CN204338612U - A kind of planar targets binding apparatus for leveling - Google Patents

A kind of planar targets binding apparatus for leveling Download PDF

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Publication number
CN204338612U
CN204338612U CN201420833245.8U CN201420833245U CN204338612U CN 204338612 U CN204338612 U CN 204338612U CN 201420833245 U CN201420833245 U CN 201420833245U CN 204338612 U CN204338612 U CN 204338612U
Authority
CN
China
Prior art keywords
exerting pressure
leveling
bar
pressure
hook
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201420833245.8U
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Chinese (zh)
Inventor
王志强
张斐
罗建冬
罗文富
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
XIAMEN YINGRI NEW MATERIAL TECHNOLOGY Co Ltd
Original Assignee
XIAMEN YINGRI NEW MATERIAL TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by XIAMEN YINGRI NEW MATERIAL TECHNOLOGY Co Ltd filed Critical XIAMEN YINGRI NEW MATERIAL TECHNOLOGY Co Ltd
Priority to CN201420833245.8U priority Critical patent/CN204338612U/en
Application granted granted Critical
Publication of CN204338612U publication Critical patent/CN204338612U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a kind of planar targets binding apparatus for leveling, during for being bound by the copper backboard of planar targets and attached flat board target, leveling is used, and described copper backboard is positioned on plane table, this binding apparatus for leveling comprises binding rack and leveling block, described leveling block be placed on the copper backboard and its size that are attached with target and copper backboard suitable, form entirety to be exerted pressure; Described binding rack comprises hook-shaped frame, frame of exerting pressure, the hook-shaped end of described hook-shaped frame is positioned at waits overall below of exerting pressure, described frame one end of exerting pressure is connected with hook-shaped frame, and this frame other end of exerting pressure is positioned at waits to exert pressure on the whole, is formed for waiting the overall support body forming clamping pressing structure of exerting pressure.Binding rack and leveling block coordinate by the utility model, and the dynamics realizing exerting pressure regulates, thus can also ensure that target material body can not be damaged while guaranteeing to there will not be the phenomenons such as bubble between target and copper backboard, and then increases work efficiency.

Description

A kind of planar targets binding apparatus for leveling
Technical field
The utility model relates to a kind of planar targets binding apparatus for leveling, divides belong to target manufacturing technology field by International Patent Classification (IPC) (IPC).
Background technology
Planar targets is bundled in by target on copper backboard, thus form the target raw material that can realize sputtering processing, and in the production of planar targets raw material and process, Major Difficulties is the binding between target and copper backboard, how to guarantee to there will not be gap or bubble etc. between target and copper backboard, if occur, gap or bubble phenomenon directly affect the quality of target, cause defective.
At present, the leveling structure that existing target is bundled in copper backboard generally adopts iron block to exert pressure, and very easily target material surface is caused cut, makes target material body sustain damage, and iron block weight is large simultaneously, and a dead lift is required great effort very much.
Thus, the present inventor considers to improve the structure of existing planar targets binding leveling, and this case produces thus.
Utility model content
For the deficiencies in the prior art, the utility model provides a kind of planar targets binding apparatus for leveling, and it effectively realizes the leveling of planar targets, guarantees that its inside there will not be the phenomenons such as bubble, thus guarantees the quality of target.
For achieving the above object, the utility model is achieved through the following technical solutions:
A kind of planar targets binding apparatus for leveling, during for being bound by the copper backboard of planar targets and attached flat board target, leveling is used, and described copper backboard is positioned on plane table, this binding apparatus for leveling comprises binding rack and leveling block, described leveling block be placed on the copper backboard and its size that are attached with target and copper backboard suitable, form entirety to be exerted pressure; Described binding rack comprises hook-shaped frame, frame of exerting pressure, the hook-shaped end of described hook-shaped frame is positioned at waits overall below of exerting pressure, described frame one end of exerting pressure is connected with hook-shaped frame, and this frame other end of exerting pressure is positioned at waits to exert pressure on the whole, is formed for waiting the overall support body forming clamping pressing structure of exerting pressure.
Further, described in frame of exerting pressure comprise cross bar and bar of exerting pressure, described cross bar one end is fixed on hook-shaped frame, bar of exerting pressure described in this cross bar other end is connected with, and this bar of exerting pressure is pressure adjusting lever.
Further, described in the exert pressure circumference side of bar be provided with external screw thread, this bar of exerting pressure is set in the stomidium of the cross bar other end, and this stomidium is the female through hole of band, described in bar of exerting pressure coordinate the rotational structure forming adjustable dynamics of exerting pressure with stomidium.
Further, described in bar upper end of exerting pressure also wear the handlebar penetrating a horizontally set, formed and drive bar of exerting pressure to rotate the handle arrangement regulated at stomidium.
Further, the quantity of described binding rack is at least one, and the quantity of this binding rack will be arranged according to the copper backboard being attached with target.
Further, below described leveling block, be also provided with buffer structure, in order to the buffering in course of exerting pressure, effectively avoid target be scraped off because pressure is excessive or damage.
Further, described buffer structure is cardboard.
Compared with prior art, advantage of the present utility model:
Binding rack and leveling block coordinate by the utility model, and the dynamics realizing exerting pressure regulates, thus can also ensure that target material body can not be damaged while guaranteeing to there will not be the phenomenons such as bubble between target and copper backboard, and then increases work efficiency.
Accompanying drawing explanation
Fig. 1 is the utility model structural representation.
Detailed description of the invention
A kind of planar targets binding apparatus for leveling described in the utility model, flatten use during for being bound by the copper backboard of planar targets and attached flat board target, and described copper backboard is positioned on plane table, below in conjunction with accompanying drawing, the utility model is described in further detail:
Embodiment: refer to shown in Fig. 1, a kind of planar targets binding apparatus for leveling, it comprises binding rack 1 and leveling block 2.
Refer to shown in Fig. 1, aforementioned leveling block 2 be placed on the copper backboard A and its size that are attached with target and copper backboard suitable, form entirety to be exerted pressure.Also be provided with the buffer structure that cardboard 3 is formed below described leveling block 2, in order to the buffering in course of exerting pressure, effectively avoid target be scraped off because pressure is excessive or damage.
Refer to shown in Fig. 1, the quantity of aforementioned binding rack 1 is at least one, and the quantity of this binding rack 1 will be arranged according to the copper backboard A being attached with target, and each binding rack 1 comprises hook-shaped frame 11, frame 12 of exerting pressure; Wherein hook-shaped frame 11 is the body of rod of at right angles bending, be positioned at and wait overall below of exerting pressure under the hook-shaped end of described hook-shaped frame 11 stretches to plane table B, described frame 12 one end of exerting pressure is connected with hook-shaped frame 11, this frame 12 other end of exerting pressure is positioned at waits to exert pressure on the whole, is formed for waiting the overall support body forming clamping pressing structure of exerting pressure.
Refer to shown in Fig. 1, aforementioned frame 12 of exerting pressure comprises cross bar 121 and bar 122 of exerting pressure, and described cross bar 121 one end is fixed on hook-shaped frame 11, bar 122 of exerting pressure described in this cross bar 121 other end is connected with, and this bar 122 of exerting pressure is for pressure adjusting lever.The circumference side of described bar 122 of exerting pressure is provided with external screw thread, and this bar 122 of exerting pressure is set in the stomidium of cross bar 121 other end, and this stomidium is the female through hole of band, described in bar 122 of exerting pressure coordinate the rotational structure forming adjustable dynamics of exerting pressure with stomidium.The handlebar 123 penetrating a horizontally set is also worn in described bar 122 upper end of exerting pressure, and is formed and drives bar of exerting pressure to rotate the handle arrangement regulated at stomidium.
Above, be only the embodiment utilizing this origination techniques content, the modification that any those skilled in the art use this creation to do, change, all belong to the scope of the claims that this creation is advocated, and be not limited to those disclosed embodiments.

Claims (7)

1. a planar targets binding apparatus for leveling, during for being bound by the copper backboard of planar targets and attached flat board target, leveling is used, and described copper backboard is positioned on plane table, it is characterized in that: this binding apparatus for leveling comprises binding rack and leveling block, described leveling block be placed on the copper backboard and its size that are attached with target and copper backboard suitable, form entirety to be exerted pressure; Described binding rack comprises hook-shaped frame, frame of exerting pressure, the hook-shaped end of described hook-shaped frame is positioned at waits overall below of exerting pressure, described frame one end of exerting pressure is connected with hook-shaped frame, and this frame other end of exerting pressure is positioned at waits to exert pressure on the whole, is formed for waiting the overall support body forming clamping pressing structure of exerting pressure.
2. a kind of planar targets binding apparatus for leveling according to claim 1, it is characterized in that: described in frame of exerting pressure comprise cross bar and bar of exerting pressure, described cross bar one end is fixed on hook-shaped frame, bar of exerting pressure described in this cross bar other end is connected with, and this bar of exerting pressure is pressure adjusting lever.
3. a kind of planar targets binding apparatus for leveling according to claim 2, it is characterized in that: described in the exert pressure circumference side of bar be provided with external screw thread, this bar of exerting pressure is set in the stomidium of the cross bar other end, and this stomidium is the female through hole of band, described in bar of exerting pressure coordinate the rotational structure forming adjustable dynamics of exerting pressure with stomidium.
4. a kind of planar targets binding apparatus for leveling according to claim 3, is characterized in that: described in bar upper end of exerting pressure also wear the handlebar penetrating a horizontally set, formed and drive bar of exerting pressure to rotate the handle arrangement regulated at stomidium.
5. a kind of planar targets binding apparatus for leveling according to Claims 1-4 any one, is characterized in that: the quantity of described binding rack is at least one, and the quantity of this binding rack will be arranged according to the copper backboard being attached with target.
6. a kind of planar targets binding apparatus for leveling according to claim 1, is characterized in that: be also provided with buffer structure below described leveling block.
7. a kind of planar targets binding apparatus for leveling according to claim 6, is characterized in that: described buffer structure is cardboard.
CN201420833245.8U 2014-12-25 2014-12-25 A kind of planar targets binding apparatus for leveling Expired - Fee Related CN204338612U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420833245.8U CN204338612U (en) 2014-12-25 2014-12-25 A kind of planar targets binding apparatus for leveling

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201420833245.8U CN204338612U (en) 2014-12-25 2014-12-25 A kind of planar targets binding apparatus for leveling

Publications (1)

Publication Number Publication Date
CN204338612U true CN204338612U (en) 2015-05-20

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CN201420833245.8U Expired - Fee Related CN204338612U (en) 2014-12-25 2014-12-25 A kind of planar targets binding apparatus for leveling

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CN (1) CN204338612U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107892014A (en) * 2017-09-28 2018-04-10 柳州煜华科技有限公司 The packing method and package component of a kind of rotary target material
CN110814096A (en) * 2019-11-18 2020-02-21 宁波江丰电子材料股份有限公司 Metal target post-welding shaping method and welding method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107892014A (en) * 2017-09-28 2018-04-10 柳州煜华科技有限公司 The packing method and package component of a kind of rotary target material
CN110814096A (en) * 2019-11-18 2020-02-21 宁波江丰电子材料股份有限公司 Metal target post-welding shaping method and welding method
CN110814096B (en) * 2019-11-18 2021-06-11 宁波江丰电子材料股份有限公司 Metal target post-welding shaping method and welding method

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150520

Termination date: 20161225