CN204237726U - Virahol purifying processing device - Google Patents
Virahol purifying processing device Download PDFInfo
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- CN204237726U CN204237726U CN201420620099.0U CN201420620099U CN204237726U CN 204237726 U CN204237726 U CN 204237726U CN 201420620099 U CN201420620099 U CN 201420620099U CN 204237726 U CN204237726 U CN 204237726U
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- virahol
- filter core
- tank
- processing device
- purification
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Abstract
The utility model relates to a kind of Virahol purifying processing device, it is characterized in that it comprises and comprise Virahol purification tank (1), adsorption of metal ions device (2), the first filter core (3) and the second filter core (4) from front to back successively, described Virahol purification tank (1) inside is provided with molecular sieve (1.1), the opening for feed of described Virahol purification tank (1) connects Virahol storage tank (5), the top of described Virahol purification tank (1) is connected with a uncontaminated air capstan (6), and the rear of described second filter core (4) connects purification Virahol tank (7).The utility model Virahol purifying processing device can remove impurity, improves Virahol purity, has and make Virahol Quality advance, save energy, the advantage that cost is low.
Description
Technical field
The utility model relates to a kind of Virahol purifying processing device.
Background technology
Clean Virahol may be used for the cleaning of semiconductor integrated circuit, and generally containing various impurity in then conventional Virahol, therefore seek one and can remove impurity, the Virahol purifying processing device improving Virahol purity is particularly important.
Summary of the invention
The purpose of this utility model is to overcome above-mentioned deficiency, provides one to remove impurity, improves the Virahol purifying processing device of Virahol purity.
The purpose of this utility model is achieved in that
A kind of Virahol purifying processing device, it comprises and comprises Virahol purification tank, adsorption of metal ions device, the first filter core and the second filter core from front to back successively, described Virahol purification tank inside is provided with molecular sieve, the opening for feed of described Virahol purification tank connects Virahol storage tank, the top of described Virahol purification tank is connected with a uncontaminated air capstan, and the rear of described second filter core connects purification Virahol tank.
Preferred as one, the filter pore size of described first filter core is 0.2 μm, and the filter pore size of described second filter core is 0.1 μm.
Preferred as one, described uncontaminated air capstan is drawn by oilless air compressor, uncontaminated air capstan is provided with an air filter.
Compared with prior art, the beneficial effects of the utility model are:
The utility model Virahol purifying processing device can remove impurity, improves Virahol purity, has and make Virahol Quality advance, save energy, the advantage that cost is low.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model Virahol purifying processing device.
Wherein:
Virahol purification tank 1, adsorption of metal ions device 2, first filter core 3, second filter core 4, Virahol storage tank 5, uncontaminated air capstan 6, purification Virahol tank 7, first pipeline 8, second pipe 9, the 3rd pipeline 10, the 4th pipeline 11, the 5th pipeline 12, oilless air compressor 13, air filter 14.
Embodiment
See Fig. 1, a kind of Virahol purifying processing device that the utility model relates to, it comprises and comprises Virahol purification tank 1 from front to back successively, adsorption of metal ions device 2, first filter core 3 and the second filter core 4, described Virahol purification tank 1 inside is provided with molecular sieve 1.1, the opening for feed of described Virahol purification tank 1 connects Virahol storage tank 5, the top of described Virahol purification tank 1 is connected with a uncontaminated air capstan 6, the filter pore size of described first filter core 3 is 0.2 μm, the filter pore size of described second filter core 4 is 0.1 μm, the rear of described second filter core 4 connects purification Virahol tank 7.
Wherein: between the discharge port of Virahol storage tank 5 and the opening for feed of Virahol purification tank 1, be connected with the first pipeline 8, second pipe 9 is connected with between the discharge port of Virahol purification tank 1 and the opening for feed of adsorption of metal ions device 2, the 3rd pipeline 10 is connected with between the discharge port of adsorption of metal ions device 2 and the opening for feed of the first filter core 3, be connected with between the discharge port of the first filter core 3 and the opening for feed of the second filter core 4 between the discharge port of the 4th pipeline 11, second filter core 4 and the opening for feed of purification Virahol tank 7 and be connected with the 5th pipeline 12.
Uncontaminated air capstan 6 is drawn by oilless air compressor 13, uncontaminated air capstan 6 is provided with an air filter 14.
Principle of work:
Uncontaminated air enters Virahol purification tank from uncontaminated air capstan and Virahol is carried out pressure treatment, Virahol carries out first time through molecular sieve and filters, then enter adsorption of metal ions device and carry out adsorption of metal ions, then the first filter core and the second filter core is this time entered, carry out coming of the impurity of respective aperture size respectively, finally generate clean Virahol and enter purification Virahol tank, may be used for the cleaning of semiconductor integrated circuit.
Claims (3)
1. a Virahol purifying processing device, it is characterized in that it comprises and comprise Virahol purification tank (1), adsorption of metal ions device (2), the first filter core (3) and the second filter core (4) from front to back successively, described Virahol purification tank (1) inside is provided with molecular sieve (1.1), the opening for feed of described Virahol purification tank (1) connects Virahol storage tank (5), the top of described Virahol purification tank (1) is connected with a uncontaminated air capstan (6), and the rear of described second filter core (4) connects purification Virahol tank (7).
2. a kind of Virahol purifying processing device according to claim 1, it is characterized in that the filter pore size of described first filter core (3) is 0.2 μm, the filter pore size of described second filter core (4) is 0.1 μm.
3. a kind of Virahol purifying processing device according to claim 1 and 2, is characterized in that described uncontaminated air capstan (6) is drawn by oilless air compressor (13), uncontaminated air capstan (6) is provided with an air filter (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420620099.0U CN204237726U (en) | 2014-10-25 | 2014-10-25 | Virahol purifying processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420620099.0U CN204237726U (en) | 2014-10-25 | 2014-10-25 | Virahol purifying processing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204237726U true CN204237726U (en) | 2015-04-01 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420620099.0U Active CN204237726U (en) | 2014-10-25 | 2014-10-25 | Virahol purifying processing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204237726U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111957226A (en) * | 2020-07-23 | 2020-11-20 | 江阴市化学试剂厂有限公司 | Production line for silicon dioxide corrosion pre-wetting impregnating solution and production method thereof |
| CN112349440A (en) * | 2020-11-01 | 2021-02-09 | 百色学院 | Liquid metal purification device and application method thereof |
-
2014
- 2014-10-25 CN CN201420620099.0U patent/CN204237726U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111957226A (en) * | 2020-07-23 | 2020-11-20 | 江阴市化学试剂厂有限公司 | Production line for silicon dioxide corrosion pre-wetting impregnating solution and production method thereof |
| CN112349440A (en) * | 2020-11-01 | 2021-02-09 | 百色学院 | Liquid metal purification device and application method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |