CN204372252U - Flow control valve - Google Patents
Flow control valve Download PDFInfo
- Publication number
- CN204372252U CN204372252U CN201420751360.0U CN201420751360U CN204372252U CN 204372252 U CN204372252 U CN 204372252U CN 201420751360 U CN201420751360 U CN 201420751360U CN 204372252 U CN204372252 U CN 204372252U
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- CN
- China
- Prior art keywords
- flow control
- control valve
- putting chamber
- valve body
- axle bed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
Flow control valve of the present utility model, a putting chamber is formed in a valve body, separately be provided with in the outer side surface of valve body the intake interface and communicated with putting chamber to give vent to anger interface, an axle bed is separately had to be fixedly arranged on the assembly mouth place of putting chamber, be equipped with a push rod in axle bed place, and be provided with in putting chamber one can drawn stem touch ball float.Bulk flow control valve does not need to install other control units in addition additional, the flow control effect whether gas is entered application apparatus can be produced by the functional unit of application apparatus end pushes away tactile, can with relatively more positive, the pollution risk of means reduction reliably.
Description
Technical field
The utility model, about a kind of valve member, refers to that a kind of overall structure composed significantly simplifies especially, with flow control valve that is relatively more positive, the pollution risk of means reduction reliably.
Background technique
Press, the semiconductor materials such as general light shield or wafer are for avoiding suffering foreign substance pollution, majority can be placed in box body and preserve, and for avoiding above-mentioned material be oxidized or pollute in time storing, can filling non-oxidizing gas, ultra-clean gas (Xtra Clean Dry Air in storage area further again, the inert gas such as XCDA), and preferably within a period of time, repeat filling inert gas, guarantee the environmental quality in box body.
Knownly the light shield storage facilities in order to store the semiconductor material such as light shield or wafer can be presented with the board kenel shown in Fig. 1, similar light shield storage facilities is provided with one substantially for the mechanical structure body of disc for air inflation 21 as carrying light shield 10 importing inert gas, separately be provided with one to open entire cabin and cover 22 the light shield 10 on disc for air inflation 21 is covered for corresponding with this disc for air inflation 21, make by cabin cover 22 and disc for air inflation 21 form the storage area that light shield 10 is deposited in a confession.
Above-mentioned disc for air inflation 21 and be positioned at long-range gas source 24 through pressure duct 23 connect with relative, makes with in the storage area inputted by inert gas via pressure duct 23 above disc for air inflation 21; Be limited to the environmental quality that storage area must maintain ultra-clean as far as possible, traditional practice, after the switch (valve) in gas source 24 is opened, namely allows inert gas constantly input in storage area.Even if under the state that the cabin of light shield storage facilities cover 22 has been unlocked, inert gas is still continuous to be disengaged via pressure duct 23, causes inert gas constantly to run off, causes great waste.
But, in the streets mostly the existing flow control valve commonly used is utilize the assembly manipulations such as external impetus, electric power, magnet or spring or drive at present, because the assembly relative complex that will integrate is loaded down with trivial details, not only the outward appearance type body of all component is comparatively not easy clean and also easy accumulation dust; In addition, the component that bulk flow control valve comprises is more, easier in course of action, produces the pollution sources such as particulate or dust.
Therefore, how to provide a kind of structure composed comparatively simple, and in the middle of same mechanical structure main body, be integrated with the flow control valve driving structure, make to be applied in the similar equipment needing to maintain the environmental quality of ultra-clean, be for a long time always industry and academia desire most ardently the problem of solution.
Model utility content
Main purpose of the present utility model, is namely providing a kind of overall structure composed significantly to simplify, with flow control valve that is relatively more positive, the pollution risk of means reduction reliably.
For reaching above-mentioned purpose, solution of the present utility model is:
A kind of flow control valve, comprising:
One valve body, for inside forms the soil block cloddy of a putting chamber, this putting chamber communicates with this valve body one outer side surface formation one assembly mouth, and the outer side surface of this valve body is separately provided with an intake interface communicated with this putting chamber, an interface of giving vent to anger communicated with this putting chamber;
One axle bed, is fixedly arranged on the assembly mouth place of this valve body, and this axle bed runs through an axis hole communicated with this putting chamber;
One ball float, is located in this putting chamber in the mode that can come and go displacement in this putting chamber, and being formed between this ball float and inwall of this putting chamber can the gap passed through of supplied gas;
One push rod, so that the axis hole place of this axle bed can be arranged in the kenel of this axle bed relative displacement, one end of this push rod and go deep into this putting chamber for abutting mutually with this ball float;
And this intake interface communicates in the another end of this putting chamber relative to this assembly mouth with this putting chamber; This interface of giving vent to anger communicates in the position can covered by this ball float with this putting chamber, has one section of shift motion that can enter for this ball float in the middle of the position that interface and this intake interface communicate with this putting chamber and this is given vent to anger.
Further, the tail end that this push rod stretches out this valve body is relatively provided with a thread section, is separately provided with a cap in this thread section place spiral shell.
Further, the tail end that this push rod stretches out this valve body is relatively provided with a thread section, is provided with a cap in this thread section place spiral shell, and one supplies the positioning screw cap limiting the rotation of this cap.
Further, this flow control valve is lined with at least one Airtight gasket between this axle bed and this valve body.
Further, this valve body is provided with internal screw thread in the inner ring of this assembly mouth, and the outer of this axle bed is arranged with the external screw thread supplying to be screwed with the internal screw thread of this assembly mouth.
Further, this valve body is provided with multiple pilot hole in the outer side surface that it is provided with assembly mouth.
Further, this valve body, in this intake interface place and this jointing of giving vent to anger, is respectively equipped with the pipe joint that protrudes its outer side surface relatively.
Further, this flow control valve connects a pressure duct in the intake interface place of this valve body, is provided with flow meters in this pressure duct place.Flow control valve of the present utility model, in time using, the kenel of the functional unit stroke of application apparatus is stretched in the one end of stretching out valve body with push rod, valve body is fixed on the main structure body of application apparatus end, separately be connected between the intake interface of valve body and gas source through multiple pressure duct, and be connected to valve body give vent to anger between interface and application apparatus; Whole flow control valve does not need to install other control units in addition additional, the flow control effect whether gas is able to flow into through interface of giving vent to anger application apparatus can be produced by the functional unit of application apparatus end pushes away tactile, not only the structure composed of bulk flow control valve is significantly simplified, more can with comparatively positive, the pollution risk of means reduction reliably.
Flow control valve disclosed by the utility model, do not need to install other control units in addition additional, the flow control effect whether gas is entered application apparatus can be produced by the functional unit of application apparatus end pushes away tactile, not only the structure composed of bulk flow control valve is significantly simplified, especially be applicable to being applied to as the needs such as light shield storage facilities maintain device or the equipment of ultra clean environment quality, with comparatively actively, reliably means prevent applied device or equipment contamination.
Accompanying drawing explanation
Fig. 1 is the structural representation commonly using light shield storage facilities;
Fig. 2 is that flow control valve of the present utility model uses configuration reference drawing;
Fig. 3 is the flow rate control valve structure exploded view of the utility model first embodiment;
Fig. 4 is the structure sectional view of flow control valve under not operating state of the utility model first embodiment;
Fig. 5 is the structure sectional view of flow control valve when action of the utility model first embodiment;
Fig. 6 is the air feed view of flow control valve application apparatus when action of the utility model first embodiment;
Fig. 7 is the structure sectional view of flow control valve under not operating state of the utility model second embodiment;
Fig. 8 is the structure sectional view of flow control valve behind adjustment cap position of the utility model second embodiment;
Fig. 9 is the structure sectional view of flow control valve when action of the utility model second embodiment;
Figure 10 is that the flow control valve of another embodiment of the utility model uses configuration reference drawing.
[symbol description]
Prior art:
10 light shield 21 disc for air inflations
23 pressure ducts are covered in 22 cabins
24 gas sources
The utility model:
30 flow control valve 31 valve bodies
311 putting chamber 312 assembly mouths
313 intake interfaces 314 are given vent to anger interface
315 internal screw thread 316 pilot holes
317 pipe joint 318 pipe joints
32 axle bed 321 axis holes
322 external screw thread 33 ball floats
34 push rod 341 thread sections
35 Airtight gasket 36 caps
361 positioning screw cap 37 pressure ducts
38 flowmeters.
Embodiment
In order to explain the technical solution of the utility model further, below by specific embodiment, the utility model is elaborated.
As shown in fig. 2, the utility model mainly provides a kind of and is especially applicable to being applied to as the needs such as light shield storage facilities maintain device or the equipment of ultra clean environment quality, the flow control valve 30 of applied device or equipment contamination is prevented with comparatively positive, reliable means, please coordinate with reference to shown in Fig. 2 to Fig. 4 simultaneously, flow control valve 30 of the present utility model, consist essentially of: valve body 31, axle bed 32, ball float 33, and a push rod 34; Wherein:
This valve body 31 is the inner soil block cloddy forming a putting chamber 311, this putting chamber 311 communicates with this valve body 31 1 outer side surface formation one assembly mouth 312, and the outer side surface of this valve body 31 is separately provided with the interface 314 of giving vent to anger that an intake interface 313, communicated with this putting chamber 311 communicates with this putting chamber 311.
This axle bed 32 is fixedly arranged on assembly mouth 312 place of this valve body 31, and this axle bed 32 runs through an axis hole 321 communicated with this putting chamber 311; In time implementing, bulk flow control valve 30 can be lined with at least one Airtight gasket 35 between this axle bed 32 and this valve body 31, to increase the sealing property of axle bed 32 and valve body 31; In the present embodiment, described valve body 31 is provided with internal screw thread 315 in the inner ring of this assembly mouth 312, and the outer of this axle bed 32 is arranged with the external screw thread 322 supplying to be screwed with the internal screw thread 315 of this assembly mouth 312, can pass through the mode screwed togather and is fixedly arranged on assembly mouth 312 place.
This ball float 33 is located in this putting chamber 311 in the mode that can come and go displacement in this putting chamber 311, and being formed between this ball float 33 and inwall of this putting chamber 311 can the gap passed through of supplied gas; In time implementing, described ball float 33 can be made up of metal, plastics or rubber processing.
This push rod 34 is can be arranged in axis hole 321 place of this axle bed 32 with the kenel of this axle bed 32 relative displacement, and one end of this push rod 34 and go deep into this putting chamber 311 for abutting mutually with this ball float 33, pushes away in order to coordinate to produce the linkage effect that tactile ball float 33 changes position.
And this intake interface 313 communicates in the another end of this putting chamber 311 relative to this assembly mouth 312 with this putting chamber 311; This interface 314 of giving vent to anger communicates in the position can covered by this ball float 33 with this putting chamber 311, has one section of shift motion that can enter for this ball float 33 in the middle of the position that interface 314 and this intake interface 313 communicate with this putting chamber 311 and this is given vent to anger.
In principle, flow control valve 30 of the present utility model, in time using, the kenel of functional unit (the cabin cover 22 as shown in the figure) stroke of application apparatus (light shield storage facilities as shown in the figure) is stretched in the one end of stretching out valve body 31 with push rod 34, valve body 31 is fixed on the main structure body (as located below the disc for air inflation 21 of figure) of application apparatus end, separately be connected between the intake interface 313 of valve body 31 and gas source 24 through multiple pressure duct 23, and be connected to the giving vent to anger between interface 314 and application apparatus of valve body 31.
As shown in Figure 2, whole flow control valve 30 is not under its push rod 34 is subject to the functional unit of application apparatus end (cabin cover 22) to push away tactile state, push rod 34 and ball float 33 are under the effect of suction pressure, remain on the position (as shown in Figure 4) interface 314 of giving vent to anger can covered, restriction gas disengages via interface 314 of giving vent to anger, and avoids causing gas loss.
And, when the functional unit (cabin cover 22) of application apparatus arrives predetermined stroke as shown in Figure 6 to when locating, namely push rod 34 pushes away by the functional unit (cabin cover 22) of application apparatus end and to touch or pressure is touched and towards the displacement of valve body 31 internal direction, as shown in Figures 5 and 6, and then change the position of ball float 33, make gas be able to flow into application apparatus through interface 314 of giving vent to anger, reaching can with the flow control effect of application apparatus fine motion.
Especially, the structure composed of bulk flow control valve can significantly simplify whereby, and do not need to install other control units in addition additional, the flow control effect whether gas is entered application apparatus can be produced, with relatively more positive, the pollution risk of means reduction reliably by the functional unit of application apparatus end pushes away tactile.
Moreover flow control valve of the present utility model is in time implementing, and described valve body 31 can by slug or the machine shaping of unit of plastic one; In the present embodiment, described valve body 31 is provided with multiple pilot hole 316 in the outer side surface that it is provided with assembly mouth 312, and interface 314 place of can giving vent to anger in this intake interface 313 place and this further, be respectively equipped with the pipe joint 317,318 that protrudes its outer side surface relatively, make the appearance and modeling more simple harmonic quantity of whole flow control valve 30, contribute to preventing dust from adhering to and pile up.
As shown in Fig. 3 and Fig. 7, flow control valve of the present utility model is in time specifically implementing, the tail end that described push rod 34 stretches out this valve body 31 relatively can be provided with a thread section 341 further, separately be provided with a cap 36 in this thread section 341 place spiral shell, can pass through the mode of rotating cap 36, rapid fine adjustment push rod 34 stretches into the degree (as shown in Figure 8) of valve body 31.
According to this, can coordinate the aperture design of interface 314 of giving vent to anger, collocation adjustment push rod 34 stretches into the degree of valve body 31, reaches the function adjusting the maximum gas output of flow control valve 30 as shown in Figure 9.Certainly, take off the tail end that described push rod 34 stretches out this valve body 31 be relatively provided with a thread section 341 upper, and under this thread section 341 place spiral shell is provided with the structure kenel of a cap 36, one can be established for the positioning screw cap 361 limiting the rotation of this cap 36, really cap 36 to be fixed on the position of adjusting further in this thread section 341 place spiral shell.
It is worth mentioning that, flow control valve 30 of the present utility model upper take off different structure kenel under, bulk flow control valve 30 is in time dispatching from the factory, can be as shown in Figure 10, a pressure duct 37 is connected in advance prior to intake interface 313 place of this valve body 31, and be provided with flow meters 38 in this pressure duct 37 place, make to obtain a kind of flow control valve 30 being combined with flow indication function.
Specifically, flow control valve disclosed by the utility model, do not need to install other control units in addition additional, the flow control effect whether gas is entered application apparatus can be produced by the functional unit of application apparatus end pushes away tactile, not only the structure composed of bulk flow control valve is significantly simplified, especially be applicable to being applied to as the needs such as light shield storage facilities maintain device or the equipment of ultra clean environment quality, with comparatively actively, reliably means prevent applied device or equipment contamination.
Technology contents of the present utility model and technical characterstic disclose as above, but the personage being familiar with the technology still may do the various replacement and the modification that do not deviate from this case model utility spirit based on announcement of the present utility model.Therefore, protection domain of the present utility model should be not limited to those disclosed embodiments, and should comprise various do not deviate from replacement of the present utility model and modification, and is contained by following claim.
Claims (8)
1. a flow control valve, is characterized in that, comprising:
One valve body, for inside forms the soil block cloddy of a putting chamber, this putting chamber communicates with this valve body one outer side surface formation one assembly mouth, and the outer side surface of this valve body is separately provided with an intake interface communicated with this putting chamber, an interface of giving vent to anger communicated with this putting chamber;
One axle bed, is fixedly arranged on the assembly mouth place of this valve body, and this axle bed runs through an axis hole communicated with this putting chamber;
One to be located at the ball float in this putting chamber in the mode that can come and go displacement in this putting chamber, being formed between this ball float and inwall of this putting chamber can the gap passed through of supplied gas;
One can be arranged in the push rod at the axis hole place of this axle bed with the kenel of this axle bed relative displacement, one end of this push rod and go deep into this putting chamber for abutting mutually with this ball float;
And this intake interface communicates in the another end of this putting chamber relative to this assembly mouth with this putting chamber; This interface of giving vent to anger communicates in the position can covered by this ball float with this putting chamber, has one section of shift motion that can enter for this ball float in the middle of the position that interface and this intake interface communicate with this putting chamber and this is given vent to anger.
2. flow control valve as claimed in claim 1, is characterized in that: the tail end that this push rod stretches out this valve body is relatively provided with a thread section, is separately provided with a cap in this thread section place spiral shell.
3. flow control valve as claimed in claim 1, is characterized in that: the tail end that this push rod stretches out this valve body is relatively provided with a thread section, is provided with a cap in this thread section place spiral shell, and one supplies the positioning screw cap limiting the rotation of this cap.
4. flow control valve as claimed in claim 1, is characterized in that: this flow control valve is lined with at least one Airtight gasket between this axle bed and this valve body.
5. as the flow control valve of Claims 1-4 according to any one of it, it is characterized in that: this valve body is provided with internal screw thread in the inner ring of this assembly mouth, this axle bed outer is arranged with the external screw thread for being screwed with the internal screw thread of this assembly mouth.
6., as the flow control valve of Claims 1-4 according to any one of it, it is characterized in that: this valve body is provided with multiple pilot hole in the outer side surface that it is provided with assembly mouth.
7. as the flow control valve of Claims 1-4 according to any one of it, it is characterized in that: this valve body, in this intake interface place and this jointing of giving vent to anger, is respectively equipped with the pipe joint that protrudes its outer side surface relatively.
8., as the flow control valve of Claims 1-4 according to any one of it, it is characterized in that: this flow control valve connects a pressure duct in the intake interface place of this valve body, be provided with flow meters in this pressure duct place.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420751360.0U CN204372252U (en) | 2014-12-04 | 2014-12-04 | Flow control valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420751360.0U CN204372252U (en) | 2014-12-04 | 2014-12-04 | Flow control valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204372252U true CN204372252U (en) | 2015-06-03 |
Family
ID=53328474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420751360.0U Expired - Fee Related CN204372252U (en) | 2014-12-04 | 2014-12-04 | Flow control valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204372252U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110706541A (en) * | 2019-10-23 | 2020-01-17 | 胡越云 | Pressure flow control system training device |
-
2014
- 2014-12-04 CN CN201420751360.0U patent/CN204372252U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110706541A (en) * | 2019-10-23 | 2020-01-17 | 胡越云 | Pressure flow control system training device |
| CN110706541B (en) * | 2019-10-23 | 2021-11-09 | 山东同其工业互联网有限公司 | Pressure flow control system training device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150603 Termination date: 20191204 |