CN204170597U - A kind of industrial waste gas treatment device for large discharge low temperature plasma - Google Patents

A kind of industrial waste gas treatment device for large discharge low temperature plasma Download PDF

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Publication number
CN204170597U
CN204170597U CN201420628592.7U CN201420628592U CN204170597U CN 204170597 U CN204170597 U CN 204170597U CN 201420628592 U CN201420628592 U CN 201420628592U CN 204170597 U CN204170597 U CN 204170597U
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China
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electrode
dbd
treating apparatus
waste gas
industrial waste
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CN201420628592.7U
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万京林
万良淏
万良庆
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NANJING SUMAN PDP TECHNOLOGY Co Ltd
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NANJING SUMAN PDP TECHNOLOGY Co Ltd
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Abstract

The utility model discloses a kind of industrial waste gas treatment device for large discharge low temperature plasma, comprise the treating apparatus casing be arranged on base and the air inlet and the gas outlet that are arranged at treating apparatus casing both sides, described treating apparatus casing comprises treating apparatus circuit control part and treating apparatus air treatment section, and described treating apparatus circuit control part comprises interconnective high pressure wiring porcelain vase through walls, high-voltage pulse power source, step-up transformer and coupling inductance, modulating pulse power supply and power switch control panel; Pending industrial waste gas enters via the described air inlet being arranged at treating apparatus air treatment section, successively after air inlet even flow plate and DBD electrode group, is discharged by gas outlet.The utility model can drive many group coaxial-type DBD electrodes with single power supply, drives quantity can the coaxial DBD electrode of tens to hundreds of group, and makes each electrode can produce uniform electric discharge, and can produce Uniform Discharge under smaller driving power.

Description

A kind of industrial waste gas treatment device for large discharge low temperature plasma
Technical field
The utility model discloses a kind of industrial waste gas treatment device for large discharge low temperature plasma, relate to environmental protection technical field of waste gas treatment.
Background technology
Along with the development of global economy, problem of environmental pollution becomes increasingly conspicuous, and various types of environmental pollution emerges in an endless stream, and has seriously jeopardized health and the existence of the mankind.In order to the safety of mankind itself, Environment control problem is extremely urgent.In recent years, the whole world emerges the new and high technology of many Environment control problems, as ultrasonic wave, photochemical catalytic oxidation, low temperature plasma, counter-infiltration etc., wherein low temperature plasma processes poisonous fume and hard-degraded substance as the environment protection novel that a kind of efficient, low energy consumption, treating capacity are large, simple to operate, is the focus of research recently.
The principle of lower temperature plasma technology process pollutant is: under the effect of extra electric field, what dielectric barrier discharge produced takes in a large number and can bombard contaminant molecule by electronics, make it ionize, dissociate and excite, then physics, the chemical reaction of series of complex has just been caused, complicated macromolecule contaminant is made to change simple Small molecular safe material into, or make poisonous and harmful substance be transformed into material that is nontoxic or the low evil of low toxicity, thus pollutant is degraded removal.Because the averaged electron energy produced after its ionization is at 5 ~ 10ev, the chemical reaction that suitably control reaction condition can realize generally being difficult to realize or speed is very slow becomes very quick.Have the new and high technology of extremely strong potential advantages as in environmental pollution treatment field, plasma receives showing great attention to of domestic and international related discipline circle.
Degraded volatile organic contaminant (VOCs) traditional processing method is as absorption and sorption, condensation and burning etc., VOCs for low concentration is difficult to realize, and there is the problem of the easy inactivation of catalyst in photocatalytic degradation VOCs, utilize Low Temperature Plasma Treating VOCs by the restriction of above-mentioned condition, potential advantage can not be had.
But because plasma is a cross discipline comprising on the basic subjects such as discharge physics, discharge chemistry, Chemical Reaction Engineering and catalysis technique.Therefore, this technology is mainly still in conceptual phase at present, does not develop yet up till now and has business-like product.Such as: the people such as the Yu Yong of Fudan University to degrade CF3Br with dielectric barrier discharge, degradation rate reaches 55%, the people such as the Zheng Lei of Zhejiang University utilize Positive Pulse Corona Discharge process to be the air of 42. 8umol containing concentration dichloromethane, adding BaTiO3 is in the reactor catalyst, under test gas flow velocity is 28mL/min condition, the degradation rate of carrene reaches more than 90%.The vertical dimension of Zhejiang University's Huang waits people to utilize impulse electric corona process Low Concentration Toluene waste gas, and in online-tubular reactor, the degradation rate of toluene reaches 81%, and capacity usage ratio is 8.4g/(kW/h).The Xie Chengping of Beijing University of Technology carrys out the mechanism of reactive plasma process VOCs by the concentration measuring ozone, result of the test shows, under the effect of the active particle (as high energy electron, ozone, free radical etc.) of exoelectrical reaction generation, high energy electron passes through and target molecule generation inelastic collision, pass to molecule by all or part of for energy, make its cracking, intensify, then, by high energy electron cracking, the molecule that intensifies under the effect of ozone and oxygen plasma, be oxidized to CO 2, CO and H 2o.
The pollution problem of plasma technique processing environment is a kind of new and high technology, is the hot issue of research both at home and abroad at present.In the sixties in 20th century, western developed country just begins one's study plasma chemistry, to the eighties, starts the problem utilizing Plasma Technology Treating Environmental Pollutants.But most of developed country is yet just in theoretical research or pilot scale stage to this technology, really enter business-like considerably less.Up to the present, the domestic industrialization apparatus for processing plasma also do not had truly.The improvement of low temperature plasma environmental pollution, its application comprises: the elimination of (1) foul smell, the foul smell produced as food industry, sewage treatment plant, composting plant, Treatment of Sludge, tobacco industry, plastics industry etc. are local; (2) purification of air, as the application of air-conditioning or other occasions; (3) removal of low concentration solvent (containing halogenating agent) in waste gas, as industry such as paint, printings; (4) noxious material is purified.Although can not reach the requirement of people's Indoor Air purity through the aeroscope of Low Temperature Plasma Treating, can reach factory's ambient air quality requirement, degradation rate reaches 90%.
Domestic many researchs to the pollution problem of lower temperature plasma technology processing environment at present still rest in the theoretical research of colleges and universities or the small-scale test in laboratory, although some develops into pilot plant, the commercially produced product that can directly apply to industry remains blank at present at home.For lower temperature plasma technology process organic exhaust gas, the gas of these experimental study process is all generally that throughput is less, air-flow is more stable, and industrial generation and need administer off-gas flows amount large, air-flow is unstable.Therefore, need to develop to be applicable to industrial organic exhaust gas, the business-like lower temperature plasma technology product of fragrance and foul gas, reaches the object of problem of really curbing environmental pollution.
The development reasons of the technology for treating low temperature plasma waste gas of restriction large discharge has the following aspects:
1) can only road power drives DBD electrode in DBD discharge of plasma in low temperature system, can not road power drives many groups DBD electrode: in traditional DBD discharge of plasma in low temperature system, generally can only road power drives DBD electrode.This mainly DBD flash-over characteristic be negative impedance (or negative reactance) characteristic, namely after DBD electrode starts electric discharge, along with the increase of discharge power, its impedance (or reactance) then reduces, when many group DBD electrodes are in parallel, if by a road power drives, then only have partial electrode to produce electric discharge in many group DBD electrodes, and most of electrode to produce " evenly " electric discharge simultaneously, in the multi-group electrode of parallel connection, the electrode of minority is namely only had to produce low temperature plasma.If adopt power drives DBD electrode, then treatment system just unusual complexity and huge.Such as, the gas treatment amount of a DBD electrode is per hour is generally several cubes to tens cubes, if process the gas of several ten thousand cubes, then power supply needs hundreds of individual to several thousand, this implements in the application of reality is very difficult, in very severe and complicated industrial environment, huge and its reliability of the system of complexity is also difficult to ensure.Answer this, many DBD electrode single supply in parallel drives and produces lower temperature plasma technology is restrict the technical bottleneck that application administered by low temperature plasma large discharge industrial waste gas at present.
2) be difficult to produce low driving power large-area " evenly " electric discharge in DBD discharge of plasma in low temperature system: because DBD flash-over characteristic is negative impedance (or negative reactance) characteristic, the electric discharge of local can only be produced in large-area DBD electric discharge, produce large-area " evenly " electric discharge, then driving power needs very large, to such an extent as to the medium of DBD can not bear its power and damage very soon.
3) be difficult to obtain DBD with delicate or nanosecond pulse power supply and drive the high efficiency of electric discharge and low cost: drive DBD load with delicate or nanosecond pulse power supply, can improve the problems referred to above, but driving power is with high costs, market is difficult to accept.Drive efficiency also very low.Because DBD load is capacitive load, when large area or multi-electrode parallel connection, its equivalent capacity is very large, several thousand ~ hundreds of thousands pico farad can be reached, precipitous and the high frequency in the edge of the output waveform of this and delicate or nanosecond pulse power supply is contradiction, drive the coupling of large its power supply of DBD load very difficult with delicate or nanosecond pulse power supply, drive efficiency is also both very low.
Utility model content
Technical problem to be solved in the utility model is: for the defect of prior art, a kind of industrial waste gas treatment device for large discharge low temperature plasma is provided, for the deficiency that can not drive many DBD electrode in the equipment for treating industrial waste gas of plasma in low temperature of existing DBD large discharge with single supply, a kind of employing " impulse modulation actuation techniques " and " seed electrons initiation discharge technology " is proposed, compare with existing DBD equipment for treating industrial waste gas of plasma in low temperature, the utility model can drive many group coaxial-type DBD electrodes with single power supply, drive quantity can the coaxial DBD electrode of tens to hundreds of group, and make each electrode can produce uniform electric discharge.Also can drive large-area dull and stereotyped DBD electrode, make large-area plate electrode produce uniform electric discharge, and Uniform Discharge can be produced under smaller driving power.
The utility model is for solving the problems of the technologies described above by the following technical solutions:
A kind of industrial waste gas treatment device for large discharge low temperature plasma, comprise the treating apparatus casing be arranged on base and the air inlet and the gas outlet that are arranged at treating apparatus casing both sides, described treating apparatus casing comprises treating apparatus circuit control part and treating apparatus air treatment section, wherein, described treating apparatus circuit control part comprises interconnective high pressure wiring porcelain vase through walls, high-voltage pulse power source, step-up transformer and coupling inductance, driving power and power switch control panel, pending industrial waste gas enters via the described air inlet being arranged at treating apparatus air treatment section, successively after air inlet even flow plate and DBD electrode group, is discharged by gas outlet, described DBD electrode group is the coaxial-type bi-medium to block DBD electrode of a plurality of parallel connection, the concrete structure of each DBD electrode is: DBD electrode comprises interior electrode and external electrode, interior electrode is fixed on wallboard by the DBD electrode of drawing and fixed screw is fixed on both sides via DBD internal and external electrode mounting flange, external electrode is also fixed on DBD electrode and fixes on wallboard, in, external electrode surface is in opposite directions provided with rare earth oxide and forms DBD region of discharge, described external electrode comprises outer medium tube, described interior electrode comprises interior medium tube, the metal powder of low melting point is filled with in described interior medium tube.
As further preferred version of the present utility model, described metal powder is aluminium powder or magnesium powder.
As further preferred version of the present utility model, in described DBD electrode group, the quantity of DBD electrode is 1 to 500.
As further preferred version of the present utility model, described driving power is impulse modulation resonant power, and the first-harmonic of power supply is sinusoidal wave, and modulation waveform is square wave.
As further preferred version of the present utility model, in described impulse modulation resonant power, sinusoidal wave frequency is 2000 ~ 200000Hz, and rectangle wave frequency is 20 ~ 500Hz, and dutycycle is 1% ~ 99%; By regulating output width or dutycycle, the i.e. adjustable actuation duration being transported to DBD electrode group of square wave, and then regulate its mean power.
As further preferred version of the present utility model, described interior electrode is quartz or earthenware.
The utility model adopts above technical scheme compared with prior art, has following technique effect:
1) coaxial-type bi-medium to block DBD number of electrodes can be 1 ~ 500 group of parallel operation, makes DBD electrode group in parallel form an electrode module, and when processing large discharge gas, DBD electrode group module is convenient to design, installation and maintenance.
2) one deck rare earth oxide is all coated with at the glass of the forward surface of two electrodes or ceramic surface, even if bi-medium to block DBD electrode in parallel can be made under smaller driving power also all to produce uniform electric discharge.
3) driving power adopts impulse modulation resonant power, can obtain efficient energy conversion and high efficiency drive DBD electrode group.And DBD electrode group can be made under different power drive can to produce uniform electric discharge, reach effect that is efficient and power adjusting.
4) driving power adopts impulse modulation mode, by the width of adjustment modulating pulse, can control the reaction time of gas, produces polymer during minimizing process organic gas because the reaction time is long.During as processed dimethylbenzene, if the processing time is long, then can produces biphenyl and form secondary pollution.
5) adopt impulse modulation resonant power to drive many DBD electrode paralleling model, equipment cost is cheaper.
Accompanying drawing explanation
The emission-control equipment figure that Fig. 1 designs for the utility model,
Wherein: 1 is the air inlet of device, 2 is the gas outlet of device, 3 is air inlet even flow plate, 4 is the DBD electrode group that honeycomb distributes, and 5 is high-voltage collector, and 6 is high pressure wiring porcelain vase through walls, 7 is high-voltage pulse power source step-up transformer and coupling inductance, 8 is modulating pulse power supply, and 9 is power switch control panel, and 10 is plant bottom case.
The exhaust-gas treatment DBD cell electrode figure that Fig. 2 designs for the utility model,
Wherein: 11 is the outer medium tube of DBD electrode, 12 is the interior medium tube of DBD electrode, 13 is the external electrode of DBD electrode, 14 is the interior electrode of DBD electrode, and 15 is the metal powder that in DBD, electrode is filled, 16,17 is the rare earth oxide of DBD region of discharge forward surface plated surface, 18 is that the interior electrode of DBD electrode is drawn and fixed screw, and 19 fix wallboard for DBD electrode, and 20 is DBD internal and external electrode mounting flange.
The excitation waveform figure of the exhaust-gas treatment DBD electrode that Fig. 3 designs for the utility model,
Wherein: F1 is driving power excitation first-harmonic, and F2 is rectangular modulation ripple, F3 is the pulse resonance excitation waveform be carried in after modulation on DBD electrode.
Detailed description of the invention
Be described below in detail embodiment of the present utility model, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Being exemplary below by the embodiment be described with reference to the drawings, only for explaining the utility model, and can not being interpreted as restriction of the present utility model.
In order to realize driving many coaxial-types DBD electrode with single power supply, and make each electrode can produce uniform electric discharge, the technical solution adopted in the utility model is:
1) large discharge equipment for treating industrial waste gas of plasma in low temperature, comprises impulse modulation resonant power, cellular coaxial-type bi-medium to block DBD electrode group.
2) cellular coaxial-type bi-medium to block DBD electrode group, adopts mutually isostructural many groups, coaxial-type bi-medium to block DBD electrode in parallel.Coaxial-type bi-medium to block DBD number of electrodes wherein can be 1 ~ 500 group, according to honeycomb arrangement, and medium adopts quartz glass, pottery grade for insulating materials.
3) DBD electrode is all coated with one deck rare earth oxide at the glass of the forward surface of two electrodes or ceramic surface.In the dielectric barrier discharge of the multi-electrode parallel connection of routine, only have partial electrode to discharge, particularly large discharging distance (more than 4 millimeters) is difficult to make DBD electrode in parallel all produce electric discharge.If the glass of the forward surface of two electrodes or the surface of pottery be coated with one deck rare earth oxide (as lanthana, rubidium oxide, praseodymium oxide) or by rare earth oxide direct sintering inside glass, then DBD electrode in parallel can be made all to produce electric discharge.The atomic structure of rare earth element can represent with 4fx5d16s2, x is from 0 → 14, and after rare earth element becomes ion from metal, the outside of 4f track still surrounds the electron cloud of 5s25p6, lose 6s2 electronics and 5d1 or 4f loses an electronics, form the electronic structure of 4fx5s25p6.In rare earth metal, 6s electronics and 5d electronics form conduction band, 4f electronics is localization in atom then, the localization of this 4f electronics and not exclusively fill and all 4f electronics among being reflected in their all physical property is positioned at intratomic layer track, 5s25p6 electron cloud has shielding action to it, the space that 4f track stretches is very little, so very little by the impact of crystalline field, ligand field etc.; In contrast, its spin (MS) is all very large with the interaction of track (ML), make f-f electron orbit L and the mutual coupling of spin S-phase, E4f splits into the energy level subgrade that many energy levels have minute differences, under ac high-voltage electric field action, the micro-electronics of the periphery of rare earth element just forms seed electrons than being easier to overflow and causing electric discharge in sparking electrode.
4) driving power adopts impulse modulation resonant power, and as shown in Figure 3, the first-harmonic of power supply is sinusoidal wave F1, frequency is at 2000 ~ 200000Hz, and modulation waveform F2 is square wave, and frequency is at 20 ~ 500Hz, dutycycle is 1% ~ 99%, F3 is the excitation waveform be carried in after modulation on DBD electrode.DBD electrode group in parallel can be made to produce electric discharge although be all coated with one deck rare earth oxide at the glass of the forward surface of two electrodes or ceramic surface, but the driving power of DBD electrode needs to reach certain driving power, otherwise part DBD electrode still has and does not discharge.In order to solve the power adjustment problem of many DBD electrode parallel connection, the utility model have employed impulse modulation resonant power drive scheme.Namely the driving power of first-harmonic is larger, and makes the energy conversion efficiency of power supply higher as the part of power supply resonant tank the reactance of DBD, and its efficiency can reach more than 90%, and makes each electrode in DBD electrode in parallel produce electric discharge.The square wave that first-harmonic again with one width of power supply can regulate is multiplied, make to deliver to first-harmonic width on DBD electrode or the actuation duration is subject to the control that this square wave exports width, as long as regulate output width or the dutycycle of square wave, namely can regulate the actuation duration being transported to DBD electrode group, namely its mean power can regulate.
5) the interior electrode of coaxial-type bi-medium to block DBD electrode is quartz or earthenware, fills the metal powder of low melting point in pipe, as aluminium powder, and magnesium powder etc.Because electrode surface area in coaxial-type bi-medium to block DBD electrode is much smaller than external electrode, the power density of interior electrode is also greater than external electrode, the radiating condition of interior electrode is than dispatch from foreign news agency extreme difference, and under the condition that some are accidental, the medium of interior electrode easily produces thermal breakdown and damages DBD electrode.In the utility model, the metal powder of low melting point is filled with in interior electrode tube, as aluminium powder, magnesium powder etc., because the temperature of its focus can be very high before generation thermal breakdown, the metal-powder of breakdown point will melt and gasification by high temperature, and very fast falls hot(test)-spot temperature, prevent the further rising of temperature, prevent the thermal breakdown of electrode in DBD.
Below in conjunction with accompanying drawing, the technical solution of the utility model is described in further detail:
Low temperature plasma DBD discharge cell electrode structure of the present utility model as shown in Figure 2.The interior electrode of electrode is quartz or earthenware, fills the metal powder of low melting point in pipe, as aluminium powder, and magnesium powder etc.Because electrode surface area in coaxial-type bi-medium to block DBD electrode is much smaller than external electrode, the power density of interior electrode is also greater than external electrode, the radiating condition of interior electrode is than dispatch from foreign news agency extreme difference, and under the condition that some are accidental, the medium of interior electrode easily produces thermal breakdown and damages DBD electrode.In the utility model, the metal powder of low melting point is filled with in interior electrode tube, as aluminium powder, magnesium powder etc., because the temperature of its focus can be very high before generation thermal breakdown, the metal-powder of breakdown point will melt and gasification by high temperature, very fast falls hot(test)-spot temperature, prevent the further rising of temperature, prevent the thermal breakdown of electrode in DBD, improve the reliability of DBD electrode.DBD electrode is all coated with one deck rare earth oxide at the glass of the forward surface of two electrodes or ceramic surface.In the dielectric barrier discharge of the multi-electrode parallel connection of routine, only have partial electrode to discharge, particularly large discharging distance (more than 4 millimeters) is difficult to make DBD electrode in parallel all produce electric discharge.If the glass of the forward surface of two electrodes or the surface of pottery be coated with one deck rare earth oxide (as lanthana, rubidium oxide, praseodymium oxide) or by rare earth oxide direct sintering inside glass, then DBD electrode in parallel can be made all to produce electric discharge.The atomic structure of rare earth element can represent with 4fx5d16s2, x is from 0 → 14, and after rare earth element becomes ion from metal, the outside of 4f track still surrounds the electron cloud of 5s25p6, lose 6s2 electronics and 5d1 or 4f loses an electronics, form the electronic structure of 4fx5s25p6.In rare earth metal, 6s electronics and 5d electronics form conduction band, 4f electronics is localization in atom then, the localization of this 4f electronics and not exclusively fill and all 4f electronics among being reflected in their all physical property is positioned at intratomic layer track, 5s25p6 electron cloud has shielding action to it, the space that 4f track stretches is very little, so very little by the impact of crystalline field, ligand field etc.; In contrast, its spin (MS) is all very large with the interaction of track (ML), make f-f electron orbit L and the mutual coupling of spin S-phase, E4f splits into the energy level subgrade that many energy levels have minute differences, under high voltage electric field, the micro-electronics of the periphery of rare earth element just forms seed electrons than being easier to overflow and causing electric discharge in sparking electrode.
Be arranged in the equipment of Fig. 1 by the cells D BD electrode in Fig. 2, according to honeycomb arrangement, adopt mutually isostructural many groups, coaxial-type bi-medium to block DBD electrode in parallel, DBD number of electrodes can be 1 ~ 500 group.The high-pressure side of the external electrode of each DBD unit is linked together by current-collector, is connected with high-tension transformer by high pressure porcelain vase through walls.High voltage pulse transformer modulating pulse power supply is brought in the discharge voltage 25000 ~ 35000 volts that is pressed onto required for DBD electrode of voltage rise discharge in order to encourage DBD reactor.
By reference to the accompanying drawings embodiment of the present utility model is explained in detail above, but the utility model is not limited to above-mentioned embodiment, in the ken that those of ordinary skill in the art possess, can also make a variety of changes under the prerequisite not departing from the utility model aim.The above, it is only preferred embodiment of the present utility model, not any pro forma restriction is done to the utility model, although the utility model discloses as above with preferred embodiment, but and be not used to limit the utility model, any those skilled in the art, do not departing within the scope of technical solutions of the utility model, make a little change when the technology contents of above-mentioned announcement can be utilized or be modified to the Equivalent embodiments of equivalent variations, in every case be do not depart from technical solutions of the utility model content, according to technical spirit of the present utility model, within spirit of the present utility model and principle, to any simple amendment that above embodiment is done, equivalent replacement and improvement etc., within the protection domain all still belonging to technical solutions of the utility model.

Claims (6)

1. the industrial waste gas treatment device for large discharge low temperature plasma, comprise the treating apparatus casing be arranged on base and the air inlet and the gas outlet that are arranged at treating apparatus casing both sides, it is characterized in that: described treating apparatus casing comprises treating apparatus circuit control part and treating apparatus air treatment section, wherein
Described treating apparatus circuit control part comprises interconnective high pressure wiring porcelain vase through walls, high-voltage pulse power source, step-up transformer and coupling inductance, driving power and power switch control panel;
Pending industrial waste gas enters via the described air inlet being arranged at treating apparatus air treatment section, successively after air inlet even flow plate and DBD electrode group, is discharged by gas outlet;
Described DBD electrode group is the coaxial-type bi-medium to block DBD electrode of a plurality of parallel connection, and the concrete structure of each DBD electrode is:
DBD electrode comprises interior electrode and external electrode, interior electrode is fixed on wallboard by the DBD electrode of drawing and fixed screw is fixed on both sides via DBD internal and external electrode mounting flange, external electrode is also fixed on DBD electrode and fixes on wallboard, inside and outside electrode surface is in opposite directions provided with rare earth oxide and forms DBD region of discharge, described external electrode comprises outer medium tube, described interior electrode comprises interior medium tube, is filled with the metal powder of low melting point in described interior medium tube.
2. a kind of industrial waste gas treatment device for large discharge low temperature plasma as claimed in claim 1, is characterized in that: described metal powder is aluminium powder or magnesium powder.
3. a kind of industrial waste gas treatment device for large discharge low temperature plasma as claimed in claim 1 or 2, is characterized in that: in described DBD electrode group, the quantity of DBD electrode is 1 to 500.
4. a kind of industrial waste gas treatment device for large discharge low temperature plasma as claimed in claim 1, is characterized in that: described driving power is impulse modulation resonant power, and the first-harmonic of power supply is sinusoidal wave, and modulation waveform is square wave.
5. a kind of industrial waste gas treatment device for large discharge low temperature plasma as claimed in claim 4, it is characterized in that: in described impulse modulation resonant power, sinusoidal wave frequency is 2000 ~ 200000Hz, and rectangle wave frequency is 20 ~ 500Hz, and dutycycle is 1% ~ 99%.
6. a kind of industrial waste gas treatment device for large discharge low temperature plasma as claimed in claim 1 or 2, is characterized in that: described interior electrode is quartz or earthenware.
CN201420628592.7U 2014-10-28 2014-10-28 A kind of industrial waste gas treatment device for large discharge low temperature plasma Withdrawn - After Issue CN204170597U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104437019A (en) * 2014-10-28 2015-03-25 南京苏曼等离子科技有限公司 High-flow low-temperature plasma industrial waste gas treatment device
CN105879549A (en) * 2016-05-17 2016-08-24 浙江省环境工程有限公司 Purification system for heavy oil and pitch flue gas in expressway maintenance station field

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104437019A (en) * 2014-10-28 2015-03-25 南京苏曼等离子科技有限公司 High-flow low-temperature plasma industrial waste gas treatment device
CN105879549A (en) * 2016-05-17 2016-08-24 浙江省环境工程有限公司 Purification system for heavy oil and pitch flue gas in expressway maintenance station field

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Granted publication date: 20150225

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