CN204357660U - The pneumatic pump of strong acid-base-resisting - Google Patents
The pneumatic pump of strong acid-base-resisting Download PDFInfo
- Publication number
- CN204357660U CN204357660U CN201420673513.4U CN201420673513U CN204357660U CN 204357660 U CN204357660 U CN 204357660U CN 201420673513 U CN201420673513 U CN 201420673513U CN 204357660 U CN204357660 U CN 204357660U
- Authority
- CN
- China
- Prior art keywords
- opening end
- furtulon
- return assembly
- strong acid
- cover plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- ZWAOHEXOSAUJHY-ZIYNGMLESA-N doxifluridine Chemical compound O[C@@H]1[C@H](O)[C@@H](C)O[C@H]1N1C(=O)NC(=O)C(F)=C1 ZWAOHEXOSAUJHY-ZIYNGMLESA-N 0.000 claims abstract description 66
- 229950005454 doxifluridine Drugs 0.000 claims abstract description 65
- 239000012530 fluid Substances 0.000 claims abstract description 24
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 78
- 239000000463 material Substances 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 6
- 239000007769 metal material Substances 0.000 claims description 4
- 239000002253 acid Substances 0.000 abstract description 23
- 230000003628 erosive effect Effects 0.000 abstract description 4
- 239000003513 alkali Substances 0.000 abstract description 2
- 230000005540 biological transmission Effects 0.000 abstract description 2
- 230000000712 assembly Effects 0.000 abstract 1
- 238000000429 assembly Methods 0.000 abstract 1
- 230000007306 turnover Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000013043 chemical agent Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Abstract
The utility model provides the pneumatic pump of a strong acid-base-resisting, can be installed in the board of confession strong acid or highly basic, transmission and the circulatory function of fluid is provided, comprise the main body that has center containing space and two side opening ends, it is provided with water-in and water-out hole to be communicated with center containing space, one Furtulon central shaft is arranged in wherein again, two Furtulon telescopic elements are installed in two opening ends respectively and can engage Furtulon central shaft, two pairs of non-return assemblies of water-in and water-out are installed in two side opening ends respectively, and opening end corresponding to being communicated with separately and water-in and water-out hole; Two cover plates are locked in main body two ends and cover opening end respectively, and rely on inlet hole input gas to drive strong acid or the turnover of highly basic fluid to cause two Furtulon telescopic elements and Furtulon central shaft to move back and forth, and the erosion of strong acid, alkali fluid can be prevented.
Description
Technical field
The utility model relates to a kind of pneumatic type pump, particularly about a kind of can the pneumatic pump of strong acid-base-resisting of fluid of overall anti-strong acid and highly basic.
Background technique
Pump is a kind of pressure in order to increase the fluid be input into wherein, again by the equipment of fluid output, pump then needs the driving of external force to make inflow fluid pressurized wherein, and common pump driving mode can be divided into hand pump, steam pump, motor-drive pump, pneumatic pump, turbine pump, electromagnetic pump, steam turbine pump and Diesel engine pump etc.
Wherein pneumatic pump uses the fluid of gas exerts pressure in the outer also presses against diaphragm sheet of both sides diaphragm to increase the pressure of fluid usually, again because the start of gas not easily produces spark, therefore the higher place of security requirement can be used in, along with high-tech industry is as the development of semiconductor industry, because the chemical agent burning-point used in processing procedure is usually lower, and the requirement in Security is very high, usual meeting choice for use pneumatic pump exports to provide the supercharging of chemical agent, the process work bench of wet etching is so provided, the uses such as acid supplying system or cleaning system processing procedure.The continuous motion stem of existing pneumatic pump internal partition diaphragm and connection diaphragm is easily because the flowing of strong acid or highly basic, and cause the erosion of pump inside, working life is limited and not easily estimate when can break down suddenly, moreover, pneumatic pump therefore need to provide and control accurate flow and flow velocity, this is very important for above-mentioned processing procedure, otherwise can affect productivity and the production capacity of its procedure for producing, if inside suffers the erosion of strong acid or highly basic, then can cause pump start that irregular fluid flow occurs and export.
Therefore, the utility model, for above-mentioned puzzlement, proposes a kind of pneumatic pump of strong acid-base-resisting, and it relies on Furtulon telescopic element and Furtulon central shaft to improve general existing diaphragm and continuous motion stem, so effectively improves effect of the strong acid-base-resisting of pump inside.
Model utility content
Main purpose of the present utility model is providing a kind of pneumatic pump of strong acid-base-resisting, it can rely on the telescopic element of Furtulon and central shaft to replace traditional diaphragm and continuous motion stem, anti-strong acid in raising pneumatic pump and effect of highly basic, to promote the working life of pneumatic pump, and maintaining the fluid of pneumatic pump transmission stable in board and circulation strong acid or highly basic, then Absorbable organic halogens maintains productivity and the production capacity of procedure for producing.
To achieve the above object, the utility model provides a kind of pneumatic pump of strong acid-base-resisting, and it can be installed in transmitting fluid in board, and it is characterized in that, this pneumatic pump comprises:
One main body, it has a center containing space, and this center containing space two side is respectively equipped with the first opening end and the second opening end, and this main body is provided with a water-feeding hole and a water outlet hole to be communicated with this center containing space;
One Furtulon central shaft, it is arranged in the middle of this first opening end, this center containing space and this second opening end;
One first Furtulon telescopic element and one second Furtulon telescopic element, it is installed in this first opening end and this second opening end respectively and engages this Furtulon central shaft;
The one first non-return assembly of water inlet and the non-return assembly of one second water inlet, it is installed in this first opening end and this second opening end respectively, and this first non-return assembly of water inlet and the non-return assembly of this second water inlet are communicated with this first opening end, this second opening end and this water-feeding hole respectively;
The non-return assembly of one first water outlet and the non-return assembly of one second water outlet, it is installed in this first opening end and this second opening end respectively, and the non-return assembly of this first water outlet and the non-return assembly of this second water outlet are communicated with this first opening end, this second opening end and this water outlet hole respectively; And
One first cover plate and one second cover plate, this first cover plate is provided with one first inlet hole, this second cover plate is provided with one second inlet hole, this first cover plate and this second cover plate are locked in this main body two ends respectively, and this first cover plate covers this first opening end and this second cover plate covers this second opening end.
In the pneumatic pump of described strong acid-base-resisting, the non-return assembly of this first water outlet, the non-return assembly of this second water outlet comprise respectively:
One cup;
One spring, it is installed in bottom this cup;
One forward check valve; It connects this spring and is installed in this cup; And
One capping, it is covered in the rim of a cup of this cup.
In the pneumatic pump of described strong acid-base-resisting, the non-return assembly of this first water inlet, the non-return assembly of this second water inlet comprise respectively:
One cup;
One reverse check valve, it is installed in bottom this cup;
One spring, it is positioned at this cup and connects this reverse check valve; And
One capping, it is covered in the rim of a cup of this cup.
In the pneumatic pump of described strong acid-base-resisting, the non-return assembly of this first water inlet, this second water inlet non-return assembly, the non-return assembly of this first water outlet, the non-return assembly of this second water outlet and this main body are Furtulon materials.
In the pneumatic pump of described strong acid-base-resisting, this first cover plate, this second cover plate are metal materials.
In the pneumatic pump of described strong acid-base-resisting, the plated surface last layer Furtulon of this first cover plate, this second cover plate.
In the pneumatic pump of described strong acid-base-resisting, also comprise four fixing gear racks and eight nuts, so that this first cover plate, this second cover plate are locked in this main body two ends.
In the pneumatic pump of described strong acid-base-resisting, this first Furtulon telescopic element, this second Furtulon telescopic element are the bellows of Furtulon material.
In the pneumatic pump of described strong acid-base-resisting, this water-feeding hole and this water outlet hole connect a liquid line respectively.
In the pneumatic pump of described strong acid-base-resisting, this first inlet hole, this second inlet hole connect a gas piping separately.
By means of the gas extrusion first Furtulon telescopic element that the first inlet hole inputs, it drives Furtulon central shaft to promote the second Furtulon telescopic element again, by means of the first inlet hole and the second inlet hole staggered input gas, first, second Furtulon telescopic element and Furtulon central shaft are moved reciprocatingly, for another example this to-and-fro motion makes the fluid flowing into center containing space from water-feeding hole flow out through this water outlet hole again, the strong acid of the drive board capable of circulation of the to-and-fro motion by means of the pneumatic pump of strong acid-base-resisting or highly basic circular fluidic flow.
Under rely on specific embodiment to coordinate pay graphicly to illustrate in detail, when the effect being easier to understand the purpose of this utility model, technology contents, feature and reach.
Accompanying drawing explanation
Fig. 1 is stereogram of the present utility model;
Fig. 2 is sectional axonometric drawing of the present utility model;
Fig. 3 is decomposing schematic representation of the present utility model;
Fig. 4 is diced elements schematic diagram of the present utility model;
Fig. 5 of the present utility model first makes flowing mode schematic diagram;
Fig. 6 of the present utility model second makes flowing mode schematic diagram.
Description of reference numerals: the pneumatic pump of 10 strong acid-base-resistings; 12 main bodys; 14 center containing spaces; 16 first opening ends; 18 second opening ends; 20 water-feeding holes; 22 water outlet holes; 24 Furtulon central shafts; 26 first Furtulon telescopic elements; 28 second Furtulon telescopic elements; The non-return assembly of 30 first water inlet; The non-return assembly of 32 first water outlet; The non-return assembly of 34 second water inlet; The non-return assembly of 36 second water outlet; 37 fixing gear racks; 38 first cover plates; 39 nuts; 40 second cover plates; 42 first inlet holes; 44 second inlet holes; 46 factory of factory business ends; 48 boards; 50 stable-pressure devices; 52 filtrating equipments; 54 chemical acid/lye tanks.
Embodiment
In semiconductor manufacturing factory, solar energy manufactory, LED manufactory or other chemical plant, there is board that strong acid or highly basic must be used to carry out the application of the related process aspects such as the etching of product or cleaning, board domestic demand install can the pump of anti-strong acid and highly basic to drive circulating of acid solution or alkali lye, the pneumatic pump of strong acid-base-resisting then provides the Furtulon structure preventing strong acid or highly basic completely from inside to outside, with circulating of stable strong acid or highly basic fluid.
First, shown in the utility model Fig. 1, Fig. 2 and Fig. 3, a kind of pneumatic pump 10 of strong acid-base-resisting, it comprises a main body 12, its inside has a center containing space 14, and be positioned at main body 12 both sides and be respectively equipped with the first opening end 16 and the second opening end 18, main body 12 is then provided with again a water-feeding hole 20 and a water outlet hole 22 to be communicated with center containing space 14, water-feeding hole 20 and water outlet hole 22 can connect a liquid line (not shown) respectively; One Furtulon central shaft 24 is arranged in the first opening end 16, center containing space 14 and the second opening end 18, the first Furtulon telescopic element 26 and the second Furtulon telescopic element 28 is had to be installed in the first opening end 16 and the second opening end 18 respectively and Furtulon central shaft 24 can be engaged again, in the present embodiment, the first Furtulon telescopic element 26 and the second Furtulon telescopic element 28 can be the bellows of Furtulon material; First opening end 16 is equiped with the non-return assembly of the first water inlet 30 and the non-return assembly 32 of the first water outlet, second opening end 18 is equiped with the non-return assembly of the second water inlet 34 and the non-return assembly 36 of the second water outlet, and the non-return assembly of the first water inlet 30 and the non-return assembly 34 of the second water inlet can be communicated with the first opening end 16, second opening end 18 and the non-return assembly of water-feeding hole 20, first water outlet 32 and the non-return assembly 36 of the second water outlet respectively can be communicated with the first opening end 16, second opening end 18 and water outlet hole 22 respectively; Rely on four fixing gear racks 37 to be locked in main body 12 respectively by the first cover plate 38 and the second cover plate 40 in main body 12 both sides, specifically, first cover plate 38 covers the first opening end 16, and utilize four nuts 39 that first cover plate 38 is locked in fixing gear rack 37 one end, and the first cover plate 38 is firmly locked in main body 12; In like manner, second cover plate 40 covers the second opening end 18, and utilize four nuts 39 that second cover plate 40 is locked in fixing gear rack 37 the other end, and the second cover plate 40 is firmly locked in main body 12, and the first cover plate 38 is provided with the first inlet hole 42, second cover plate 40 is provided with the second inlet hole 44, first inlet hole 42 and the second inlet hole 44 can be connected to a gas piping (not shown) separately.
Accept epimere, except Furtulon central shaft 24, first Furtulon telescopic element 26 and the second Furtulon telescopic element 28, the non-return assembly of first water inlet 30 and the second non-return assembly 34 of water inlet and the non-return assembly of the first water outlet 32 and the non-return assembly 36 of the second water outlet and main body 12 are all Furtulon materials, and the first cover plate 38 and the second cover plate 40 are cover plates of metal material, but can plate in its surface the erosion that one deck Furtulon prevents strong acid or highly basic.Wherein, the non-return assembly 30 of the first water inlet and the non-return assembly 34 of the second water inlet bottom a cup, install a spring upwards connect a forward check valve again, is covered in the rim of a cup of cup with a capping.The non-return assembly of first water outlet 32 and the non-return assembly 36 of two water outlets are then bottom a cup, install a reverse check valve upwards connect a spring again, are covered in the rim of a cup of cup with a capping.Design by means of contrary check valve makes the non-return assembly of the first water inlet 30 and the second non-return assembly 34 of water inlet and the non-return assembly of the first water outlet 32 and the non-return assembly 36 of the second water outlet form the assembly of different direction water inlet and outlet.
After each element in this device has been described, continues and implementation methods of the present utility model has been described, shown in Fig. 4, Fig. 5 of the present utility model.But fluid strong acid or the highly basic of board 48 is flowed to from factory of factory business end 46, flow to the water-feeding hole 20 in the pneumatic pump 10 of strong acid-base-resisting by means of liquid line, then flow in the first opening end 16 and the second opening end 18 that the first cover plate 38 and the second cover plate 40 cover via the non-return assembly of the first water outlet 32 and the non-return assembly 34 of the second water inlet.Now, gas piping is relied on to pour into the first inlet hole 42 by means of the gas being connected to board end, and the Furtulon of extruding promotion first immediately telescopic element 26 drives Furtulon central shaft 24 to promote the second Furtulon telescopic element 28, extruding by means of the first Furtulon telescopic element 26 relies on the non-return assembly 32 of the first water outlet to flow to water outlet hole 22 fluid in first opening end 16, simultaneously, after second Furtulon telescopic element 28 is pushed, then fluid is made to flow in the second opening end 18 from the non-return assembly 34 of the second water inlet.
Then, referring to shown in Fig. 4, Fig. 6 of the present utility model and simultaneously with reference to shown in figure 5.Flow to the water-feeding hole 20 in the pneumatic pump 10 of strong acid-base-resisting by means of liquid line, then flow in the first opening end 16 and the second opening end 18 that the first cover plate 38 and the second cover plate 40 cover via the first non-return assembly of water inlet and the non-return assembly 34 of the second water inlet.Now, the gas that board end supplies can be relied on, gas piping is relied on to pour into the second inlet hole 44 again, and the Furtulon of extruding promotion second immediately telescopic element 28 drives Furtulon central shaft 24 to promote the first Furtulon telescopic element 26, extruding by means of the second Furtulon telescopic element 28 relies on the non-return assembly 36 of the second water outlet to flow to water outlet hole 22 fluid in second opening end 18, simultaneously, after first Furtulon telescopic element 26 is pushed, then fluid is made to flow in the first opening end 16 from the non-return assembly 30 of the first water inlet.The utility model then relies on the first inlet hole 42 and the second inlet hole 44 to input gas respectively, to compress the first Furtulon telescopic element 26 respectively, Furtulon central shaft 24 and the second Furtulon telescopic element 28 and form a to-and-fro motion, and move and so forth strong acid or highly basic that factory of factory business end 46 is provided, the reciprocating manner of the first Furtulon telescopic element 26 and the second Furtulon telescopic element 28 is relied on to be squeezed to other devices in board 48 again, as can flow to stable-pressure device 50 stablize the pneumatic pump 10 of strong acid-base-resisting the fluid got, flow to filtrating equipment 52 again to filter out the impurity in fluid, last again discharged among chemical acid/lye tank 54.
Therefore in sum, the utility model in effect of board as the action of the heart in human body, fluid is squeezed into in board from factory of factory business end by rule, and because of use can Furtulon telescopic element, Furtulon central shaft, main body and the non-return assembly of water-in and water-out made by the Furtulon material of anti-strong acid or highly basic and make the utility model can not by strong acid or highly basic corrode, more can extend the working life of pneumatic pump, and more can stablize the flowing of the fluid of strong acid or highly basic.Cover plate uses metal material then because avoiding sharp pounding to make cover plate easily be out of shape, and when plated surface last layer Furtulon is to avoid the liquid line leakage loss in board, causes the corrosion of cover plate.
More than illustrate the utility model just illustrative; and nonrestrictive, those of ordinary skill in the art understand, when not departing from the spirit and scope that claim limits; many amendments, change or equivalence can be made, but all will fall within protection domain of the present utility model.
Claims (10)
1. a pneumatic pump for strong acid-base-resisting, it can be installed in transmitting fluid in board, and it is characterized in that, this pneumatic pump comprises:
One main body, it has a center containing space, and this center containing space two side is respectively equipped with the first opening end and the second opening end, and this main body is provided with a water-feeding hole and a water outlet hole to be communicated with this center containing space;
One Furtulon central shaft, it is arranged in the middle of this first opening end, this center containing space and this second opening end;
One first Furtulon telescopic element and one second Furtulon telescopic element, it is installed in this first opening end and this second opening end respectively and engages this Furtulon central shaft;
The one first non-return assembly of water inlet and the non-return assembly of one second water inlet, it is installed in this first opening end and this second opening end respectively, and this first non-return assembly of water inlet and the non-return assembly of this second water inlet are communicated with this first opening end, this second opening end and this water-feeding hole respectively;
The non-return assembly of one first water outlet and the non-return assembly of one second water outlet, it is installed in this first opening end and this second opening end respectively, and the non-return assembly of this first water outlet and the non-return assembly of this second water outlet are communicated with this first opening end, this second opening end and this water outlet hole respectively; And
One first cover plate and one second cover plate, this first cover plate is provided with one first inlet hole, this second cover plate is provided with one second inlet hole, this first cover plate and this second cover plate are locked in this main body two ends respectively, and this first cover plate covers this first opening end and this second cover plate covers this second opening end.
2. the pneumatic pump of strong acid-base-resisting as claimed in claim 1, it is characterized in that, the non-return assembly of this first water outlet, the non-return assembly of this second water outlet comprise respectively:
One cup;
One spring, it is installed in bottom this cup;
One forward check valve; It connects this spring and is installed in this cup; And
One capping, it is covered in the rim of a cup of this cup.
3. the pneumatic pump of strong acid-base-resisting as claimed in claim 1, is characterized in that, the non-return assembly of this first water inlet, the non-return assembly of this second water inlet comprise respectively:
One cup;
One reverse check valve, it is installed in bottom this cup;
One spring, it is positioned at this cup and connects this reverse check valve; And
One capping, it is covered in the rim of a cup of this cup.
4. the pneumatic pump of strong acid-base-resisting as claimed in claim 1, is characterized in that, the non-return assembly of this first water inlet, this second water inlet non-return assembly, the non-return assembly of this first water outlet, the non-return assembly of this second water outlet and this main body are Furtulon materials.
5. the pneumatic pump of strong acid-base-resisting as claimed in claim 1, it is characterized in that, this first cover plate, this second cover plate are metal materials.
6. the pneumatic pump of strong acid-base-resisting as claimed in claim 5, is characterized in that, the plated surface last layer Furtulon of this first cover plate, this second cover plate.
7. the pneumatic pump of strong acid-base-resisting as claimed in claim 1, is characterized in that, also comprise four fixing gear racks and eight nuts, so that this first cover plate, this second cover plate are locked in this main body two ends.
8. the pneumatic pump of strong acid-base-resisting as claimed in claim 1, it is characterized in that, this first Furtulon telescopic element, this second Furtulon telescopic element are the bellows of Furtulon material.
9. the pneumatic pump of strong acid-base-resisting as claimed in claim 1, it is characterized in that, this water-feeding hole and this water outlet hole connect a liquid line respectively.
10. the pneumatic pump of strong acid-base-resisting as claimed in claim 1, it is characterized in that, this first inlet hole, this second inlet hole connect a gas piping separately.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420673513.4U CN204357660U (en) | 2014-11-12 | 2014-11-12 | The pneumatic pump of strong acid-base-resisting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420673513.4U CN204357660U (en) | 2014-11-12 | 2014-11-12 | The pneumatic pump of strong acid-base-resisting |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204357660U true CN204357660U (en) | 2015-05-27 |
Family
ID=53259134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420673513.4U Expired - Fee Related CN204357660U (en) | 2014-11-12 | 2014-11-12 | The pneumatic pump of strong acid-base-resisting |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204357660U (en) |
-
2014
- 2014-11-12 CN CN201420673513.4U patent/CN204357660U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150527 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |