face and suction nozzle body bottom surface are provided with multiple vacuum holes of four joint faces is circle, multiple vacuum holes that multiple vacuum hole and the suction nozzle body bottom surface of described suction nozzle body end face are provided with four joint faces are connected, interval between multiple vacuum holes that multiple vacuum hole of described suction nozzle body end face and suction nozzle body bottom surface are provided with four joint faces is all equal.
2. a kind of chip suction nozzle as claimed in claim 1, is characterized in that: the material of described suction nozzle body is rubber.
3. a kind of chip suction nozzle as claimed in claim 1, is characterized in that: the global shape of described recess is rectangle, can also be square.
4. a kind of chip suction nozzle as claimed in claim 1, is characterized in that: multiple vacuum holes formation global shapes communicated that described suction nozzle body end face and suction nozzle body bottom surface are provided with joint face are cylindrical vacuum body.
CN201520131395.9U 2015-03-09 2015-03-09 A kind of chip suction nozzle Active CN204391079U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201520131395.9U CN204391079U (en) 2015-03-09 2015-03-09 A kind of chip suction nozzle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201520131395.9U CN204391079U (en) 2015-03-09 2015-03-09 A kind of chip suction nozzle

Publications (1)

Publication Number Publication Date
CN204391079U true CN204391079U (en) 2015-06-10

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Application Number Title Priority Date Filing Date
CN201520131395.9U Active CN204391079U (en) 2015-03-09 2015-03-09 A kind of chip suction nozzle

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110482211A (en) * 2019-08-13 2019-11-22 苏州富强科技有限公司 A kind of suction nozzle rotating mechanism
CN114920042A (en) * 2021-02-12 2022-08-19 株式会社村田制作所 Sheet conveying apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110482211A (en) * 2019-08-13 2019-11-22 苏州富强科技有限公司 A kind of suction nozzle rotating mechanism
CN114920042A (en) * 2021-02-12 2022-08-19 株式会社村田制作所 Sheet conveying apparatus

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