CN204228130U - A kind of substrate position detection apparatus - Google Patents
A kind of substrate position detection apparatus Download PDFInfo
- Publication number
- CN204228130U CN204228130U CN201420712958.9U CN201420712958U CN204228130U CN 204228130 U CN204228130 U CN 204228130U CN 201420712958 U CN201420712958 U CN 201420712958U CN 204228130 U CN204228130 U CN 204228130U
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- fork
- substrate
- signal
- casing
- detection apparatus
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Abstract
A kind of substrate position detection apparatus described in the utility model, described device comprises: detect casing, fork and roller, one end of described fork is movably connected in described detection casing by rotating shaft, its other end connects described roller, described substrate motion drives fork to swing, and is provided with the signal detector of the wobble drive work by fork in described detection casing.Detection case body of the present utility model is positioned at ullage, its signal detector is arranged to detect in casing and is protected, substrate liquid level by time can promote fork, fork is offset, signal detector now can detect substrate arriving signal, knows that substrate arrives, when substrate by the location restore of later fork to reference position, signal detector can obtain substrate pass through after signal, can judge that substrate has been in by this signal and pass through state; Because detecting portion is not interposing at below liquid level, therefore there will not be fouling and survey phenomenon by mistake.
Description
Technical field
The utility model relates to display technique field, is specifically related to a kind of substrate position detection apparatus.
Background technology
Usually, in the process manufacturing liquid crystal panel or OLED, need to process substrate in reaction chamber, as cleaning or etching etc., when substrate is transferred into reaction chamber, need to detect the position of substrate, to judge whether substrate arrives assigned address.
Adopt in traditional cleaning or etching apparatus and wave inductor, it is positioned over below liquid level, after having substrate to walk, wobble heads can present horizontal level with substrate, like this, wave inductor and can present open circuit or closed circuit, and the signal detecting substrate current location is uploaded to host computer; This structural design there will be the phenomenon of not resilient state when having incrustation scale or other reasons, when not having substrate, waving inductor and also board can be caused to shut down by there being the information of substrate to be uploaded to host computer.
Utility model content
For this reason, technical problem to be solved in the utility model is placed in the caused incrustation scale of liquid and crystallisation problems for sensor.
For solving the problems of the technologies described above, the utility model provides a kind of substrate position detection apparatus, comprise: detect casing, fork and roller, described fork comprises the first end be movably connected on by rotating shaft in described detection casing, and the second end connected with the roller of substrate motion, be provided with the signal detector of the wobble drive work by fork in described detection casing.
Described signal detector is be arranged at the optical signal source in described detection casing, described optical signal source comprises optical signal launch end and light signal receiving end, when described fork is static between described optical signal launch end and described light signal receiving end, and block the light signal that described optical signal launch end launches to described light signal receiving end; The substrate detected drives described fork to offset, and described light signal receiving end receives the light signal that described optical signal launch end is launched.
The initial detecting position of described fork is vertical state.
Described optical signal source is the one in laser, ultraviolet light and LED light.
Described signal detector is the field signal source for launching field signal, and described detection casing is also provided with current signal detecting device; Described fork is provided with complete ring of conductor, and it is arranged in the magnetic field of launching in described field signal source, the current signal produced when described current signal detecting device is for detecting complete ring of conductor on described fork at cutting magnetic line.
Described roller is corrosion-resistant roller.
Described fork is Metallic rod or high molecular polymer bar.
End face and the side of described detection casing are surrounded by corrosion-resistant transparent shell, the sealed bottom layer sealing that its bottom surface is made up of retractable material, and described fork is through described sealed bottom layer.
The utility model has following beneficial effect relative to prior art:
A. detection case body provided by the utility model is positioned at ullage, its signal detector is arranged to detect in casing and is protected, substrate liquid level by time can promote fork, fork is offset, signal detector now can detect substrate arriving signal, can judge that substrate has been in pass through state by this signal; Because detecting portion is not interposing at below liquid level, therefore there will not be fouling and survey phenomenon by mistake.
B. due to detecting portion not with soda acid liquid comes into contact, not by the impact of environment, its stability is strong, and usable range is wide, also can be applicable to the common liq environment of non-acid & alkali liquid.
Accompanying drawing explanation
In order to make content of the present utility model be more likely to be clearly understood, below according to specific embodiment of the utility model also by reference to the accompanying drawings, the utility model is described in further detail, wherein
Figure 1A is the structural representation under detection substrate provided by the utility model is in arrival state;
Figure 1B is that detection substrate provided by the utility model is in by the structural representation under state;
Fig. 2 is the structural representation of a kind of pick-up unit provided by the utility model under detected state;
Fig. 3 is the layout stereographic map of detection casing in Fig. 2 and optical signal source;
Fig. 4 is the structural representation of another kind of pick-up unit provided by the utility model under detected state;
The stereographic map of the layout of the detection casing in Fig. 5 Fig. 4 and field signal source, current signal detecting device.
In figure: 1-detects casing, the corrosion-resistant transparent shell of 11-, 12-sealed bottom layer; 2-fork; 3-roller; 4-signal detector, 41-optical signal source, 411-optical signal launch end, 412-light signal receiving end, 42-field signal source, 43-current signal detecting device; 5-substrate; 6-liquid level; 7-rotating shaft; 8-magnetic field; 9-light signal.
Embodiment
For making the purpose of this utility model, technical scheme and advantage clearly, below in conjunction with accompanying drawing, the utility model embodiment is described in further detail.
The utility model provides a kind of substrate position detection apparatus, as shown in Figure 1A, comprise: detect casing 1, fork 2 and corrosion resistant roller 3, the first end of fork 2 is arranged at by rotating shaft 7 and detects in casing 1, its second end connects described roller 3, detect in casing 1 and be provided with signal detector 4, when described substrate 5 reaches, wear-resistant roller 3 can along with the mobile of substrate 5 rolls in the upper plane of substrate 5, thus drive fork 2 to swing, described in the wobble drive of described fork 2, signal detector 4 works, the position of substrate 5 is judged by the signal detected by signal detector 4.
Wherein, corrosion-resistant roller 3 belongs to lightweight roller, and wear-resistant roller 3 is arranged at substrate 5 edge without graphics field, namely near 7-10mm place, substrate 5 edge.Fork 2 is Metallic rod or high molecular polymer bar.
Can find out by Fig. 1, the end face of detection casing 1 wherein and side are surrounded by corrosion-resistant transparent shell 11, the sealed bottom layer 12 that its bottom surface is made up of retractable material seals, fork 2 is through sealed bottom layer 12, sealed bottom layer 12 links closely fork 2, and occurs along with the change of fork 2 position and change.
Embodiment 1
As shown in Figures 2 and 3, the signal detector 4 in detection casing 1 is wherein the optical signal sources such as laser, and optical signal source here can be the one in laser, ultraviolet light or LED light.Wherein the optical signal launch end 411 of optical signal source 41 and light signal receiving end 412 are all arranged at the both sides detecting casing 1, and form correlation structure.
A., before substrate 5 arrives, the light signal that optical signal launch end 411 sends is blocked by fork 2, light signal receiving end 412 no light perception signal;
B. when substrate 5 arrives, fork 2 moves on substrate 5 with roller 3, and the light signal 9 that optical signal launch end 411 sends is received by light signal receiving end 412, shows that substrate 5 arrives;
C., after substrate 5 past, fork 2 and roller 3 return to origin-location, and light signal receiving end 412 is no light perception signal again.
Wherein, light signal receiving end 412 receives light signal as substrate 5 arriving signal, and light signal receiving end 412 is again without the signal that light signal passes through as substrate 5.
Embodiment 2
As shown in Figure 3 and Figure 5, signal detector 4 is wherein for being arranged in described detection casing 1 for launching the field signal source of field signal, transmitting magnetic field, field signal source 8, wire composition closed-loop path is connected at the upper and lower side of metal fork 2, detect casing 1 and be provided with current signal detecting device 43, as the current signal detecting device 43 in Fig. 5 is arranged at the end face detecting casing 1.Complete ring of conductor on fork 2 is arranged in the magnetic field 8 of launching in field signal source, the current signal that current signal detecting device 43 produces when cutting magnetic line for detecting fork 2.
A., before substrate 5 arrives, metal fork 2 is static in magnetic field 8;
B. when substrate 5 arrives, metal fork 2 moves on substrate 5 with roller 3, and metal fork 2 cutting magnetic induction line, produces induction current in the closed circuit, generation current signal in current signal detecting device 43;
C., after substrate 5 past, metal fork 2 and roller 3 return to origin-location, metal fork 2 cutting magnetic induction line again, generation current signal.
First time in the current signal of two minor ticks as substrate 5 arriving signal, the signal that passes through as substrate 5 of second time.
Obviously, above-described embodiment is only for clearly example being described, and the restriction not to embodiment.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here exhaustive without the need to also giving all embodiments.And thus the apparent change of extending out or variation be still among protection domain of the present utility model.
Claims (8)
1. a substrate position detection apparatus, it is characterized in that, comprise: detect casing, fork and roller, described fork comprises the first end be movably connected on by rotating shaft in described detection casing, and the second end connected with the roller of substrate motion, be provided with the signal detector of the wobble drive work by fork in described detection casing.
2. substrate position detection apparatus according to claim 1, it is characterized in that, described signal detector is optical signal source, described optical signal source comprises optical signal launch end and light signal receiving end, when described fork is static between described optical signal launch end and described light signal receiving end, and block the light signal that described optical signal launch end launches to described light signal receiving end; The substrate detected drives described fork to offset, and described light signal receiving end receives the light signal that described optical signal launch end is launched.
3. substrate position detection apparatus according to claim 2, is characterized in that, the initial detecting position of described fork is vertical state.
4. substrate position detection apparatus according to claim 2, is characterized in that, described optical signal source is the one in laser, ultraviolet light and LED light.
5. substrate position detection apparatus according to claim 1, is characterized in that, described signal detector is the field signal source for launching field signal, and described detection casing is also provided with current signal detecting device; Described fork is provided with complete ring of conductor, and it is arranged in the magnetic field of launching in described field signal source, the current signal produced when described current signal detecting device is for detecting complete ring of conductor on described fork at cutting magnetic line.
6. substrate position detection apparatus according to claim 1, is characterized in that, described roller is corrosion-resistant roller.
7. substrate position detection apparatus according to claim 1, is characterized in that, described fork is Metallic rod or high molecular polymer bar.
8. substrate position detection apparatus according to claim 1, it is characterized in that, end face and the side of described detection casing are surrounded by corrosion-resistant transparent shell, the sealed bottom layer sealing that its bottom surface is made up of retractable material, and described fork is through described sealed bottom layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420712958.9U CN204228130U (en) | 2014-11-24 | 2014-11-24 | A kind of substrate position detection apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420712958.9U CN204228130U (en) | 2014-11-24 | 2014-11-24 | A kind of substrate position detection apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204228130U true CN204228130U (en) | 2015-03-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420712958.9U Expired - Fee Related CN204228130U (en) | 2014-11-24 | 2014-11-24 | A kind of substrate position detection apparatus |
Country Status (1)
| Country | Link |
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| CN (1) | CN204228130U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105527735A (en) * | 2016-02-03 | 2016-04-27 | 京东方科技集团股份有限公司 | Substrate detection equipment and working method thereof |
| CN109142388A (en) * | 2018-08-01 | 2019-01-04 | 京东方科技集团股份有限公司 | Substrates detector, driving device and board cleaning equipment |
| CN110386522A (en) * | 2018-04-17 | 2019-10-29 | 三菱电机上海机电电梯有限公司 | Photo-electric limit switch and elevator device |
-
2014
- 2014-11-24 CN CN201420712958.9U patent/CN204228130U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105527735A (en) * | 2016-02-03 | 2016-04-27 | 京东方科技集团股份有限公司 | Substrate detection equipment and working method thereof |
| CN105527735B (en) * | 2016-02-03 | 2019-06-18 | 京东方科技集团股份有限公司 | Substrate detection equipment and its working method |
| CN110386522A (en) * | 2018-04-17 | 2019-10-29 | 三菱电机上海机电电梯有限公司 | Photo-electric limit switch and elevator device |
| CN109142388A (en) * | 2018-08-01 | 2019-01-04 | 京东方科技集团股份有限公司 | Substrates detector, driving device and board cleaning equipment |
| CN109142388B (en) * | 2018-08-01 | 2021-04-13 | 京东方科技集团股份有限公司 | Substrate detector, driving device and substrate cleaning equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150325 Termination date: 20171124 |