CN204168703U - A kind of radio-frequency power supply - Google Patents
A kind of radio-frequency power supply Download PDFInfo
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- CN204168703U CN204168703U CN201420683967.XU CN201420683967U CN204168703U CN 204168703 U CN204168703 U CN 204168703U CN 201420683967 U CN201420683967 U CN 201420683967U CN 204168703 U CN204168703 U CN 204168703U
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Abstract
The utility model relates to supply unit field, discloses a kind of radio-frequency power supply, and this radio-frequency power supply comprises: housing, forms the first chamber, the second chamber and the accommodation chamber for installing power supply module in described housing; The chamber wall of described accommodation chamber is provided with the heat radiation air intake vent and the heat radiation air outlet being communicated with described accommodation chamber and described second chamber that are communicated with described accommodation chamber and the first chamber; Described first chamber is provided with air intake vent, and described second chamber is provided with air outlet; Make the first gas drier of the gas drying in described first chamber.Less by the restriction of humidity in its operational environment during above-mentioned radio-frequency power supply work, applicability is higher.
Description
Technical field
The utility model relates to supply unit field, especially relates to a kind of radio-frequency power supply.
Background technology
Radio-frequency power supply is part important in PECVD device, and it generates the energy source of plasma, is widely used in TFT, in semiconductor and photovoltaic industry.
But comparatively large by the restriction of humidity in operational environment during radio-frequency power supply work of the prior art, when the humidity in radio-frequency power supply operational environment is greater than a rated value, radio-frequency power supply cannot normally work; As, provide data according to producer, when the humidity in radio-frequency power supply operational environment is greater than 70%, radio-frequency power supply cannot normally work.
Especially in photovoltaic industry, process conditions are relatively simple, plant area's condition is poor, the very difficult controls such as the humidity of radio-frequency power supply operational environment, and it is annual to rainy season in summer, humidity in radio-frequency power supply operational environment can reach 95%, and in the environment, radio-frequency power supply cannot maintain normal work.
Utility model content
The utility model provides a kind of radio-frequency power supply, and less by the restriction of humidity in its operational environment during the work of this radio-frequency power supply, applicability is higher.
For achieving the above object, the utility model provides following technical scheme:
A kind of radio-frequency power supply, comprising:
Housing, forms the first chamber, the second chamber and the accommodation chamber for installing power supply module in described housing; The chamber wall of described accommodation chamber is provided with the heat radiation air intake vent and the heat radiation air outlet being communicated with described accommodation chamber and described second chamber that are communicated with described accommodation chamber and the first chamber; Described first chamber is provided with air intake vent, and described second chamber is provided with air outlet;
Make the first gas drier of the gas drying in described first chamber.
Above-mentioned radio-frequency power supply operationally, gas enters in accommodation chamber from the first chamber by heat radiation air intake vent, enter in the second chamber from the heat radiation air outlet of accommodation chamber after flowing through power supply module, then blow out, to realize the heat radiation to power supply module from the air outlet of the second chamber; Because the first gas drier can make the gas in the first chamber dry, so the gas entering accommodation chamber by heat radiation air intake vent is dry gas, and the heat radiation air outlet of accommodation chamber does not directly communicate with the external world, outside air is difficult to enter in accommodation chamber from heat radiation air outlet, therefore, the power supply module in accommodation chamber can not be subject to the impact of ambient atmos humidity.
Therefore, less by the restriction of humidity in its operational environment during above-mentioned radio-frequency power supply work, applicability is higher.
Preferably, described first gas drier comprises dry gas source device, and the air outlet of described dry gas source device and the air intake vent of described first chamber are sealed by air pipe and be communicated with.
Preferably, described first gas drier comprises the irradiation modules be arranged in described first chamber.
Preferably, described irradiation modules is positioned at the air intake vent place of described first chamber.
Preferably, described first gas drier also comprises the source of the gas that air outlet is communicated with the air intake vent of described first chamber.
Preferably, described radio-frequency power supply also comprises the second gas drier making the second chamber indoor gas drying.
Preferably, described second gas drier is be arranged in described second chamber and be arranged at the irradiation modules at described second chamber air outlet place.
Preferably, described second gas drier comprises dry gas source device, the air outlet of described dry gas source device and described second chamber.
Preferably, forming the first chamber, the second chamber and the accommodation chamber for installing power supply module in described housing, specifically comprising:
Described housing comprises power supply body shell, the first guard shield and the second guard shield; Described power supply body shell inside forms described accommodation chamber, described first guard shield is positioned at the side of described power supply body shell and is sealed and matched to form described first chamber with described power supply body shell, and described second guard shield is positioned at described power supply body shell to deviate from the side of described first guard shield and is sealed and matched to form described second chamber with described power supply body shell.
Preferably, the material of described first guard shield and described second guard shield is aluminium.
Accompanying drawing explanation
A kind of radio-frequency power supply structural representation that Fig. 1 provides for the utility model embodiment;
The another kind of radio-frequency power supply structural representation that Fig. 2 provides for the utility model embodiment;
The another kind of radio-frequency power supply structural representation that Fig. 3 provides for the utility model embodiment;
The another kind of radio-frequency power supply structural representation that Fig. 4 provides for the utility model embodiment.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, be clearly and completely described the technical scheme in the utility model embodiment, obviously, described embodiment is only the utility model part embodiment, instead of whole embodiments.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtained under creative work prerequisite, all belong to the scope of the utility model protection.
Please refer to Fig. 1, Fig. 2 and Fig. 3, a kind of radio-frequency power supply structural representation that Fig. 1 provides for the utility model embodiment; The another kind of radio-frequency power supply structural representation that Fig. 2 provides for the utility model embodiment; The another kind of radio-frequency power supply structural representation that Fig. 3 provides for the utility model embodiment.
As shown in Figure 1, a kind of radio-frequency power supply that the utility model embodiment provides, comprising:
Housing 1, forms the first chamber 2, second chamber 3 and the accommodation chamber 4 for installing power supply module in housing 1; The chamber wall of accommodation chamber 4 is provided with the heat radiation air intake vent 41 and the heat radiation air outlet 42 being communicated with accommodation chamber 4 and the second chamber 3 that are communicated with accommodation chamber 4 and the first chamber 2; First chamber 2 is provided with and air intake vent 21, and the second chamber 3 is provided with and air outlet 31;
Make the first gas drier 5 of the gas drying in the first chamber 2.
The utility model does not limit the shape of the heat radiation air intake vent 41 in above-mentioned radio-frequency power supply, heat radiation air outlet 42, air intake vent 21, air outlet 31 and particular location.
Above-mentioned radio-frequency power supply operationally, gas enters in accommodation chamber 4 from the first chamber 2 by heat radiation air intake vent 41, enter in the second chamber 3 from the heat radiation air outlet 42 of accommodation chamber 4 after flowing through power supply module, then blow out from the air outlet 31 of the second chamber 3, to realize the heat radiation to power supply module; Because the first gas drier 5 can make the gas in the first chamber 2 dry, so the gas entering accommodation chamber 4 by heat radiation air intake vent 41 is dry gas, and the heat radiation air outlet 42 of accommodation chamber 4 does not directly communicate with the external world, outside air is difficult to enter in accommodation chamber 4 from heat radiation air outlet 42, therefore, the power supply module in accommodation chamber 4 can not be subject to the impact of ambient atmos humidity.
Therefore, less by the restriction of humidity in its operational environment during above-mentioned radio-frequency power supply work, applicability is higher.
As shown in Figure 2, in a kind of specific embodiment, the first gas drier 5 comprises dry gas source device 52, and the air outlet of dry gas source device 52 and the air intake vent 21 of the first chamber 2 are sealed by air pipe 51 and be communicated with.Dry gas source device 52 can by air pipe 51 for the first chamber 2 provides the gas of clean dried, to make the gas in the first chamber 2 dry.
As shown in Figure 3, in a kind of specific embodiment, the first gas drier comprises the irradiation modules 53 be arranged in the first chamber 2.Irradiation modules 53 can be dehydrating breather or drier, as calcium sulfate, active carbon etc., irradiation modules 53 can hydrone in adsorbed gas to make the gas in the first chamber 2 dry.
As shown in Figure 3, on the basis of above-described embodiment, in a kind of preferred embodiment, irradiation modules 53 is positioned at air intake vent 21 place of the first chamber 2, directly carries out drying to the gas entered from air intake vent 21 to facilitate.As shown in Figure 4, in another kind of preferred embodiment, the first gas drier 5 can also comprise the source of the gas 55 that air outlet is communicated with the air intake vent 21 of the first chamber 2, and source of the gas 55 can provide gas for the first chamber 2 by air pipe 54.
On the basis of above-described embodiment, in a kind of preferred embodiment, radio-frequency power supply also comprises the second gas drier making gas drying in the second chamber 3.
As shown in Figure 4, on the basis of above-described embodiment, in a kind of preferred embodiment, the second gas drier can for be arranged in the second chamber 3 and to be arranged at the irradiation modules 6 at the second chamber 3 air outlet 31 place.Irradiation modules 6 can be dehydrating breather or drier, and as calcium sulfate, active carbon etc., irradiation modules 6 can make the gas that enters in the second chamber 3 dry by the hydrone in adsorbed gas.In another kind of preferred embodiment, the second gas drier can also comprise the dry gas source device that air outlet is communicated with the second chamber 3.The gas of clean dried is provided to the second chamber 3 by dry gas source device, the gas in the second chamber 3 can be made dry, and keep the air pressure in the second chamber 3 to be greater than ambient pressure, to prevent outside air from entering from the air outlet 31 of the second chamber 3, and finally enter in accommodation chamber 4 and affect supply unit work.
As shown in Figure 3, on the basis of the various embodiments described above, forming the first chamber 2, second chamber 3 and the accommodation chamber 4 for installing power supply module in housing 1, specifically can realize in the following manner:
Housing 1 comprises power supply body shell 14, first guard shield 12 and the second guard shield 13; Power supply body shell 14 inside forms accommodation chamber 4, first guard shield 12 is positioned at the side of power supply body shell 14 and is sealed and matched to be formed the first chamber 2, second guard shield 13 with power supply body shell 14 and is positioned at power supply body shell 14 and deviates from the side of the first guard shield 12 and be sealed and matched to form the second chamber 3 with power supply body shell 14.Preferably, the material of the first guard shield 12 and the second guard shield 13 is aluminium.
Above-mentioned execution mode, can on the basis of existing power supply main body, and by arranging the first guard shield 12 and the second guard shield 13 forms whole power shell 1, implementation process is convenient and swift and go for the power supply of any model and kind.
Obviously, those skilled in the art can carry out various change and modification to the utility model embodiment and not depart from spirit and scope of the present utility model.Like this, if these amendments of the present utility model and modification belong within the scope of the utility model claim and equivalent technologies thereof, then the utility model is also intended to comprise these change and modification.
Claims (10)
1. a radio-frequency power supply, is characterized in that, comprising:
Housing, forms the first chamber, the second chamber and the accommodation chamber for installing power supply module in described housing; The chamber wall of described accommodation chamber is provided with the heat radiation air intake vent and the heat radiation air outlet being communicated with described accommodation chamber and described second chamber that are communicated with described accommodation chamber and the first chamber; Described first chamber is provided with air intake vent, and described second chamber is provided with air outlet;
Make the first gas drier of the gas drying in described first chamber.
2. radio-frequency power supply according to claim 1, is characterized in that, described first gas drier comprises dry gas source device, and the air outlet of described dry gas source device and the air intake vent of described first chamber are sealed by air pipe and be communicated with.
3. radio-frequency power supply according to claim 1, is characterized in that, described first gas drier comprises the irradiation modules be arranged in described first chamber.
4. radio-frequency power supply according to claim 3, is characterized in that, described irradiation modules is positioned at the air intake vent place of described first chamber.
5. radio-frequency power supply according to claim 3, is characterized in that, described first gas drier also comprises the source of the gas that air outlet is communicated with the air intake vent of described first chamber.
6. radio-frequency power supply according to claim 1, is characterized in that, also comprises the second gas drier making the second chamber indoor gas drying.
7. radio-frequency power supply according to claim 6, is characterized in that, described second gas drier is be arranged in described second chamber and be arranged at the irradiation modules at described second chamber air outlet place.
8. radio-frequency power supply according to claim 6, is characterized in that, described second gas drier comprises dry gas source device, the air outlet of described dry gas source device and described second chamber.
9. the radio-frequency power supply according to any one of claim 1-8, is characterized in that, forming the first chamber, the second chamber and the accommodation chamber for installing power supply module, specifically comprising in described housing:
Described housing comprises power supply body shell, the first guard shield and the second guard shield; Described power supply body shell inside forms described accommodation chamber, described first guard shield is positioned at the side of described power supply body shell and is sealed and matched to form described first chamber with described power supply body shell, and described second guard shield is positioned at described power supply body shell to deviate from the side of described first guard shield and is sealed and matched to form described second chamber with described power supply body shell.
10. radio-frequency power supply according to claim 9, is characterized in that, the material of described first guard shield and described second guard shield is aluminium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420683967.XU CN204168703U (en) | 2014-11-14 | 2014-11-14 | A kind of radio-frequency power supply |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420683967.XU CN204168703U (en) | 2014-11-14 | 2014-11-14 | A kind of radio-frequency power supply |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204168703U true CN204168703U (en) | 2015-02-18 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420683967.XU Active CN204168703U (en) | 2014-11-14 | 2014-11-14 | A kind of radio-frequency power supply |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204168703U (en) |
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2014
- 2014-11-14 CN CN201420683967.XU patent/CN204168703U/en active Active
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200416 Address after: Langfang City, Hebei province Guangyang road 065001 North Zone Patentee after: ENN SCIENCE & TECHNOLOGY DEVELOPMENT Co.,Ltd. Address before: The 065001 Hebei economic and Technological Development Zone of Langfang Huaxiang No. 106 Patentee before: ENN SOLAR ENERGY Co.,Ltd. |