CN204233909U - A kind of exhaust treatment system for MOCVD device - Google Patents
A kind of exhaust treatment system for MOCVD device Download PDFInfo
- Publication number
- CN204233909U CN204233909U CN201420660937.7U CN201420660937U CN204233909U CN 204233909 U CN204233909 U CN 204233909U CN 201420660937 U CN201420660937 U CN 201420660937U CN 204233909 U CN204233909 U CN 204233909U
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- Prior art keywords
- filter
- treatment system
- exhaust treatment
- mocvd device
- filter core
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- 238000002488 metal-organic chemical vapour deposition Methods 0.000 title claims abstract description 27
- 238000001914 filtration Methods 0.000 claims abstract description 20
- 230000001105 regulatory effect Effects 0.000 claims description 4
- 239000004809 Teflon Substances 0.000 claims description 3
- 229920006362 Teflon® Polymers 0.000 claims description 3
- 239000003822 epoxy resin Substances 0.000 claims description 3
- 239000003365 glass fiber Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229920000647 polyepoxide Polymers 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 239000011162 core material Substances 0.000 claims 8
- 239000007789 gas Substances 0.000 description 21
- 238000000034 method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 230000009977 dual effect Effects 0.000 description 3
- 238000000407 epitaxy Methods 0.000 description 3
- 239000002912 waste gas Substances 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000002360 explosive Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
A kind of exhaust treatment system for MOCVD device, comprise filter, vavuum pump, exhaust gas treating device, described filter is made up of filter and bypass line, described bypass line two ends are connected with gas outlet respectively at filtering air inlet, described bypass line, filtering air inlet end and gas outlet end are all provided with regulation and control valve member, in order to control the circulation path of air-flow in MOCVD device chamber; Described filter also comprises shell and filter core, and described shell is made up of upper cover and lower case, and described upper cover and lower case are by seal seal combination.This filtration system efficiently solves the stability problem of safety problem when filter replacement and filter leak hunting and board.
Description
Technical field
The utility model relates generally to filter field, and particularly one is used for the exhaust particulate Filtration Filtration device in MOCVD device extension (Epitaxy) processing procedure.
Background technology
MOCVD device can form a large amount of reaction residue in the environment at high-temperature low-pressure in extension (Epitaxy) growth course, and this residue is solid particle that is inflammable, explosive, highly corrosive.It is short that the particulate filter generally used in current industry there will be service life, safeguards frequent.Especially reaction chamber and tail gas pipeline is easily caused to enter air and affect answering a pager's call or causing pipeline to burn or explode of board when replacing filter.Change in leaking hunting after filter easily cause that MOCVD system is poured in down a chimney, airborne dust etc. is abnormal.
At present, gas filtration core generally adopt single only, twin-stage or multistage filtering, for realizing tail gas filtering, but there is following defect in this design:
(1) during replacing filter, system can expose air to the open air, and the air system of entering is unfavorable for the fast fast reset machine of board and there is serious potential safety hazard (the dust height that air and MOCVD react is inflammable, explosive);
(2) filter core mainly adopts general seal cover board to compress, and easily in use leaks, and is unfavorable for the stable of system pressure and easily causes the choke valve of rear end (dish valve) and processing procedure Pump(pump) badly damaged;
(3) filter is installed on reative cell (reactor) lower end, and in the process of leaking hunting after replacing, as occurred, system has leakage or human users's error, is easy to generation systems and pours in down a chimney or reative cell airborne dust, have a strong impact on the stability of board;
(4) filter of twin-stage or multilevel design, sealing surface is more, easily leaks, and install, safeguard numerous and diverse.
Summary of the invention
In order to overcome the deficiency in above existing conventional exhaust Processing System Design, the present invention aims to provide a kind of exhaust treatment system for MOCVD device, effectively can filter a large amount of solid particles be mingled with in tail gas in extension (Epitaxy) processing procedure, filter area, compared with the obvious increase of traditional design, effectively reduces use cost; And by system Pre-handoff to bypass line, can effectively ensure the operation of security and MOCVD board long-term stability when changing filter.In addition, filter core adopts and the threaded rod of height can be regulated arbitrarily to fix, and ensures that the filter core of each length well can be fixed on filter interior.
Technical solutions of the utility model are, a kind of exhaust treatment system for MOCVD device, comprise filter, vavuum pump, exhaust gas treating device, it is characterized in that: described filter is made up of filter and bypass line, described bypass line two ends are connected with gas outlet respectively at filtering air inlet, described bypass line, filtering air inlet end and gas outlet end are all provided with regulation and control valve member, in order to control the circulation path of air-flow in MOCVD device chamber.
Preferably, described filter also comprises shell and filter core, and described shell is made up of upper cover and lower case, and described upper cover and lower case are by seal seal combination.
Preferably, described filter inlet end and outlet side all arrange the mouth that leaks hunting, and can be connected when filter service with leak detector, in order to detect filter.
Preferably, described filter housing all offer 2 to or 2 to above air inlet/outlet, be placed in inlet end and outlet side sidewall respectively.
Preferably, described filter core is that monotubular list props up structure, and material is Teflon, glass fibre, stainless steel metal and epoxy resin.
Preferably, described filter core fold number N is: 45≤N<70 rolls over, and single folding width L is: 5≤L<7cm, height H is: 30≤H<70cm.
Preferably, described filter core adopts and the threaded rod of height can be regulated arbitrarily to fix.
Preferably, described filter core upper surface is fixed by the cover plate of surface relief structure, and wherein said protuberance fixes filter core inner surface, and recess fixes filter core outer surface; Effectively improve intake efficiency, and the dual fixing generation can avoiding the situations such as filter core distortion, displacement in use procedure, and filter core upper and lower part adopts Double seal ring (Double-oring) to seal.
In one embodiment, described filter air inlet end is connected with MOCVD device chamber rear end, and described gas outlet end is connected with vavuum pump front end.
Described filter air inlet end is connected with vavuum pump rear end in another embodiment, and described gas outlet end is connected with exhaust gas treating device front end.
The utility model at least has following beneficial effect: filter comprises filter and bypass line, make the air-flow flowed out from chamber both can flow to last exhaust gas treating device by filter, also exhaust gas treating device can be flowed to by bypass line, thus avoid chamber end when filter is safeguarded and be exposed in air, air enters chamber, causes and safeguards that rear chamber's environment is difficult to the situation recovered; And vavuum pump need not carry out the action that rests-restart, save maintenance time.
In addition filter housing adopts upper and lower two halves formula to design, easy disassembly and change its internal core, and filter core adopts the dual fixing generation can avoiding the situations such as filter core distortion, displacement in use procedure of concavo-convex cover plate; Fixed bar adopts single only height-adjustable threaded rod, can realize the filter core demand of differing heights; And adopting material preparation stable under soda acid and hot conditions, long service life, pressure change is little, and recoverable, solves MOCVD board conventional granulates filter short for service life, the problem of reaction chamber pressure difference instability; This filtration system also solves the stability problem of safety problem when filter replacement and filter leak hunting and board.
Accompanying drawing explanation
Fig. 1 is the flowage structure schematic diagram of the exhaust treatment system of the utility model embodiment one.
Fig. 2 is filter II schematic cross-section.
Fig. 3 is filter core schematic diagram in filter.
Fig. 4 is filter core securing cover plate inner surface schematic top plan view in filter.
Fig. 5 is filter core securing cover plate schematic cross-section in filter.
Fig. 6 is filter core many folds filter material scale diagrams in filter.
Fig. 7 is cartridge seal circle (Double o-ring) schematic diagram.
Fig. 8 is the flowage structure schematic diagram of the exhaust treatment system of the utility model embodiment two.
Element numbers explanation
I, reaction chamber; II, filter; III, vavuum pump; IV, exhaust gas treating device
1 entrance hand-operated valve;
2 entrance hand-operated valves;
3 cartridge seal cover plates;
31 cover inner surface recesses;
The 32 convex places of cover inner surface;
33 holes;
4 filters;
5 bypass lines;
6 bypass hand-operated valves;
7 outlet hand-operated valves;
8 outlet hand-operated valves;
9 leak hunting mouth;
10 filter core fixed bars;
11 filter cores;
12 filter seal;
13 leak hunting mouth;
14 sealing rings;
15 upper covers;
16 lower case.
Detailed description of the invention
Be described in further detail the utility model below in conjunction with accompanying drawing and concrete case study on implementation, relevant correlation technique content of the present utility model, feature and effect, can clearly present.
embodiment one
As shown in Fig. 1 to 7, in the utility model, filter II is installed between MOCVD chamber I and vavuum pump III, and its middle filtrator 4 air inlet 17 is all connected with chamber I rear end with one end of bypass line 5; Filter 4 gas outlet 18 is all connected with aspiration pump front end with the another port of bypass line 5, make the air-flow flowed out from chamber I both can flow to last exhaust gas treating device IV by filter 4, also exhaust gas treating device IV can be flowed to by bypass line 5, thus avoid chamber end when filter 4 is safeguarded and be exposed in air, air enters chamber, causes and safeguards that rear chamber's environment is difficult to the situation recovered; And vavuum pump need not carry out the action that rests-restart, save maintenance time.
Particularly, the waste gas comprising particle that chamber I end flows out aborning is on-state by entrance hand-operated valve 1 and 2(two valve) enter filter 4, during by filter core 11, particle is adsorbed by filter core 11 thus is separated with waste gas, waste gas streams after separation is through outlet hand-operated valve 7 and 8, discharge from filter outlet mouth 18, enter in vent gas treatment and be cleaned process further.And when filter reach maintenance period need safeguard time, by entrance hand-operated valve 1,2 and outlet hand-operated valve 7,8 close, open the hand-operated valve 6 of bypass line 5, now in chamber, air-flow flows into exhaust gas treating device via bypass line 5; In this process, owing to closing entrance hand-operated valve 1,2 and outlet hand-operated valve 7,8, thus avoid discarded object in filter 4 to leak in air, also avoid chamber end to be exposed in air, and as generation systems also avoided to pour in down a chimney when occurring that human users slips up or the abnormal conditions such as reative cell airborne dust; When filter 4 being installed on work system and leaking hunting after maintenance terminates, leak detecting device is connected to the mouth 9 and 13 that leaks hunting, and does not need the work stopping vavuum pump in leaking hunting.
Wherein, filter 4 comprises shell and filtration core part, and shell is made up of upper cover 15 and lower case 16, and upper cover 15 and lower case 16 are tightly connected by seal 12 and combine, and the preferred sealing flange of seal, wraps up filtration core in it; Shell offer 2 to or 2 to above air inlet/outlet 17,18, be placed in inlet end and outlet side sidewall respectively, when this filter is applied to different model MOCVD device, corresponding air inlet 17 and gas outlet 18 can be selected flexibly.
And filter core 11 props up structure for monotubular list, the Teflon of stable performance under acid, alkali and hot conditions, glass fibre, stainless steel metal and epoxy resin material is adopted to make, the pattern in many folds, fold number N is: 45≤N<70 rolls over, single folding width L is: 5≤L<7cm, and the height H of filter core is: 30≤H<70cm; Many folds filter core is fixed by threaded rod 10, filter core 11 height can be regulated as required, filter core 11 upper end has seal cover board 3 to fix, seal cover board 3 inner surface is concaveconvex structure (Fig. 4 is cover inner surface top view), protuberance 32 fixes filtration core inner ring, recess 31 fixes filtration core outer ring, and this is dual fixing effectively can improve filtration core in use to be out of shape the air-flow caused uneven, and affects the situation of filter efficiency; Hole 33 is for retaining thread bar 10; Filtration core upper and lower surface all has Double seal ring 14 to seal, and effectively ensure that the sealing property between filter core 11 and filter core holder, filter core securing cover plate.Sectional area can be expanded to the 2-3 of the branched filter core of conventional two-stage doubly by this kind of filter core, extends to intrinsic 2-3 service life doubly.
embodiment two
Referring to accompanying drawing 8, the difference of the present embodiment and embodiment one is: filter II is installed between vavuum pump III and exhaust gas treating device IV, and in chamber, airflow passes vavuum pump III enters filter II again, finally enters in exhaust gas treating device IV; Because filter II is away from chamber end, then when air-flow arrives filter II, its temperature reduces, and then reduces the consume of the parts such as filter core, extends the service life of filter body.
Should be understood that, above-mentioned specific embodiments is preferred embodiment of the present utility model, and scope of the present utility model is not limited to this example, and all any changes done according to the utility model, all belong within protection domain of the present utility model.
Claims (10)
1. the exhaust treatment system for MOCVD device, comprise filter, vavuum pump and exhaust gas treating device, it is characterized in that: described filter is made up of filter and bypass line, described bypass line two ends are connected with filtering air inlet and gas outlet respectively, described bypass line, filtering air inlet end and gas outlet end are provided with regulation and control valve member, in order to control the circulation path of air-flow in MOCVD device chamber.
2. a kind of exhaust treatment system for MOCVD device according to claim 1, it is characterized in that: described filter also comprises shell and filter core, described shell is made up of upper cover and lower case, and described upper cover and lower case are by seal seal combination.
3. a kind of exhaust treatment system for MOCVD device according to claim 1, it is characterized in that: described filtering air inlet end and gas outlet end all arrange the mouth that leaks hunting, can be connected with leak detector when described filter service, in order to detect filter.
4. a kind of exhaust treatment system for MOCVD device according to claim 2, is characterized in that: described filter housing all offers at least 2 pairs of air inlet/outlets, is placed in inlet end and outlet side sidewall respectively.
5. a kind of exhaust treatment system for MOCVD device according to claim 2, is characterized in that: described filter core is that monotubular list props up structure.
6. a kind of exhaust treatment system for MOCVD device according to claim 2, is characterized in that: described filter core material is Teflon, glass fibre, stainless steel metal or epoxy resin.
7. a kind of exhaust treatment system for MOCVD device according to claim 2, it is characterized in that: the fold number N of described filter core is: 45≤N<70 rolls over, single folding width L is: 5≤L<7cm, height H is: 30≤H<70cm.
8. a kind of exhaust treatment system for MOCVD device according to claim 2, is characterized in that: described filter core upper surface is fixed by the cover plate of surface relief structure, and wherein said protuberance fixes filter core inner surface, and recess fixes filter core outer surface.
9. a kind of exhaust treatment system for MOCVD device according to claim 2, is characterized in that: described filter core adopts and the threaded rod of height can be regulated arbitrarily to fix.
10. a kind of exhaust treatment system for MOCVD device according to claim 1, is characterized in that: described filter is placed in vavuum pump front end or rear end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420660937.7U CN204233909U (en) | 2014-11-07 | 2014-11-07 | A kind of exhaust treatment system for MOCVD device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420660937.7U CN204233909U (en) | 2014-11-07 | 2014-11-07 | A kind of exhaust treatment system for MOCVD device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204233909U true CN204233909U (en) | 2015-04-01 |
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ID=52763465
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420660937.7U Active CN204233909U (en) | 2014-11-07 | 2014-11-07 | A kind of exhaust treatment system for MOCVD device |
Country Status (1)
| Country | Link |
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| CN (1) | CN204233909U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105032076A (en) * | 2015-07-31 | 2015-11-11 | 晋江市晋美日用品有限公司 | Air inflow controllable waste gas treatment device |
| CN110172679A (en) * | 2019-05-24 | 2019-08-27 | 苏州新材料研究所有限公司 | A kind of MOCVD device with multistage filtering yttrium source bulky grain reactant mechanism |
| CN111359250A (en) * | 2020-03-30 | 2020-07-03 | 常州翊翔炭材科技有限公司 | Carbon/carbon composite material chemical vapor deposition high-temperature tail gas condensation filtering structure |
-
2014
- 2014-11-07 CN CN201420660937.7U patent/CN204233909U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105032076A (en) * | 2015-07-31 | 2015-11-11 | 晋江市晋美日用品有限公司 | Air inflow controllable waste gas treatment device |
| CN110172679A (en) * | 2019-05-24 | 2019-08-27 | 苏州新材料研究所有限公司 | A kind of MOCVD device with multistage filtering yttrium source bulky grain reactant mechanism |
| CN111359250A (en) * | 2020-03-30 | 2020-07-03 | 常州翊翔炭材科技有限公司 | Carbon/carbon composite material chemical vapor deposition high-temperature tail gas condensation filtering structure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20160912 Address after: 241000 Anhui city of Wuhu Province Economic and Technological Development Zone Dong Liang Road No. 8 Patentee after: Anhui three Gas Co. Ltd. Address before: 241000 Anhui city of Wuhu Province Economic and Technological Development Zone Dong Liang Road No. 8 Patentee before: Anhui San'an Optoelectronics Co., Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180411 Address after: 241000 Anhui city of Wuhu Province Economic and Technological Development Zone Dong Liang Road No. 8 Patentee after: Anhui San'an Optoelectronics Co., Ltd. Address before: 241000 Anhui city of Wuhu Province Economic and Technological Development Zone Dong Liang Road No. 8 Patentee before: Anhui three Gas Co. Ltd. |