CN204257682U - A kind of sapphire pss sheet thunder etching system - Google Patents
A kind of sapphire pss sheet thunder etching system Download PDFInfo
- Publication number
- CN204257682U CN204257682U CN201420737237.3U CN201420737237U CN204257682U CN 204257682 U CN204257682 U CN 204257682U CN 201420737237 U CN201420737237 U CN 201420737237U CN 204257682 U CN204257682 U CN 204257682U
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- Prior art keywords
- thunder
- laser
- etching system
- keji
- lei
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- Expired - Fee Related
Links
- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 22
- 239000010980 sapphire Substances 0.000 title claims abstract description 22
- 238000005530 etching Methods 0.000 title claims abstract description 21
- 239000000428 dust Substances 0.000 claims abstract description 16
- 238000009499 grossing Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 239000011248 coating agent Substances 0.000 abstract description 4
- 238000000576 coating method Methods 0.000 abstract description 4
- 239000000758 substrate Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000013078 crystal Chemical group 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000010330 laser marking Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Laser Beam Processing (AREA)
Abstract
The utility model discloses a kind of sapphire pss sheet thunder etching system, described thunder etching system comprises: Lei Keji and chip, and described Lei Keji comprises: positioning seat, Focussing device, laser laser head, operation post, chip placement platform, computer screen, main frame, ON/OFF key, laser switch, dust shedder, pedal and terrace.System described in the utility model its carve with thunder and replace original mode of production, eliminate coating, exposure, develop and the technique such as etching, while technique is simplified in realization, also save the input of a large amount of board and personnel, and then saved cost.Sapphire pss sheet simultaneously must carry out thunder quarter in dust free room, carries out thunder quarter, realizing dustless production, ensure that the cleannes of product, improve the performance of product, greatly improve the competitiveness of product in market in dust free room.
Description
Technical field
The utility model relates to a kind of thunder and carves, specifically a kind of sapphire pss sheet thunder etching system.
Background technology
The sapphire aluminium oxide that consists of is combined with covalent bond pattern by three oxygen atoms and two aluminium atoms, crystal structure is hexagonal lattice structure, it has good thermal stability and dielectric property, and its chemical inertness is strong, translucidus can be good, tool has good wearability, and it is a kind of multi-functional oxide crystal integrating excellent optical performance, physical property, mechanical performance and chemical property.
Sapphire purposes can be found out widely, such as: the screens such as mobile phone, computer, wrist-watch or protection panel, wherein a most important purposes is exactly the first-selected substrate slice material as nitride based LED device light emission diodes from above-mentioned characteristic.In recent years, pass through semiconductor processes, on a sapphire substrate manufacturing cycle arrangement figure or carry out the irregular alligatoring of substrate surface, receive much concern with the research of photoelectric properties of the epitaxial loayer crystal mass and device thereof that improve the nitride material grown thereon and the popularization of the technology corresponding with Sapphire Substrate treatment process and product.
Sapphire Substrate is being carried out in the semiconductor processes of Surface Machining, need through making the processing steps such as coating, exposure, development and etching, because its quantities is larger, in above-mentioned each step, all need corresponding board, personnel could realize, and in the process of operation, some can be caused to damage to chip unavoidably, will the human and material resources of at substantial and financial resources, thus we should seek a kind of better solution.
Utility model content
Utility model object: the purpose of this utility model is to solve the deficiencies in the prior art, provides a kind of sapphire pss sheet thunder etching system.
Technical scheme: in order to realize above object, sapphire pss sheet thunder etching system described in the utility model, described thunder etching system comprises: Lei Keji and chip, described Lei Keji comprises: positioning seat, Focussing device, laser laser head, operation post, chip placement platform, computer screen, main frame, ON/OFF key, laser switch, dust shedder, pedal and terrace, the top of positioning seat is located at by described Focussing device, described laser laser head is located at the left side of positioning seat, described operation post is located at the front of positioning seat, described chip placement platform is located at above operation post, described computer screen is located at the right of positioning seat, described main frame is located at the below of operation post, described ON/OFF key and laser switch are all located on operation post platen below, the side of Lei Keji is located at by described dust shedder, the front lower place of Lei Keji is located at by described pedal.Adopt thunder to carve in the utility model and replace original pss slice processing method, in the whole course of processing, eliminate the steps such as original coating, exposure, development and etching, whole production process is simplified.
Described positioning seat is inverted T-shaped, and it comprises base and column, and described base is fixed on Lei Keji, and described base and column are one-body molded, and described stem height can regulate.Facilitate other equipment on board to put, whole operating desk is put in order.
Described chip placement platform is divided into two inch chip placement platforms and four inch chip placement platforms, realizes a many specification of machine and produces, can save the machine cost of writing.
Described thunder is carved machine and is applicable in dust free room, ensure that whole thunder carves the cleannes of process, allows it realize dustless production.
The front of described chip is burnishing surface, surface smoothing; The back side is cloudy surface, and surface is rough-shape.
Beneficial effect: sapphire pss sheet thunder etching system described in the utility model, has the following advantages:
1, sapphire pss sheet thunder etching system described in the utility model, it is carved with thunder and replaces original mode of production, eliminate the techniques such as coating, exposure, development and etching, while realizing simplifying technique, also save the input of a large amount of board and personnel, and then serve as the cost-saving effect of company.
2, sapphire pss sheet described in the utility model must carry out thunder quarter, realizing dustless production, ensure that the cleannes of product, improve the performance of product, greatly improve the competitiveness of product in market in dust free room.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the structural representation of " chip placement platform " in the utility model.
1-thunder carves machine, 2-chip, 3-positioning seat, 31-reservation, 32-column, 4-Focussing device, 5-laser laser head, 6-operation post, 7-chip placement platform, 8-computer screen, 9-main frame, 10-ON/OFF key, 11-laser switch, 12-dust shedder, 13-pedal, 14-terrace.
Embodiment
Below in conjunction with the drawings and specific embodiments, illustrate the utility model further, these embodiments should be understood and be only not used in restriction scope of the present utility model for illustration of the utility model, after having read the utility model, the amendment of those skilled in the art to the various equivalent form of value of the present utility model has all fallen within the application's claims limited range.
Embodiment
A kind of sapphire pss sheet thunder etching system as shown in the figure, comprise: thunder carves machine 1 and chip 2, described thunder is carved machine 1 and is comprised: positioning seat 3, Focussing device 4, laser laser head 5, operation post 6, chip placement platform 7, computer screen 8, main frame 9, ON/OFF key 10, laser switch 11, dust shedder 12, pedal 13 and terrace 14, wherein said positioning seat 3 positioning seat is inverted T-shaped, comprises base 31 and column 32.
Above-mentioned each parts relationship is as follows:
The top of positioning seat 3 is located at by described Focussing device 4, described laser laser head 5 is located at the left side of positioning seat 3, described operation post 6 is located at the front of terrace 14, described chip placement platform 7 is located at above operation post 6, described computer screen 8 is located at the right of positioning seat 3, described main frame 9 is located at the below of operation post 6, described ON/OFF key 10 and laser switch 11 are all located on operation post 6 platen below, the side that thunder carves machine 1 is located at by described dust shedder 12, and the front lower place that thunder carves machine 1 is located at by described pedal 13.
Described positioning seat 3 it comprise base 31 and column 32, described base 31 is fixed on thunder to be carved on machine 1, and described base 31 and column 32 are one-body molded, and described column 32 has controllability.Facilitate other equipment on board to put, whole operating desk is put in order.
Described chip placement platform 7 is divided into two inch chip placement platforms and four inch chip placement platforms, realizes a many specification of machine and produces, can save the machine cost of writing.
Described thunder is carved machine 1 and is applicable in dust free room, ensure that whole thunder carves the cleannes of process, allows it realize dustless production.
The front of described chip 2 is burnishing surface, surface smoothing; The back side is cloudy surface, and some is coarse on surface.
Described a kind of sapphire pss sheet thunder etching system, the specific works step of this system is as follows:
A, the front preparation of operation first entering thunder quarter;
Gloves cleanliness factor must be confirmed, if there are the dirty gloves that need more renew before a, operation;
Whether b, every sheet chip 2 must really all towards U-bar, if put back planar condition, must be chosen this sheet and place back original position by just facing U-bar in front;
C, get a slice catch and carry out examination and beat, confirm that thunder is carved code and whether had fuzzy or do not see the situation of Chu; If have fuzzy or unclear situation, then Suspend Job, wait for and start operation again after 10 minutes, if also have same condition, notify engineering unit.
After d, first have printed, must look for the second people confirm thunder carve code whether correct, whether print position offsets, just carrying on the back carve printing surface whether correct, print whether have fuzzy or do not know situation, collapse angle, laser breaks or fragmentation situation.
B, then confirm that whether supplied materials quantity is correct, if sheet number has problem, must notify a production processed in units, simultaneously the every sheet of full inspection, confirmation chip front side is towards the direction of the 25th;
C, press ON/OFF key, double-click the HomePage on computer screen, carry out system and to transfer items and thunder carves code inquiry;
D, chip to be put on corresponding chip placement platform, and they are alignd with the anchor point above operation post, position placement;
E, utilize the mapping software in computer mark thunder on chip carve needed for the position got ready;
F, startup laser switch, carry out focus adjustment to the Focussing device on Lei Keji and adjust laser frequency and the travel speed that thunder carves machine, controlling the degree of depth and the uniformity of its laser;
G, step on pedal and carry out laser marking by laser laser head;
H, while laser, open dust shedder the dust that laser produces is sucked totally;
I, treat its laser after, use Aqueous cleaning liquid collocation pure water to carry out Supersonic and clean.
Claims (5)
1. a sapphire pss sheet thunder etching system, it is characterized in that: comprising: Lei Keji (1) and chip (2), described Lei Keji (1) comprising: positioning seat (3), Focussing device (4), laser laser head (5), operation post (6), chip placement platform (7), computer screen (8), main frame (9), ON/OFF key (10), laser switch (11), dust shedder (12), pedal (13) and terrace (14), described Focussing device (4) is located at the top of positioning seat (3), described laser laser head (5) is located at the left side of positioning seat (3), described operation post (6) is located at the front of terrace (14), described chip placement platform (7) is located at above operation post (6), described computer screen (8) is located at the right of positioning seat (3), described main frame (9) is located at the below of operation post (6), described ON/OFF key (10) and laser switch (11) are all located on operation post (6) platen below, described dust shedder (12) is located at the side of Lei Keji (1), the front lower place of Lei Keji (1) is located at by described pedal (13).
2. a kind of sapphire pss sheet thunder etching system according to claim 1, it is characterized in that: described positioning seat (3) is inverted T-shaped, it comprises base (31) and column (32), described base (31) is fixed on Lei Keji (1), described base (31) and column (32) are one-body molded, and described column (32) height can regulate.
3. a kind of sapphire pss sheet thunder etching system according to claim 1, is characterized in that: described chip placement platform (7) is divided into two inch chip placement platforms and four inch chip placement platforms.
4. a kind of sapphire pss sheet thunder etching system according to claim 1, is characterized in that: described thunder is carved machine (1) and is applicable in dust free room.
5. a kind of sapphire pss sheet thunder etching system according to claim 1, is characterized in that: the front of described chip (2) is burnishing surface, surface smoothing; The back side is cloudy surface, and surface is rough-shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420737237.3U CN204257682U (en) | 2014-12-01 | 2014-12-01 | A kind of sapphire pss sheet thunder etching system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420737237.3U CN204257682U (en) | 2014-12-01 | 2014-12-01 | A kind of sapphire pss sheet thunder etching system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204257682U true CN204257682U (en) | 2015-04-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420737237.3U Expired - Fee Related CN204257682U (en) | 2014-12-01 | 2014-12-01 | A kind of sapphire pss sheet thunder etching system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204257682U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105632973A (en) * | 2014-12-19 | 2016-06-01 | 南京京晶光电科技有限公司 | Sapphire pss sheet laser-etching system and processing method thereof |
-
2014
- 2014-12-01 CN CN201420737237.3U patent/CN204257682U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105632973A (en) * | 2014-12-19 | 2016-06-01 | 南京京晶光电科技有限公司 | Sapphire pss sheet laser-etching system and processing method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200511 Address after: 213300 No.8, Feiyue Road, Shanghuang science and Technology Innovation Park, Liyang City, Changzhou City, Jiangsu Province Patentee after: Jiangsu Jingjing Photoelectric Technology Co.,Ltd. Address before: 211599 Jiangsu city of Nanjing Province Economic and Technological Development Zone Heng Road No. 8 Room 306 branch base Patentee before: NANJING J-CRYSTAL PHOTOELECTRIC SCIENCE & TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150408 |