CN204302565U - Compact microscope - Google Patents

Compact microscope Download PDF

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Publication number
CN204302565U
CN204302565U CN201420775678.2U CN201420775678U CN204302565U CN 204302565 U CN204302565 U CN 204302565U CN 201420775678 U CN201420775678 U CN 201420775678U CN 204302565 U CN204302565 U CN 204302565U
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China
Prior art keywords
semi
housing
lens
reflecting lens
transparent semi
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CN201420775678.2U
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Chinese (zh)
Inventor
赵跃东
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NANJING DONGLILAI PHOTOELECTRIC INDUSTRIAL Co Ltd
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NANJING DONGLILAI PHOTOELECTRIC INDUSTRIAL Co Ltd
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Priority to CN201420775678.2U priority Critical patent/CN204302565U/en
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Abstract

This technology provides a kind of neat appearance, volume compact that is little, that can be combined with other parts as embedded components micro-, its compact conformation of mirror, achieve the Rapid Combination of modular plug and play and hardware and software platform, the fields such as Laser Processing, cut, laser preparing, semiconductor detection, genetic chip inspection can be applied to.It comprises and is converted to the ccd sensor of electric signal for the formation of the object lens of object mirror image, the eyepiece of mirror image formed for viewing objective or the mirror image for object lens are formed; Object lens and eyepiece or ccd sensor are arranged on the shell wall of a housing, arrange the first semi-transparent semi-reflecting lens and at least comprise the light path system of a mirror group in housing; From object lens light out after the first semi-transparent semi-reflecting lens transmission, enter eyepiece or ccd sensor through light path system again; The illuminator comprising light source, condenser is also provided with in housing; The light that light source sends enters object lens through the first semi-transparent semi-reflecting lens reflection again after condenser converges.

Description

Compact microscope
Technical field
This technology relates to microscope, specifically, is a kind of embedded compact microscope.
Background technology
Existing microscopical structure is mainly divided into three parts: mechanical part, illumination section and opticator.Mechanical part comprises microscope base, mirror post, handel, lens barrel, Nosepiece, objective table, regulator etc.Illumination section comprises light source, reflective mirror, optical collector.Opticator comprises eyepiece and object lens.
Microscope base is microscopical base, in order to support whole mirror body.Mirror post is part upright above microscope base, in order to connect microscope base and handel.Handel one end is connected in mirror post, and one end is connected in lens barrel, is hand-holding part when picking and placeing microscope.Lens barrel is connected in the front upper place of handel, and eyepiece is equipped with in lens barrel upper end, and Nosepiece is equipped with in lower end.Nosepiece is connected to the below of lens barrel, free to rotate, dish has 3-4 circular hole, is to install object lens position, rotates converter, can exchange the object lens of different multiples.Objective table is below lens barrel, and the shape side of having, circle two kinds, in order to place slide sample.Regulator is the size two kinds of spirals be contained on mirror post, makes dressing table do the movement of above-below direction during adjustment.Coarse adjustment knob (pinion head): king bolt claims coarse adjustment knob, dressing table can be made time mobile to do lifting quick and by a relatively large margin, so the distance between object lens and sample can be regulated rapidly to make image be presented in the visual field, usually when using low power lens, first find image rapidly with coarse adjustment knob.Fine adjustment knob (thin spiral): minor spiral claims fine adjustment knob, can make dressing table be elevated lentamente time mobile, how to use when using high power lens, thus obtains image more clearly, and so as to observing the different levels of sample and the structure of different depth.
The profile of this conventional microscopy is irregular, volume large, is difficult to integrally embed in other parts.
Technology contents
The object of this technology is to provide the compact microscope that a kind of neat appearance, volume are little, can be combined with other parts as embedded components.
The compact microscope of this technology, comprises and is converted to the ccd sensor of electric signal for the formation of the object lens of object mirror image, the eyepiece of mirror image formed for viewing objective or the mirror image for object lens are formed; Object lens and eyepiece or ccd sensor are arranged on the shell wall of a housing, arrange the first semi-transparent semi-reflecting lens and at least comprise the light path system of a mirror group in housing; From object lens light out after the first semi-transparent semi-reflecting lens transmission, enter eyepiece or ccd sensor through light path system again; The illuminator comprising light source, condenser is also provided with in housing; The light that light source sends enters object lens through the first semi-transparent semi-reflecting lens reflection again after condenser converges.
The beneficial effect of this technology: this technology is arranged on light path system, illuminator etc. in housing, and do not expose housing, not only little the but also neat appearance of volume, can be combined with other parts as insertion element, embedded components.In this technology, when needing eye observation image, eyepiece can be used; When needing storage image, can use ccd sensor that image information is exported with electronic signal.
Above-mentioned compact microscope, housing slidably connects for the converter of beam constriction; When converter slides relative to housing, converter can be positioned at or leave the optical axis being positioned at eyepiece or ccd sensor.Because ccd sensor is small-sized, so when using ccd sensor, generally need to use converter.But when observing with eyepiece, can not converter be used again.So converter can will slide relative to housing.
Above-mentioned compact microscope, housing wall has hole, and sliding in hole is provided with slide, slide is provided with difference and observes diaphragm; When slide is positioned at hole, difference is observed diaphragm and is positioned on the optical axis of light path system.Difference is observed diaphragm and is belonged to prior art, observes diaphragm can carry out difference observation by difference.
Above-mentioned compact microscope, arranges the second semi-transparent semi-reflecting lens in housing, and the light that light source sends reflects through the second semi-transparent semi-reflecting lens, converge through condenser, enter object lens through the first semi-transparent semi-reflecting lens reflection again.Preferably, in housing, be provided with the first catoptron, housing arranges the socket for inserting optical fiber; When optical fiber inserts socket, reflect through the first catoptron from optical fiber light out, the second semi-transparent semi-reflecting lens transmission, condenser converge, reflect through the first semi-transparent semi-reflecting lens again and enter object lens.Like this, this compact microscope can adopt ordinary light source (as LED lamp) as lighting source, and optical fiber also can be adopted as lighting source.
Above-mentioned compact microscope, housing arranges a bayonet socket, eyepiece or ccd sensor is dismountable is connected on bayonet socket.To be convenient for changing eyepiece or ccd sensor.
Above-mentioned compact microscope, object lens are connected on housing by nosewheel.Like this, the object lens that nosewheel can change different multiplying are rotated.
Above-mentioned compact microscope, it also comprise pluggable be connected on housing, be positioned at automatic focusing module in the optical path.
Above-mentioned compact microscope, the first semi-transparent semi-reflecting lens arranges in a pluggable first semi-transparent semi-reflecting lens module be connected on housing; It also comprises one for replacing the fluorescent moieties of the first semi-transparent semi-reflecting lens module, and fluorescent moieties comprises the first semi-transparent semi-reflecting lens, be arranged on exciter filter between the first semi-transparent semi-reflecting lens and condenser, be arranged on absorption color filter between the first semi-transparent semi-reflecting lens and object lens.After replace the first semi-transparent semi-reflecting lens module with fluorescent moieties, namely this microscope can be used as fluorescent microscope and uses.
Above-mentioned compact microscope, the first semi-transparent semi-reflecting lens arranges in a pluggable first semi-transparent semi-reflecting lens module be connected on housing; It also comprises one for replacing the polarization module of the first semi-transparent semi-reflecting lens module, and polarization module comprises the first semi-transparent semi-reflecting lens, be arranged on polarizer between the first semi-transparent semi-reflecting lens and condenser, be arranged on analyzer between the first semi-transparent semi-reflecting lens and object lens.After replace the first semi-transparent semi-reflecting lens module with polarization module, namely this microscope can be used as polarization microscope and uses.
At object lens and analyzer, there is a pluggable DIC prism module be connected on housing.Coordinate with polarization module with DIC prism module, this microscope can microlayer thickness method be observed, and improves microstructure contrast.
Above-mentioned compact microscope, the rectangular parallelepiped that described housing is a length, width is all greater than thickness, the optical axis of light path system is vertical with the thickness direction of housing.Like this, the rectangular parallelepiped profile of this housing is suitable for more as embedded components, and meanwhile, the optical axis of light path system is vertical with the thickness direction of housing, and thickness can be made to become less.
Above-mentioned compact microscope, the optical axis of object lens is vertical with the thickness direction of housing.
Above-mentioned compact microscope, in housing, arrange one from object lens light reflection out to the second catoptron of the first semi-transparent semi-reflecting lens, the light that light source sends enters object lens through the first semi-transparent semi-reflecting lens reflection, the second catoptron reflection again after condenser converges.Like this, as inverted microscope, changed dramatically in common inverted microscope larger-size defect on objective lens optical axis direction, can be more prone to embed or be inserted in other parts, use as embedded components.
The microscopical beneficial effect of this compact: this microscope is compact conformation not only, achieve the Rapid Combination of modular plug and play and hardware and software platform, the fields such as Laser Processing, cut, laser preparing, semiconductor detection, genetic chip inspection etc. are industrial, biological, chemical can be applied to.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of embodiment 1;
Fig. 2 is the A-A cut-open view of Fig. 1;
Fig. 3 is the B-B cut-open view of Fig. 1;
Fig. 4, Fig. 5, Fig. 6 are the stereographic map of embodiment 1 respectively.
Fig. 7 is the schematic diagram of embodiment 2;
Fig. 8 is the schematic diagram of embodiment 3;
Fig. 9 is the schematic diagram of embodiment 4.
Embodiment
Below in conjunction with the drawings and specific embodiments, this technology is described further.
Embodiment 1: compact microscope (objective lens optical axis extends along the length direction of housing):
Compact microscope shown in Figure 1, has a closed rectangular parallelepiped housing 1, the length X > width Y > thickness Z of housing.Housing 1 has 6 faces (shell wall), is antetheca 11, rear wall 12, upper wall 13, lower wall 14, left wall 15, right wall 16 respectively.
Upper wall 13 arranges a bayonet socket 2, and this bayonet socket 2 can with eyepiece or ccd sensor be dismountable is connected.
First semi-transparent semi-reflecting lens 4 is fixed in the first semi-transparent semi-reflecting lens module 41, and the first semi-transparent semi-reflecting lens module 41 becomes pluggable with housing rear and is connected on the thickness direction of housing.Light path system 5 in housing comprises the first mirror group 51, first plane mirror 52, second plane mirror 53, second mirror group 54, the 3rd plane mirror 55, the 4th plane mirror 56.Dismountable object lens 3 be connected with for the formation of object mirror image on lower wall 14.The optical axis of object lens extends along the length direction of housing, and coplanar with the optical axis of light path system.
Rear wall slidably connect in the width direction for the converter 6 of beam constriction.When converter slides at Width relative to housing, converter can be positioned at or leave the optical axis being positioned at eyepiece or ccd sensor.
Rear wall has hole, and in hole, through-thickness slides and is provided with slide 7, slide is provided with difference and observes diaphragm 71; When slide is positioned at hole, difference observes diaphragm in the 4th light path between plane mirror and converter.
Illuminator 8 is also provided with in housing.Illuminator comprises LED lamp 81, second semi-transparent semi-reflecting lens 82, condenser 83, first catoptron 84, optical fiber socket 85 etc.Optical fiber socket 85 is opened on rear wall, and after optical fiber inserts optical fiber socket 85, optical fiber extends along the thickness direction of housing.
When using LED lamp as light source, the light that LED lamp sends reflects through the second semi-transparent semi-reflecting lens 82, converge through condenser 83, enter object lens 3 through the first semi-transparent semi-reflecting lens 4 reflection again.When use optical fiber as light source time, from optical fiber come incident light reflect through the first catoptron 84, the second semi-transparent semi-reflecting lens 82 transmission, converge through condenser 83, again through first semi-transparent semi-reflecting lens 4 reflection enter object lens 3, after object lens, illuminate observed object.
The light of observed reflections off objects or scattering enters object lens, from object lens out light reflects through the first mirror group 51, first plane mirror 52 after the first semi-transparent semi-reflecting lens 4 transmission, again, the second plane mirror 53 reflects, the second mirror group 54, the 3rd plane mirror 55 reflect, the 4th plane mirror 56 reflects, then through difference observe diaphragm 71 enter the eyepiece be connected on bayonet socket.Certainly, if when not carrying out difference observation, the slide 7 with difference observation diaphragm 71 can be extracted from rear wall, carry out bright field observation.
If when not using eyepiece and use ccd sensor to export electric signal, take off eyepiece, ccd sensor is connected on bayonet socket, mobile converter, makes converter be positioned on the optical axis of ccd sensor simultaneously.The light of observed reflections off objects or scattering enters object lens, from object lens out light reflects through the first mirror group 51, first plane mirror 52 after the first semi-transparent semi-reflecting lens 4 transmission, again, the second plane mirror 53 reflects, the second mirror group 54, the 3rd plane mirror 55 reflect, the 4th plane mirror 56 reflects, after converter, arrive ccd sensor.
Embodiment 2: compact microscope (objective lens optical axis extends along the Width of housing):
Embodiment 2 is with the difference of embodiment 1: in the present embodiment 2, object lens 3 are dismountable to be connected on the left wall 15 of housing; The optical axis of object lens extends along the Width of housing; Second catoptron 9 is also set in housing; The light that illuminator 8 sends reflects through the first semi-transparent semi-reflecting lens 4, enter object lens through the second catoptron 9 reflection again, illuminates observed object after object lens; The light of observed reflections off objects or scattering enters object lens, reflects arrival first semi-transparent semi-reflecting lens 4 through the second catoptron 9.Other structure is identical with embodiment 1.
Embodiment 3: compact fluorescent microscope
Embodiment 3 is from the different of embodiment 1:
Embodiment 3 also comprises a fluorescent moieties 42 for the first semi-transparent semi-reflecting lens module 41 in alternative embodiment 1.Object lens 3 in embodiment 3 are arranged on nosewheel 31, and nosewheel 31 can relative to housing into rotation.When the first semi-transparent semi-reflecting lens module 41 in embodiment 1 is pulled up from housing, after inserting fluorescent moieties, schematic diagram is see Fig. 8.Fluorescent moieties 42 comprises the first semi-transparent semi-reflecting lens 4, be arranged on exciter filter 43 between the first semi-transparent semi-reflecting lens and condenser, be arranged on absorption color filter 44 between the first semi-transparent semi-reflecting lens and object lens.Nosewheel 31, exciter filter 43, absorption color filter 44 etc. belong to prior art, no longer describe.
Embodiment 4: compact polarization microscope
Embodiment 4 is from the different of embodiment 1:
Embodiment 4 also comprises a polarization module 45 for the first semi-transparent semi-reflecting lens module 41 in alternative embodiment 1.Object lens 3 in embodiment 4 are arranged on nosewheel 31, and nosewheel 31 can relative to housing into rotation.When the first semi-transparent semi-reflecting lens module 41 in embodiment 1 is pulled up from housing, after inserting polarization module, schematic diagram is see Fig. 9.Polarization module 45 comprises the first semi-transparent semi-reflecting lens 4, be arranged on polarizer 46 between the first semi-transparent semi-reflecting lens and condenser, be arranged on analyzer 47 between the first semi-transparent semi-reflecting lens and object lens.
Embodiment 4 also comprises one on the thickness direction of housing, becomes the pluggable DIC prism 48 be connected with housing rear.Certainly, DIC prism also can not be arranged on housing, and is pluggablely arranged on nosewheel.Embodiment 4 also comprises one on the thickness direction of housing, becomes the pluggable automatic focusing system 49 be connected with housing rear.After housing inserting automatic focusing system 49, in the light path of automatic focusing system 49 between the first plane mirror 52 and the second plane mirror 53.
Nosewheel, polarizer, analyzer, DIC prism, automatic focusing system etc. belong to prior art, no longer describe.

Claims (10)

1. compact microscope, is characterized in that: it comprises and is converted to the ccd sensor of electric signal for the formation of the object lens of object mirror image, the eyepiece of mirror image formed for viewing objective or the mirror image for object lens are formed; Object lens and eyepiece or ccd sensor are arranged on the shell wall of a housing, arrange the first semi-transparent semi-reflecting lens and at least comprise the light path system of a mirror group in housing; From object lens light out after the first semi-transparent semi-reflecting lens transmission, enter eyepiece or ccd sensor through light path system again; The illuminator comprising light source, condenser is also provided with in housing; The light that light source sends enters object lens through the first semi-transparent semi-reflecting lens reflection again after condenser converges.
2. compact microscope as claimed in claim 1, is characterized in that: slidably connect for the converter of beam constriction on housing; When converter slides relative to housing, converter can be positioned at or leave the optical axis being positioned at eyepiece or ccd sensor.
3. compact microscope as claimed in claim 1, is characterized in that: on housing wall, have hole, and sliding in hole is provided with slide, slide is provided with difference and observes diaphragm; When slide is positioned at hole, difference is observed diaphragm and is positioned on the optical axis of light path system.
4. compact microscope as claimed in claim 1, is characterized in that: in housing, arrange the second semi-transparent semi-reflecting lens, the light that light source sends reflects through the second semi-transparent semi-reflecting lens, converges through condenser, enters object lens through the first semi-transparent semi-reflecting lens reflection again.
5. compact microscope as claimed in claim 4, is characterized in that: in housing, be provided with the first catoptron, housing arranges the socket for inserting optical fiber; When optical fiber inserts socket, reflect through the first catoptron from optical fiber light out, the second semi-transparent semi-reflecting lens transmission, condenser converge, reflect through the first semi-transparent semi-reflecting lens again and enter object lens.
6. compact microscope as claimed in claim 1, it is characterized in that: further comprising pluggable be connected on housing, be positioned at automatic focusing module in the optical path.
7. the compact microscope as described in as arbitrary in claim 1-6, is characterized in that: the first semi-transparent semi-reflecting lens arranges in a pluggable first semi-transparent semi-reflecting lens module be connected on housing; It also comprises one for replacing the fluorescent moieties of the first semi-transparent semi-reflecting lens module, and fluorescent moieties comprises the first semi-transparent semi-reflecting lens, be arranged on exciter filter between the first semi-transparent semi-reflecting lens and condenser, be arranged on absorption color filter between the first semi-transparent semi-reflecting lens and object lens.
8. the compact microscope as described in as arbitrary in claim 1-6, is characterized in that: the first semi-transparent semi-reflecting lens arranges in a pluggable first semi-transparent semi-reflecting lens module be connected on housing; It also comprises one for replacing the polarization module of the first semi-transparent semi-reflecting lens module, and polarization module comprises the first semi-transparent semi-reflecting lens, be arranged on polarizer between the first semi-transparent semi-reflecting lens and condenser, be arranged on analyzer between the first semi-transparent semi-reflecting lens and object lens.
9. compact microscope as claimed in claim 8, is characterized in that: have a pluggable DIC prism module be connected on housing at object lens and analyzer.
10. compact microscope as claimed in claim 1, it is characterized in that: in housing, arrange one from object lens light reflection out to the second catoptron of the first semi-transparent semi-reflecting lens, the light that light source sends enters object lens through the first semi-transparent semi-reflecting lens reflection, the second catoptron reflection again after condenser converges.
CN201420775678.2U 2014-12-09 2014-12-09 Compact microscope Active CN204302565U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104459968A (en) * 2014-12-09 2015-03-25 南京东利来光电实业有限责任公司 Compact type microscope
CN107561081A (en) * 2016-06-30 2018-01-09 上海微电子装备(集团)股份有限公司 A kind of defect detecting device and method
CN109991238A (en) * 2017-12-29 2019-07-09 上海微电子装备(集团)股份有限公司 Defect detecting device and method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104459968A (en) * 2014-12-09 2015-03-25 南京东利来光电实业有限责任公司 Compact type microscope
CN104459968B (en) * 2014-12-09 2017-07-11 南京东利来光电实业有限责任公司 Compact microscope
CN107561081A (en) * 2016-06-30 2018-01-09 上海微电子装备(集团)股份有限公司 A kind of defect detecting device and method
CN109991238A (en) * 2017-12-29 2019-07-09 上海微电子装备(集团)股份有限公司 Defect detecting device and method

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