CN204269905U - Prismatic adjustment mechanism - Google Patents
Prismatic adjustment mechanism Download PDFInfo
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- CN204269905U CN204269905U CN201420725094.4U CN201420725094U CN204269905U CN 204269905 U CN204269905 U CN 204269905U CN 201420725094 U CN201420725094 U CN 201420725094U CN 204269905 U CN204269905 U CN 204269905U
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Abstract
The utility model discloses a kind of prismatic adjustment mechanism, comprising: three groups of flexible adjusting levers, two groups of flexible links, driver and recovery springs; Wherein, described three groups of flexible adjusting levers divide and are located on the inclined-plane of prism, for regulate described prism Y-direction, Rz to Rx to; Described two groups of flexible links are divided on the principal section at described prism two ends, for regulate the Z-direction of described prism and Ry to.The utility model can realize the 5DOF adjustment of prism, and adopts flexible adjusting lever and flexible link, not wearing and tearing in adjustment process, the phenomenons such as friction, adjustment is reliable, increases the mode of adjusting mechanism simultaneously, reduce the impact of external vibration on prism, add the stability of whole object lens.
Description
Technical field
The utility model relates to litho machine field, particularly a kind of prismatic adjustment mechanism.
Background technology
In Large visual angle exposure field, along with the increase of exposure area, for enhancing productivity, objective angular field continues to increase.In order to reduce processing and manufacturing difficulty and cost under the prerequisite of Large visual angle, and ensure quality of optical imaging, splicing object lens are used to replace single Large visual angle object lens gradually.
Splicing object lens connect into an entirety mechanically by multiple identical small field of view object lens, each object lens visual field after connection can form the visual field track of uniformly continous after perpendicular to tangential movement in stitching direction, splices object lens like this and can realize high efficiency Large visual angle exposure work by scan exposure form.In order to ensure the performance of splicing rear visual field, will there be very high demand the image visual field of single object lens in position, and the mechanical splice of object lens entirety is difficult to ensure positioning precision high like this, the processing and manufacturing rigging error of object lens internal optics part also can cause deviation theory position, actual image visual field simultaneously, therefore in order to obtain high-precision stitching position relation, need to use effective pH effect mode or adjusting mechanism.
The Zigzag type object lens of 1 times of enlargement ratio are used in splicing object lens usually, and wherein vital part prism is the image position adjusting mechanism be widely adopted.How 5 degree of freedom mode of motion that corresponding image planes are different respectively of prism, therefore, make prism carry out different degree of freedom motion to reach the position adjustment demand of multiple image planes, become the technical matters that those skilled in the art are urgently to be resolved hurrily.
Utility model content
The utility model provides a kind of prismatic adjustment mechanism, to realize the 5DOF adjustment of prism, thus meets the locational requirement of the multiple image planes of splicing object lens.
For solving the problems of the technologies described above, the utility model provides a kind of prismatic adjustment mechanism, comprising: three groups of flexible adjusting levers, two groups of flexible links, driver and recovery springs; Wherein, described three groups of flexible adjusting levers divide and are located on the inclined-plane of prism, for regulate described prism Y-direction, Rz to Rx to; Described two groups of flexible links are divided on the principal section at described prism two ends, for regulate the Z-direction of described prism and Ry to; One end of described driver is fixed on litho machine framework, and the other end is connected with the driving strong point of described flexible adjusting lever or flexible link; One end of described recovery spring and described flexible adjusting lever or flexible link affixed, the other end is fixed on described litho machine framework.
As preferably, two groups in the described three groups of flexible adjusting levers two ends, side being positioned at described prism hypotenuse/facet surfaces, another organizes the opposite side middle position that flexible adjusting lever is positioned at described prism hypotenuse/facet surfaces.
As preferably, the prism tie point of described flexible link by glue and described prism cementing.
As preferably, the prism tie point of described flexible support bar by glue and described prism cementing.
As preferably, described flexible support bar and flexible link are also provided with frames points, for affixed with described litho machine framework.
Compared with prior art, the utility model has the following advantages: the utility model adopts the flexible adjusting lever of driver drives three groups and two groups of flexible links, the 5DOF adjustment of prism can be realized, and not wearing and tearing in adjustment process, the phenomenons such as friction, adjustment is reliable, increases the mode of adjusting mechanism simultaneously, reduce the impact of external vibration on prism, add the stability of whole object lens.
Accompanying drawing explanation
Fig. 1 is the perspective view of prismatic adjustment mechanism in the utility model one embodiment;
Fig. 2 is the vertical view of prismatic adjustment mechanism in the utility model one embodiment;
Fig. 3 is the front view of prismatic adjustment mechanism in the utility model one embodiment;
Fig. 4 is the scheme of installation recovering spring in the utility model one embodiment;
Fig. 5 is the structural representation of flexible support bar in the utility model one embodiment;
Fig. 6 is the Z-direction adjustment schematic diagram of prismatic adjustment mechanism in the utility model one embodiment;
Fig. 7 is the Rz direction adjustment schematic diagram of prismatic adjustment mechanism in the utility model one embodiment;
Fig. 8 is the Y-direction adjustment schematic diagram of prismatic adjustment mechanism in the utility model one embodiment;
Fig. 9 is the Ry direction adjustment schematic diagram of prismatic adjustment mechanism in the utility model one embodiment;
Figure 10 is the Rx direction adjustment schematic diagram of prismatic adjustment mechanism in the utility model one embodiment.
Shown in figure: the flexible adjusting lever of 10-prism, 20-, 20a-frames points, 20b-prism tie point, 20c-V type groove, 30-flexible link, 40-driver, 50-recover spring, 60-installing plate.
Embodiment
For enabling above-mentioned purpose of the present utility model, feature and advantage become apparent more, are described in detail embodiment of the present utility model below in conjunction with accompanying drawing.It should be noted that, the utility model accompanying drawing all adopts the form of simplification and all uses non-ratio accurately, only in order to object that is convenient, aid illustration the utility model embodiment lucidly.
As shown in Figures 1 to 4, prismatic adjustment mechanism of the present utility model, for location and the adjustment of prism 10, comprising: flexible adjusting lever 20, driver 40, flexible link 30 and recovery spring 50.
Please see figures.1.and.2 by emphasis, described flexible adjusting lever 20 is provided with three groups: for showing difference, and described three groups of flexible adjusting levers 20 are defined as the first flexible adjusting lever 202 of flexible adjusting lever 201, second and the 3rd flexible adjusting lever 203 respectively.Described three groups of flexible adjusting levers 20 points are located on the inclined-plane of prism 10, wherein, first, second flexible adjusting lever 201,202 described is arranged at the two ends, side, inclined-plane of described prism 10, and the 3rd flexible adjusting lever 203 is positioned at the inclined-plane opposite side middle position of described prism 10.Please refer to Fig. 5, one end of described flexible adjusting lever 20 is prism tie point 20b, this prism tie point 20b by glue and prism 10 cementing; The other end of described flexible adjusting lever 20 is V-type groove 20c, and described flexible adjusting lever 20 is affixed by the movable end of this V-type groove 20c and driver 40; The middle upper part of described flexible adjusting lever 20 is also provided with frames points 20a, for affixed with litho machine framework.
Continue referring to Fig. 1 to Fig. 4, described flexible link 30 is provided with two groups: for showing difference, described two groups of flexible links is defined as respectively the first flexible link 301 and the second flexible link 302.Described two groups of flexible links 30 are divided on the principal section at described prism 10 two ends.Similarly, described flexible link 30 is provided with equally for the prism tie point 20b cementing with prism 10, for the V-type groove 20c affixed with driver 40 and for the frames points 20a affixed with framework.
The stiff end of described driver 40 is fixed on litho machine framework, and described driver 40, by applying driving force in the V-type groove 20c to flexible adjusting lever 20 and flexible link 30, adjusts the position of prism 10.Certainly, each driver 40 drives a flexible adjusting lever 20 or a flexible link 30, for the adjustment of prism 10 provides power.
Please emphasis with reference to Fig. 4, one end of described recovery spring 50 and described flexible adjusting lever 20 or flexible link 30 affixed, the other end is fixed on described litho machine framework by installing plate 60.Described recovery spring 50 when driver 40 recovers, provides restoring force to make adjusting mechanism counter motion, for adjusting mechanism counter motion provides driving force for flexible adjusting lever 20 or flexible link 30.
Please refer to Fig. 6 to Figure 10, and composition graphs 1 to Fig. 5, the following detailed description of the 5DOF adjustment principle of prismatic adjustment mechanism of the present utility model.
The Z-direction adjustment of prism 10:
As shown in Figure 6, in adjustment process, three drivers 40 that flexible adjusting lever 20 connects keep motionless, and two drivers 40 be connected with flexible link 30 drive flexible link 30 to move upward, and ensure to drive synchronously, drive prism 10 to move upward.Conversely, two drivers 40 be connected with flexible link 30 are downward, recover spring 50 simultaneously and drive flexible link 30 to move downward, and drive prism 10 to move downward simultaneously, complete the translation motion of prism 10 in Z-direction.
The Rz direction adjustment of prism 10:
As shown in Figure 7, in adjustment process, the driver 40 be connected with the 3rd flexible adjusting lever 203 and two groups of flexible links 30 keeps motionless; Two drivers 40 be connected with the first flexible adjusting lever 201 and the second flexible adjusting lever 202 drive first, second flexible adjusting lever 201,202 to move, and prism 10 is rotated around Z axis.Particularly, driver 40 drives the first flexible adjusting lever 201 to move upward, and recovers spring 50 and drives the second flexible adjusting lever 202 to move downward, realize prism 10 and move along the counter clockwise direction of Z axis.Conversely, recover spring 50 and drive the first flexible adjusting lever 201 to move downward, driver 40 drives the second flexible adjusting lever 202 to move upward, and realizes prism 10 moving clockwise along Z axis, and then realizes the motion in Rz direction of prism 10.
The Y-direction adjustment of prism 10:
As shown in Figure 8: in adjustment process, two drivers 40 be connected with flexible link 30 keep motionless, three drivers 40 of flexible adjusting lever 20 drive first, second flexible adjusting lever 201,202 to move upward, recover spring 50 drives the 3rd flexible adjusting lever 203 to move downward simultaneously, ensure to drive synchronously, drive prism 10 to move along Y-axis negative direction.Conversely, recover spring 50 and drive first, second flexible adjusting lever 201,202 to move downward, driver 40 drives the 3rd flexible adjusting lever 203 to move upward, and drives prism 10 along Y-axis positive movement, completes the translation motion of the Y-direction of prism 10.
The Ry direction adjustment of prism 10:
As shown in Figure 9, in adjustment process, three drivers 40 be connected with flexible adjusting lever 20 keep motionless.Drive the second flexible link 302 to move upward with the driver 40 of the second flexible link 302, recover spring 50 and drive the first flexible link 301 to move downward, realize prism 10 and move along the counter clockwise direction of Y-axis.Conversely, recover spring 50 and drive the second flexible link 302 to move downward, driver 40 drives the first flexible link 301 to move upward, and realizes prism 10 moving clockwise along Y-axis, realizes the motion in the Ry direction of prism 10.
The Rx direction adjustment of prism 10:
As shown in Figure 10, in adjustment process, the driver 40 be connected with the 3rd flexible adjusting lever 203 and two flexible links 30 keeps motionless.Two drivers 40 be connected with the first flexible adjusting lever 201 and the second flexible adjusting lever 202 drive first, second flexible adjusting lever 201,202 simultaneously, make prism 10 around X axis paper inner rotary; Conversely, recover spring 50 and drive first, second flexible adjusting lever 201,202, prism 10 is rotated in X axis paper, realizes the motion in the Rx direction of prism 10.
To sum up, the utility model adopts compliant mechanism (flexible adjusting lever 20 and flexible link 30) to support adjustment prism 10, realizes the adjustment of 5 degree of freedom of prism 10.In adjustment process, due to the existence of compliant mechanism, eliminate the gap in adjustment process and hysterisis error, eliminate due to friction simultaneously, the risk of the system timeliness that the factors such as wearing and tearing cause, make whole mechanism obtain very high mode, reduce the impact of extraneous vibration on mechanism itself, add the stability of adjusting mechanism.Structure of the present utility model is simple, adjustment is reliable, it is simple to process and easy to assembly, and applicability is wide.
Obviously, those skilled in the art can carry out various change and modification to utility model and not depart from spirit and scope of the present utility model.Like this, if these amendments of the present utility model and modification belong within the scope of the utility model claim and equivalent technologies thereof, then the utility model is also intended to comprise these change and modification.
Claims (6)
1. a prismatic adjustment mechanism, is characterized in that, comprising: three groups of flexible adjusting lever, two groups of flexible links; Wherein, described three groups of flexible adjusting levers divide and are located on the inclined-plane of prism, for regulate described prism Y-direction, Rz to Rx to; Described two groups of flexible links are divided on the principal section at described prism two ends, for regulate the Z-direction of described prism and Ry to.
2. prismatic adjustment mechanism as claimed in claim 1, is characterized in that, also comprise driver and recover spring, one end of described driver is fixed on litho machine framework, and the other end is connected with the driving strong point of described flexible adjusting lever or flexible link; One end of described recovery spring and described flexible adjusting lever or flexible link affixed, the other end is fixed on described litho machine framework.
3. prismatic adjustment mechanism as claimed in claim 1, is characterized in that, two groups in the described three groups of flexible adjusting levers two ends, side being positioned at described prism hypotenuse/facet surfaces, another organizes the opposite side middle position that flexible adjusting lever is positioned at described prism hypotenuse/facet surfaces.
4. prismatic adjustment mechanism as claimed in claim 1, is characterized in that, the prism tie point of described flexible link by glue and described prism cementing.
5. prismatic adjustment mechanism as claimed in claim 1, is characterized in that, the prism tie point of described flexible support bar by glue and described prism cementing.
6. prismatic adjustment mechanism as claimed in claim 1, is characterized in that, described flexible support bar and flexible link are also provided with frames points, for affixed with described litho machine framework.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420725094.4U CN204269905U (en) | 2014-11-26 | 2014-11-26 | Prismatic adjustment mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420725094.4U CN204269905U (en) | 2014-11-26 | 2014-11-26 | Prismatic adjustment mechanism |
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| Publication Number | Publication Date |
|---|---|
| CN204269905U true CN204269905U (en) | 2015-04-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420725094.4U Active CN204269905U (en) | 2014-11-26 | 2014-11-26 | Prismatic adjustment mechanism |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017114405A1 (en) * | 2015-12-30 | 2017-07-06 | 上海微电子装备（集团）股份有限公司 | Prism rotation adjustment mechanism, stepper exposure system, and stepper |
-
2014
- 2014-11-26 CN CN201420725094.4U patent/CN204269905U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017114405A1 (en) * | 2015-12-30 | 2017-07-06 | 上海微电子装备（集团）股份有限公司 | Prism rotation adjustment mechanism, stepper exposure system, and stepper |
| CN106933060A (en) * | 2015-12-30 | 2017-07-07 | 上海微电子装备有限公司 | A kind of prism rotation regulating mechanism and exposure system of photo-etching machine and litho machine |
| US11106005B2 (en) | 2015-12-30 | 2021-08-31 | Shanghai Micro Electronics Equipment (Group) Co., Ltd. | Prism rotation adjustment mechanism, stepper exposure system, and stepper |
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Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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| CP01 | Change in the name or title of a patent holder |