CN204388899U

CN204388899U - A kind of Temperature Humidity Sensor

Info

Publication number: CN204388899U
Application number: CN201420868007.0U
Authority: CN
Inventors: 许广俊; 姜惠启; 蔡旭东; 孙淼
Original assignee: Qingdao Zhongke Software Co Ltd
Current assignee: Qingdao Zhongke Software Co Ltd
Priority date: 2014-12-31
Filing date: 2014-12-31
Publication date: 2015-06-10
Anticipated expiration: 2024-12-31

Abstract

The utility model discloses a kind of Temperature Humidity Sensor, comprise data acquisition unit, controlled processing unit, communication unit, receiving element; Data acquisition unit comprises the data acquisition unit be made up of multiple temperature sensor and humidity sensor, the data of data acquisition unit acquires transfer to wireless communication module by middleware adapter, controlled processing unit accepts the voltage signal of probe unit, is converted to digital signal and stores; The signal of controlled processing unit is wirelessly sent to receiving element by described communication unit; The signal of described receiving element receiving communication unit, described wireless communication module comprises the communication unit of multiple frequency range.The utility model utilizes the full passive element such as inductance, electric capacity to form integrated temperature, humidity sensor, because all components and parts are all passive device, can be operated in the rugged surroundings such as high temperature, low temperature, high pollution; The utility model adopts the preparation of CMOS MEMS technology, low in energy consumption, consistance good, and cost is low, is suitable for industrialization and produces.

Description

A kind of Temperature Humidity Sensor

Technical field

The utility model belongs to temperature and humidity measurement neck, is specifically related to a kind of Temperature Humidity Sensor.

Background technology

Traditional temperature, moisture measurement generally adopt the element such as temperature-humidity sensor of thermopair, thermistor and split.But this class component is easily subject to measurement field institute and environmental limit, because the impact of environment can make its hydraulic performance decline during Long-Time Service, need to make regular check on and replacing, and signal wire is when long range propagation, mutually easily produce interference, and wire is not easily laid, bring very large inconvenience to practical application.

Simultaneously, existing radio sensing network is all directly arrange wireless communication module at acquisition node, directly the data of collection are issued terminal computer process, the data volume of such collection is just very large, very large load is brought to terminal computer, and have in these data and much belong to gibberish, waste computational resource.

Utility model content

For the deficiencies in the prior art part, the technical scheme that the utility model adopts is:

A kind of Temperature Humidity Sensor, is characterized in that, comprise data acquisition unit, controlled processing unit, communication unit, receiving element, described data acquisition unit comprises the data acquisition unit be made up of multiple temperature sensor and humidity sensor, this sensor adopts semi-girder capacitive temperature sensor and interdigital capacitive humidity sensor, comprise the Semiconductor substrate connected successively from bottom to up, lower dielectric layer, lower metal layer, middle dielectric layer, intermediate metal layer, upper dielectric layer, and be positioned at upper metal interconnecting wires and the humidity-sensitive material of described upper dielectric layer upper surface, the data of data acquisition unit acquires transfer to wireless communication module by middleware adapter, described controlled processing unit accepts the voltage signal of data acquisition unit, be converted to digital signal and store, the signal of controlled processing unit is wirelessly sent to receiving element by described communication unit, the signal of described receiving element receiving communication unit, described wireless communication module comprises the communication unit of multiple frequency range.

The beneficial effects of the utility model are:

The utility model structure is comparatively simple, and small product size is little, facilitates field survey; The utility model utilizes the full passive element such as inductance, electric capacity to form integrated temperature, humidity sensor, because all components and parts are all passive device, can be operated in the rugged surroundings such as high temperature, low temperature, high pollution; The utility model adopts the preparation of CMOS MEMS technology, low in energy consumption, consistance good, and cost is low, is suitable for industrialization and produces.

Accompanying drawing explanation

Fig. 1 is schematic diagram of the present utility model.

Embodiment

A kind of Temperature Humidity Sensor, is characterized in that, comprise data acquisition unit, controlled processing unit, communication unit, receiving element, described data acquisition unit comprises the data acquisition unit be made up of multiple temperature sensor and humidity sensor, this sensor adopts semi-girder capacitive temperature sensor and interdigital capacitive humidity sensor, comprise the Semiconductor substrate connected successively from bottom to up, lower dielectric layer, lower metal layer, middle dielectric layer, intermediate metal layer, upper dielectric layer, and be positioned at upper metal interconnecting wires and the humidity-sensitive material of described upper dielectric layer upper surface, the data of data acquisition unit acquires transfer to wireless communication module by middleware adapter, described controlled processing unit accepts the voltage signal of probe unit, be converted to digital signal and store, described communication unit, wirelessly sends to receiving element by the signal of controlled processing unit, described receiving element, the signal of receiving communication unit, described wireless communication module comprises the communication unit of multiple frequency range.

This real utility model structure is comparatively simple, and small product size is little, facilitates field survey;

The utility model utilizes the full passive element such as inductance, electric capacity to form integrated temperature, humidity sensor, because all components and parts are all passive device, can be operated in the rugged surroundings such as high temperature, low temperature, high pollution;

The utility model adopts the preparation of CMOS MEMS technology, low in energy consumption, consistance good, and cost is low, is suitable for industrialization and produces.

Claims

1. a Temperature Humidity Sensor, is characterized in that, comprises data acquisition unit, controlled processing unit, communication unit, receiving element, described data acquisition unit comprises the data acquisition unit be made up of multiple temperature sensor and humidity sensor, this sensor adopts semi-girder capacitive temperature sensor and interdigital capacitive humidity sensor, comprise the Semiconductor substrate connected successively from bottom to up, lower dielectric layer, lower metal layer, middle dielectric layer, intermediate metal layer, upper dielectric layer, and be positioned at upper metal interconnecting wires and the humidity-sensitive material of described upper dielectric layer upper surface, the data of data acquisition unit acquires transfer to wireless communication module by middleware adapter, described controlled processing unit accepts the voltage signal of data acquisition unit, be converted to digital signal and store, the signal of controlled processing unit is wirelessly sent to receiving element by described communication unit, the signal of described receiving element receiving communication unit, described wireless communication module comprises the communication unit of multiple frequency range.