CN204198848U - Based on the volume to volume vapor phase growing apparatus of tube furnace - Google Patents
Based on the volume to volume vapor phase growing apparatus of tube furnace Download PDFInfo
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- CN204198848U CN204198848U CN201420304373.3U CN201420304373U CN204198848U CN 204198848 U CN204198848 U CN 204198848U CN 201420304373 U CN201420304373 U CN 201420304373U CN 204198848 U CN204198848 U CN 204198848U
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- vapor phase
- tube furnace
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- 239000012808 vapor phase Substances 0.000 title claims abstract description 27
- 239000011159 matrix material Substances 0.000 claims abstract description 65
- 238000006243 chemical reaction Methods 0.000 claims abstract description 56
- 238000001816 cooling Methods 0.000 claims abstract description 27
- 230000005540 biological transmission Effects 0.000 claims abstract description 25
- 230000007246 mechanism Effects 0.000 claims abstract description 22
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- 238000004804 winding Methods 0.000 claims description 35
- 239000007789 gas Substances 0.000 claims description 24
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- 238000009792 diffusion process Methods 0.000 claims description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 6
- 238000004891 communication Methods 0.000 claims description 5
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 claims description 3
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 claims description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 3
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 229910000077 silane Inorganic materials 0.000 claims description 3
- 230000008021 deposition Effects 0.000 abstract description 8
- 230000004044 response Effects 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- 238000000151 deposition Methods 0.000 description 8
- 230000012010 growth Effects 0.000 description 8
- 230000008569 process Effects 0.000 description 6
- 229910021389 graphene Inorganic materials 0.000 description 5
- 238000009434 installation Methods 0.000 description 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000000376 reactant Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000002041 carbon nanotube Substances 0.000 description 2
- 229910021393 carbon nanotube Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
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- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
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- 239000012071 phase Substances 0.000 description 1
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- 239000002243 precursor Substances 0.000 description 1
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- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- Silicon Compounds (AREA)
Abstract
The utility model discloses a kind of volume to volume vapor phase growing apparatus based on tube furnace, comprise tubular oven, airing system and vacuum pump group, tubular oven comprises body of heater and is arranged on the reaction cavity in body of heater, also comprise: to be arranged on outside reaction cavity and the first gas-tight silo be tightly connected respectively with reaction cavity two ends and the second gas-tight silo, the first transmission mechanism is provided with in first gas-tight silo, the second transmission mechanism is provided with in second gas-tight silo, airing system and reaction cavity, first gas-tight silo is communicated with in the second gas-tight silo three, and vacuum pump group is communicated with in three in two other, be provided with for cooling the first gas-tight silo in first gas-tight silo and the second gas-tight silo, the water cooling plant of the second gas-tight silo and reactive matrix.Device reaction matrix successive reaction in reaction chamber that this programme provides, the volume to volume vapour deposition of realization response matrix.
Description
Technical field
The utility model relates to manufacture technology of composite material field, particularly a kind of volume to volume vapor phase growing apparatus based on tube furnace.
Background technology
Chemical gaseous phase depositing process is a kind of chemical technology utilizing the decomposition reaction at a certain temperature of reactant gaseous precursor to form film, coating or micron, nanostructure.This method has been widely used in the synthesis of various material, such as: Graphene, carbon nanotube, silicon, zinc oxide etc.Tubular oven is widely used in chemical vapour deposition reaction as a kind of Reaktionsofen being easy to manufacture and manage.
To prepare Graphene, the preparation of Graphene of the prior art carries out in tubular oven, preparation facilities comprises a cavity, the reactant of question response is placed in tubular oven, heat tubular oven, chemical vapour deposition is now static growth pattern, after the reactant in tube furnace has grown, take out grower, carry out the growth of next reactant; Existing in prior art can the vapor phase growing apparatus that grows continuously of realization response thing, a kind of Graphene production method and continuous production device is disclosed in CN102828161A patent, this device comprises vacuum cavity, be provided with heater element in vacuum cavity, transfer system that reactive matrix transmits, reactive matrix cooling system, reactive matrix chemical gas-phase deposition system and reactive matrix annealing system, the continuous growth of reactive matrix is carried out in vacuum cavity, and reactive matrix realizes growth continuously by the transmission of transfer system.The device mentioned in above-mentioned patent document, all parts of vapour deposition needs to be fixed in vacuum cavity, causes the assembling of all parts in vacuum cavity to there is certain difficulty, installs inconvenient.
Therefore, how to reduce the assembling difficulty of the device that reactive matrix grows continuously, become the technical problem that those skilled in the art are urgently to be resolved hurrily.
Utility model content
In view of this, the utility model provides a kind of volume to volume vapor phase growing apparatus based on tube furnace, to reduce the assembling difficulty of the device that reactive matrix grows continuously.
For achieving the above object, the utility model provides following technical scheme:
Based on a volume to volume vapor phase growing apparatus for tube furnace, comprise tubular oven, airing system and vacuum pump group, tubular oven comprises body of heater and is arranged on the reaction cavity in body of heater, also comprises:
To be arranged on outside described reaction cavity and the first gas-tight silo be tightly connected respectively with described reaction cavity two ends and the second gas-tight silo, the first transmission mechanism is provided with in described first gas-tight silo, the second transmission mechanism is provided with in described second gas-tight silo, described airing system and described reaction cavity, described first gas-tight silo and in the second gas-tight silo three be communicated with, and described vacuum pump group is communicated with in three in two other, be provided with for cooling described first gas-tight silo in described first gas-tight silo and described second gas-tight silo, the water cooling plant of described second gas-tight silo and reactive matrix.
Preferably, above-mentioned based in the volume to volume vapor phase growing apparatus of tube furnace, described first gas-tight silo and described second gas-tight silo and described tubular oven pass through Flange joint.
Preferably, above-mentioned based in the volume to volume vapor phase growing apparatus of tube furnace, described first transmission mechanism device comprises: the first winding roller being arranged in described first gas-tight silo the reactive matrix reacted for reeling is with the outside being arranged on described first gas-tight silo and the first motor be connected with described first winding roller;
Described second transmission mechanism comprises: the second winding roller being arranged in described second gas-tight silo the reactive matrix do not reacted for reeling is with the outside being arranged on described second gas-tight silo and the second motor be connected with described second winding roller.
Preferably, above-mentioned based in the volume to volume vapor phase growing apparatus of tube furnace, described water cooling plant comprises:
Outer wall along described first gas-tight silo and described second gas-tight silo arranges the water-cooled layer for cooling described first gas-tight silo and described second gas-tight silo; Be arranged vertically with the delivery direction of described reactive matrix and fit the water cooling tube for cooling reactive matrix with described reactive matrix.
Preferably, above-mentioned based in the volume to volume vapor phase growing apparatus of tube furnace, described airing system comprises:
Can take up the gas cylinder of hydrogen or argon gas or silane or methane or ethene or acetylene or ethane gas, the number of described gas cylinder is no less than 2, and described gas cylinder is provided with under meter.
Preferably, above-mentioned based in the volume to volume vapor phase growing apparatus of tube furnace, described vacuum pump group is mechanical pump pump group or diffusion pump pump group or molecular pump pump group, or described vacuum pump group is the pump group that two or three in mechanical pump, diffusion pump and molecular pump is combined into;
Also comprise the vacuumometer be connected with described vacuum pump group communication for detecting vacuum tightness in described tubular oven.
Preferably, above-mentioned based in the volume to volume vapor phase growing apparatus of tube furnace, also comprise:
Be arranged on for detecting the tension pick-up of described reactive matrix rate of tension in described first winding roller, described tension pick-up is connected with described second its communications;
The first step-down gear coordinated with described first motor and the second step-down gear coordinated with described second motor.
Preferably, above-mentioned based in the volume to volume vapor phase growing apparatus of tube furnace, also comprise: be connected the travel switch for detecting described reactive matrix degree of drawing with described first motor and described second its communications.
As can be seen from technique scheme, the volume to volume vapor phase growing apparatus based on tube furnace that the utility model provides, comprise tubular oven, airing system, vacuum pump group, first transmission mechanism and the second transmission mechanism, first transmission mechanism and the second transmission mechanism are used for transmission reactive matrix, also comprise be arranged on tubular oven reaction cavity outside and the first gas-tight silo be tightly connected with the two ends of reaction cavity and the second gas-tight silo, first transmission mechanism is arranged in the first gas-tight silo, second transmission mechanism is arranged in the second gas-tight silo, air pressure in airing system and the common setting device of vacuum pump group.First gas-tight silo and the second gas-tight silo are arranged on the both sides of reaction cavity by the device that this programme provides, the reaction cavity of the first gas-tight silo, the second gas-tight silo and reaction cavity composition volume to volume vapour deposition, relative to reaction unit of the prior art, do not need to arrange in other devices are wrapped in by a large annular seal space, the combination of first gas-tight silo, the second gas-tight silo and reaction cavity can be formed reaction cavity by the device that this programme provides, be that the installation of the device such as the first transport unit and the second transport unit provides installation foundation, reduce the installation difficulty of device.
Accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only embodiments more of the present utility model, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
The structural representation of the volume to volume vapor phase growing apparatus based on tube furnace that Fig. 1 provides for the utility model embodiment.
1, tubular oven, the 2, first gas-tight silo, the 3, second gas-tight silo, 4, first winding roller, the 5, first motor, 6, second winding roller, the 7, second motor, 8, water-cooled layer, 9, water cooling tube, 10, gas cylinder, 11, under meter, 12, travel switch.
Embodiment
The utility model discloses a kind of volume to volume vapor phase growing apparatus based on tube furnace, to reduce group leader's difficulty of the device that reactive matrix grows continuously.
Below in conjunction with the accompanying drawing in the utility model embodiment, be clearly and completely described the technical scheme in the utility model embodiment, obviously, described embodiment is only the utility model part embodiment, instead of whole embodiments.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtained under creative work prerequisite, all belong to the scope of the utility model protection.
Refer to Fig. 1, the structural representation of the volume to volume vapor phase growing apparatus based on tube furnace that Fig. 1 provides for the utility model embodiment.
A kind of volume to volume vapor phase growing apparatus based on tube furnace, comprise tubular oven 1, airing system and vacuum pump group, tubular oven 1 comprises body of heater and is arranged on the reaction cavity in body of heater, also comprise: to be arranged on outside reaction cavity and the first gas-tight silo 2 and the second gas-tight silo 3 be tightly connected respectively with reaction cavity two ends, the first transmission mechanism is provided with in first gas-tight silo 2, the second transmission mechanism is provided with in second gas-tight silo 3, airing system and reaction cavity, first gas-tight silo 2 and in the second gas-tight silo 3 three be communicated with, and vacuum pump group is communicated with in three in two other, be provided with for cooling the first gas-tight silo 2 in first gas-tight silo 2 and the second gas-tight silo 3, the water cooling plant of the second gas-tight silo 3 and reactive matrix.
The device that this programme provides, outside the reaction cavity of tubular oven 1, two ends are provided with the first gas-tight silo 2 and the second gas-tight silo 3 be tightly connected with reaction cavity, the reaction chamber of volume to volume vapour deposition is formed by the reaction cavity of tubular oven 1, the first gas-tight silo 2 and the second gas-tight silo 3, the first transmission mechanism is provided with in first gas-tight silo 2, the second transmission mechanism is provided with in second gas-tight silo 3, can the continuous growth of realization response matrix in the process of vapour deposition.The reaction cavity of the device tubular oven that this programme provides, the first gas-tight silo 2 and the second gas-tight silo 3 form reaction cavity, do not need to arrange a large cavity and heater element, transfer system and cooling system etc. are carried out encapsulation process, as long as the first gas-tight silo 2 is connected with reaction cavity with the second gas-tight silo 3, and can be that the first transport unit and the second transport unit provide installation foundation, the assembling of equipment is facilitated relative to device in prior art, reduce installation difficulty, reduce hand labor intensity simultaneously.In order to optimize technique scheme further, in a specific embodiment of the present utility model, first gas-tight silo 2 and the second gas-tight silo 3 pass through Flange joint with tubular oven 1, or the first gas-tight silo 2 and the second gas-tight silo 3 are bolted with tubular oven 1, arrange gasket at the first gas-tight silo 2, second gas-tight silo 3 with the junction of reaction cavity, assurance device seals.
Preferably, airing system is communicated with between the first gas-tight silo 2 and the second gas-tight silo 3, vacuum pump group is communicated with the another one in the second gas-tight silo 3 with the first gas-tight silo 2, can ensure that whole reaction cavity internal pressure is consistent, improve the quality of product, and the connection of airing system and vacuum pump group and device can be facilitated.
In order to optimize technique scheme further, in a specific embodiment of the present utility model, the first transmission mechanism device comprises: the first winding roller 4 being arranged on the reactive matrix reacted for reeling in the first gas-tight silo 2 is with the outside being arranged on the first gas-tight silo 2 and the first motor 5 be connected with first winding roller 4;
Second transmission mechanism comprises: the second winding roller 6 being arranged on the reactive matrix do not reacted for reeling in the second gas-tight silo 3 is with the outside being arranged on the second gas-tight silo 3 and the second motor 7 be connected with second winding roller 6.
The unreacted reactive matrix rolling rolling is wrapped in the second winding roller 6 of the second gas-tight silo 3, unreacted reactive matrix is launched, in the first winding roller being wound into the first gas-tight silo 2 through the reaction cavity of tubular oven 14, open vacuum pump group and water cooling plant, open airing system and air feed is carried out to reaction cavity, gas reaction environment is formed, the vacuum tightness in vacuum pump group assurance device in tubular oven 1.Open the first motor 5 and the second motor 7, first winding roller 4 and second winding roller 6 are rotated, unreacted reactive matrix to be twined by second winding roller 6 by the reaction cavity of tubular oven 1 and is set in first winding roller 4, and first winding roller 4 is for twining the reactive matrix established and react.Source of the gas is sustained reaction in reaction cavity, and reactive matrix is persistent movement in reaction cavity, realizes the continuous growth of volume to volume vapour deposition.
Tubular oven 1 is provided with heating unit and temperature control system:
Heating unit is electric-heating-wire-heating, and heating wire winding, in the outside of tubular oven 1, heats tubular oven 1;
Temperature controlling system controls the temperature of reaction of tubular oven 1, ensure quality product, the programmable temperature device that temperature controlling system comprises the thermopair for detecting temperature in tubular oven 1 and communicates to connect with thermopair, concrete working process is: thermopair detects the temperature of reaction in tubular oven 1, and by the Temperature Feedback in the tubular oven 1 that detects to programmable temperature device, programmable temperature device controls the temperature in tubular oven 1, temperature controls, for automatically controlling, effectively to ensure that the quality of product.
The cavity cross-section of tubular oven 1 can be circular or square, and tubular oven 1 can be the tubular oven of silica tube or vitrified pipe or stainless steel tube making.Reactive matrix can be two or more the alloy strip steel rolled stock one or any in copper, iron, nickel, carbon, cobalt, gold, platinum, aluminium, molybdenum, ruthenium, tantalum, titanium, tungsten, chromium, magnesium, manganese, or two or more band one or any is stacking or be wound around the composite strip of composition.The utility model is applicable to the volume to volume growth of the materials such as Graphene, carbon nanotube, zinc oxide and magnesium oxide.
The transmission of reactive matrix not only can be transmitted by first winding roller 4 and second winding roller 6, can also carry out the load mode transmitting or be other, be not specifically limited at this by travelling belt, transport roller way.
In order to optimize technique scheme further, in a specific embodiment of the present utility model, water cooling plant comprises:
Outer wall along the first gas-tight silo 2 and the second gas-tight silo 3 arranges the water-cooled layer 8 for cooling the first gas-tight silo 2 and the second gas-tight silo 3; Be arranged vertically with the delivery direction of reactive matrix and fit the water cooling tube 9 for cooling reactive matrix with reactive matrix.
The temperature of reaction of vapour deposition to reactive matrix has certain requirement, water-cooled layer 8 is arranged on the outer wall of the first gas-tight silo 2 and the second gas-tight silo 3, water cooling tube is arranged in water-cooled layer 8, realize the cooling to the first gas-tight silo 2 and the second gas-tight silo 3, can not be there are other chemical reactions in the reactive matrix reacted ensureing to be positioned at reactive matrix that the second gas-tight silo 3 do not react and the first gas-tight silo 2, ensure product purity and quality; Water cooling tube 9 is mainly used to cool reactive matrix, avoids reactive matrix to affect temperature in the first gas-tight silo 2 and the second gas-tight silo 3, ensures that reactive matrix, when passing in and out reaction cavity, other chemical reactions does not occur simultaneously, improves purity and the quality of product further.
In order to optimize technique scheme further, in a specific embodiment of the present utility model, airing system comprises:
Can take up the gas cylinder 10 of hydrogen or argon gas or silane or methane or ethene or the gas such as acetylene or ethane, the number of gas cylinder 10 is no less than 2, gas cylinder 10 is provided with under meter 11.Airing system can be connected with any one in reaction cavity with the first gas-tight silo 2, second gas-tight silo 3, and in airing system and above-mentioned three one passes through pipeline connection, pipeline is provided with valve, control the opening and closing of airing system, under meter 11 controls the flow velocity of gas and the ratio of gas with various, ensures that reactive matrix fully can react in tubular oven 1.The number of gas cylinder 10 is at least 2, is filled with corresponding gas as required in gas cylinder 10.
In order to optimize technique scheme further, in a specific embodiment of the present utility model, vacuum pump group is mechanical pump pump group or diffusion pump pump group or molecular pump pump group, or vacuum pump group is the pump group that two or three in mechanical pump, diffusion pump and molecular pump is combined into;
Also comprise the vacuumometer be connected with vacuum pump group communication for detecting vacuum tightness in tubular oven 1.
Two other is connected by pipeline vacuum pump with the first gas-tight silo 2, second gas-tight silo 3 and reaction cavity, and pipeline is provided with valve.
The air pressure of the device that this programme provides is determined jointly by air feeder and vacuum pump group.Open valve, the gas in the second gas-tight silo 3 enters vacuum pump by pipeline, the air pressure in vacuumometer proofing unit, and air pressure signal is transferred to vacuum pump, and vacuum pump opens according to the air pressure signal recorded or cuts out.
In order to improve the quality of product further, also comprise: be arranged on the tension pick-up for detection reaction matrix rate of tension in first winding roller 4, tension pick-up and the second motor 7 communicate to connect; The first step-down gear coordinated with the first motor 5 and the second step-down gear coordinated with the second motor 7.In the process of winding, reactive matrix is constantly sent to first winding roller 4 from second winding roller 6, the diameter of the reactive matrix volume on the second rolling tube 6 is in continuous reduction, the diameter of the reactive matrix volume in first winding roller 4 is in continuous increase, in order to ensure that the power that reactive matrix is subject to does not change because of the diameter change of the reactive matrix volume in first winding roller 4 and second winding roller 6, in the process transmitted, the rate of tension of tension pick-up Real-Time Monitoring reactive matrix, and according to the rotating speed that rate of tension change adjustment second motor 7 of reactive matrix provides, ensure that the tensile force that reactive matrix is subject in reaction process is constant, reactive matrix is prevented to be pulled off, impact is growth continuously, also improve the quality of product to a certain extent simultaneously.
In order to the stability of further assurance device work, also comprise the first step-down gear coordinated with the first motor 5 and the second step-down gear coordinated with the second motor 7, play the object increasing moment of torsion.
In order to optimize technique scheme further, in a specific embodiment of the present utility model, also comprise: communicate to connect with the first motor 5 and the second motor 7 travel switch 12 being used for detection reaction substrate tensile degree.When the tensile deformation being wrapped in the reactive matrix in second winding roller 6 reaches certain degree, in order to avoid reactive matrix is pulled off, affect the continuous growth of reactive matrix, the degree of drawing of travel switch 12 detection reaction matrix, when degree of drawing reaches preset value, stretch signal is fed back to the first motor 5 and the second motor 7, first motor 5 and the second motor 7 and quits work by travel switch, and the winding of reactive matrix is stopped.Preferably, also comprise the warning howler coordinated with travel switch, when degree of drawing reaches preset value, the first motor 5 and the second motor 7 quit work, alarm equipment alarm, remind staff to keep in repair.
To the above-mentioned explanation of the disclosed embodiments, professional and technical personnel in the field are realized or uses the utility model.To be apparent for those skilled in the art to the multiple amendment of these embodiments, General Principle as defined herein when not departing from spirit or scope of the present utility model, can realize in other embodiments.Therefore, the utility model can not be restricted to these embodiments shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (8)
1. the volume to volume vapor phase growing apparatus based on tube furnace, comprise tubular oven (1), airing system and vacuum pump group, tubular oven (1) comprises body of heater and is arranged on the reaction cavity in described body of heater, it is characterized in that, also comprises:
To be arranged on outside described reaction cavity and the first gas-tight silo (2) be tightly connected respectively with described reaction cavity two ends and the second gas-tight silo (3), the first transmission mechanism is provided with in described first gas-tight silo (2), the second transmission mechanism is provided with in described second gas-tight silo (3), described airing system and described reaction cavity, described first gas-tight silo (2) is communicated with in the second gas-tight silo (3) three, and described vacuum pump group is communicated with in three in two other, be provided with for cooling described first gas-tight silo (2) in described first gas-tight silo (2) and described second gas-tight silo (3), the water cooling plant of described second gas-tight silo (3) and reactive matrix.
2. the volume to volume vapor phase growing apparatus based on tube furnace according to claim 1, is characterized in that, described first gas-tight silo (2) and described second gas-tight silo (3) pass through Flange joint with described tubular oven (1).
3. the volume to volume vapor phase growing apparatus based on tube furnace according to claim 1, it is characterized in that, described first transmission mechanism device comprises: the first winding roller (4) being arranged in described first gas-tight silo (2) reactive matrix reacted for reeling is with the outside being arranged on described first gas-tight silo (2) and the first motor (5) be connected with described first winding roller (4);
Described second transmission mechanism comprises: the second winding roller (6) being arranged in described second gas-tight silo (3) reactive matrix do not reacted for reeling is with the outside being arranged on described second gas-tight silo (3) and the second motor (7) be connected with described second winding roller (6).
4. the volume to volume vapor phase growing apparatus based on tube furnace according to claim 1, it is characterized in that, described water cooling plant comprises:
Outer wall along described first gas-tight silo (2) and described second gas-tight silo (3) arranges the water-cooled layer (8) for cooling described first gas-tight silo (2) and described second gas-tight silo (3); Be arranged vertically with the delivery direction of described reactive matrix and fit for the water cooling tube (9) cooling reactive matrix with described reactive matrix.
5. the volume to volume vapor phase growing apparatus based on tube furnace according to claim 1, it is characterized in that, described airing system comprises:
The gas cylinder (10) of hydrogen or argon gas or silane or methane or ethene or acetylene or ethane gas can be taken up, the number of described gas cylinder (10) is no less than 2, described gas cylinder (10) is provided with under meter (11).
6. the volume to volume vapor phase growing apparatus based on tube furnace according to claim 1, it is characterized in that, described vacuum pump group is mechanical pump pump group or diffusion pump pump group or molecular pump pump group, or described vacuum pump group is the pump group that two or three in mechanical pump, diffusion pump and molecular pump is combined into;
Also comprise the vacuumometer be connected with described vacuum pump group communication for detecting described tubular oven (1) interior vacuum tightness.
7. the volume to volume vapor phase growing apparatus based on tube furnace according to claim 3, is characterized in that, also comprise:
Be arranged on for detecting the tension pick-up of described reactive matrix rate of tension in described first winding roller (4), described tension pick-up and described second motor (7) communicate to connect;
The first step-down gear coordinated with described first motor (5) and the second step-down gear coordinated with described second motor (7).
8. the volume to volume vapor phase growing apparatus based on tube furnace according to claim 7, it is characterized in that, also comprise: communicating to connect the travel switch (12) for detecting described reactive matrix degree of drawing with described first motor (5) and described second motor (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420304373.3U CN204198848U (en) | 2014-06-09 | 2014-06-09 | Based on the volume to volume vapor phase growing apparatus of tube furnace |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201420304373.3U CN204198848U (en) | 2014-06-09 | 2014-06-09 | Based on the volume to volume vapor phase growing apparatus of tube furnace |
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| CN204198848U true CN204198848U (en) | 2015-03-11 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103993296A (en) * | 2014-06-09 | 2014-08-20 | 中国科学院宁波材料技术与工程研究所 | Tube furnace based roll-to-roll vapor deposition device |
-
2014
- 2014-06-09 CN CN201420304373.3U patent/CN204198848U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103993296A (en) * | 2014-06-09 | 2014-08-20 | 中国科学院宁波材料技术与工程研究所 | Tube furnace based roll-to-roll vapor deposition device |
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Effective date of registration: 20181123 Address after: 315201 No. 1818, Zhong Guan Xi Road, Zhuang City Street, Zhenhai District, Ningbo, Zhejiang. Patentee after: Ningbo soft carbon Electronic Technology Co., Ltd. Address before: 315201 No. 1219 Zhongguan West Road, Zhenhai District, Ningbo City, Zhejiang Province Patentee before: Ningbo Institute of Material Technology and Engineering Chinese Academy of Scien |