CN204215278U - Mass flow controller - Google Patents
Mass flow controller Download PDFInfo
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- CN204215278U CN204215278U CN201420547277.1U CN201420547277U CN204215278U CN 204215278 U CN204215278 U CN 204215278U CN 201420547277 U CN201420547277 U CN 201420547277U CN 204215278 U CN204215278 U CN 204215278U
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- valve
- mass flow
- valve body
- flow controller
- zero point
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Abstract
The utility model relates to a kind of mass flow controller, comprising: valve body; Sensor, is connected with described valve body, for detecting the flow of the fluid flowing through described valve body; Master controller, is connected with described sensor, for the flow of control flow check through the fluid of described valve body; Microprocessor, is connected with described master controller and sensor, for carrying out zero compensation to described mass flow controller.In the mass flow controller that the utility model provides, set up microprocessor, detected the zero point drift voltage under dead head condition by described microprocessor, and calculated the offset of zero point drift according to described zero point drift voltage, thus realize auto-compensation.
Description
Technical field
The utility model relates to gas flow monitoring technique field, particularly a kind of mass flow controller.
Background technology
Mass flow controller (Mass Flow Controller, be called for short MFC) a kind ofly directly to the device that the mass rate of gas or liquid is accurately measured and controlled, can have the advantages such as precision is high, reproducible.Therefore, the fields such as semiconductor, petrochemical complex, metallurgy, pharmacy are widely used in.
In the semiconductor industry, many manufacturing processes all need to use reacting gas, the manufacturing process such as such as Li Shi Ke ﹑ vapor deposition.Need the flow controlling reacting gas when various reacting gas is supplied to semiconductor board, therefore in the supply line of various reacting gas, be all respectively arranged with mass flow controller.
Find in actual use, there is zero point drift (Zero Pointshift) problem in existing mass flow controller, zero point drift can affect repeatability, causes measured value inaccurate, and then affects the precision of mass flow controller.Specifically, in semiconductor fabrication process, mass flow controller occurs that zero point drift can cause gas flow deviation, and then causes the change of composition and structure of film (Film), affect the performance of semiconductor devices, even cause product yield to decline.
Cause the reason of mass flow controller zero point drift a lot, such as working temperature is too high, thermal drift etc. containing solid foreign materials or sensor (Sensor) itself in device aging circuit, reacting gas, all can make produce the zero point of described mass flow controller and drift about.
Because existing mass flow controller cannot the data-signal of automatic feedback zero point drift, therefore by equipment point-detecting to collect the data of zero point drift or to confirm the service time of described mass flow controller, can only determine whether that needs carry out manually adjustment and compensate zero point drift according to equipment point-detecting situation at present.Adopt this manual monitoring Method compare time-consuming, and zero point drift cannot be compensated in time.Therefore, the generation of zero point drift cannot effectively be prevented.
Utility model content
The purpose of this utility model is to provide a kind of mass flow controller, cannot be compensated in time to solve mass flow controller generation zero point drift in prior art and affect the problem of its repeatability.
For solving the problem, the utility model provides a kind of mass flow controller, and described mass flow controller comprises:
Valve body;
Sensor, is connected with described valve body, for detecting the flow of the fluid flowing through described valve body;
Master controller, is connected with described sensor, for the flow of control flow check through the fluid of described valve body;
Microprocessor, is connected with described master controller and sensor, for carrying out zero compensation to described mass flow controller.
Optionally, in described mass flow controller, described valve body comprises main valve and shunt, and described shunt has point inflow entrance and shunting outlet, and described shunt is through with described valve body with shunting outlet by described point of inflow entrance.
Optionally, in described mass flow controller, also comprise: timer, the first valve and the second valve; Described first valve and the second valve are arranged at the two ends of described sensor respectively, for the flow of control flow check through described sensor; Described microprocessor controls described first valve and the second valve by timer, and described timer is for setting the frequency acquisition of zero point drift voltage.
Optionally, in described mass flow controller, described first valve and the second valve lay respectively at described point inflow entrance and shunting outlet.
Optionally, in described mass flow controller, also comprise zero point drift auto-compensation pressure out-of-limit alarming device, described zero point drift auto-compensation pressure out-of-limit alarming device is connected with described microprocessor, and the steering order that described zero point drift auto-compensation pressure out-of-limit alarming device sends according to described master controller is reported to the police.
Optionally, in described mass flow controller, also comprise manual zero correction circuit, described manual zero correction circuit is connected with described microprocessor, for realizing the manual compensation of zero point drift.
Optionally, in described mass flow controller, also comprise a variable valve, described variable valve is connected with described valve body, for regulating the flow flowing out described valve body.
In sum, in the mass flow controller that the utility model provides, set up microprocessor, detect the zero point drift voltage under dead head condition by described microprocessor, and calculate the offset of zero point drift according to described zero point drift voltage, thus realize auto-compensation.
Accompanying drawing explanation
Fig. 1 is the structural representation of the mass flow controller of the utility model embodiment.
Embodiment
Below in conjunction with the drawings and specific embodiments, the mass flow controller that the utility model proposes is described in further detail.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that, accompanying drawing all adopts the form that simplifies very much and all uses non-ratio accurately, only in order to object that is convenient, aid illustration the utility model embodiment lucidly.
Please refer to Fig. 1, it is the structural representation of the mass flow controller of the utility model embodiment.As shown in Figure 1, described mass flow controller 200 comprises: valve body 210; Sensor 220, is connected with described valve body 210, for detecting the flow of the fluid flowing through described valve body 210; Master controller 230, is connected with described sensor 220, for the flow of control flow check through the fluid of described valve body; Microprocessor 260, is connected with described master controller 230 and sensor 220 respectively, for carrying out zero compensation to described mass flow controller 200.
Concrete, the two ends of described valve body 210 are respectively arranged with fluid inlet P1 and fluid egress point P2, described valve body 210 comprises main valve 211 and shunt 212, described shunt 212 has shunting import Q1 and shunting outlet Q2, described shunt 212 is communicated with described main valve 211 with shunting outlet Q2 by described shunting import Q1, described sensor 220 is arranged on the shunt 212 of described valve body 210, for detecting the flow of the fluid flowing through described valve body 210.Described master controller 230 is connected with described sensor 220, for the flow of control flow check through the fluid of described valve body 210.Described microprocessor 260 is connected with described sensor 220 and master controller 230 respectively, for carrying out zero compensation to described mass flow controller 200
Fluid enters described valve body 210 from described fluid inlet P1, and shunted by described shunt 212, a part for fluid is through described sensor 220, described sensor 220 carries out flow detection to the fluid flowing through described sensor 220, and send the flow detecting signal recorded to described master controller 230, described flow detecting signal and the flow setting signal preset compare by described master controller 230, then send the steering order making flow increase, reduce or remain unchanged according to comparative result.
Wherein, described master controller 230 is by having without illustrated central processing unit (Central ProcessingUnit, be called for short CPU) or the numeral such as internal memory, A/D converter, D/A converter or mimic channel composition, also can not use central processing unit (CPU) and realize each portion function of described master controller 230 with mimic channel.Master controller 230 is structure well known to those skilled in the art, no longer describes in detail herein.
Please continue to refer to Fig. 1, described first valve 270a and the second valve 270b is arranged at the two ends of described sensor 220 respectively, when closing described first valve 270a and the second valve 270b, the testing result of described sensor 220 can be made to be zero flow, and the flow namely flowing through described sensor 220 is 0.As shown in Figure 1, because described first valve 270a and the second valve 270b lays respectively at shunting import Q1 and shunting outlet Q2, therefore without the need to valve body 210, the state of zero flow can be reached fast.
Described microprocessor 260 is connected with described sensor 220 and described master controller 230 respectively, for detecting the zero point drift magnitude of voltage of dead head condition, and according to described zero point drift magnitude of voltage, described mass flow controller 200 is carried out to the auto-compensation of zero point drift.
As shown in Figure 1, described mass flow controller 200 also comprises a timer 280, described microprocessor 260 is connected with described first valve 270a and the second valve 270b respectively by described timer 280, and control described first valve 270a and the second valve 270b respectively by described timer 280 and open or close, described timer 280 is for setting the frequency acquisition of zero-point voltage.
In described mass flow controller 200, the two ends of described shunt 212 are provided with the first valve 270a and the second valve 270b that are controlled by described timer 280, described microprocessor 260 controls by described timer 280 state that described first valve 270a and the second valve 270b can realize zero flow, therefore, it is possible to realize also making compensation in time to the real-time detection of zero point drift, thus effectively reduce the generation of zero point drift.
As shown in Figure 1, described mass flow controller 200 also comprises zero point drift auto-compensation pressure out-of-limit alarming device 240 and manual zero correction circuit 250, described zero point drift auto-compensation pressure out-of-limit alarming device 240 is connected with described microprocessor 260 respectively with manual zero correction circuit 250, described manual zero correction circuit 250 is for realizing the manual compensation of zero point drift, the steering order that described zero point drift auto-compensation pressure out-of-limit alarming device 240 sends according to described master controller 230 operates, once described master controller 230 judges that described zero point drift magnitude of voltage exceeds its maximum permissible value, described zero point drift auto-compensation pressure out-of-limit alarming device 240 can automatic alarm.Described zero point drift magnitude of voltage exceeds its maximum permissible value and means that the automatic compensation function of described microprocessor 260 fails, and needs manually zero correction circuit 250 to carry out manual compensation.
In the utility model preferred embodiment, described mass flow controller 200 also comprises a variable valve 290, and described variable valve 290 is connected with the fluid egress point of described valve body 210, for regulating the flow flowing out described valve body 210.The control circuit of described variable valve 290 is connected with the output terminal of described master controller 230, and the steering order sent according to described master controller 230 operates, and the flow of the fluid flowing through described fluid egress point is consistent with the flow preset as far as possible.
Please continue to refer to Fig. 1, the detailed process that described mass flow controller 200 realizes zero point drift auto-compensation is as follows:
First, described microprocessor 260 cuts out described first valve 270a and the second valve 270b by timer 280, makes the testing result of described sensor 220 be zero flow;
Then, detected the flow flowing through the fluid of described sensor 220 by described sensor 220, and confirm whether the testing result of described sensor 220 is zero flow by described master controller 230; If the testing result of described sensor 220 is zero flow, then detected the magnitude of voltage of the zero point drift under dead head condition by described microprocessor 260;
Afterwards, judge whether described zero point drift magnitude of voltage exceedes its maximum permissible value by described microprocessor 260; If described zero point drift magnitude of voltage exceedes its maximum permissible value, run zero point drift auto-compensation pressure out-of-limit alarming device 240, therefore operating personnel can close described variable valve 290 in time, are realized the manual compensation of zero point drift after closing described variable valve 290 by described manual zero correction circuit 250; If described zero point drift magnitude of voltage does not exceed its maximum permissible value, described microprocessor 260 carries out data processing according to described zero point drift magnitude of voltage, calculates the offset of zero point drift and carries out auto-compensation according to described offset.
As fully visible, in the mass flow controller that the utility model embodiment provides, set up microprocessor (Micro Processor Unit, be called for short MPU), and be provided with valve at the two ends of dividing cell, described microprocessor controls by timer the state that described valve realizes zero flow, is obtained the offset of zero point drift voltage, thus realize auto-compensation by the zero point drift voltage detected under this state.Further, described mass flow controller is also provided with zero point drift auto-compensation pressure out-of-limit alarming device, when automatic compensation function lost efficacy can and alarm, adopt manual zero correction circuit realiration manual compensation.
Foregoing description is only the description to the utility model preferred embodiment; any restriction not to the utility model scope; any change that the those of ordinary skill in the utility model field does according to above-mentioned disclosure, modification, all belong to the protection domain of claims.
Claims (7)
1. a mass flow controller, is characterized in that, comprising:
Valve body;
Sensor, is connected with described valve body, for detecting the flow of the fluid flowing through described valve body;
Master controller, is connected with described sensor, for the flow of control flow check through the fluid of described valve body;
Microprocessor, is connected with described master controller and sensor, for carrying out zero compensation to described mass flow controller.
2. mass flow controller as claimed in claim 1, it is characterized in that, described valve body comprises main valve and shunt, and described shunt has point inflow entrance and shunting outlet, and described shunt passes through described point of inflow entrance and shunting outlet is through with described valve body.
3. mass flow controller as claimed in claim 2, is characterized in that, also comprise: timer, the first valve and the second valve; Described first valve and the second valve are arranged at the two ends of described sensor respectively, for the flow of control flow check through described sensor; Described microprocessor controls described first valve and the second valve by timer, and described timer is for setting the frequency acquisition of zero point drift voltage.
4. mass flow controller as claimed in claim 3, is characterized in that, described first valve and the second valve lay respectively at described point inflow entrance and shunting outlet.
5. mass flow controller as claimed in claim 1, it is characterized in that, also comprise zero point drift auto-compensation pressure out-of-limit alarming device, described zero point drift auto-compensation pressure out-of-limit alarming device is connected with described microprocessor, and the steering order that described zero point drift auto-compensation pressure out-of-limit alarming device sends according to described master controller is reported to the police.
6. mass flow controller as claimed in claim 1, it is characterized in that, also comprise manual zero correction circuit, described manual zero correction circuit is connected with described microprocessor, for realizing the manual compensation of zero point drift.
7. mass flow controller as claimed in claim 1, it is characterized in that, also comprise a variable valve, described variable valve is connected with described valve body, for regulating the flow flowing out described valve body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420547277.1U CN204215278U (en) | 2014-09-22 | 2014-09-22 | Mass flow controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420547277.1U CN204215278U (en) | 2014-09-22 | 2014-09-22 | Mass flow controller |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204215278U true CN204215278U (en) | 2015-03-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420547277.1U Expired - Fee Related CN204215278U (en) | 2014-09-22 | 2014-09-22 | Mass flow controller |
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| Country | Link |
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| CN (1) | CN204215278U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110431387A (en) * | 2017-03-20 | 2019-11-08 | 高准公司 | The zero migration of vibrometer is determined under process condition |
-
2014
- 2014-09-22 CN CN201420547277.1U patent/CN204215278U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110431387A (en) * | 2017-03-20 | 2019-11-08 | 高准公司 | The zero migration of vibrometer is determined under process condition |
| CN110431387B (en) * | 2017-03-20 | 2021-11-09 | 高准公司 | Determining zero point offset of a vibrating meter under process conditions |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150318 Termination date: 20190922 |