CN204284503U - A kind of high vacuum gate valve - Google Patents
A kind of high vacuum gate valve Download PDFInfo
- Publication number
- CN204284503U CN204284503U CN201420704271.0U CN201420704271U CN204284503U CN 204284503 U CN204284503 U CN 204284503U CN 201420704271 U CN201420704271 U CN 201420704271U CN 204284503 U CN204284503 U CN 204284503U
- Authority
- CN
- China
- Prior art keywords
- subplate
- valve
- valve body
- mainboard
- connecting plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Abstract
The utility model discloses a kind of high vacuum gate valve, comprise: valve body, valve and power plant, valve by connecting plate, be located at mainboard on connecting plate and subplate is formed, mainboard bottom and connecting plate are fixed, supported spring is provided with between subplate bottom and connecting plate, hinged by least one hinging shaft between mainboard and subplate, power plant are connected to below connecting plate; Subplate is provided with the seal ring coordinated with valve opening outer ring sidewall, and the top of valve body is provided with the breach that can hold mainboard lifting, and the sidewall that power plant promote the seal ring and valve opening outer ring that connecting plate moves up to subplate is close to.The utility model is by the hinging structure between mainboard and subplate, after cylinder promotion connecting plate moves upward, hinging shaft relatively rotates between major and minor plate, produces the power compressed to valve body by subplate, make valve fit tightly on valve body, reach high vacuum seal effect.
Description
Technical field
The utility model relates to a kind of gate valve, particularly relates to a kind of high vacuum gate valve.
Background technique
Gate valve is a kind of block valve be in daily use, and is mainly used to the medium connected or block in fluid or air-channel system, does not generally apply to regulate rate-of flow.The pressure that gate valve uses, temperature and diameter range are very large, in especially applying to, large diameter pipeline.Such as, gate valve is widely used in MOCVD device field, and because domestic MOCVD device is still in the starting stage of growth at present, technology and equipment manufacturing technology all imperfections, do not possess perfect function and the ability of large-scale industrialized production.The gate valve that domestic MOCVD device relates to has the following disadvantages and defect:
1, general parallel gate valve because of structure simple, can not lean on and self reach forced seal effect, during valve closing, also may there is the leakage of reaction gas, gate valve sealing effect is poor;
Even if 2, gate valve reaches required sealing effect, but in valve opening and closing movement process, there is relative sliding between the sealing surface that valve contacts with valve seat, easily scratch is caused to sealing surface, have impact on sealing effect conversely again in the course of time;
3, the structure function of gate valve is not complete, does not possess industrialization conditions of manufacture.
Therefore, how to design a kind of good sealing effect, reduce sealing surface scratch and the high vacuum gate valve of the production Perfect in shape and function technical problem that to be industry urgently to be resolved hurrily.
Model utility content
For solving the problems of the technologies described above, the utility model proposes and a kind ofly self structure can be relied on to reach high vacuum seal effect and parallel type high vacuum gate valve without frictional impact between sealing surface in valve opening and closing process.
The technical solution adopted in the utility model is, designs a kind of high vacuum gate valve, comprising: valve body, be provided with cavity in described valve body, and the two side, front and back of valve body is parallel and be provided with valve opening; Valve, described valve coordinates to be located in the cavity of valve body, valve by connecting plate, be located at mainboard on connecting plate and subplate is formed, mainboard, subplate are parallel with the front and rear sides wall of valve body respectively, mainboard bottom and connecting plate are fixed, and are provided with supported spring between subplate bottom and connecting plate, hinged by least one hinging shaft between described mainboard and subplate, the two ends of hinging shaft are laterally hinged with respectively on mainboard, subplate, and described hinging shaft is at vertical rotation in surface; Power plant, described power plant are connected to below connecting plate; Described subplate size is greater than the valve opening on valve body rear sidewall, described subplate is provided with the seal ring coordinated with this valve opening outer ring sidewall, the top of valve body is provided with the breach that can hold mainboard lifting, and the sidewall that described power plant promote the seal ring and described valve opening outer ring that connecting plate moves up to subplate is close to.
Described subplate end face is provided with secondary roller, and described secondary roller can along valve body inner roof wall scroll forward and backward; Be provided with main roller on front side of described mainboard, described main roller can along front panel scroll-up/down in valve body.
Described body top side is provided with the nitrogen be communicated with in valve body and purges suction port.
The described mainboard hinging shaft parallel with being provided with two between subplate is hinged.
Described power plant are cylinder.
Compared with prior art, the utility model has the following advantages:
1, by the hinging structure between mainboard and subplate, cylinder promotes connecting plate and moves upward, when subplate touches valve body top, mainboard is continued to promote on valve body breach, spring between subplate and connecting plate is compressed, and hinging shaft relatively rotates between major and minor plate, produces the power compressed to valve body by subplate, make valve fit tightly on valve body, reach high vacuum seal effect.
2, during valve motion, by roller and valve body contact, thus the wearing and tearing between valve and valve body are reduced.
3, increase a nitrogen and purge suction port, ensure the cleanliness of substrate.
Accompanying drawing explanation
Below in conjunction with embodiment and accompanying drawing, the utility model is described in detail, wherein:
Fig. 1 is structural representation of the present utility model;
Fig. 2 is the first stage schematic diagram of valve closing;
Fig. 3 is the partial enlarged drawing of A in Fig. 2;
Fig. 4 is the second stage schematic diagram of valve closing;
Fig. 5 is the partial enlarged drawing of B in Fig. 4.
Embodiment
As shown in Figure 1, the high vacuum gate valve that the utility model proposes, comprising: valve body 1, valve and power plant.
Be provided with cavity in valve body 1, the two side, front and back of valve body 1 is parallel and be provided with valve opening.Valve coordinates to be located in the cavity of valve body, valve by connecting plate 2, be located at mainboard 3 on connecting plate 2 and subplate 4 is formed, mainboard 3, subplate 4 are parallel with the front and rear sides wall of valve body 1 respectively, mainboard 3 bottom and connecting plate 2 are fixed, supported spring is provided with between subplate 4 bottom and connecting plate 2, under the elastic force effect of spring, subplate 4 can keep state of equilibrium in vertical direction.Hinged by least one hinging shaft 5 between mainboard 3 and subplate 4, the two ends of hinging shaft 5 are laterally hinged with respectively on mainboard 3, subplate 4, and hinging shaft 5 is at vertical rotation in surface.Subplate 4 size is greater than the valve opening on valve body 1 rear sidewall, and subplate 4 is provided with the seal ring coordinated with this valve opening outer ring sidewall, and the top of valve body 1 is provided with the breach 9 that can hold mainboard 3 and be elevated.Power plant are connected to below connecting plate.In the present embodiment, in order to strengthen the pressure of structural reliability and hinging shaft 5 pairs of subplates 4, be provided with two parallel hinging shafts 5 between mainboard 3 with subplate 4 hinged.Wherein, power plant are cylinder 10, and cylinder 10 promotes connecting plate 2 and moves up to subplate 4 and be close to the sidewall of valve opening outer ring.
Subplate 4 end face is provided with secondary roller 6, and secondary roller 6 can along valve body 1 inner roof wall scroll forward and backward.Be provided with main roller 7 on front side of mainboard 3, main roller 7 can along front panel scroll-up/down in valve body 1.Highi degree of accuracy roller makes mainboard 3, subplate 4 by roller contact in valve opening and closing process and between valve body 1, thus avoids mainboard 3, wearing and tearing between subplate 4 and valve body.
During valve closing motion, as shown in Figure 2,3, the first stage: under cylinder 10 thrust, connecting plate 2 drives major and minor plate to do ascending motion, then the secondary roller 6 on subplate 4 contacts with valve body 1 inner chamber roof, and subplate 4 first reaches upper limit position in the vertical direction, and subplate 4 moves upward termination.As shown in Figure 4,5, second stage: mainboard 3 continues to do ascending motion under cylinder 10 thrust, protrude upward the breach 9 at valve body 1 top, by the gearing of hinge axis 5 between major and minor plate, subplate 4 is pushed in hinge axis 5 rotation open makes subplate 4 make horizontal motion, the seal ring on subplate 4 and valve body 1 is close to and reaches sealing effect.The inverse process that valve opening motion is valve closing motion, mainboard 3 first makes descending motion by cylinder 10 pulling force, simultaneously due to the effect of hinge axis 5, subplate 4 is made to make horizontal motion, depart from valve body 1 madial wall, then major and minor plate does descending motion together, valve opening.
Gate valve is fitted by subplate 4 and valve body 1 and is sealed, and it is horizontal motion that subplate 4 and valve body 1 carry out fitting with motion when separating, so do not have scraping phenomenon between subplate 4 and valve body 1 sealing surface.
Further, side, valve body 1 top is provided with the nitrogen be communicated with in valve body 1 and purges suction port 8, when discharging is by gate valve, carry out inflated with nitrogen to the substrate on graphite plate to purge with the cleanliness ensureing substrate, promote the practicability of gate valve, be convenient to gate valve to be applied in large-scale industrialized production.
The foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection domain of the present utility model.
Claims (5)
1. a high vacuum gate valve, is characterized in that comprising:
Valve body, is provided with cavity in described valve body, and the two side, front and back of valve body is parallel and be provided with valve opening;
Valve, described valve coordinates to be located in the cavity of valve body, valve by connecting plate, be located at mainboard on connecting plate and subplate is formed, mainboard, subplate are parallel with the front and rear sides wall of valve body respectively, mainboard bottom and connecting plate are fixed, and are provided with supported spring between subplate bottom and connecting plate, hinged by least one hinging shaft between described mainboard and subplate, the two ends of hinging shaft are laterally hinged with respectively on mainboard, subplate, and described hinging shaft is at vertical rotation in surface;
Power plant, described power plant are connected to below connecting plate;
Described subplate size is greater than the valve opening on valve body rear sidewall, described subplate is provided with the seal ring coordinated with this valve opening outer ring sidewall, the top of valve body is provided with the breach that can hold mainboard lifting, and the sidewall that described power plant promote the seal ring and described valve opening outer ring that connecting plate moves up to subplate is close to.
2. high vacuum gate valve as claimed in claim 1, it is characterized in that, described subplate end face is provided with secondary roller, and described secondary roller can along valve body inner roof wall scroll forward and backward;
Be provided with main roller on front side of described mainboard, described main roller can along front panel scroll-up/down in valve body.
3. high vacuum gate valve as claimed in claim 2, is characterized in that, described body top side is provided with the nitrogen be communicated with in valve body and purges suction port.
4. high vacuum gate valve as claimed in claim 1, is characterized in that, the described mainboard hinging shaft parallel with being provided with two between subplate is hinged.
5. high vacuum gate valve as claimed in claim 1, it is characterized in that, described power plant are cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420704271.0U CN204284503U (en) | 2014-11-21 | 2014-11-21 | A kind of high vacuum gate valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420704271.0U CN204284503U (en) | 2014-11-21 | 2014-11-21 | A kind of high vacuum gate valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204284503U true CN204284503U (en) | 2015-04-22 |
Family
ID=52867664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420704271.0U Active CN204284503U (en) | 2014-11-21 | 2014-11-21 | A kind of high vacuum gate valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204284503U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105351604A (en) * | 2015-11-27 | 2016-02-24 | 四川九天真空科技股份有限公司 | Opening structure and opening method of valve under large pressure difference |
| CN112081496A (en) * | 2020-08-31 | 2020-12-15 | 中国电子科技集团公司第四十八研究所 | Vacuum sealing door device of semiconductor equipment |
| CN115405712A (en) * | 2022-08-26 | 2022-11-29 | 湖北洪城通用机械有限公司 | Rectangular vacuum quick cut-off valve |
| CN116576265A (en) * | 2023-07-12 | 2023-08-11 | 国仪量子(合肥)技术有限公司 | Sealing device and scanning electron microscope system |
-
2014
- 2014-11-21 CN CN201420704271.0U patent/CN204284503U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105351604A (en) * | 2015-11-27 | 2016-02-24 | 四川九天真空科技股份有限公司 | Opening structure and opening method of valve under large pressure difference |
| CN112081496A (en) * | 2020-08-31 | 2020-12-15 | 中国电子科技集团公司第四十八研究所 | Vacuum sealing door device of semiconductor equipment |
| CN115405712A (en) * | 2022-08-26 | 2022-11-29 | 湖北洪城通用机械有限公司 | Rectangular vacuum quick cut-off valve |
| CN115405712B (en) * | 2022-08-26 | 2023-12-12 | 湖北洪城通用机械有限公司 | Rectangular vacuum quick cut-off valve |
| CN116576265A (en) * | 2023-07-12 | 2023-08-11 | 国仪量子(合肥)技术有限公司 | Sealing device and scanning electron microscope system |
| CN116576265B (en) * | 2023-07-12 | 2023-10-10 | 国仪量子(合肥)技术有限公司 | Sealing device and scanning electron microscope system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN204284503U (en) | A kind of high vacuum gate valve | |
| CN204730988U (en) | Inlet manifold air tightness detection apparatus | |
| CN103410992A (en) | Totally-closed spectacle type intercepting valve | |
| CN105015797A (en) | Sealing block cover for air intake duct | |
| CN202746629U (en) | Double soft sealing flat-plate gate valve | |
| CN201695083U (en) | Insertion plate valve for vacuum film coating production line | |
| CN203516724U (en) | U-shaped plug based on shape memory effect | |
| CN104108860B (en) | Wipe stannum device | |
| CN204312746U (en) | Water valve in a kind of water softening device | |
| CN205715844U (en) | A kind of making-up air device of backflow preventer | |
| CN204610917U (en) | Forged steel pipeline soft seal plate valve | |
| CN201404800Y (en) | Vessel window | |
| CN208900733U (en) | A kind of fast-assembling wafer type butterfly valve | |
| CN203400570U (en) | Leak-proof sealing structure of upper opening cover of filter | |
| CN203374848U (en) | Metal sealing valve plate and valve bases for underwater flat gate valve | |
| CN202371240U (en) | Soft seal safety valve | |
| CN208677182U (en) | A kind of diatery supplement machine with double sealing structure | |
| CN201575176U (en) | Manual parallel gate valve | |
| CN203258100U (en) | Mounted-type ball valve capable of being dismounted and mounted on line and achieving two-way sealing | |
| CN204805607U (en) | Soft seal ball valve | |
| CN202545856U (en) | Knife-edge valve of wedge ring | |
| CN204433507U (en) | A kind of petrol storage tank | |
| CN202182198U (en) | Novel improvement for hard sealing gate valve | |
| CN203051745U (en) | Sealing device for supercritical carbon dioxide extraction kettle | |
| CN203115192U (en) | Check valve |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant |