Utility model content
The purpose of this utility model is for above-mentioned technical matters, provides a kind of hyperchannel sulfur hexafluoride insulation electrical equipment on-Line Monitor Device, utilizes this device can realize separate unit monitoring device for multiple stage SF
6the on-line monitoring of insulation electrical equipment decomposition product, improves the utilization factor of on-Line Monitor Device, reduces costs.
For realizing this object, a kind of hyperchannel sulfur hexafluoride insulation electrical equipment on-Line Monitor Device designed by the utility model, comprises sampling and detects air-channel system, monitoring host computer, and described sampling detects air-channel system and comprises SF
6purity detecting unit, a SO
2concentration detecting unit, the 2nd SO
2concentration detecting unit, Three S's O
2concentration detecting unit, share return gas channel, also comprise first interface cross-over valve, second interface conversion valve, 3rd interface conversion valve, first filtrator, second filtrator, 3rd filtrator, first threeway, second threeway, 3rd threeway, 5th threeway, 6th threeway, first solenoid valve, second solenoid valve, 3rd solenoid valve, 4th solenoid valve, 11 solenoid valve, 12 solenoid valve, first four-way, second four-way, 3rd four-way, 4th four-way, second ball valve, 3rd ball valve, 4th ball valve, second gauge, second pressure transducer, buffer cell, vacuum pressed pump, micro-water sensor, electrically controlled 4-way transfer valve, first retaining valve, second retaining valve, 3rd retaining valve, vacuum orifice, wherein:
One end of described first interface cross-over valve connects a SF to be measured
6insulation electrical equipment, the other end of first interface cross-over valve connects one end of the first filtrator, the other end of the first filtrator connects the first interface of the first threeway, second interface of the first threeway connects the first interface of the first four-way by the first solenoid valve, second interface of described first four-way connects the first interface of the second four-way by the 4th solenoid valve, one end of described second interface conversion valve connects the 2nd SF to be measured
6insulation electrical equipment, the other end of the second interface conversion valve connects one end of the second filtrator, the other end of the second filtrator connects the first interface of the second threeway, second interface of the second threeway connects the second interface of the second four-way by the second solenoid valve, one end of described 3rd interface conversion valve connects Three S's F to be measured
6insulation electrical equipment, the other end of the 3rd interface conversion valve connects one end of the 3rd filtrator, the other end of the 3rd filtrator connects the first interface of the 3rd threeway, second interface of the 3rd threeway connects the 3rd interface of the second four-way by the 3rd solenoid valve, the 4th interface of described second four-way connects SF
6the input end of purity detecting unit, SF
6first output terminal of purity detecting unit connects the first interface of the 3rd four-way, SF
6second output terminal of purity detecting unit accesses the 3rd interface of the first four-way by the 11 solenoid valve, the 4th interface of the first four-way connects the first interface of the 6th threeway, and the second interface of the 3rd four-way connects a SO
2the input end of concentration detecting unit, a SO
2the output terminal of concentration detecting unit connects the first interface of the 4th four-way, and the 3rd interface of the 3rd four-way connects the 2nd SO
2the input end of concentration detecting unit, described 2nd SO
2the output terminal of concentration detecting unit connects the second interface of the 4th four-way, and the 4th interface of described 3rd four-way connects Three S's O
2the input end of concentration detecting unit, described Three S's O
2the output terminal of concentration detecting unit connects the 3rd interface of the 4th four-way, 4th interface of the 4th four-way connects the first interface of the 5th threeway, second interface of the 5th threeway is connected with the first interface of buffer cell by the 3rd ball valve, second interface of buffer cell connects the input end of vacuum pressed pump, vacuum pressed delivery side of pump is connected with the first interface of electrically controlled 4-way transfer valve, second gauge is provided with between the first interface of described 5th threeway and the 4th interface of the 4th four-way, 3rd interface of described 5th threeway connects the second ball valve, 3rd interface of described buffer cell connects the second pressure transducer, 4th interface of buffer cell connects micro-water sensor, 5th interface of buffer cell is connected with the 3rd interface of the 6th threeway by the 12 solenoid valve, second interface of described 6th threeway is connected with vacuum orifice by the 4th ball valve, second interface of described electrically controlled 4-way transfer valve connects the input end of the first retaining valve, the output terminal of the first retaining valve connects the 3rd interface of the first threeway, 3rd interface of electrically controlled 4-way transfer valve connects the input end of the second retaining valve, the output terminal of the second retaining valve connects the 3rd interface of the second threeway, 4th interface of electrically controlled 4-way transfer valve connects the input end of the 3rd retaining valve, the output terminal of the 3rd retaining valve connects the 3rd interface of the 3rd threeway,
Described monitoring host computer comprises gas circuit control module, signal pre-processing module, A/D acquisition module, dsp processor module, fault diagnosis module, state display module and communication module, wherein, the first interface of described dsp processor module connects the signal input part of gas circuit control module, the signal output part of gas circuit control module connects the first solenoid valve in sampling detection air-channel system respectively by signal wire, second solenoid valve, 3rd solenoid valve, 4th solenoid valve, 5th solenoid valve, 6th solenoid valve, 7th solenoid valve, 8th solenoid valve, 9th solenoid valve, tenth solenoid valve, 11 solenoid valve, 12 solenoid valve, first-class gauge, second gauge, the control end of vacuum pressed pump and electrically controlled 4-way transfer valve, the signal input part of described pretreatment module connects SF respectively by signal wire
6purity sensor, the second pressure transducer, micro-water sensor, SF
6first pressure transducer of purity detecting unit, a SO
2one SO of concentration detecting unit
2concentration sensor, the 2nd SO
22nd SO of concentration detecting unit
2concentration sensor, Three S's O
2the Three S's O of concentration detecting unit
2the signal output part of concentration sensor, the signal output part of pretreatment module connects the signal input part of A/D acquisition module, the signal output part of A/D acquisition module connects the second interface of dsp processor, 3rd interface of dsp processor connects the signal input part of fault diagnosis module, the signal input part of the signal output part connection status display module of fault diagnosis module, the 4th interface connecting communication module of described dsp processor.
In such scheme, described SF
6purity detecting unit comprises reduction valve 7, the 4th threeway, first-class gauge, SF
6purity sensor, the first ball valve, the first pressure transducer, wherein, the first interface of described 4th threeway is connected with the 4th interface of the second four-way by reduction valve 7, second interface of the 4th threeway is connected with the first interface of the 3rd four-way, and the second interface of described 4th threeway is by first-class gauge, the first pressure transducer and SF
6purity sensor connects the first interface of the 3rd four-way, and the second interface of described 4th threeway is also by first-class gauge, the first pressure transducer and SF
6purity sensor connects the input end of the 11 solenoid valve, and the 3rd interface of described 4th threeway connects the first ball valve.
In such scheme, a described SO
2concentration detecting unit comprises the 5th solenoid valve, a SO
2concentration sensor, the 6th solenoid valve, a described SO
2the air intake opening of concentration sensor is connected with the second interface of the 3rd four-way by the 5th solenoid valve, a described SO
2the gas outlet of concentration sensor is connected with the first interface of the 4th four-way by the 6th solenoid valve.
In such scheme, described 2nd SO
2concentration detecting unit comprises the 7th solenoid valve, the 2nd SO
2concentration sensor, the 8th solenoid valve, the pipeline between described 7th solenoid valve and the 8th solenoid valve arranges the 2nd SO
2concentration sensor, the 7th solenoid valve is connected with the 3rd interface of the 3rd four-way, and the 8th solenoid valve is connected with the second interface of the 4th four-way.
In such scheme, described Three S's O
2concentration detecting unit comprises the 9th solenoid valve, Three S's O
2concentration sensor, the tenth solenoid valve, the pipeline between described 9th solenoid valve and the tenth solenoid valve arranges Three S's O
2concentration sensor, the 9th solenoid valve is connected with the 4th interface of the 3rd four-way, and the tenth solenoid valve is connected with the 3rd interface of the 4th four-way.
In such scheme, described SF
6purity sensor is SF
6infrared sensor.
The utility model is by arranging shared SF
6purity detecting room, share return gas channel, three independently SO
2the parts such as sensing chamber achieve SF
6the on-line checkingi of insulation electrical equipment decomposition product, ensure that accuracy in detection, avoids the mixed gas between distinct device, improve the reliable rows of system, reduce cost, improve the reusability of system, have employed circulation gas circuit design, the sample pneumatic transmission after having detected is got back to SF
6in insulation electrical equipment body, decrease the loss of gas and the pollution to air.In addition, by detecting the pressure transducer configured in gas circuit in sampling, according to the change of force value, the self diagnosis that the utility model sampling detects solenoid valve state in gas circuit can be realized, improves reliability of the present utility model.
Embodiment
Below in conjunction with drawings and Examples, the utility model is described in further detail:
A kind of hyperchannel sulfur hexafluoride insulation electrical equipment on-Line Monitor Device as shown in Figure 1-2, comprises sampling and detects air-channel system 24, monitoring host computer 25, and described sampling detects air-channel system 24 and comprises SF
6purity detecting unit 19, a SO
2concentration detecting unit 20, the 2nd SO
2concentration detecting unit 21, Three S's O
2concentration detecting unit 22, share return gas channel 23, also comprise first interface cross-over valve 2.1, second interface conversion valve 2.2, 3rd interface conversion valve 2.3, first filtrator 3.1, second filtrator 3.2, 3rd filtrator 3.3, first threeway 4.1, second threeway 4.2, 3rd threeway 4.3, 5th threeway 4.5, 6th threeway 4.6, first solenoid valve 5.1, second solenoid valve 5.2, 3rd solenoid valve 5.3, 4th solenoid valve 5.4, 11 solenoid valve 5.11, 12 solenoid valve 5.12, first four-way 6.1, second four-way 6.2, 3rd four-way 6.3, 4th four-way 6.4, second ball valve 8.2, 3rd ball valve 8.3, 4th ball valve 8.4, second gauge 9.2, second pressure transducer 11.2, buffer cell 13, vacuum pressed pump 14, micro-water sensor 15, electrically controlled 4-way transfer valve 16, first retaining valve 17.1, second retaining valve 17.2, 3rd retaining valve 17.3, vacuum orifice 18, wherein:
One end of described first interface cross-over valve 2.1 connects a SF to be measured
6insulation electrical equipment 1.1, the other end of first interface cross-over valve 2.1 connects one end of the first filtrator 3.1, the other end of the first filtrator 3.1 connects the first interface of the first threeway 4.1, second interface of the first threeway 4.1 connects the first interface of the first four-way 6.1 by the first solenoid valve 5.1, second interface of described first four-way 6.1 connects the first interface of the second four-way 6.2 by the 4th solenoid valve 5.4, one end of described second interface conversion valve 2.2 connects the 2nd SF to be measured
6insulation electrical equipment 1.2, the other end of the second interface conversion valve 2.2 connects one end of the second filtrator 3.2, the other end of the second filtrator 3.2 connects the first interface of the second threeway 4.2, second interface of the second threeway 4.2 connects the second interface of the second four-way 6.2 by the second solenoid valve 5.2, one end of described 3rd interface conversion valve 2.3 connects Three S's F to be measured
6insulation electrical equipment 1.3, the other end of the 3rd interface conversion valve 2.3 connects one end of the 3rd filtrator 3.3, the other end of the 3rd filtrator 3.3 connects the first interface of the 3rd threeway 4.3, second interface of the 3rd threeway 4.3 connects the 3rd interface of the second four-way 6.2 by the 3rd solenoid valve 5.3, the 4th interface of described second four-way 6.2 connects SF
6the input end of purity detecting unit 19, SF
6first output terminal of purity detecting unit 19 connects the first interface of the 3rd four-way 6.3, SF
6second output terminal of purity detecting unit 19 accesses the 3rd interface of the first four-way 6.1 by the 11 solenoid valve 5.11, the 4th interface of the first four-way 6.1 connects the first interface of the 6th threeway 4.6, and the second interface of the 3rd four-way 6.3 connects a SO
2the input end of concentration detecting unit 20, a SO
2the output terminal of concentration detecting unit 20 connects the first interface of the 4th four-way 6.4, and the 3rd interface of the 3rd four-way 6.3 connects the 2nd SO
2the input end of concentration detecting unit 21, described 2nd SO
2the output terminal of concentration detecting unit 21 connects the second interface of the 4th four-way 6.4, and the 4th interface of described 3rd four-way 6.3 connects Three S's O
2the input end of concentration detecting unit 22, described Three S's O
2the output terminal of concentration detecting unit 22 connects the 3rd interface of the 4th four-way 6.4, 4th interface of the 4th four-way 6.4 connects the first interface of the 5th threeway 4.5, second interface of the 5th threeway 4.5 is connected with the first interface of buffer cell 13 by the 3rd ball valve 8.3, second interface of buffer cell 13 connects the input end of vacuum pressed pump 14, the output terminal of vacuum pressed pump 14 is connected with the first interface of electrically controlled 4-way transfer valve 16, second gauge 9.2 is provided with between the first interface of described 5th threeway 4.5 and the 4th interface of the 4th four-way 6.4, 3rd interface of described 5th threeway 4.5 connects the second ball valve 8.2, 3rd interface of described buffer cell 13 connects the second pressure transducer 11.2, 4th interface of buffer cell 13 connects micro-water sensor 15, 5th interface of buffer cell 13 is connected with the 3rd interface of the 6th threeway 4.6 by the 12 solenoid valve 5.12, second interface of described 6th threeway 4.6 is connected with vacuum orifice 18 by the 4th ball valve 8.4, second interface of described electrically controlled 4-way transfer valve 16 connects the input end of the first retaining valve 17.1, the output terminal of the first retaining valve 17.1 connects the 3rd interface of the first threeway 4.1, 3rd interface of electrically controlled 4-way transfer valve 16 connects the input end of the second retaining valve 17.2, the output terminal of the second retaining valve 17.2 connects the 3rd interface of the second threeway 4.2, 4th interface of electrically controlled 4-way transfer valve 16 connects the input end of the 3rd retaining valve 17.3, the output terminal of the 3rd retaining valve 17.3 connects the 3rd interface of the 3rd threeway 4.3, described micro-water sensor 15 is for detecting SF
6micro-water content in insulation electrical equipment, described second pressure transducer 11.2 is for detecting the pressure of buffer cell 13,
Described monitoring host computer 25 comprises gas circuit control module, signal pre-processing module, A/D acquisition module, dsp processor module, fault diagnosis module, state display module and communication module, wherein, the first interface of described dsp processor module connects the signal input part of gas circuit control module, the signal output part of gas circuit control module connects the first solenoid valve 5.1 in sampling detection air-channel system respectively by signal wire, second solenoid valve 5.2, 3rd solenoid valve 5.3, 4th solenoid valve 5.4, 5th solenoid valve 5.5, 6th solenoid valve 5.6, 7th solenoid valve 5.7, 8th solenoid valve 5.8, 9th solenoid valve 5.9, tenth solenoid valve 5.10, 11 solenoid valve 5.11, 12 solenoid valve 5.12, first-class gauge 9.1, second gauge 9.2, the control end of vacuum pressed pump 14 and electrically controlled 4-way transfer valve 16, for to the electromagnetic valve switch action in gas circuit, flowmeter uninterrupted controls, the signal input part of described pretreatment module connects SF respectively by signal wire
6purity sensor 10, second pressure transducer 11.2, micro-water sensor 15, SF
6first pressure transducer 11.1 of purity detecting unit 19, a SO
2one SO of concentration detecting unit 20
2concentration sensor 12.1, the 2nd SO
22nd SO of concentration detecting unit 21
2concentration sensor 12.2, Three S's O
2the Three S's O of concentration detecting unit 22
2the signal output part of concentration sensor 12.3, for the collection of each sensor analog signals, the signal output part of pretreatment module connects the signal input part of A/D acquisition module, the signal output part of A/D acquisition module connects the second interface of dsp processor, 3rd interface of dsp processor connects the signal input part of fault diagnosis module, the signal input part of the signal output part connection status display module of fault diagnosis module, for carrying out Analysis on Fault Diagnosis and display to the simulating signal gathered, 4th interface connecting communication module of described dsp processor, for based on IEC61850 communications protocol and background devices communication.
In such scheme, described SF
6purity detecting unit 19 comprises reduction valve 7, the 4th threeway 4.4, first-class gauge 9.1, SF
6purity sensor 10, first ball valve 8.1, first pressure transducer 11.1, wherein, the first interface of described 4th threeway 4.4 is connected with the 4th interface of the second four-way 6.2 by reduction valve 7, second interface of the 4th threeway 4.4 is connected with the first interface of the 3rd four-way 6.3, and the second interface of described 4th threeway 4.4 is by first-class gauge 9.1, first pressure transducer 11.1 and SF
6purity sensor 10 connects the first interface of the 3rd four-way 6.3, and the second interface of described 4th threeway 4.4 is also by first-class gauge 9.1 and SF
6purity sensor 10 connects the input end of the 11 solenoid valve 5.11, and the 3rd interface of described 4th threeway 4.4 connects the first ball valve 8.1, described SF
6purity sensor 10 also connects the first pressure transducer 11.1.
In such scheme, a described SO
2concentration detecting unit 20 comprises the 5th solenoid valve 5.5, a SO
2concentration sensor 12.1, the 6th solenoid valve 5.6, a described SO
2the air intake opening of concentration sensor 12.1 is connected with the second interface of the 3rd four-way 6.3 by the 5th solenoid valve 5.5, a described SO
2the gas outlet of concentration sensor 12.1 is connected with the first interface of the 4th four-way 6.4 by the 6th solenoid valve 5.6.
In such scheme, described 2nd SO
2concentration detecting unit 21 comprises the 7th solenoid valve 5.7, the 2nd SO
2concentration sensor 12.2, the 8th solenoid valve 5.8, the pipeline between described 7th solenoid valve 5.7 and the 8th solenoid valve 5.8 arranges the 2nd SO
2concentration sensor 12.2, the 7th solenoid valve 5.7 is connected with the 3rd interface of the 3rd four-way 6.3, and the 8th solenoid valve 5.8 is connected with the second interface of the 4th four-way 6.4.
In such scheme, described Three S's O
2concentration detecting unit 22 comprises the 9th solenoid valve 5.9, Three S's O
2concentration sensor 12.3, the tenth solenoid valve 5.10, the pipeline between described 9th solenoid valve 5.9 and the tenth solenoid valve 5.10 arranges Three S's O
2concentration sensor 12.3, the 9th solenoid valve 5.9 is connected with the 4th interface of the 3rd four-way 6.3, and the tenth solenoid valve 5.10 is connected with the 3rd interface of the 4th four-way 6.4.
In such scheme, described SF
6purity sensor is SF
6infrared sensor, SO
2concentration sensor is SO
2electrochemical sensor.
In such scheme, a described SO
2concentration sensor 12.1, the 2nd SO
2concentration sensor 12.2, Three S's O
2concentration sensor 12.3 is SO
2electrochemical sensor.
The monitoring method of a kind of hyperchannel sulfur hexafluoride insulation electrical equipment on-Line Monitor Device designed by the utility model, comprises the steps:
S1: guarantee that all solenoid valves, ball valve are all in closed condition (namely closing the first solenoid valve 5.1, second solenoid valve 5.2, the 3rd solenoid valve 5.3, the 4th solenoid valve 5.4, the 5th solenoid valve 5.5, the 6th solenoid valve 5.6, the 7th solenoid valve 5.7, the 8th solenoid valve 5.8, the 9th solenoid valve 5.9, the tenth solenoid valve the 5.10, the 11 solenoid valve the 5.11, the 12 solenoid valve 5.12, first ball valve 8.1, second ball valve 8.2, the 3rd ball valve 8.3, the 4th ball valve 8.4);
S2: demarcate SF
6purity sensor 10, a SO
2concentration sensor 12.1, the 2nd SO
2concentration sensor 12.2 and Three S's O
2concentration sensor 12.3;
S3: air-channel system 24 is detected to sampling and vacuumizes;
S4: to a SF to be measured
6insulation electrical equipment 1.1, the 2nd SF
6insulation electrical equipment 1.2, a SF
6the decomposition product on-line monitoring of insulation electrical equipment 1.3;
Above-mentioned steps S4 comprises the steps:
S400: to a SF
6decomposition product in insulation electrical equipment 1.1 carries out on-line monitoring, opens the first solenoid valve 5.1 and the 4th solenoid valve 5.4 by monitoring host computer 25, and adjusting first-class gauge 9.1 flow is 300ml/min; Observe the force value of the first pressure transducer 11.1 that monitoring host computer 25 records, when reaching 1 atmospheric pressure, monitoring host computer 25 passes through SF simultaneously
6purity sensor 10 starts to measure SF
6purity, and record stores;
S401: open the 5th solenoid valve 5.5 and the 6th solenoid valve 5.6 by monitoring host computer 25, electrically controlled 4-way transfer valve 16 is switched to the return gas channel A of the first single-phase valve 17.1 correspondence, adjustment second gauge 9.2 flow is 300ml/min, and after 30 seconds, monitoring host computer is by a SO
2concentration sensor 12.1 starts to measure SO
2content, and record stores, observe the force value of the second pressure transducer 11.2 that monitoring host computer records, when reaching 1 atmospheric pressure, monitoring host computer 25 starts the micro-water content in measurement gas by micro-water sensor 15 simultaneously, and record stores;
S402: close the first solenoid valve 5.1, the 5th solenoid valve 5.5 and the 6th solenoid valve 5.6 by monitoring host computer, opens the 11 solenoid valve the 5.11 and the 12 solenoid valve 5.12;
S403: control to start vacuum pressed pump 14 by monitoring host computer 25, monitoring host computer 25 measures the force value of the first pressure transducer 11.1 and the second pressure transducer 11.2 automatically simultaneously, when reaching vacuum level requirements, monitoring host computer 25 closes the 4th solenoid valve the 5.4, the 11 solenoid valve the 5.11 and the 12 solenoid valve 5.12 automatically, and electrically controlled 4-way transfer valve 16 is switched to the return gas channel B of the second single-phase valve 17.2 correspondence;
S404: to the 2nd SF
6decomposition product in insulation electrical equipment 1.2 carries out on-line monitoring, opens the second solenoid valve 5.2 by monitoring host computer 25, and adjusting first-class gauge 9.1 flow is 300ml/min; Observe the force value of the first pressure transducer 11.1 that monitoring host computer 25 records, when reaching 1 atmospheric pressure, monitoring host computer 25 passes through SF simultaneously
6purity sensor 10 starts to measure SF
6purity, and record stores;
S405: open the 7th solenoid valve 5.7 and the 8th solenoid valve 5.8 by monitoring host computer, adjustment second gauge 9.2 flow is 300ml/min, and after 30 seconds, monitoring host computer 25 is by the 2nd SO
2concentration sensor 12.2 starts to measure SO
2content, and record stores, observe the force value of the second pressure transducer 11.2 that monitoring host computer 25 records, when reaching 1 atmospheric pressure, monitoring host computer 25 starts the micro-water content in measurement gas by micro-water sensor 15 simultaneously, and record stores;
S406: close the second solenoid valve 5.2, the 7th solenoid valve 5.7 and the 8th solenoid valve 5.8 by monitoring host computer 25, opens the 11 solenoid valve the 5.11 and the 12 solenoid valve 5.12;
S407: control to start vacuum pressed pump 14 by monitoring host computer 25, monitoring host computer 25 measures the force value of the first pressure transducer 11.1 and the second pressure transducer 11.2 automatically simultaneously, when reaching vacuum level requirements, monitoring host computer 25 closes the 11 solenoid valve the 5.11 and the 12 solenoid valve 5.12 automatically, and electrically controlled 4-way transfer valve 16 is switched to the return gas channel C of the 3rd single-phase valve 17.3 correspondence;
S408: to Three S's F
6decomposition product in insulation electrical equipment 1.3 carries out on-line monitoring, opens the 3rd solenoid valve 5.3 by monitoring host computer 25, and adjusting first-class gauge 9.1 flow is 300ml/min; Observe the force value of the first pressure transducer 11.1 that monitoring host computer 25 records, when reaching 1 atmospheric pressure, monitoring host computer 25 passes through SF simultaneously
6purity sensor 10 starts to measure SF
6purity, and record stores;
S409: open the 9th solenoid valve 5.9 and the tenth solenoid valve 5.10 by monitoring host computer, adjustment second gauge 9.2 flow is 300ml/min, and after 30 seconds, monitoring host computer 25 is by Three S's O
2concentration sensor 12.3 starts to measure SO
2content, and record stores, observe the force value of the second pressure transducer 11.2 that monitoring host computer 25 records, when reaching 1 atmospheric pressure, monitoring host computer 25 starts the micro-water content in measurement gas by micro-water sensor 15 simultaneously, and record stores;
S410: close the 3rd solenoid valve 5.3, the 9th solenoid valve 5.9 and the tenth solenoid valve 5.10 by monitoring host computer 25, opens the 11 solenoid valve the 5.11 and the 12 solenoid valve 5.12;
S411: control to start vacuum pressed pump 14 by monitoring host computer 25, monitoring host computer 25 measures the force value of the first pressure transducer 11.1 and the second pressure transducer 11.2 automatically simultaneously, when reaching vacuum level requirements, monitoring host computer 25 closes the 11 solenoid valve the 5.11 and the 12 solenoid valve 5.12 automatically, and electrically controlled 4-way transfer valve 16 is switched to the return gas channel A of the first single-phase valve 17.1 correspondence.
In described step S2 after the utility model has been developed or install before or system need again timing signal to carry out following steps:
S200: manual unlocking first ball valve 8.1 and the second ball valve 8.2, control to open the 5th solenoid valve 5.5 and the 6th solenoid valve 5.6 by monitoring host computer 25, the flow velocity arranging first-class gauge 9.1 and second gauge 9.2 is 300ml/min, and wherein, the first ball valve 8.1 is as SF
6purity sensor 10, a SO
2concentration sensor 12.1, the 2nd SO
2concentration sensor 12.2 and Three S's O
2the demarcation air intake opening of concentration sensor 12.3, described second ball valve 8.2 is as SF
6purity sensor 10, a SO
2concentration sensor 12.1, the 2nd SO
2concentration sensor 12.2 and Three S's O
2concentration sensor 12.3 calibrate gas port;
S201: pass into 5 kinds respectively with SF by demarcating air intake opening
6for background gas SO
2calibrating gas (SO
2concentration: 100uL/L, 50uL/L, 20uL/L, 10uL/L, 1uL/L, 0.5uL/L), often kind of gas passes into 2 minutes, automatically records each SO by monitoring host computer 25
2the signal value that concentration sensor 12.1 is responded to, utilizes normal concentration value and a SO
2the signal value that concentration sensor 12.1 is responded to, adopts least square method to a SO
2concentration sensor 12.1 is demarcated;
S202: controlled by monitoring host computer 25, is closed the 5th solenoid valve 5.5 and the 6th solenoid valve 5.6, opens the 7th solenoid valve 5.7 and the 8th solenoid valve 5.8;
S203: pass into 5 kinds respectively with SF by demarcating air intake opening
6for background gas SO
2calibrating gas (SO
2concentration: 100uL/L, 50uL/L, 20uL/L, 10uL/L, 1uL/L, 0.5uL/L), often kind of gas passes into 2 minutes, automatically records each 2nd SO by monitoring host computer
2the signal value that concentration sensor 12.2 is responded to, utilizes normal concentration value and the 2nd SO
2the signal value that concentration sensor 12.2 is responded to, adopts least square method to the 2nd SO
2concentration sensor 12.2 is demarcated;
S204: controlled by monitoring host computer 25, is closed the 7th solenoid valve 5.7 and the 8th solenoid valve 5.8, opens the 9th solenoid valve 5.9 and the tenth solenoid valve 5.10;
S205: pass into 5 kinds respectively with SF by demarcating air intake opening
6for background gas SO
2calibrating gas (SO
2concentration: 100uL/L, 50uL/L, 20uL/L, 10uL/L, 1uL/L, 0.5uL/L), often kind of gas passes into 2 minutes, by monitoring host computer 25 record every order Three S's O automatically
2the signal value that concentration sensor 12.3 is responded to, utilizes normal concentration value and Three S's O
2the signal value that concentration sensor 12.3 is responded to, adopts least square method to Three S's O
2concentration sensor 12.3 is demarcated;
S206: the SF passing into 5 kinds of concentration by demarcating air intake opening successively respectively
6calibrating gas (SF
6concentration: 99.9%, 99%, 98.5%, 98%, 97.5%, 97%), often kind of gas passes into 2 minutes, automatically records each SF by monitoring host computer 25
6the signal value that purity sensor 10 is responded to, utilizes normal concentration value and SF
6the signal value that purity sensor 10 is responded to, adopts least square method to SF
6purity sensor 10 is demarcated;
S207: passing into concentration by demarcation air intake opening is 99.9% pure SF
6gas, after 1 minute, controls closedown the 9th solenoid valve 5.9 and the tenth solenoid valve 5.10 by monitoring host computer 25; Control to open the 7th solenoid valve 5.7 and the 8th solenoid valve after 5.8,1 minute by monitoring host computer 25, then control closedown the 7th solenoid valve 5.7 and the 8th solenoid valve 5.8 by monitoring host computer 25; Control to open the 5th solenoid valve 5.5 and the 6th solenoid valve after 5.6,1 minute by monitoring host computer 25, then control closedown the 5th solenoid valve 5.5 and the 6th solenoid valve 5.6 by monitoring host computer 25; Thus make a SO
2concentration detecting unit 20, the 2nd SO
2concentration detecting unit 21 and Three S's O
2concentration detecting unit 22 is filled with about 1 atmospheric pure SF
6gas, ensures a SO
2concentration sensor 12.1, the 2nd SO
2concentration sensor 12.2, Three S's O
2concentration sensor 12.3 reaches the requirement of running environment pressure;
S208: manual-lock first ball valve 8.1 and the second ball valve 8.2, complete SF
6purity sensor 10, a SO
2concentration sensor 12.1, the 2nd SO
2concentration sensor 12.2 and Three S's O
2the demarcation of concentration sensor 12.3.
Described step S3 carries out following steps when the utility model just fills or overhauls:
S300: vacuum pump is connected to vacuum orifice 18;
S301: manual unlocking the 3rd ball valve 8.3 and the 4th ball valve 8.4, adjustment reduction valve 7 top hole pressure to 2 atmospheric pressure; The first solenoid valve 5.1, second solenoid valve 5.2, the 3rd solenoid valve 5.3, the 4th solenoid valve the 5.4, the 11 solenoid valve the 5.11 and the 12 solenoid valve 5.12 is opened by monitoring host computer 25;
S302: start vacuum pump, to removing a SO
2concentration detecting unit 20, the 2nd SO
2concentration detecting unit 21 and Three S's O
2all gas circuits outside concentration detecting unit 22 vacuumize, observe the force value of the first pressure transducer 11.1 of recording of monitoring host computer 25 and the second pressure transducer 11.2 simultaneously, when reaching vacuum level requirements, monitoring host computer 25 closes the first solenoid valve 5.1, second solenoid valve 5.2, the 3rd solenoid valve 5.3, the 4th solenoid valve the 5.4, the 11 solenoid valve the 5.11 and the 12 solenoid valve 5.12 automatically, manual-lock the 4th ball valve 8.4, finally closes vacuum pump.
The content that this instructions is not described in detail belongs to the known prior art of professional and technical personnel in the field.