CN204385290U - The air-cooled furnace binding of a kind of tubular type PECVD - Google Patents
The air-cooled furnace binding of a kind of tubular type PECVD Download PDFInfo
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- CN204385290U CN204385290U CN201420828851.0U CN201420828851U CN204385290U CN 204385290 U CN204385290 U CN 204385290U CN 201420828851 U CN201420828851 U CN 201420828851U CN 204385290 U CN204385290 U CN 204385290U
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Abstract
The utility model discloses the air-cooled furnace binding of a kind of tubular type PECVD, comprising: silica tube, be located at the silica tube set ring at silica tube two ends, and be located at the peripheral thermofin of silica tube and housing from the inside to the outside successively; There is gap between described silica tube and thermofin and form first channel, heater coil is evenly located in first channel, the two ends of described first channel offer the first inlet mouth and first row gas port that are connected with outside air respectively, and the first inlet mouth and first row gas port are provided with valve.Described housing is bilayer structure, and there is gap between inner housing and body skin and form second passage, the two ends of described second passage are respectively equipped with the second inlet mouth and second exhaust port that are connected with outside air, and the second inlet mouth is provided with valve.Air is passed into furnace interior, utilizes air flowing, take away heat and be discharged to body of heater outside, thus accelerate internal cooling efficiency, reduction body of heater surface temperature, shorten process cycle, promote production capacity.
Description
Technical field
The utility model relates to PECVD device technical field, relates more specifically to the air-cooled furnace binding of a kind of tubular type PECVD.
Background technology
Tubular type PECVD is widely used in photovoltaic industry, for cell piece surface coating (antireflective film), to strengthen absorptivity and to extend the visual plant in cell piece life-span.Body of heater is as thermal source, and generally in a tubular form, be simplified construction, PECVD device producer is designed the radiating mode becoming naturally cooling usually.The deficiency of existing radiating mode and defect: 1, the deposition reaction of antireflective film is at high temperature carried out, after having reacted, body of heater needs cooling to carry out other subsequent techniques to facilitate taking-up cell piece, owing to being naturally cooling, the heat of furnace interior slowly can only be transmitted to body of heater outside by thermofin, and temperature-fall period is relatively slower, and the process time extends thereupon, and then affect the production capacity of PECVD device, lower efficiency; In the deposition reaction process of 2, antireflective film, the heat of furnace interior is directly transferred to body of heater surface by thermofin, causes body of heater surface temperature too high, becomes the labile factor of production process.
Therefore, in order to improve furnace interior cooling efficiency, reduce body of heater surface temperature, how designing a kind of fluidizing air that utilizes and carry out the tubular type PECVD furnace binding of dispelling the heat, is industry technical problem urgently to be resolved hurrily.
Utility model content
Technical problem to be solved in the utility model overcomes above-mentioned the deficiencies in the prior art, the air-cooled furnace binding of a kind of tubular type PECVD is provided, air is passed into furnace interior, utilize the fluxion strap of air to walk heat and be discharged to body of heater outside, thus accelerate furnace interior cooling efficiency, reduction body of heater surface temperature, shorten process cycle, promote production capacity.
The technical scheme in the invention for solving the above technical problem is: the air-cooled furnace binding of a kind of tubular type PECVD, comprising: silica tube, is located at the silica tube set ring at silica tube two ends, and is located at the peripheral thermofin of silica tube and housing from the inside to the outside successively; There is gap between described silica tube and thermofin and form first channel, heater coil is evenly located in first channel, the two ends of described first channel offer the first inlet mouth and first row gas port that are connected with outside air respectively, and the first inlet mouth and first row gas port are provided with valve.
Described housing is bilayer structure, exist between inner housing and body skin gap formed second passage, the two ends of described second passage be respectively equipped be connected with outside air the second inlet mouth and second exhaust port, the second inlet mouth is provided with valve.
Near being provided with ring-type gas averaging board between the second inlet mouth and second exhaust port in described second passage, gas averaging board offers several through holes.
Air-guiding strip is provided with between described gas averaging board.
Described first inlet mouth Huo ∕ and the second inlet mouth are connected to high pressure positive blower.
Compared with prior art, the beneficial effects of the utility model:
1. leave gap between silica tube and thermofin, after deposition reaction completes during cooling, furnace interior is by blasting freezing air, by the flowing of freezing air, take away heat rapidly, greatly shorten temperature fall time, improve the speed of cooling of body of heater, the antireflective film depositing operation cycle also significantly shortens thereupon, directly improves equipment capacity, is referred to as the heat radiation of body of heater internal layer.
2. the housing of body of heater adopts bilayer structure, and in body of heater heat-processed, by the flowing of freezing air, carry out heat exchange equably with the thermofin of furnace interior, body of heater surface temperature declines to a great extent, and is referred to as the heat radiation of body of heater skin.Meanwhile, bilayer structure is very beneficial for heat insulation.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the utility model is described further.
Refer to Fig. 1, the utility model relates to the air-cooled furnace binding of a kind of tubular type PECVD, comprises silica tube 1, heater coil 2, thermofin 3, inner housing 4, body skin 5 and set ring 6.Silica tube 1 is the cvd reactive chamber of cell piece, is provided with graphite boat 12 in silica tube 1, and graphite boat 12 is formed primarily of graphite flake and ceramic rod, and graphite flake is for the formation of corresponding magnetic reaction fields, and ceramic rod plays insulating effect.The body two ends of silica tube 1 are fixed with silica tube set ring 6, are provided with heater coil 2 uniformly outside the body of silica tube 1, between two set rings 6, and heater coil 2 is for providing the heat energy needed for deposition reaction.Between the outside of heater coil 2, two set rings 6, cover has insulating tubular layer 3, reduces furnace interior heat-energy losses and prevent body of heater surface temperature too high when thermofin 3 is for reacting.Gap is left between thermofin 3 and silica tube 1, define internal layer heat radiation first channel, the set ring 6 of both sides offers the first inlet mouth 10 and first row gas port 11 respectively, the inner space of two gas ports and first channel, valve is provided with at the first inlet mouth 10 and first row gas port 11, valve herein ensure that closing of gas port in deposition reaction process, to guarantee being uniformly distributed of furnace interior silica tube temperature field, first inlet mouth 10 place is equipped with high pressure positive blower, so that the blasting and discharging of freezing air.
Panel beating inner housing 4 is provided with between the outside of thermofin 3, two set rings 6, sheet metal shell body 5 is provided with in the outside of inner housing 4 and set ring 6, gap is left between inside and outside housing, define outer heat radiation second passage, offer the inner space of the second inlet mouth 7 and second exhaust port 8, two gas port and second passage in the axial both sides of body skin 5 respectively, be also provided with valve at the second inlet mouth 7 place, high pressure positive blower is equipped with, so that the blasting and discharging of freezing air simultaneously.Near being respectively equipped with ring-type gas averaging board 9 between the second inlet mouth 7 and second exhaust port 8 in second passage, gas averaging board 9 offers several through holes, simultaneously, between both sides gas averaging board 9, be provided with several parallel air-guiding strips (not indicating in figure), ensure freezing air and body of heater uniform contact in outside sandwich with this.
In the deposition reaction process of antireflective film, freezing air enters from the second inlet mouth 7, under the driving of blower fan, through the shunting action of gas averaging board, air-guiding strip, enter uniformly in body of heater, constantly absorb heat, discharge body of heater finally by second exhaust port 8, thus take away heat, greatly reduce the temperature on body of heater surface.After deposition reaction terminates, freezing air enters from the first inlet mouth 10, and under the driving of blower fan, freezing air absorbs heater coil 2 amount of heat, then discharges body of heater by first row gas port 11, to reach the object of cooling rapidly, just can take out cell piece afterwards.
The foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection domain of the present utility model.
Claims (5)
1. the air-cooled furnace binding of tubular type PECVD, comprise: silica tube (1), be located at the silica tube set ring (6) at silica tube two ends, and be located at the peripheral thermofin (3) of silica tube and housing from the inside to the outside successively, it is characterized in that: there is gap between described silica tube and thermofin and form first channel, heater coil (2) is evenly located in first channel, the two ends of described first channel offer the first inlet mouth (10) and first row gas port (11) that are connected with outside air respectively, and the first inlet mouth and first row gas port are provided with valve.
2. the air-cooled furnace binding of tubular type PECVD according to claim 1, it is characterized in that, described housing is bilayer structure, be provided with gap between inner housing (4) and body skin (5) and form second passage, the two ends of described second passage be respectively equipped be connected with outside air the second inlet mouth (7) and second exhaust port (8), the second inlet mouth is provided with valve.
3. the air-cooled furnace binding of tubular type PECVD according to claim 2, is characterized in that, near being provided with ring-type gas averaging board (9) between the second inlet mouth (7) and second exhaust port (8) in described second passage, gas averaging board offers several through holes.
4. the air-cooled furnace binding of tubular type PECVD according to claim 3, is characterized in that, described gas averaging board is provided with air-guiding strip between (9).
5. the air-cooled furnace binding of the tubular type PECVD according to Claims 1-4 any one, is characterized in that, (10) Huo ∕ and the second inlet mouth (7) are connected to high pressure positive blower to described first inlet mouth.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420828851.0U CN204385290U (en) | 2014-12-24 | 2014-12-24 | The air-cooled furnace binding of a kind of tubular type PECVD |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420828851.0U CN204385290U (en) | 2014-12-24 | 2014-12-24 | The air-cooled furnace binding of a kind of tubular type PECVD |
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| CN204385290U true CN204385290U (en) | 2015-06-10 |
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| CN201420828851.0U Active CN204385290U (en) | 2014-12-24 | 2014-12-24 | The air-cooled furnace binding of a kind of tubular type PECVD |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105444571A (en) * | 2015-12-07 | 2016-03-30 | 湖南红太阳光电科技有限公司 | Vacuum annealing furnace |
| CN106756879A (en) * | 2015-11-23 | 2017-05-31 | 中国科学院沈阳科学仪器股份有限公司 | A kind of vacuum dry pump nitrogen heater under the harsh process environments of semiconductor |
| CN111321393A (en) * | 2018-12-13 | 2020-06-23 | 中国电子科技集团公司第四十八研究所 | Microwave sealing structure of PECVD (plasma enhanced chemical vapor deposition) equipment |
| CN112665388A (en) * | 2020-12-04 | 2021-04-16 | 深圳市拉普拉斯能源技术有限公司 | Hot stove cooling structure |
-
2014
- 2014-12-24 CN CN201420828851.0U patent/CN204385290U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106756879A (en) * | 2015-11-23 | 2017-05-31 | 中国科学院沈阳科学仪器股份有限公司 | A kind of vacuum dry pump nitrogen heater under the harsh process environments of semiconductor |
| CN105444571A (en) * | 2015-12-07 | 2016-03-30 | 湖南红太阳光电科技有限公司 | Vacuum annealing furnace |
| CN111321393A (en) * | 2018-12-13 | 2020-06-23 | 中国电子科技集团公司第四十八研究所 | Microwave sealing structure of PECVD (plasma enhanced chemical vapor deposition) equipment |
| CN111321393B (en) * | 2018-12-13 | 2022-05-10 | 中国电子科技集团公司第四十八研究所 | Microwave sealing structure of PECVD (plasma enhanced chemical vapor deposition) equipment |
| CN112665388A (en) * | 2020-12-04 | 2021-04-16 | 深圳市拉普拉斯能源技术有限公司 | Hot stove cooling structure |
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