CN204224687U - Plasma spraying target nozzle - Google Patents
Plasma spraying target nozzle Download PDFInfo
- Publication number
- CN204224687U CN204224687U CN201420675768.4U CN201420675768U CN204224687U CN 204224687 U CN204224687 U CN 204224687U CN 201420675768 U CN201420675768 U CN 201420675768U CN 204224687 U CN204224687 U CN 204224687U
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- Prior art keywords
- nozzle
- plasma spraying
- conductive layer
- passage
- plasma
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Abstract
The utility model discloses a kind of plasma spraying target nozzle, comprise nozzle body, be provided with through through hole in the middle part of described nozzle body, described through hole forms the passage passed through for spray material, and the inner-wall surface of described passage is provided with conductive layer.Plasma spraying target nozzle of the present utility model, for spraying sputtering target material, it is by arranging conductive layer at inwall, both the thermal conductivity that nozzle is good had been maintained, the nozzle inner walls electric arc erosion of ability point rifle moment and the High Temperature High Pressure erosion of plasma body again simultaneously, the nozzle life that plasma spray is coated in when spraying rotatable sputtering target improves greatly, again reduces consumables cost simultaneously; Be applicable to the continuous spray operation of long period and higher spray coating operations is required to coating quality.
Description
Technical field
The utility model relates to a kind of nozzle, particularly relates to a kind of plasma spraying target nozzle.
Background technology
In plasma spraying rotatable sputtering target, the general spray gun that adopts sprays.The nozzle of the spray gun of current use mostly adopts oxygen free copper to process, there is the advantage of the low and good heat conduction effect of cost, but, the nozzle that this oxygen free copper is processed into, its inwall is not resistance in the electric arc erosion of spray gun moment and the High Temperature High Pressure erosion of plasma body, makes this kind of nozzle be applicable to short period of time, the general plasma spraying work not high to coating needs.
Utility model content
The technical problems to be solved in the utility model is, provides a kind of plasma spraying target nozzle of improvement.
The utility model solves the technical scheme that its technical problem adopts: provide a kind of plasma spraying target nozzle, comprise nozzle body, be provided with through through hole in the middle part of described nozzle body, described through hole forms the passage passed through for spray material, and the inner-wall surface of described passage is provided with conductive layer.
Preferably, described conductive layer is tungsten layer or cerium tungsten alloy layer.
Preferably, the thickness of described conductive layer is 10-100 μm.
Preferably, the exit end of described passage is tapered.
Preferably, described nozzle body is oxygen free copper nozzle body.
Preferably, described nozzle body comprises cylinder, and described cylinder periphery is provided with annular positioning groove.
Preferably, described cylinder comprises the first end and the second end that are connected, and described annular positioning groove is arranged on described first end, and the circumferential lateral surface of described second end is provided with conical surface, and the exit end of described passage is positioned on described second end.
Plasma spraying target nozzle of the present utility model, for spraying sputtering target material, it is by arranging conductive layer at inwall, both the thermal conductivity that nozzle is good had been maintained, the nozzle inner walls electric arc erosion of ability point rifle moment and the High Temperature High Pressure erosion of plasma body again simultaneously, the nozzle life that plasma spray is coated in when spraying rotatable sputtering target improves greatly, again reduces consumables cost simultaneously; Be applicable to the continuous spray operation of long period and higher spray coating operations is required to coating quality.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the utility model is described in further detail, in accompanying drawing:
Fig. 1 is the cross-sectional view of the plasma spraying target nozzle of the utility model one embodiment.
Embodiment
In order to there be understanding clearly to technical characteristic of the present utility model, object and effect, now contrast accompanying drawing and describe embodiment of the present utility model in detail.
As shown in Figure 1, the plasma spraying target nozzle of the utility model one embodiment, for spraying sputtering target material, this nozzle comprises nozzle body 10; Be provided with through through hole in the middle part of nozzle body 10, through hole forms the passage 20 passed through for spray material, and the inner-wall surface of passage 20 is provided with conductive layer 30.This conductive layer 30 is while maintaining the good thermal conductivity of nozzle, make the nozzle inner walls electric arc erosion instantaneously of ability point rifle and the High Temperature High Pressure erosion of plasma body again, the nozzle life that plasma spray is coated in when spraying rotatable sputtering target improves greatly, again reduces consumables cost simultaneously; Be applicable to the continuous spray operation of long period and higher spray coating operations is required to coating quality.
Wherein, conductive layer 30 is the conductive layer of resistance to electric arc, high temperature high voltage resistant; Conductive layer 30 is preferably tungsten layer or cerium tungsten alloy layer.The thickness of conductive layer 30 is 10-100 μm.This conductive layer 30 can adopt electro-plating method to process on the inner-wall surface of passage 20, easily processing and cost is low.
Nozzle body 10 adopts oxygen free copper to be processed to form, and is oxygen free copper nozzle body.Passage 20 has entrance end 21 and exit end 22 in nozzle body 10, and wherein exit end 22 is tapered, and spray material ejects at exit end 22 after entrance end 21 admission passage 20.
Particularly, nozzle body 10 comprises cylinder 11, passage 20 this cylinder 11 opposite end through.Cylinder 11 periphery is provided with annular positioning groove 12, for coordinating with spray gun, is fixed on spray gun by nozzle.This cylinder 11 can comprise the first end 111 and the second end 112 that are connected, and annular positioning groove 12 is arranged on first end 111 periphery, and the circumferential lateral surface of the second end 112 is provided with conical surface 113, makes this second end 112 tapered in appearance, attractive in appearance.The exit end 22 of passage 20 is positioned on the second end 112.
When this nozzle makes; oxygen free copper is first adopted to be processed to form the nozzle body 10 with passage 20; other surface-coated liquid tetrafluoroethylene of nozzle body 10 after cleaning oil removing outside passage 20 inner-wall surface are protected, and can carry out plating form conductive layer 30 after tetrafluoroethylene solidifies to passage 20 inner-wall surface.
The foregoing is only embodiment of the present utility model; not thereby the scope of the claims of the present utility model is limited; every utilize the utility model specification sheets and accompanying drawing content to do equivalent structure or equivalent flow process conversion; or be directly or indirectly used in other relevant technical fields, be all in like manner included in scope of patent protection of the present utility model.
Claims (5)
1. a plasma spraying target nozzle, comprise nozzle body (10), described nozzle body (10) middle part is provided with through through hole, described through hole forms the passage (20) passed through for spray material, it is characterized in that, the inner-wall surface of described passage (20) is provided with conductive layer (30); Described conductive layer (30) is tungsten layer or cerium tungsten alloy layer, and the thickness of described conductive layer (30) is 10-100 μm.
2. plasma spraying target nozzle according to claim 1, is characterized in that, the exit end (22) of described passage (20) is tapered.
3. plasma spraying target nozzle according to claim 1, is characterized in that, described nozzle body (10) is oxygen free copper nozzle body.
4. plasma spraying target nozzle according to claim 1, is characterized in that, described nozzle body (10) comprises cylinder (11), and described cylinder (11) periphery is provided with annular positioning groove (12).
5. plasma spraying target nozzle according to claim 4, it is characterized in that, described cylinder (11) comprises the first end (111) and the second end (112) that are connected, described annular positioning groove (12) is arranged on described first end (111), the circumferential lateral surface of described second end (112) is provided with conical surface (113), and the exit end (22) of described passage (20) is positioned on described second end (112).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420675768.4U CN204224687U (en) | 2014-11-12 | 2014-11-12 | Plasma spraying target nozzle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420675768.4U CN204224687U (en) | 2014-11-12 | 2014-11-12 | Plasma spraying target nozzle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204224687U true CN204224687U (en) | 2015-03-25 |
Family
ID=52922805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420675768.4U Expired - Fee Related CN204224687U (en) | 2014-11-12 | 2014-11-12 | Plasma spraying target nozzle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204224687U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106142838A (en) * | 2016-06-24 | 2016-11-23 | 江苏亨通光电股份有限公司 | A kind of method of low smoke halogen-free material surface coding lettering |
-
2014
- 2014-11-12 CN CN201420675768.4U patent/CN204224687U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106142838A (en) * | 2016-06-24 | 2016-11-23 | 江苏亨通光电股份有限公司 | A kind of method of low smoke halogen-free material surface coding lettering |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150325 Termination date: 20181112 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |