CN204301860U - A kind of spectrometer - Google Patents
A kind of spectrometer Download PDFInfo
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- CN204301860U CN204301860U CN201420683389.XU CN201420683389U CN204301860U CN 204301860 U CN204301860 U CN 204301860U CN 201420683389 U CN201420683389 U CN 201420683389U CN 204301860 U CN204301860 U CN 204301860U
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Abstract
The utility model relates to a kind of spectrometer, comprises cavity, entrance slit, grating, sensor, described sensor is separated into Part I and Part II by described cavity, described Part I sensor setting is in described cavity, and described Part II sensor setting is outside described cavity; Described spectrometer comprises further: incidence window, and described incidence window is arranged on described cavity, and light to be analyzed is radiated on described grating through described incidence window, entrance slit successively; Optical transmission window, described optical transmission window is arranged on described cavity, and the longwave optical after grating beam splitting incides on described Part II sensor through described optical transmission window.The utility model has the advantages such as cost is low, cavity volume is little.
Description
Technical field
The utility model relates to a kind of spectrometer, particularly a kind of spectrometer simultaneously can analyzing air wave band and vacuum ultraviolet band spectrum.
Background technology
Only electromagnetic one, wavelength coverage about from 1nm to 1mm between, wherein the aerial loss of the light of more than 200nm is very little, and the vacuum ultraviolet band of light of below 200nm is because meeting is by strong absorption such as the oxygen in air and moisture, can only such as, under vacuum or ultraviolet transparent gases (gas that uv absorption coefficient is very low, argon gas, nitrogen etc.) environment can normal transmission.Therefore, measuring vacuum ultraviolet band of light to want, being necessary for the measurement environment that measuring equipment provides vacuum or ultraviolet transparent gases.
For the spectrometer of the handkerchief type-Long lattice structure shown in Fig. 1, complex light to be analyzed enters the seal chamber constructed by hermetically-sealed construction 14 through optical transmission window 16, after entrance slit 11, be irradiated on grating 12, through the dispersion interaction of grating 12, the spectral line of different wave length is separated, be arranged in circular arc 13 from shortwave to long wave along D-E-F, the wavelength that wherein E point is corresponding is 200nm, DE section is the ultraviolet band light that wavelength is less than 200nm, and EF section is the air band of light that wavelength is greater than 200nm.
In order to measure the light that wavelength is more than 200nm and below 200nm simultaneously, current solution has two kinds:
(1) dash area shown in Fig. 1 is vacuumized, the light of such short wavelength and the light of long wavelength are all in vacuum environment, can realize the measurement of long and short ripple, but vacuum scheme needs higher structural strength, that also can bring in many uses such as power consumption, noise is not convenient simultaneously.Concerning ultraviolet transparent gases purges scheme, generally do not adopt, because the space of spectrometer is too large, want to make the gas purity in spectrometer reach the transmission requirement of below 200nm vacuum-ultraviolet light, the time that ultraviolet transparent gases purges and effect can be greatly affected.
(2) for the gas purging spectrometer of an optical band specialized designs small size of below 200nm, as shown in Figure 2.Complex light to be analyzed enters the seal chamber constructed by hermetically-sealed construction 24 through optical transmission window 26, after entrance slit 21, is irradiated on grating 22, and through the dispersion interaction of grating 22, the spectral line of different wave length is separated, and is arranged on circular arc 23 along D-E.By the optimal design to the parameter of grating 22 and the position of entrance slit 21, the position of the spectral position of below 200nm and entrance slit can be made closest, effectively can reduce the purge volume of spectrometer like this, and then reduce the time purged, improve and purge effect.But this method needs the spectrum measuring shortwave and long wave with two cover spectrometers respectively, obviously increases the cost of spectrometer.
Utility model content
In order to solve deficiency of the prior art, the utility model provides a kind of spectrometer, can be made a distinction in the space of vacuum ultraviolet under same set of optical system from whole spectrometer, thus greatly shortens the gas purging time, improves and purges effect.
For realizing above-mentioned utility model object, the utility model adopts following technical scheme:
A kind of spectrometer, comprise cavity, entrance slit, grating, sensor, described sensor is separated into Part I and Part II by described cavity, and described Part I sensor setting is in described cavity, and described Part II sensor setting is outside described cavity; Described spectrometer comprises further:
Incidence window, described incidence window is arranged on described cavity, and light to be analyzed is radiated on described grating through described incidence window, entrance slit successively;
Optical transmission window, described optical transmission window is arranged on described cavity, and the longwave optical after grating beam splitting incides on described Part II sensor through described optical transmission window.
Further, described spectrometer also comprises catoptron, and described catoptron is arranged in described cavity, is irradiated to described grating after described catoptron reflection from the light of entrance slit incidence.
As preferably, described catoptron is level crossing or spherical mirror or aspheric mirror.
Further, described entrance slit be arranged on meet spectrometer design condition position on.
Further, in described cavity for vacuum or be filled with ultraviolet transparent gases.
As preferably, described ultraviolet transparent gases is nitrogen, argon gas or helium.
Further, described incidence window and described optical transmission window are same window.
Further, described entrance slit be arranged on meet spectrometer design condition position on.
As preferably, described grating is Rowland-circle concave grating or flat filed concave grating.
Further, described cavity is the seal chamber with air intake opening and/or gas outlet.
Long wave described in the utility model is the air band of light that wavelength is greater than 200nm, and shortwave is the ultraviolet band light that wavelength is less than 200nm; Ultraviolet transparent gases described in the utility model is the gas that uv absorption coefficient is very low, such as argon gas, nitrogen etc.
The utility model compared with prior art has following beneficial effect:
1, cost is low
A set of spectrometer simultaneously analytical wavelengths can be greater than vacuum ultraviolet wave band and the shortwave spectrum that the air wave band of 200nm and long wave spectrum and wavelength be less than 200nm, reduces instrument cost;
2, cavity volume is little
The space of the shortwave spectrum of vacuum ultraviolet wave band is separately formed cavity from whole spectrometer, the light path of air wave band is separated out outside cavity, substantially reduces cavity volume; No matter cavity vacuumized or filled ultraviolet transparent gases or purge displacement with ultraviolet transparent gases, all substantially reducing the operating process time, improve efficiency.
Accompanying drawing explanation
Fig. 1 is conventional spectrometers structural representation;
Fig. 2 is the spectrometer architecture schematic diagram for the design of vacuum ultraviolet band spectrum;
Fig. 3 is embodiment 2 structural representation;
Fig. 4 is embodiment 3 structural representation;
Fig. 5 is embodiment 4 structural representation;
Fig. 6 is embodiment 5 structural representation;
Fig. 7 is embodiment 6 structural representation;
Fig. 8 is embodiment 7 structural representation;
Fig. 9 is embodiment 8 structural representation.
Embodiment
Embodiment 1
A kind of spectrometer, comprising: cavity, entrance slit, grating, sensor, described sensor is separated into Part I and Part II by described cavity, and described Part I sensor setting is in described cavity, and described Part II sensor setting is outside described cavity;
Described spectrometer comprises further:
Incidence window, described incidence window is arranged on described cavity, and light to be analyzed is radiated on described grating through described incidence window, entrance slit successively;
Optical transmission window, described optical transmission window is arranged on described cavity, and the longwave optical after grating beam splitting incides on described Part II sensor through described optical transmission window.
Long wave described in the utility model is the air band of light that wavelength is greater than 200nm, and shortwave is the ultraviolet band light that wavelength is less than 200nm.The corresponding described Part I sensor of short wavelength light, the corresponding described Part II sensor of longwave optical.
In order to realize the imaging analysis of shortwave, shortwave should all vacuum or UV transparent environment from being incident to the whole light path part arriving Part I sensor; And long wave is to this no requirement (NR); Then the light path of shortwave part is arranged in the environment meeting its measurement requirement, that is,
Further, in described cavity for vacuum or be filled with ultraviolet transparent gases.Ultraviolet transparent gases described in the utility model is the gas that uv absorption coefficient is very low, such as argon gas, nitrogen, helium etc.
Therefore the whole light path part that shortwave arrives Part I sensor is all arranged in cavity, in order to reduce cavity volume, can by Part II sensor setting outside cavity.Now, because entrance slit and grating are in order to meet the requirement of shortwave measurement environment, be in cavity, and for long wave, it is from being incident to the light path of grating part in cavity, and can pass cavity wall from the light path that grating is transmitted to Part II sensor, this just require cavity wall long wave through time can through longwave optical, namely
Described cavity arranges optical transmission window, passes to enable long wave and arrive Part II sensor.
In order to reduce the volume of cavity, by the light path folding in cavity, as long as incident light can be made by arriving grating after entrance slit, and finally respective sensor can be arrived further;
Further, described spectrometer also comprises catoptron, and described catoptron is arranged in described cavity, is irradiated to described grating after described catoptron reflection from the light of entrance slit incidence.
As preferably, described catoptron is level crossing or spherical mirror or aspheric mirror.
By adjusting the position between each device, the optical transmission window that can long wave be made further corresponding and described incidence window are same window.
Further, described entrance slit be arranged on meet spectrometer design condition position on.
Further, described entrance slit only allows the light within the scope of wide 10 μm, high 10mm to pass through.
As preferably, described grating is Rowland-circle concave grating or flat filed concave grating.
Further, in order to save cost, described cavity can be set to seal chamber, to reduce the cost vacuumizing or fill ultraviolet transparent gases or the displacement of ultraviolet transparent gases purging; Conveniently vacuumize or fill ultraviolet transparent gases or logical ultraviolet transparent gases and carry out purging displacement:
Further, described cavity is the seal chamber with air intake opening and/or gas outlet.
The spectrometer that the utility model provides, simultaneously analytical wavelengths can be greater than vacuum ultraviolet wave band and the shortwave spectrum that the air wave band of 200nm and long wave spectrum and wavelength be less than 200nm, reduce instrument cost;
The space of the shortwave spectrum of vacuum ultraviolet wave band is separately formed cavity from whole spectrometer, the light path of air wave band is separated out outside cavity, substantially reduces cavity volume; No matter cavity vacuumized or filled ultraviolet transparent gases or purge displacement with ultraviolet transparent gases, all substantially reducing the operating process time, improve efficiency.
Embodiment 2
The present embodiment is the application examples of embodiment 1.
As shown in Figure 3, a kind of spectrometer, comprises cavity 114, described cavity 114 is arranged incidence window 116 and optical transmission window 115, arrange entrance slit 111 and grating 112 in described cavity 114, entrance slit 111 present position point is designated as A, and described grating edge is designated as B-C;
The present embodiment, described grating 112 is Rowland-circle concave grating.
Described entrance slit 111 is arranged on Rowland circle, allows the light within the scope of wide 10 μm, high 10mm to pass through.
Described incidence window 116 can through all light to be analyzed.Described optical transmission window 115 can through longwave optical.
Incidence window 116 described in light transmission to be analyzed is radiated on described grating 112 by entrance slit 111;
Light from entrance slit 111 incidence separates by wavelength by described grating 112, and converges on sensor 113 by wavelength order, and described sensor is designated as D-E-F;
Sensor D-E-F, comprise Part I sensor D-E and Part II sensor E-F, described Part I sensor D-E is arranged in described cavity 114, described Part II sensor E-F is arranged on outside described cavity 114, short wavelength light is propagated and is arrived Part I sensor D-E in described cavity 114, and longwave optical arrives Part II sensor E-F through described optical transmission window 115.
Be incident to the light of grating and the frontier point between the light of grating outgoing is G.As long as be arranged in cavity by optical path space A-B-C-D-E-G-A, the purpose of this utility model can be realized.Therefore optical transmission window 115 is arranged on the rear of E-G section on optical path direction.
Described cavity 114 is seal chamber.In figure, dash area is filled with ultraviolet transparent gases.The present embodiment, is filled with nitrogen in described cavity 114.
Embodiment 3
As shown in Figure 4, a kind of spectrometer, as different from Example 2: the spectrometer of the present embodiment also comprises catoptron 127, described catoptron 127 is arranged in cavity 124, in the lower extreme point B of grating 112 and the below of the longest optical sensor position F line.
By the light transmission entrance slit 121 of incidence window 126, first after the reflection of catoptron 127, reenter and be mapped on grating 112.Described entrance slit 121, above the upper extreme point C and the shortest optical sensor position D line of grating 112.
Described catoptron 127 can be level crossing, spherical mirror or aspheric mirror.
Embodiment 4
As shown in Figure 5, a kind of spectrometer, as different from Example 3: light to be analyzed incides on entrance slit 131 by the incidence window 136 on cavity 134, the lower extreme point B of described entrance slit 131 at grating 112 and the below of the longest optical sensor position F line.
Embodiment 5
The present embodiment is the application examples of embodiment 1.
As shown in Figure 6, a kind of spectrometer, as different from Example 2:
Cavity 214 is arranged incidence window 216 and optical transmission window 215, arrange entrance slit 211 and grating 212 in described cavity 214, entrance slit 211 present position point is designated as a, and described grating edge is designated as b-c;
The present embodiment, described grating 112 is flat filed concave grating.
Argon gas is filled with in described cavity 214.
Light from entrance slit 211 incidence separates by wavelength by described grating 212, and converges on sensor 213 by wavelength order, and described sensor is designated as d-e-f;
Sensor d-e-f, comprise Part I sensor d-e and Part II sensor e-f, described Part I sensor d-e is arranged in described cavity 214, described Part II sensor e-f is arranged on outside described cavity 214, short wavelength light is propagated and is arrived Part I sensor d-e in described cavity 214, and longwave optical arrives Part II sensor e-f through described optical transmission window 215.
Be incident to the light of grating and the frontier point between the light of grating outgoing is g.As long as be arranged in cavity by optical path space a-b-c-e-d-g-a, the purpose of this utility model can be realized.Therefore optical transmission window 215 is arranged on the rear of c-e section on optical path direction.
Embodiment 6
As shown in Figure 7, a kind of spectrometer, as different from Example 5: the spectrometer of the present embodiment also comprises catoptron 227, described catoptron 227 is arranged in cavity 224, in the lower extreme point b of grating 212 and the below of the shortest optical sensor position d line.
By the light transmission entrance slit 221 of incidence window 226, first after the reflection of catoptron 227, reenter and be mapped on grating 212.Described entrance slit 221, in the lower extreme point b of grating 212 and the below of the shortest optical sensor position d line.
Described catoptron 227 can be level crossing, spherical mirror or aspheric mirror.
Embodiment 7
As shown in Figure 8, a kind of spectrometer, as different from Example 6: light to be analyzed incides on entrance slit 231 by the incidence window 236 on cavity 234, the position of entrance slit 231 in cavity 234 of the spectrometer of the present embodiment adjusts, and namely described entrance slit 231 is above the upper extreme point c and the longest optical sensor position f line of grating 212.
Embodiment 8
As shown in Figure 9, a kind of spectrometer, as different from Example 7: the incidence window of cavity 244 and optical transmission window are same window, are window 245, can pass through all spectrum to be analyzed.
Above-mentioned embodiment should not be construed as the restriction to the utility model protection domain.Key of the present utility model is: short wavelength light is propagated and arrived Part I sensor in vacuum or UV transparent cavity, and longwave optical arrives Part II sensor through the optical transmission window on cavity wall.When not departing from the utility model spirit, all should fall within protection domain of the present utility model any type of change that the utility model is made.
Claims (8)
1. a spectrometer, comprises cavity, entrance slit, grating, sensor, is characterized in that: described sensor is separated into Part I and Part II by described cavity, described Part I sensor setting is in described cavity, and described Part II sensor setting is outside described cavity; Described spectrometer comprises further:
Incidence window, described incidence window is arranged on described cavity, and light to be analyzed is radiated on described grating through described incidence window, entrance slit successively;
Optical transmission window, described optical transmission window is arranged on described cavity, and the longwave optical after grating beam splitting incides on described Part II sensor through described optical transmission window.
2. spectrometer according to claim 1, is characterized in that: described spectrometer also comprises catoptron, and described catoptron is arranged in described cavity, is irradiated to described grating after described catoptron reflection from the light of entrance slit incidence.
3. spectrometer according to claim 2, is characterized in that: described catoptron is level crossing or spherical mirror or aspheric mirror.
4. spectrometer according to claim 1, is characterized in that: for vacuum or be filled with ultraviolet transparent gases in described cavity.
5. spectrometer according to claim 4, is characterized in that: described ultraviolet transparent gases is nitrogen, argon gas or helium.
6. spectrometer according to claim 1, is characterized in that: described incidence window and described optical transmission window are same window.
7. spectrometer according to claim 1, is characterized in that: described grating is Rowland-circle concave grating or flat filed concave grating.
8., according to the arbitrary described spectrometer of claim 1 ~ 7, it is characterized in that: described cavity is the seal chamber with air intake opening and/or gas outlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420683389.XU CN204301860U (en) | 2014-11-14 | 2014-11-14 | A kind of spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420683389.XU CN204301860U (en) | 2014-11-14 | 2014-11-14 | A kind of spectrometer |
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| Publication Number | Publication Date |
|---|---|
| CN204301860U true CN204301860U (en) | 2015-04-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420683389.XU Withdrawn - After Issue CN204301860U (en) | 2014-11-14 | 2014-11-14 | A kind of spectrometer |
Country Status (1)
| Country | Link |
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| CN (1) | CN204301860U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104359558A (en) * | 2014-11-14 | 2015-02-18 | 聚光科技(杭州)股份有限公司 | Spectrograph |
| CN108956515A (en) * | 2018-08-14 | 2018-12-07 | 武汉敢为科技有限公司 | Benzene homologues deep ultraviolet light spectrum detection method in a kind of volatile organic matter |
-
2014
- 2014-11-14 CN CN201420683389.XU patent/CN204301860U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104359558A (en) * | 2014-11-14 | 2015-02-18 | 聚光科技(杭州)股份有限公司 | Spectrograph |
| CN108956515A (en) * | 2018-08-14 | 2018-12-07 | 武汉敢为科技有限公司 | Benzene homologues deep ultraviolet light spectrum detection method in a kind of volatile organic matter |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20150429 Effective date of abandoning: 20160831 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |