CN204323876U - A kind of anti-deformation spin coating pallet with discontinuous stage portion - Google Patents
A kind of anti-deformation spin coating pallet with discontinuous stage portion Download PDFInfo
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- CN204323876U CN204323876U CN201420781957.XU CN201420781957U CN204323876U CN 204323876 U CN204323876 U CN 204323876U CN 201420781957 U CN201420781957 U CN 201420781957U CN 204323876 U CN204323876 U CN 204323876U
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- pallet
- deformation
- boss
- spin coating
- stage portion
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Abstract
The utility model relates to a kind of pallet, be specifically related to a kind of anti-deformation spin coating pallet with discontinuous stage portion, it mainly comprises disc body, a groove is offered at this disc body center downwards, this groove to be enclosed by bottom surface by end to end four sides and forms, each side stretches out and is provided with a boss, and the boss in adjacent side is not connected.Multiple boss that the utility model is arranged by uniform intervals on disc body, make to produce cavity between substrate and groove, thus minimizing substrate contacts with pallet, avoids substrate to produce distortion because of bottom surface unfairness, contributes to heat radiation simultaneously.
Description
Technical field
The utility model relates to a kind of pallet, is specifically related to a kind of anti-deformation spin coating pallet with discontinuous stage portion.
Background technology
Along with the development of economy and the continuous progress of science and technology, provide a good development platform for automated production manufacturing emerges rapidly.In automated production manufacturing, in order to ensure the high precision of product, high quality, high efficiency requirement, correspondingly, various unit in automated production manufacturing is applied to or machine must can reach requirement.At present, on photovoltaic device manufacturing line, in photovoltaic device production process, need the operation of carrying out gluing at device surface, when utilizing existing pallet to base wafer glue coating, substrate is placed on horizontal pallet usually, when High Rotation Speed gluing, substrate contacts with pallet entirety, especially substrate center place, be subject to the application force that pallet applies, be easy to produce distortion, cause being coated with the substrate unfairness wiped, affect product quality.
Utility model content
For substrate unfairness in background technology, yielding problem, the purpose of this utility model is to provide a kind of anti-deformation spin coating pallet with discontinuous stage portion.
The technical solution of the utility model is achieved in that a kind of anti-deformation spin coating pallet with discontinuous stage portion, mainly comprise disc body, a groove is offered at this disc body center downwards, this groove to be enclosed by bottom surface by end to end four sides and forms, each side stretches out and is provided with a boss, and the boss in adjacent side is not connected.
As preferably, described boss is provided with vacuum hole.
As preferably, described bottom surface is provided with knock hole.
The utility model compared with prior art, there is following advantage: the utility model arranges multiple boss by uniform intervals on disc body, make to produce cavity between substrate and groove, thus minimizing substrate contacts with pallet, avoid substrate to produce distortion because of bottom surface unfairness, contribute to heat radiation simultaneously.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the utility model embodiment, be clearly and completely described the technical scheme in the utility model embodiment, obviously described embodiment is only the utility model part embodiment, instead of whole embodiments.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtained under creative work prerequisite, all belong to the scope of the utility model protection.
As shown in Figure 1, anti-deformation spin coating pallet with discontinuous stage portion described in the utility model, in order to place substrate, mainly comprise disc body 1, a groove 2 is offered at this disc body 1 center downwards, this groove 2 to be enclosed by bottom surface by end to end four sides 11 and forms, and each side 11 stretches out and is provided with a boss 3, and the boss 3 in adjacent side 11 is not connected.Conveniently pallet is installed, and is provided with knock hole 21 in described bottom surface.Conveniently draw substrate, described boss 3 is provided with vacuum hole 31.Described substrate is positioned on described boss 3, makes to form a cavity between substrate and groove 2, thus reduces substrate and pallet area of contact, avoids substrate to produce distortion because of bottom surface unfairness, contributes to heat radiation simultaneously.
The foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all within spirit of the present utility model and principle, any amendment done, equivalent replacement, improvement etc., all should be included within protection domain of the present utility model.
Claims (3)
1. the anti-deformation spin coating pallet with discontinuous stage portion, it is characterized in that: comprise disc body, a groove is offered at this disc body center downwards, this groove to be enclosed by bottom surface by end to end four sides and forms, each side stretches out and is provided with a boss, and the boss in adjacent side is not connected.
2. the anti-deformation spin coating pallet with discontinuous stage portion according to claim 1, is characterized in that: described boss is provided with vacuum hole.
3. the anti-deformation spin coating pallet with discontinuous stage portion according to claim 1, is characterized in that: described bottom surface is provided with knock hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420781957.XU CN204323876U (en) | 2014-12-13 | 2014-12-13 | A kind of anti-deformation spin coating pallet with discontinuous stage portion |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420781957.XU CN204323876U (en) | 2014-12-13 | 2014-12-13 | A kind of anti-deformation spin coating pallet with discontinuous stage portion |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204323876U true CN204323876U (en) | 2015-05-13 |
Family
ID=53160260
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420781957.XU Active CN204323876U (en) | 2014-12-13 | 2014-12-13 | A kind of anti-deformation spin coating pallet with discontinuous stage portion |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204323876U (en) |
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2014
- 2014-12-13 CN CN201420781957.XU patent/CN204323876U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |