CN204307871U - A kind of Intelligent temperature control type monocrystalline silicon cleaning device - Google Patents
A kind of Intelligent temperature control type monocrystalline silicon cleaning device Download PDFInfo
- Publication number
- CN204307871U CN204307871U CN201420780503.0U CN201420780503U CN204307871U CN 204307871 U CN204307871 U CN 204307871U CN 201420780503 U CN201420780503 U CN 201420780503U CN 204307871 U CN204307871 U CN 204307871U
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- China
- Prior art keywords
- tank
- control type
- monocrystalline silicon
- temperature control
- cleaning device
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a kind of Intelligent temperature control type monocrystalline silicon cleaning device, comprise the first tank, the second tank, the 3rd tank, the 4th tank, the 5th tank and the drying baker that set gradually, temperature inductor and heater is provided with in described second tank and the 3rd tank, each heater connects a temperature display panel respectively, described second tank and the 3rd tank arrange water circle device respectively.Intelligent temperature control type monocrystalline silicon cleaning device described in the utility model can adjust the temperature in tank automatically, meets and uses needs, improves cleaning performance.
Description
Technical field
The utility model relates to a kind of Intelligent temperature control type monocrystalline silicon cleaning device.
Background technology
Crystalline silicon, as the primary raw material of solar cell, plays the important and pivotal role in the development promoting world's photovoltaic industry.In silicon chip production process, the pollutant sources of silicon chip surface mainly contains: the pollution that operated implement brings, the pollution etc. that in the pollution that the pollution of working fluid, environmental pollution, operating personnel bring and process, silicon chip surface generation chemical reaction produces.Along with the development of solar industry, also more and more higher to the requirement of silicon chip surface cleanliness factor, this facilitates the development of Wafer Cleaning technology to a certain extent, also promotes the research of people to silicon wafer cleaning process.Current, wet-chemical cleaning technology is still in leading position in silicon wafer surface cleaning, but this technical equipment conditional request is high, and use cost is high, is unfavorable for wide popularization and application.
Utility model content
For above-mentioned technical problem, the utility model discloses a kind of Intelligent temperature control type monocrystalline silicon cleaning device, comprise the first tank, the second tank, the 3rd tank, the 4th tank, the 5th tank and the drying baker that set gradually, temperature inductor and heater is provided with in described second tank and the 3rd tank, each heater connects a temperature display panel respectively, described second tank and the 3rd tank arrange water circle device respectively.
Preferably, described water circle device comprises cool water circulating pipe and hopper, and described cool water circulating pipe is connected with hopper.
Preferably, the medicament cleaned is added with in described second tank and the 3rd tank.
The beneficial effects of the utility model are temperature that described Intelligent temperature control type monocrystalline silicon cleaning device can adjust in tank automatically, by the temperature value that user presets, temperature sensor can be responded to and demonstrate the temperature in groove in real time, once exceed desired temperature will add cold water, thus reduce temperature in time, meet and use needs, improve cleaning performance, and also drying baker is set, namely dry after cleaning, improve cleaning quality further.
Accompanying drawing explanation
Fig. 1 is the structural representation of Intelligent temperature control type monocrystalline silicon cleaning device described in the utility model.
In figure, 1-first tank; 2-second tank; 3-the 3rd tank; 4-the 4th tank; 5-the 5th tank; 6-drying baker; 7-cool water circulating pipe; 8-hopper.
Detailed description of the invention
Below in conjunction with accompanying drawing, the utility model is described in further detail, can implements according to this with reference to description word to make those skilled in the art.
As shown in the figure, the utility model discloses a kind of Intelligent temperature control type monocrystalline silicon cleaning device, comprise the first tank 1, second tank 2, the 3rd tank 3, the 4th tank 4, the 5th tank 5 and the drying baker 6 that set gradually, temperature inductor and heater is provided with in described second tank 2 and the 3rd tank 3, each heater connects a temperature display panel respectively, described second tank and the 3rd tank arrange water circle device respectively.Described water circle device comprises cool water circulating pipe 7 and hopper 8, and described cool water circulating pipe 7 is connected with hopper 8.The medicament cleaned is added with in described second tank 2 and the 3rd tank 3.Described Intelligent temperature control type monocrystalline silicon cleaning device can adjust the temperature in tank automatically, by the temperature value that user presets, temperature sensor can be responded to and demonstrate the temperature in groove in real time, once exceed desired temperature will add cold water, thus reduce temperature in time, meet and use needs, improve cleaning performance, and also drying baker is set, namely dry after cleaning, improve cleaning quality further.
Although embodiment of the present utility model is open as above, but it is not restricted to listed in description and embodiment utilization, it can be applied to various applicable field of the present utility model completely, for those skilled in the art, can easily realize other amendment, therefore do not deviating under the universal that claim and equivalency range limit, the utility model is not limited to specific details and illustrates here and the legend described.
Claims (3)
1. an Intelligent temperature control type monocrystalline silicon cleaning device, it is characterized in that: comprise the first tank, the second tank, the 3rd tank, the 4th tank, the 5th tank and the drying baker that set gradually, temperature inductor and heater is provided with in described second tank and the 3rd tank, each heater connects a temperature display panel respectively, described second tank and the 3rd tank arrange water circle device respectively.
2. Intelligent temperature control type monocrystalline silicon cleaning device according to claim 1, it is characterized in that: described water circle device comprises cool water circulating pipe and hopper, described cool water circulating pipe is connected with hopper.
3. Intelligent temperature control type monocrystalline silicon cleaning device according to claim 1, is characterized in that: be added with the medicament cleaned in described second tank and the 3rd tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420780503.0U CN204307871U (en) | 2014-12-12 | 2014-12-12 | A kind of Intelligent temperature control type monocrystalline silicon cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420780503.0U CN204307871U (en) | 2014-12-12 | 2014-12-12 | A kind of Intelligent temperature control type monocrystalline silicon cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204307871U true CN204307871U (en) | 2015-05-06 |
Family
ID=53130203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420780503.0U Expired - Fee Related CN204307871U (en) | 2014-12-12 | 2014-12-12 | A kind of Intelligent temperature control type monocrystalline silicon cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204307871U (en) |
-
2014
- 2014-12-12 CN CN201420780503.0U patent/CN204307871U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: JIANGXI SHENSHAN ENERGY SCIENCE & TECHNOLOGY CO., LTD. Assignor: Jiangxi Haoan Energy Technology Co., Ltd. Contract record no.: 2015360000060 Denomination of utility model: Intelligent temperature control type single crystal silicon cleaning device Granted publication date: 20150506 License type: Exclusive License Record date: 20150601 |
|
| LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150506 Termination date: 20151212 |
|
| EXPY | Termination of patent right or utility model |