CN204265840U - A kind of pressure ring - Google Patents
A kind of pressure ring Download PDFInfo
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- CN204265840U CN204265840U CN201420674496.6U CN201420674496U CN204265840U CN 204265840 U CN204265840 U CN 204265840U CN 201420674496 U CN201420674496 U CN 201420674496U CN 204265840 U CN204265840 U CN 204265840U
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- paw
- pressure ring
- annular base
- fixed
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Abstract
The utility model discloses a kind of pressure ring of replaceable paw, this pressure ring comprises annular base and along several paws that annular base is circumferentially arranged, described paw is detachably fixed on annular base.The utility model pressure ring, by changing paw, can meet the user demand to unlike material, specification paw, and on annular base, arrange the mounting face exceeding required paw quantity, then select the quantity of paw to create condition flexibly for user.Adopt the utility model pressure ring, user only need prepare the paw of the annular base of several material and unlike material, specification, quantity, the pressure ring of the satisfied different service requirements of One's name is legion can be combined into, this array mode compared with prior art, both reduce production cost, turn improve the handiness of pressure ring application.
Description
Technical field
The utility model relates to a kind of pressure ring, especially a kind of pressure ring being used for fixing the replaceable paw of wafer in semiconductor devices.
Background technology
Common semiconductor devices, according to technique needs, is divided into etching apparatus, depositing device etc.Magnetron sputtering, is also called physical vapor deposition, is the method that in ic manufacturing process, depositing metal layers and associated materials extensively adopt.The application of silicon through hole (Through Silicon Via) technology is more and more extensive, and this technology greatly reduces the interconnect delay between chip, and is the gordian technique of three-dimensional integration realization.The application of PVD in TSV is mainly in silicon through hole inside deposition blocking layer and copper seed layer.
Current PVD technology mainly adopts electrostatic chuck (ESC) to support silicon chip.Comparatively large unlike, the film thickness deposited in silicon through hole with integrated circuit copper interconnecting technique, correspondingly, membrane stress also can be comparatively large, and the excessive electrostatic chuck that will cause of membrane stress cannot carry out electrostatic adhesion to wafer; And silicon through hole thin film deposition operation has more now in road packaging process, wafer is thinned rear generally needs and adopts glassy bond to support wafer, and electrostatic chuck cannot carry out electrostatic adhesion to substrate of glass equally.Therefore, in the magnetron sputtering of silicon through hole, need to adopt mechanical chuck and pressure ring (clamp ring) to be fixed wafer.
As shown in Figure 1, wherein, 1 is reaction cavity to typical DC magnetron sputtering device, and 2 is the chuck (BLT) of bearing wafer, and 3 for having the pressure ring of certainweight, and 4 is wafer, and 5 is target.During sputtering, the paw lower surface at pressure ring 3 inner edge place contacts with the upper surface of wafer 4 outer rim, and mechanically wafer 4 is pressed on chuck 2, DC power supply applies to be biased into target 5, makes it become negative pressure relative to the cavity of ground connection, and makes the argon gas discharging in reaction chamber and produce plasma body, the argon ion of positively charged is attracted to the target 5 of negative bias, when the energy of argon ion is enough high, atoms metal effusion target material surface can be made and be deposited on wafer 4, completing sputtering technology thus.
Pressure ring used in prior art is structure as a whole, once make, on it, namely the quantity of paw, specification, material are determined.When the specification of required paw, quantity or material are different, can only process the pressure ring with corresponding paw, for this reason, people will prepare the pressure ring of One's name is legion usually, needed for producing.And increasing along with pressure ring quantity, not only greatly increase production cost, also cause waste of material.
Utility model content
For above-mentioned prior art Problems existing, the purpose of this utility model is the pressure ring providing a kind of replaceable paw.
For achieving the above object, several paws that the utility model pressure ring comprises annular base and is circumferentially arranged along annular base, described paw is removably fixed on annular base.
Further, described paw is fixed on described annular base by screw is dismountable, and the upper surface flush of the upper surface of described screw and described paw or the upper surface a little less than described paw.
Further, the upper surface of described annular base inner edge is paw mounting face, and described paw is fixed on described mounting face by described screw.
Further, the upper surface of described annular base inner edge is circumferentially provided with several mounting grooves, and described paw embeds described mounting groove, and described paw is fixed in described mounting groove by described screw.
Further, each described paw is installed fixing by two screws.
Further, the quantity of described mounting groove is no less than the quantity of the required described paw installed.
Further, several paws described are along the evenly arrangement of annular base circumference.
Further, the quantity of described paw is no less than 12.
Further, described annular base and described paw are made up of metallic substance, and described metallic substance comprises stainless steel, copper, copper alloy, titanium and its alloys.
Further, described annular base and described paw are made up of non-metallic material, and described non-metallic material comprise pottery and quartz.
The utility model pressure ring, by dismountable installation fixing press claw, arbitrarily can change paw, can meet the user demand to unlike material, specification paw, and select the quantity of paw to create condition flexibly for user.Adopt the utility model pressure ring, user only need prepare the paw of the annular base of several material and unlike material, specification, quantity, the pressure ring of the satisfied different service requirements of One's name is legion can be combined into, compared with prior art, this array mode both reduced production cost, turn improved the handiness of pressure ring application.
Accompanying drawing explanation
Fig. 1 is existing DC magnetron sputtering device sectional structure schematic diagram;
Fig. 2 is existing pressure ring sectional structure schematic diagram;
Fig. 3 is the utility model pressure ring schematic top plan view;
Fig. 4 is annular base schematic top plan view shown in sequence number in Fig. 3 31;
Fig. 5 a is paw schematic top plan view shown in sequence number in Fig. 3 32;
Fig. 5 b is B-B view in Fig. 5 a;
Fig. 6 is A-A view in Fig. 3.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described.
The utility model pressure ring is for being fixed on bracing or strutting arrangement by work piece, and several paws that this pressure ring comprises annular base and is circumferentially arranged along annular base, several paws are dismountable to be fixed on annular base.Preferably, several paws can be fixed on described annular base by screw is dismountable.In order to avoid causing the bad phenomenon such as sparking in technological process, the upper surface of screw should with the upper surface flush of described paw or the upper surface a little less than described paw.
Fig. 3-Fig. 6 is the preferred embodiment of the utility model pressure ring.As shown in FIG., pressure ring comprises annular base 31 and paw 32, and annular base 31 upper surface circumference is evenly equipped with multiple mounting groove 33, and paw 32 is fixed in each mounting groove 33 by two screws 34.With the radial direction of annular base 31 for fore-and-aft direction, by making the side, two, left and right of paw 32 and matching with the corresponding sidewall on mounting groove 33 respectively away from the outer side at annular base 31 center, and paw 32 is accurately located along the circumference of annular base 31 and radial direction.Now, by " setting-in " in mounting groove 33, therefore, also only paw 32 can be fixed with a screw 34 because match with 3 sidewalls of mounting groove 33 in 3 sides of paw 32.
In the present embodiment, annular base 31 upper surface is provided with 12 mounting grooves, preferably, is equipped with paw 32 in 12 mounting grooves.Certainly, user also can select the paw 32 of installation 2, the desired numbers such as 3,4,6,8 as required.Or annular base 31 can also be arranged more mounting groove 33, with the needs of satisfied installation greater amt paw 32.Preferably, several paws along the evenly arrangement of annular base circumference, thus can be more stable work piece is fixed on bracing or strutting arrangement.
Except quantity, be fixed on annular base because paw 32 is dismountable, user also can change the paw 32 of required material and specification as required easily.
In the present embodiment, annular base 31 lower surface also have other structures, therefore, mounting groove 33 is arranged on the upper surface of annular base 31, in actual use, also can mounting groove 33 is arranged on the lower surface of annular base 31, now it should be noted that, if still use screw to install fixing press claw 32, then screw should not give prominence to the upper surface of pressure ring, in order to avoid cause the bad phenomenon such as sparking in technological process.
Certainly, if the size of pressure ring is compact, the radial dimension of annular base 31 suitably can also be strengthened, for mounting groove 33 abdicates space.
As required, annular base 31 and paw 32 can adopt metal material processing, also can adopt process for un-metal material, and metallic substance can be stainless steel, copper, copper alloy, titanium or titanium alloy, and non-metallic material can be then potteries or quartzy.Certainly, as required, screw 34 can be made up of these metallic substance or process for un-metal material equally.
In addition, in addition to the above described embodiments, annular base 31 also only can arrange mounting face to install paw 32, when just installing, need spended time to position paw 32.Certainly, mounting face then both can be arranged on the upper surface of annular base 31, also can be arranged on the lower surface of annular base 31.But mounting face is preferably close to the radial inner edge of annular base 31 and arranges as above-described embodiment.
Be understandable that, the illustrative embodiments that above embodiment is only used to principle of the present utility model is described and adopts, but the utility model is not limited thereto.For those skilled in the art, when not departing from principle of the present utility model and essence, can make various modification and improvement, these modification and improvement are also considered as protection domain of the present utility model.
Claims (10)
1. a pressure ring, for work piece is fixed on bracing or strutting arrangement, is characterized in that, several paws that described pressure ring comprises annular base and is circumferentially arranged along annular base, and described paw is dismountable to be fixed on annular base.
2. pressure ring as claimed in claim 1, it is characterized in that, described paw is fixed on described annular base by screw is dismountable, and the upper surface flush of the upper surface of described screw and described paw or the upper surface a little less than described paw.
3. pressure ring as claimed in claim 2, it is characterized in that, the upper surface of described annular base inner edge is paw mounting face, and described paw is fixed on described mounting face by described screw.
4. pressure ring as claimed in claim 2, it is characterized in that, the upper surface of described annular base inner edge is circumferentially provided with several mounting grooves, and described paw embeds described mounting groove, and described paw is fixed in described mounting groove by described screw.
5. pressure ring as claimed in claim 2, is characterized in that, each described paw is installed fixing by two screws.
6. pressure ring as claimed in claim 4, is characterized in that, the quantity of described mounting groove is no less than the quantity of the required described paw installed.
7. pressure ring as claimed in claim 1, is characterized in that, several paws described are along the evenly arrangement of annular base circumference.
8. pressure ring as claimed in claim 1, it is characterized in that, the quantity of described paw is no less than 12.
9. pressure ring as claimed in claim 1, it is characterized in that, described annular base and described paw are made up of metallic substance, and described metallic substance is stainless steel, copper, copper alloy, titanium or titanium alloy.
10. pressure ring as claimed in claim 1, it is characterized in that, described annular base and described paw are made up of non-metallic material, and described non-metallic material are pottery or quartzy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420674496.6U CN204265840U (en) | 2014-11-06 | 2014-11-06 | A kind of pressure ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420674496.6U CN204265840U (en) | 2014-11-06 | 2014-11-06 | A kind of pressure ring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204265840U true CN204265840U (en) | 2015-04-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420674496.6U Active CN204265840U (en) | 2014-11-06 | 2014-11-06 | A kind of pressure ring |
Country Status (1)
| Country | Link |
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| CN (1) | CN204265840U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106298621A (en) * | 2015-05-28 | 2017-01-04 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Mechanical chuck and semiconductor processing equipment |
| CN106558522A (en) * | 2015-09-25 | 2017-04-05 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Chuck and bogey |
| CN108796466A (en) * | 2017-04-26 | 2018-11-13 | 北京北方华创微电子装备有限公司 | A kind of mechanical chuck and semiconductor processing equipment |
| CN109590929A (en) * | 2018-12-21 | 2019-04-09 | 苏州华英光电仪器有限公司 | A kind of coating of lenses fixture |
-
2014
- 2014-11-06 CN CN201420674496.6U patent/CN204265840U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106298621A (en) * | 2015-05-28 | 2017-01-04 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Mechanical chuck and semiconductor processing equipment |
| CN106558522A (en) * | 2015-09-25 | 2017-04-05 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Chuck and bogey |
| CN108796466A (en) * | 2017-04-26 | 2018-11-13 | 北京北方华创微电子装备有限公司 | A kind of mechanical chuck and semiconductor processing equipment |
| CN108796466B (en) * | 2017-04-26 | 2020-06-19 | 北京北方华创微电子装备有限公司 | Mechanical chuck and semiconductor processing equipment |
| CN109590929A (en) * | 2018-12-21 | 2019-04-09 | 苏州华英光电仪器有限公司 | A kind of coating of lenses fixture |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 100176 Beijing economic and Technological Development Zone, Beijing, Wenchang Road, No. 8, No. Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100176 No. 8, Wenchang Avenue, Daxing District economic and Technological Development Zone, Beijing Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |