CN204281854U - A kind of novel PVD film plating machine workpiece turntable - Google Patents
A kind of novel PVD film plating machine workpiece turntable Download PDFInfo
- Publication number
- CN204281854U CN204281854U CN201420747007.5U CN201420747007U CN204281854U CN 204281854 U CN204281854 U CN 204281854U CN 201420747007 U CN201420747007 U CN 201420747007U CN 204281854 U CN204281854 U CN 204281854U
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- CN
- China
- Prior art keywords
- instlated tubular
- coating equipment
- pivoted frame
- rotating disk
- circular hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
A kind of novel PVD film plating machine workpiece turntable, comprise coating equipment, rotating disk, pivoted frame, transmission shaft, bearing support, instlated tubular, wherein coating equipment bottom surface offers circular hole; Described transmission shaft is arranged on this center of circular hole position, is wherein provided with rotating disk and pivoted frame above rotation axis, is provided with bearing support below this transmission shaft; Described circular hole periphery is provided with instlated tubular, and this instlated tubular is that upper end open is large, the T-shape flared tube that lower ending opening is little; Described instlated tubular upper end enlarging is connected with coating equipment outer side bottom surface, and this instlated tubular lower ending opening is connected with bearing support; The enlarging of described instlated tubular upper end is inner forms a pockets with coating equipment bottom surface, and its turntable, pivoted frame are arranged in this pockets.The utility model adopts sink structures, by setting up pockets bottom coating equipment, and rotating disk and pivoted frame are arranged in pockets, considerably increase the useful space and the loading capacity of vacuum plating unit vacuum chamber, make the space of vacuum chamber obtain fully effective use completely.
Description
Technical field
The utility model relates to technical field of vacuum plating, especially relates to a kind of novel PVD film plating machine workpiece turntable.
Background technology
Vacuum plating unit is used in a vacuum to workpiece plated film, and vacuum plating unit comprises the vacuum chamber of the process chamber being formed in workpiece, is provided with rotary frame device in vacuum chamber, and this rotary frame device can be driven by drive unit and rotate, thus realizes the rotation of workpiece.
Existing PVD vacuum plating vacuum chamber structure is prototype or Polygons.Bottom construction is flat.Pivoted frame be generally directly installed on vacuum chamber flat on, rotate.Need the workpiece of processing to be placed on pivoted frame, driven by pivoted frame and carry out rotation and revolution.Because pivoted frame structure be mounted in vacuum chamber flat on, the drive mechanism of pivoted frame itself is more complicated, so it needs certain height to install these drive mechanisms.Because processed workpiece is placed on pivoted frame, so the position of workpiece will be higher than pivoted frame.The useful space of such vacuum chamber just has part shared by pivoted frame, and the space of vacuum chamber can not effectively be made full use of.
Summary of the invention
The utility model object overcomes the deficiencies in the prior art, provides a kind of novel PVD film plating machine workpiece turntable.
For solving the problems of the technologies described above, the technical scheme that the utility model adopts is: a kind of novel PVD film plating machine workpiece turntable, and comprise coating equipment, rotating disk, pivoted frame, transmission shaft, bearing support, instlated tubular, wherein coating equipment bottom surface offers circular hole; Described transmission shaft is arranged on this center of circular hole position, is wherein provided with rotating disk and pivoted frame above rotation axis, is provided with bearing support below this transmission shaft; Described circular hole periphery is provided with instlated tubular, and this instlated tubular is that upper end open is large, the T-shape flared tube that lower ending opening is little; Described instlated tubular upper end enlarging is connected with coating equipment outer side bottom surface, and this instlated tubular lower ending opening is connected with bearing support; Enlarging inside, described instlated tubular upper end forms a pockets with coating equipment bottom surface and circular hole, and its turntable, pivoted frame are arranged in this pockets.
As preferably, the aperture of described circular hole is greater than the diameter of rotating disk.
As preferably, described rotating disk is arranged on below pivoted frame, and its transfer rack upper surface flushes with inside coating equipment bottom surface.
As preferably, the groove depth of described pockets is identical with the height of rotating disk.
The utility model adopts sink structures, by setting up pockets bottom coating equipment, and rotating disk and pivoted frame are arranged in pockets, considerably increase the useful space and the loading capacity of vacuum plating unit vacuum chamber, make the space of vacuum chamber obtain fully effective use completely.
Accompanying drawing explanation
Fig. 1 is the utility model structural representation.
Embodiment
Below by embodiment, and by reference to the accompanying drawings, the technical solution of the utility model is further described in detail.
Fig. 1 is the utility model structural representation.As shown in Figure 1, a kind of novel PVD film plating machine workpiece turntable, primarily of compositions such as coating equipment, rotating disk 4, pivoted frame 3, transmission shaft 5, bearing support 7, instlated tubulars 8, wherein coating equipment bottom surface 1 offers circular hole 2; Described transmission shaft 5 is arranged on this circular hole 2 central position, is wherein provided with rotating disk 4 and pivoted frame 3 above rotation axis 5, is provided with bearing support 7 below this transmission shaft 5.The aperture of circular hole 2 is greater than the diameter of rotating disk 4 and pivoted frame 3, and rotating disk 4 is arranged on below pivoted frame 3, and its transfer rack 3 upper surface 300 flushes with coating equipment bottom surface 1 medial surface 100.
Circular hole 2 periphery is provided with instlated tubular 8, and this instlated tubular 8 is that upper end open is large, the T-shape flared tube that lower ending opening is little; Instlated tubular 8 upper end enlarging is connected with outside coating equipment bottom surface 1, and this instlated tubular 8 lower ending opening is connected with bearing support 7; The enlarging of instlated tubular 8 upper end is inner forms a pockets 6 with circular hole 2, and its turntable 4, pivoted frame 3 are arranged in this pockets 6, and the groove depth of this pockets 6 is identical with the height of rotating disk 4.
The utility model adopts sink structures, by 1 setting up pockets 6 bottom coating equipment, and rotating disk 4 and pivoted frame 3 are arranged in pockets 6, considerably increase the useful space and the loading capacity of vacuum plating unit vacuum chamber, make the space of vacuum chamber obtain fully effective use completely.
The utility model illustrates embodiment of the present utility model and structure by above-described embodiment; but this patent is not limited to above-mentioned embodiment; all employings and the utility model analog structure realize all modes of the utility model object, all within protection domain of the present utility model.
Claims (4)
1. a novel PVD film plating machine workpiece turntable, comprise coating equipment, rotating disk, pivoted frame, transmission shaft, bearing support, instlated tubular, wherein coating equipment bottom surface offers circular hole; It is characterized in that, described transmission shaft is arranged on this center of circular hole position, is wherein provided with rotating disk and pivoted frame above rotation axis, is provided with bearing support below this transmission shaft; Described circular hole periphery is provided with instlated tubular, and this instlated tubular is that upper end open is large, the T-shape flared tube that lower ending opening is little; Described instlated tubular upper end enlarging is connected with coating equipment outer side bottom surface, and this instlated tubular lower ending opening is connected with bearing support; The enlarging of described instlated tubular upper end is inner forms a pockets with coating equipment bottom surface, circular hole, and its turntable, pivoted frame are arranged in this pockets.
2. one according to claim 1 novel PVD film plating machine workpiece turntable, is characterized in that, the aperture of described circular hole is greater than the diameter of rotating disk.
3. one according to claim 1 novel PVD film plating machine workpiece turntable, is characterized in that, described rotating disk is arranged on below pivoted frame, and its transfer rack upper surface flushes with inside coating equipment bottom surface.
4. one according to claim 1 novel PVD film plating machine workpiece turntable, is characterized in that, the groove depth of described pockets is identical with the height of rotating disk.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420747007.5U CN204281854U (en) | 2014-12-03 | 2014-12-03 | A kind of novel PVD film plating machine workpiece turntable |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420747007.5U CN204281854U (en) | 2014-12-03 | 2014-12-03 | A kind of novel PVD film plating machine workpiece turntable |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204281854U true CN204281854U (en) | 2015-04-22 |
Family
ID=52865036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420747007.5U Expired - Fee Related CN204281854U (en) | 2014-12-03 | 2014-12-03 | A kind of novel PVD film plating machine workpiece turntable |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204281854U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106246512A (en) * | 2016-08-20 | 2016-12-21 | 南京理工大学 | A kind of vacuum equipment cleaning test for large area MCP with water |
-
2014
- 2014-12-03 CN CN201420747007.5U patent/CN204281854U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106246512A (en) * | 2016-08-20 | 2016-12-21 | 南京理工大学 | A kind of vacuum equipment cleaning test for large area MCP with water |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180126 Address after: 518000 A, No. 13 C1, No. C1, No. 13, Henggang lower industrial zone, Xinqiao community, Baoan District Sha Jing Street, Xinqiao community Patentee after: Shenzhen Xinke nano coating Co. Ltd. Address before: 518000 Henggang lower industrial zone, Shenzhen, Baoan District, Guangdong Province, No. 13 Patentee before: SHENZHEN LATOM COATING TECHNOLOGY CO., LTD. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150422 Termination date: 20191203 |